分析薄膜的表面形貌对其生长机理和光学性质研究有着十分重要的作用。本文使用CF4和CH4为源气体,利用射频等离子体增强化学气相沉积(RF-PECVD)法在不同射频功率和沉积温度下制备了掺氟氢化无定形碳(a-C∶F∶H)薄膜,并在N2气氛中进行了...分析薄膜的表面形貌对其生长机理和光学性质研究有着十分重要的作用。本文使用CF4和CH4为源气体,利用射频等离子体增强化学气相沉积(RF-PECVD)法在不同射频功率和沉积温度下制备了掺氟氢化无定形碳(a-C∶F∶H)薄膜,并在N2气氛中进行了不同温度的退火处理。用原子力显微镜(AFM)和扫描电子显微镜(SEM)观察了薄膜表面形貌,发现低功率下沉积的薄膜表面均匀性好、缺陷少;在低温下沉积的薄膜表面光滑,而高温下粗糙;真空低温退火可使薄膜表面形貌得到改善,但薄膜内空洞增加,退火温度过高,薄膜的结构发生变化,且在薄膜表面发生皲裂现象。用R am an光谱对薄膜内的结构变化进行了进一步的分析。展开更多
Fluorinated amorphous hydrogenated a-C∶F∶H carbon thin films were deposited using radio frequency plasma enhanced chemical vapor deposition（RF-PECVD） reactor with CF4 and CH4 as source gases and were annealed in a...Fluorinated amorphous hydrogenated a-C∶F∶H carbon thin films were deposited using radio frequency plasma enhanced chemical vapor deposition（RF-PECVD） reactor with CF4 and CH4 as source gases and were annealed in a N2 atmosphere. The properties of these films were evaluated by FTIR spectrometry, UV-VIS spectrophotometry and single-wavelength spectroscopic ellipsometry. A correspondence relativity connection between the deposition rate and technology was found. The chemical bonding structures and the content of CHx and CFx in the films are transformed and the optical band gap decreases monotonically with increasing temperature after annealing. The dielectric constant is increased with decreasing content of F in the films and the optical band gap is decreased with decreasing the content of H in the film.展开更多
Using CH4 and CF4 precursor gases, amorphous fluorinated hydrocarbon (a-C:F:H) films were prepared with the method of microwave electronic cyclotron resonant (ECR) plasma chemical vapor deposition. Deposition rate of ...Using CH4 and CF4 precursor gases, amorphous fluorinated hydrocarbon (a-C:F:H) films were prepared with the method of microwave electronic cyclotron resonant (ECR) plasma chemical vapor deposition. Deposition rate of the film firstly increases and then decreases with variable flow ratios R {[CF4]/([CF4] + [CH4]} due to the competition between deposition and etching process. Results from Fourier-transform infrared transmission spectroscopy of these films show that C-F bond configuration in a-C:F:H films evolves with the variable gas flow ratios R. The locations of the C-F peaks in IR spectra shift to higher frequency with the increase of R, and finally the structure in films with R >75% takes on a PTFE-like structure, which mainly consists of -CF2- chain. The change of optical band gap Eg deduced by a Tauc plot with R is also discussed.展开更多
文摘分析薄膜的表面形貌对其生长机理和光学性质研究有着十分重要的作用。本文使用CF4和CH4为源气体,利用射频等离子体增强化学气相沉积(RF-PECVD)法在不同射频功率和沉积温度下制备了掺氟氢化无定形碳(a-C∶F∶H)薄膜,并在N2气氛中进行了不同温度的退火处理。用原子力显微镜(AFM)和扫描电子显微镜(SEM)观察了薄膜表面形貌,发现低功率下沉积的薄膜表面均匀性好、缺陷少;在低温下沉积的薄膜表面光滑,而高温下粗糙;真空低温退火可使薄膜表面形貌得到改善,但薄膜内空洞增加,退火温度过高,薄膜的结构发生变化,且在薄膜表面发生皲裂现象。用R am an光谱对薄膜内的结构变化进行了进一步的分析。
文摘Fluorinated amorphous hydrogenated a-C∶F∶H carbon thin films were deposited using radio frequency plasma enhanced chemical vapor deposition（RF-PECVD） reactor with CF4 and CH4 as source gases and were annealed in a N2 atmosphere. The properties of these films were evaluated by FTIR spectrometry, UV-VIS spectrophotometry and single-wavelength spectroscopic ellipsometry. A correspondence relativity connection between the deposition rate and technology was found. The chemical bonding structures and the content of CHx and CFx in the films are transformed and the optical band gap decreases monotonically with increasing temperature after annealing. The dielectric constant is increased with decreasing content of F in the films and the optical band gap is decreased with decreasing the content of H in the film.
基金The project supported by the National Nature Science Foundation of China (No. 10305008)
文摘Using CH4 and CF4 precursor gases, amorphous fluorinated hydrocarbon (a-C:F:H) films were prepared with the method of microwave electronic cyclotron resonant (ECR) plasma chemical vapor deposition. Deposition rate of the film firstly increases and then decreases with variable flow ratios R {[CF4]/([CF4] + [CH4]} due to the competition between deposition and etching process. Results from Fourier-transform infrared transmission spectroscopy of these films show that C-F bond configuration in a-C:F:H films evolves with the variable gas flow ratios R. The locations of the C-F peaks in IR spectra shift to higher frequency with the increase of R, and finally the structure in films with R >75% takes on a PTFE-like structure, which mainly consists of -CF2- chain. The change of optical band gap Eg deduced by a Tauc plot with R is also discussed.
