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Remote sensing of air pollution incorporating integrated-path differential-absorption and coherent-Doppler lidar
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作者 Ze-hou Yang Yong Chen +5 位作者 Chun-li Chen Yong-ke Zhang Ji-hui Dong Tao Peng Xiao-feng Li Ding-fu Zhou 《Defence Technology(防务技术)》 SCIE EI CAS CSCD 2024年第1期594-601,共8页
An innovative complex lidar system deployed on an airborne rotorcraft platform for remote sensing of atmospheric pollution is proposed and demonstrated.The system incorporates integrated-path differential absorption l... An innovative complex lidar system deployed on an airborne rotorcraft platform for remote sensing of atmospheric pollution is proposed and demonstrated.The system incorporates integrated-path differential absorption lidar(DIAL) and coherent-doppler lidar(CDL) techniques using a dual tunable TEA CO_(2)laser in the 9—11 μm band and a 1.55 μm fiber laser.By combining the principles of differential absorption detection and pulsed coherent detection,the system enables agile and remote sensing of atmospheric pollution.Extensive static tests validate the system’s real-time detection capabilities,including the measurement of concentration-path-length product(CL),front distance,and path wind speed of air pollution plumes over long distances exceeding 4 km.Flight experiments is conducted with the helicopter.Scanning of the pollutant concentration and the wind field is carried out in an approximately 1 km slant range over scanning angle ranges from 45°to 65°,with a radial resolution of 30 m and10 s.The test results demonstrate the system’s ability to spatially map atmospheric pollution plumes and predict their motion and dispersion patterns,thereby ensuring the protection of public safety. 展开更多
关键词 Differential absorption LIDAR coherent Doppler lidar Remoting sensing Atmospheric pollution
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2D DOA Estimation of Coherent Signals with a Separated Linear Acoustic Vector-Sensor Array
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作者 Sheng Liu Jing Zhao +2 位作者 Decheng Wu Yiwang Huang Kaiwu Luo 《China Communications》 SCIE CSCD 2024年第2期155-165,共11页
In this paper, a two-dimensional(2D) DOA estimation algorithm of coherent signals with a separated linear acoustic vector-sensor(AVS) array consisting of two sparse AVS arrays is proposed. Firstly,the partitioned spat... In this paper, a two-dimensional(2D) DOA estimation algorithm of coherent signals with a separated linear acoustic vector-sensor(AVS) array consisting of two sparse AVS arrays is proposed. Firstly,the partitioned spatial smoothing(PSS) technique is used to construct a block covariance matrix, so as to decorrelate the coherency of signals. Then a signal subspace can be obtained by singular value decomposition(SVD) of the covariance matrix. Using the signal subspace, two extended signal subspaces are constructed to compensate aperture loss caused by PSS.The elevation angles can be estimated by estimation of signal parameter via rotational invariance techniques(ESPRIT) algorithm. At last, the estimated elevation angles can be used to estimate automatically paired azimuth angles. Compared with some other ESPRIT algorithms, the proposed algorithm shows higher estimation accuracy, which can be proved through the simulation results. 展开更多
关键词 acoustic vector-sensor coherent signals extended signal subspace sparse array
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Scale effect removal and range migration correction for hypersonic target coherent detection
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作者 WU Shang SUN Zhi +4 位作者 JIANG Xingtao ZHANG Haonan DENG Jiangyun LI Xiaolong CUI Guolong 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2024年第1期14-23,共10页
The detection of hypersonic targets usually confronts range migration(RM)issue before coherent integration(CI).The traditional methods aiming at correcting RM to obtain CI mainly considers the narrow-band radar condit... The detection of hypersonic targets usually confronts range migration(RM)issue before coherent integration(CI).The traditional methods aiming at correcting RM to obtain CI mainly considers the narrow-band radar condition.However,with the increasing requirement of far-range detection,the time bandwidth product,which is corresponding to radar’s mean power,should be promoted in actual application.Thus,the echo signal generates the scale effect(SE)at large time bandwidth product situation,influencing the intra and inter pulse integration performance.To eliminate SE and correct RM,this paper proposes an effective algorithm,i.e.,scaled location rotation transform(ScLRT).The ScLRT can remove SE to obtain the matching pulse compression(PC)as well as correct RM to complete CI via the location rotation transform,being implemented by seeking the actual rotation angle.Compared to the traditional coherent detection algorithms,Sc LRT can address the SE problem to achieve better detection/estimation capabilities.At last,this paper gives several simulations to assess the viability of ScLRT. 展开更多
关键词 hypersonic target detection coherent integration(CI) scale effect(SE)removal range migration(RM)correction scaled location rotation transform(ScLRT)
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Spatial quantum coherent modulation with perfect hybrid vector vortex beam based on atomic medium
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作者 马燕 杨欣 +6 位作者 常虹 杨鑫琪 曹明涛 张晓斐 高宏 董瑞芳 张首刚 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第2期360-364,共5页
The perfect hybrid vector vortex beam(PHVVB)with helical phase wavefront structure has aroused significant concern in recent years,as its beam waist does not expand with the topological charge(TC).In this work,we inve... The perfect hybrid vector vortex beam(PHVVB)with helical phase wavefront structure has aroused significant concern in recent years,as its beam waist does not expand with the topological charge(TC).In this work,we investigate the spatial quantum coherent modulation effect with PHVVB based on the atomic medium,and we observe the absorption characteristic of the PHVVB with different TCs under variant magnetic fields.We find that the transmission spectrum linewidth of PHVVB can be effectively maintained regardless of the TC.Still,the width of transmission peaks increases slightly as the beam size expands in hot atomic vapor.This distinctive quantum coherence phenomenon,demonstrated by the interaction of an atomic medium with a hybrid vector-structured beam,might be anticipated to open up new opportunities for quantum coherence modulation and accurate magnetic field measurement. 展开更多
关键词 perfect hybrid vector vortex beam topological charge quantum coherence optical manipulation
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Robust measurement of orbital angular momentum of a partially coherent vortex beam under amplitude and phase perturbations
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作者 Zhao Zhang Gaoyuan Li +5 位作者 Yonglei Liu Haiyun Wang Bernhard J.Hoenders Chunhao Liang Yangjian Cai Jun Zeng 《Opto-Electronic Science》 2024年第1期1-12,共12页
The ability to overcome the negative effects,induced by obstacles and turbulent atmosphere,is a core challenge of long-distance information transmission,and it is of great significance in free-space optical communicat... The ability to overcome the negative effects,induced by obstacles and turbulent atmosphere,is a core challenge of long-distance information transmission,and it is of great significance in free-space optical communication.The spatial-coherence structure,that characterizes partially coherent fields,provides a new degree of freedom for carrying information.However,due to the influence of the complex transmission environment,the spatial-coherence structure is severely damaged during the propagation path,which undoubtedly limits its ability to transmit information.Here,we realize the robust far-field orbital angular momentum(OAM)transmission and detection by modulating the spatial-coherence structure of a partially coherent vortex beam with the help of the cross-phase.The cross-phase enables the OAM information,quantified by the topological charge,hidden in the spatial-coherence structure can be stably transmitted to the far field and can resist the influence of obstructions and turbulence within the communication link.This is due to the self-reconstruction property of the spatial-coherence structure embedded with the cross-phase.We demonstrate experimentally that the topological charge information can be recognized well by measuring the spatial-coherence structure in the far field,exhibiting a set of distinct and separated dark rings even under amplitude and phase perturbations.Our findings open a door for robust optical signal transmission through the complex environment and may find application in optical communication through a turbulent atmosphere. 展开更多
关键词 degree of coherence orbital angular momentum cross-phase topological charge information transmission
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Coherent Parameter Measurement Based on Partial Coherent Envelope Demodulation
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作者 Chaoze Zhang Laiyang Dang +3 位作者 Tianyu Guan Yuqin Mao Ligang Huang Tao Zhu 《Optics and Photonics Journal》 2023年第6期133-139,共7页
The key parameters of laser energy concentration and coherence can be characterized by laser linewidth, which determines the detection range, measurement resolution and signal-to-noise ratio of laser precision measure... The key parameters of laser energy concentration and coherence can be characterized by laser linewidth, which determines the detection range, measurement resolution and signal-to-noise ratio of laser precision measurement technology. Up to now, the laser linewidth is mainly measured by the energy distribution width in the frequency domain, but the coherence of the laser has not been measured or characterized directly. In this work, we propose the concept of coherent linewidth based on the coherent envelope of delayed self-heterodyne detection to directly characterize the time-frequency coherence of lasers. In the proof-of-concept experiment, we obtain the coherence coefficient through the Fourier transform of the partial coherence envelope, and then measure the coherence linewidth of the laser. The measured coherent linewidth is smaller than the traditional integral linewidth and larger than the intrinsic Lorentzian linewidth, indicating that the coherent linewidth is less affected by low-frequency 1/f noise. The concept of coherent linewidth proposed in this article can serve as a candidate method for directly characterizing the coherence of narrow linewidth lasers. . 展开更多
关键词 Laser Linewidth coherent Linewidth coherent Envelope
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Enabling structural and interfacial stability of 5 V spinel LiNi0.5Mn1.5O4 cathode by a coherent interface 被引量:1
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作者 Min Xu Ming Yang +6 位作者 Minfeng Chen Lanhui Gu Linshan Luo Songyan Chen Jizhang Chen Bo Liu Xiang Han 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2023年第1期266-276,I0007,共12页
Spinel LiNi_(0.5)Mn_(1.5)O_(4)(LNMO),a 5 V class high voltage cathode,has been regarded as an attractive candidate to further improve the energy density of lithium-ion battery.The issue simultaneously enabling side st... Spinel LiNi_(0.5)Mn_(1.5)O_(4)(LNMO),a 5 V class high voltage cathode,has been regarded as an attractive candidate to further improve the energy density of lithium-ion battery.The issue simultaneously enabling side stability and maintaining high interfacial kinetics,however,has not yet been resolved.Herein,we design a coherent Li_(1.3)A_(l0.3)Ti_(1.7)(PO)_(4)(LATP)layer that is crystally connected to the spinel LNMO host lattices,which offers fast lithium ions transportation as well as enhances the mechanical stability that prevents the particle fracture.Furthermore,the inactive Li_(3)BO_(3)(LBO)coating layer inhibits the corrosion of transition metals and continuous side reactions.Consequently,the coherent-engineered LNMO-LATPLBO cathode material exhibits superior electrochemical cycling stability in a window of 3.0–5.0 V,for example a high-capacity retention that is 89.7%after 500 cycles at 200 m A g-1obtained and enhanced rate performance(85.1 m A h g^(-1)at 800 m A g^(-1))when tested with a LiPF6-based carbonate electrolyte.Our work presents a new approach of engineering 5 V class spinel oxide cathode that combines interfacial coherent crystal lattice design and surface coating. 展开更多
关键词 Lithium-ion battery Spinel cathode LATP coherent interface
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Terahertz shaping technology based on coherent beam combining
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作者 郑晓冉 马丹妮 +2 位作者 蒋广通 张存林 张亮亮 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第11期484-492,共9页
The generation of terahertz(THz) waves by focusing a femtosecond pulsed laser beam at a distance is able to overcome the strong absorption properties of air and has rapidly attracted the attention of industry. However... The generation of terahertz(THz) waves by focusing a femtosecond pulsed laser beam at a distance is able to overcome the strong absorption properties of air and has rapidly attracted the attention of industry. However, the poor directionality of the THz wave radiation generated by this method is not conducive to THz wave applications. By controlling the morphology of the ultrafast laser-excited plasma filament and its electron density distribution through coherent beam combining technology, we achieve direct THz beam shaping and are able to obtain THz wave radiation of Gaussian or arbitrary transverse distribution. The novel experimental approach proposed in this paper opens up the research field of direct THz wave shaping using plasma. Moreover, it innovates multi-parameter convergence algorithms and, by doing so, has the potential to find beam patterns with higher energy conversion efficiency and break the energy limit of THz waves emitted by lasers at high power. 展开更多
关键词 femtosecond pulsed laser coherent beam combining terahertz wave beam shaping PLASMA
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Complex-amplitude Fourier single-pixel imaging via coherent structured illumination
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作者 侯红云 赵亚楠 +4 位作者 韩佳成 曹德忠 张素恒 刘宏超 梁宝来 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第6期236-241,共6页
We propose a method of complex-amplitude Fourier single-pixel imaging(CFSI)with coherent structured illumination to acquire both the amplitude and phase of an object.In the proposed method,an object is illustrated by ... We propose a method of complex-amplitude Fourier single-pixel imaging(CFSI)with coherent structured illumination to acquire both the amplitude and phase of an object.In the proposed method,an object is illustrated by a series of coherent structured light fields,which are generated by a phase-only spatial light modulator,the complex Fourier spectrum of the object can be acquired sequentially by a single-pixel photodetector.Then the desired complex-amplitude image can be retrieved directly by applying an inverse Fourier transform.We experimentally implemented this CFSI with several different types of objects.The experimental results show that the proposed method provides a promising complex-amplitude imaging approach with high quality and a stable configuration.Thus,it might find broad applications in optical metrology and biomedical science. 展开更多
关键词 complex-amplitude imaging single-pixel imaging Fourier basis scan coherent structured illumination
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Plasma optics:A perspective for high-power coherent light generation and manipulation
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作者 C.Riconda S.Weber 《Matter and Radiation at Extremes》 SCIE EI CAS CSCD 2023年第2期1-5,共5页
Over the last two decades,the importance of fully ionized plasmas for the controlled manipulation of high-power coherent light has increased considerably.Many ideas have been put forward on how to control or change th... Over the last two decades,the importance of fully ionized plasmas for the controlled manipulation of high-power coherent light has increased considerably.Many ideas have been put forward on how to control or change the properties of laser pulses such as their frequency,spectrum,intensity,and polarization.The corresponding interaction with a plasma can take place either in a self-organizing way or by prior tailoring.Considerable work has been done in theoretical studies and in simulations,but at present there is a backlog of demand for experimental veri-fication and the associated detailed characterization of plasma-optical elements.Existing proof-of-principle experiments need to be pushed to higher power levels.There is little doubt that plasmas have huge potential for future use in high-power optics.This introduction to the special issue of Matter and Radiation at Extremes devoted to plasma optics sets the framework,gives a short historical overview,and briefly describes the various articles in this collection. 展开更多
关键词 power OPTICS coherent
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Radar fast long-time coherent integration via TR-SKT and robust sparse FRFT
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作者 CHEN Xiaolong GUAN Jian +2 位作者 ZHENG Jibin ZHANG Yue YU Xiaohan 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2023年第5期1116-1129,共14页
Long-time coherent integration(LTCI)is an effective way for radar maneuvering target detection,but it faces the problem of a large number of search parameters and large amount of calculation.Realizing the simultaneous... Long-time coherent integration(LTCI)is an effective way for radar maneuvering target detection,but it faces the problem of a large number of search parameters and large amount of calculation.Realizing the simultaneous compensation of the range and Doppler migrations in complex clutter back-ground,and at the same time improving the calculation efficiency has become an urgent problem to be solved.The sparse transformation theory is introduced to LTCI in this paper,and a non-parametric searching sparse LTCI(SLTCI)based maneuvering target detection method is proposed.This method performs time reversal(TR)and second-order Keystone transform(SKT)in the range frequency&slow-time data to complete high-order range walk compensation,and achieves the coherent integra-tion of maneuvering target across range and Doppler units via the robust sparse fractional Fourier transform(RSFRFT).It can compensate for the nonlinear range migration caused by high-order motion.S-band and X-band radar data measured in sea clutter background are used to verify the detection performance of the proposed method,which can achieve better detection performance of maneuvering targets with less computational burden compared with several popular integration methods. 展开更多
关键词 radar maneuvering target detection sea clutter long-time coherent integration(LTCI) sparse transformation time reversal(TR) second-order Keystone transform(SKT)
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Tightly focused properties of a partially coherent radially polarized power-exponent-phase vortex beam
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作者 陈康 马志远 胡友友 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第2期303-310,共8页
A partially coherent beam called a radially polarized multi-Gaussian Schell-model power-exponent-phase vortex beam is introduced. Both the analytical formula of the beam propagating through the high-numerical-aperture... A partially coherent beam called a radially polarized multi-Gaussian Schell-model power-exponent-phase vortex beam is introduced. Both the analytical formula of the beam propagating through the high-numerical-aperture objective lens based on the vectorial diffraction theory, and the cross-spectral density matrix of the beam in the focal region are derived. Then,the tight focusing characteristics of the partially coherent radially polarized power-exponent-phase vortex beam are studied numerically, and the intensity distribution, degree of polarization and coherence of the beams in the focusing region with different topological charge, power order, beam index and coherence width are analyzed in detail. The results show that the contour of the spot becomes clearer and smoother with the increase in the beam index, and the focal fields of different structures that include the flattened beam can be obtained by changing the coherence width. In addition, by changing the topological charge and power order, the intensity can gather to a point along the ring. These unique properties will have potential applications in particle capture and manipulation, especially in the manipulation of irregular particles. 展开更多
关键词 partially coherent beam power-exponent-phase vortex beam tight focusing properties
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Coherent range-dependent map-drift algorithm for improving SAR motion compensation
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作者 ZHANG Man WANG Guanyong +1 位作者 WEI Feiming JIN Xue 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2023年第1期47-55,共9页
Synthetic aperture radar(SAR) is usually sensitive to trajectory deviations that cause serious motion error in the recorded data. In this paper, a coherent range-dependent mapdrift(CRDMD) algorithm is developed to acc... Synthetic aperture radar(SAR) is usually sensitive to trajectory deviations that cause serious motion error in the recorded data. In this paper, a coherent range-dependent mapdrift(CRDMD) algorithm is developed to accommodate the range-variant motion errors. By utilizing the algorithm as an estimate core, robust motion compensation strategy is proposed for unmanned aerial vehicle(UAV) SAR imagery. CRDMD outperforms the conventional map-drift algorithms in both accuracy and efficiency. Real data experiments show that the proposed approach is appropriate for precise motion compensation for UAV SAR. 展开更多
关键词 synthetic aperture radar(SAR) motion compensation(MOCO) coherent map-drift(CMD) range-variant
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Coherent change detection of fine traces based on multi-angle SAR observations
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作者 KOU Xiuli WANG Guanyong +1 位作者 LI Jun CHEN Jie 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2023年第1期1-8,共8页
Coherent change detection(CCD) is an effective method to detect subtle scene changes that occur between temporal synthetic aperture radar(SAR) observations. Most coherence estimators are obtained from a Hermitian prod... Coherent change detection(CCD) is an effective method to detect subtle scene changes that occur between temporal synthetic aperture radar(SAR) observations. Most coherence estimators are obtained from a Hermitian product based on local statistics. Increasing the number of samples in the local window can improve the estimation bias, but cause the loss of the estimated images spatial resolution. The limitations of these estimators lead to unclear contour of the disturbed region, and even the omission of fine change targets. In this paper, a CCD approach is proposed to detect fine scene changes from multi-temporal and multi-angle SAR image pairs. Multi-angle CCD estimator can improve the contrast between the change target and the background clutter by jointly accumulating singleangle alternative estimator results without further loss of image resolution. The sensitivity of detection performance to image quantity and angle interval is analyzed. Theoretical analysis and experimental results verify the performance of the proposed algorithm. 展开更多
关键词 coherent change detection(CCD) multi-angle synthetic aperture radar(SAR)
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Coherent Perfect Absorption in Higher Order Systems
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作者 Mengjun Fan Linxue Fu +1 位作者 Yaqiong Ding Xinming Fu 《Journal of Applied Mathematics and Physics》 2023年第3期737-745,共9页
We investigate the phenomenon of coherent perfect absorption in a high-order system with three passive resonators coupled to a super-surface to form this three-state coherent perfect absorber. The effective parity tim... We investigate the phenomenon of coherent perfect absorption in a high-order system with three passive resonators coupled to a super-surface to form this three-state coherent perfect absorber. The effective parity time (PT) symmetry in the passive system has received much attention, and in this open three-state PT symmetric system, the incident wave is used as the effective gain instead of balancing the material gain and loss. We analyze the variation of coherent perfect absorption of this system with the coupling coefficient of the system by simulation. 展开更多
关键词 Exceptional Point PT Symmetry Non-Hermitian System coherent Perfect Absorption
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Coherent interaction and action–counteraction theory in small polaron systems,and ground state properties
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作者 罗质华 余超凡 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第11期474-481,共8页
Based on the coherent interaction and action–counteraction principles,we investigate the ground state properties for small polaron systems,the coherent-squeezed fluctuation correction,and the anomalous lattice quantu... Based on the coherent interaction and action–counteraction principles,we investigate the ground state properties for small polaron systems,the coherent-squeezed fluctuation correction,and the anomalous lattice quantum fluctuation,with the new variational generator containing correlated squeezed-coherent coupling and quantum entanglement.Noting tha t-2t is the T.B.A.energy,for the coherent interaction effect,we find the ground-state energy E_(0)to be-2.428t,in which the coherent squeezed fluctuation correction-A_(0)t is-0.463t(where t is the hopping integral,ωis the phonon frequency),with the electron–one-phonon coupling constant g=1 and the electron–two-phonon coupling constant g_(1)=-0.1.However,as a result of the action–counteraction effect,E_(0)is-2.788t,but-E_(0)t is-0.735t.As to the polaron binding energy(EP),for the coherent interaction effect,E_(P) is-1.38ω,but for the action–counteraction effect,E_(P) is-1.88ω.In particular,the electron–two-phonon interaction noticeably enlarges the coherent interaction and the coherent squeezed quantum fluctuation correction.By intervening with the quantum entanglement,the evolutions of the squeezed coherent state and the lattice quantum fluctuation begin to take control.At that time,we encounter a new quantum phase coherence phenomenon—the collapse and revival of inversion repeatedly for the coherent state in the entangled evolution. 展开更多
关键词 coherent interaction and action-counteraction correlated representation variational approach entangled-squeezed coherent state interaction of electron with the coherent squeezed fluctuation
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A hypersonic target coherent integration detection algorithm based on Doppler feedback 被引量:6
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作者 LI Lin WANG Guohong +1 位作者 SUN Dianxing ZHANG Xiangyu 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2020年第1期85-94,共10页
The traversal search of multi-dimensional parameter during the process of hypersonic target echo signal coherent integration,leads to the problem of large amounts of calculation and poor real-time performance.In view ... The traversal search of multi-dimensional parameter during the process of hypersonic target echo signal coherent integration,leads to the problem of large amounts of calculation and poor real-time performance.In view of these problems,a modified polynomial Radon-polynomial Fourier transform(MPRPFT)hypersonic target coherent integration detection algorithm based on Doppler feedback is proposed in this paper.Firstly,the Doppler estimation value of the target is obtained by using the target point information obtained by subsequent non-coherent integration detection.Then,the feedback adjustment of the coherent integration process is performed by using the acquired target Doppler estimation value.Finally,the coherent integration is completed after adjusting the search interval of compensation.The simulation results show that the algorithm can effectively reduce the computational complexity and improve the real-time performance on the basis of the effective coherent integration of hypersonic target echo signals. 展开更多
关键词 hypersonic target coherent integration non-coherent integration Doppler estimation feedback adjustment
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有限概率空间下的动态Coherent风险度量
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作者 陈文财 钟纯 叶中行 《南昌大学学报(理科版)》 CAS 北大核心 2010年第3期236-240,共5页
在动态Coherent风险度量的公理化定义和有限概率空间的假设条件下,证明了一个动态Coherent风险度量满足Relevant性质和Time-consistent性质,当且仅当它由一族乘积型概率测度所定义。
关键词 动态风险度量 coherent 乘积型概率测度族 表示定理
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At wavelength coherent scatterometry microscope using high-order harmonics for EUV mask inspection 被引量:1
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作者 Yutaka Nagata Tetsuo Harada +2 位作者 Takeo Watanabe Hiroo Kinoshita Katsumi Midorikawa 《International Journal of Extreme Manufacturing》 2019年第3期1-12,共12页
In this review,we describe our research on the development of the 13.5 nm coherent microscope using high-order harmonics for the mask inspection of extreme ultraviolet(EUV)lithography.EUV lithography is a game-changin... In this review,we describe our research on the development of the 13.5 nm coherent microscope using high-order harmonics for the mask inspection of extreme ultraviolet(EUV)lithography.EUV lithography is a game-changing piece of technology for high-volume manufacturing of commercial semiconductors.Many top manufacturers apply EUV technology for fabricating the most critical layers of 7 nm chips.Fabrication and inspection of defect-free masks,however,still remain critical issues in EUV technology.Thus,in our pursuit for a resolution,we have developed the coherent EUV scatterometry microscope(CSM)system with a synchrotron radiation(SR)source to establish the actinic metrology,along with inspection algorithms.The intensity and phase images of patterned EUV masks were reconstructed from diffraction patterns using ptychography algorithms.To expedite the practical application of the CSM,we have also developed a standalone CSM,based on high-order harmonic generation,as an alternative to the SR-CSM.Since the application of a coherent 13.5 nm harmonic enabled the production of a high contrast diffraction pattern,diffraction patterns of sub-100 ns size defects in a 2D periodic pattern mask could be observed.Reconstruction of intensity and phase images from diffraction patterns were also performed for a periodic line-and-space structure,an aperiodic angle edge structure,as well as a cross pattern in an EUV mask. 展开更多
关键词 high-order harmonics coherent EUV light EUV lithography coherent EUV scatterometry microscope synchrotron radiation EUV mask inspection
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