This paper presents the compliance modeling of a compliant stage with symmetric configuration. Empirical compliance equations for the circular flexure hinge are first introduced. Using the matrix method, the output co...This paper presents the compliance modeling of a compliant stage with symmetric configuration. Empirical compliance equations for the circular flexure hinge are first introduced. Using the matrix method, the output compliance of a compliant stage with symmetric configuration is then obtained. Finally, the compliances derived from the proposed theoretical model and finite element analysis (FEA) are compared. It indicates that the results calculated by the theoretical model are in good agreement with those derived from FEA, which demonstrates the accuracy of the theoretical model.展开更多
Most of the XY positioning stages proposed in previous studies are mainly designed by considering only a single performance indicator of the stage. As a result, the other performance indicators are relatively weak. In...Most of the XY positioning stages proposed in previous studies are mainly designed by considering only a single performance indicator of the stage. As a result, the other performance indicators are relatively weak. In this study, a 2-degree-of-freedom linear compliant positioning stage （LCPS） is developed by mechatronic design to balance the interacting performance indicators and realize the desired positioning stage. The key parameters and the coupling of the structure and actuators are completely considered in the design. The LCPS consists of four voice coil motors （VCMs）, which are conformally designed for compactness, and six spatial leaf spring parallelograms. These parallelograms are serially connected for a large travel range and a high out-of-plane payload capacity. The mechatronic model is established by matrix structural analysis for structural modeling and by Kirchhof^s law for the VCMs. The sensitivities of the key parameters are analyzed, and the design parameters are subsequently determined. The analytical model of the stage is confirmed by experiments. The stage has a travel range of 4.4 mm 7.0 mm and a 0.16% area ratio of workspace to the outer dimension of the stage. The values of these performance indicators are greater than those of any existing stage reported in the literature. The closed-loop bandwidth is 9.5 Hz in both working directions. The stage can track a circular trajectory with a radius of 1.5 mm, with 40 Ixm error and a resolution of lower than 3 ~tm. The results of payload tests indicate that the stage has at least 20 kg out- of-plane payload capacity.展开更多
文摘This paper presents the compliance modeling of a compliant stage with symmetric configuration. Empirical compliance equations for the circular flexure hinge are first introduced. Using the matrix method, the output compliance of a compliant stage with symmetric configuration is then obtained. Finally, the compliances derived from the proposed theoretical model and finite element analysis (FEA) are compared. It indicates that the results calculated by the theoretical model are in good agreement with those derived from FEA, which demonstrates the accuracy of the theoretical model.
文摘Most of the XY positioning stages proposed in previous studies are mainly designed by considering only a single performance indicator of the stage. As a result, the other performance indicators are relatively weak. In this study, a 2-degree-of-freedom linear compliant positioning stage （LCPS） is developed by mechatronic design to balance the interacting performance indicators and realize the desired positioning stage. The key parameters and the coupling of the structure and actuators are completely considered in the design. The LCPS consists of four voice coil motors （VCMs）, which are conformally designed for compactness, and six spatial leaf spring parallelograms. These parallelograms are serially connected for a large travel range and a high out-of-plane payload capacity. The mechatronic model is established by matrix structural analysis for structural modeling and by Kirchhof^s law for the VCMs. The sensitivities of the key parameters are analyzed, and the design parameters are subsequently determined. The analytical model of the stage is confirmed by experiments. The stage has a travel range of 4.4 mm 7.0 mm and a 0.16% area ratio of workspace to the outer dimension of the stage. The values of these performance indicators are greater than those of any existing stage reported in the literature. The closed-loop bandwidth is 9.5 Hz in both working directions. The stage can track a circular trajectory with a radius of 1.5 mm, with 40 Ixm error and a resolution of lower than 3 ~tm. The results of payload tests indicate that the stage has at least 20 kg out- of-plane payload capacity.
