Integrated optical chips have already been established for application in optical communication.They also offer interesting future perspectives for integrated quantum optics on a chip.At present,however,they are mostl...Integrated optical chips have already been established for application in optical communication.They also offer interesting future perspectives for integrated quantum optics on a chip.At present,however,they are mostly fabricated using essentially planar fabrication approaches like electron-beam lithography or UV optical lithography.Many further design options would arise if one had complete fabrication freedom in regard to the third dimension normal to the chip without having to give up the virtues and the know-how of existing planar fabrication technologies.As a step in this direction,we here use three-dimensional dip-in direct-laser-writing optical lithography to fabricate three-dimensional polymeric functional devices on pre-fabricated planar optical chips containing Si3N4 waveguides as well as grating couplers made by standard electron-beam lithography.The first example is a polymeric dielectric rectangular-shaped waveguide which is connected to Si3N4 waveguides and that is adiabatically twisted along its axis to achieve geometrical rotation of linear polarization on the chip.The rotator’s broadband performance at around 1550 nm wavelength is verified by polarization-dependent grating couplers.Such polarization rotation on the optical chip cannot easily be achieved by other means.The second example is a whispering-gallery-mode optical resonator connected to Si_(3)N_(4) waveguides on the chip via polymeric waveguides.By mechanically connecting the latter to the disk,we can control the coupling to the resonator and,at the same time,guarantee mechanical stability of the three-dimensional architecture on the chip.展开更多
By combining a silicon-based lithium niobate modulator and a silicon-based Si3N4resonator with silicon-based photonics technology,a highly systematic design of a hybrid integrated optical gyroscope with enhanced recip...By combining a silicon-based lithium niobate modulator and a silicon-based Si3N4resonator with silicon-based photonics technology,a highly systematic design of a hybrid integrated optical gyroscope with enhanced reciprocity sensitivity and a dual micro-ring structure is proposed for the first time in this paper.The relationship between the device's structural parameters and optical performance is also analyzed by constructing a complete simulation link,which provides a theoretical design reference to improve the system's sensitivity.When the wavelength is 1550 nm,the conversion frequency of the dual-ring optical path is 50 MHz,the coupling coefficient is 0.2,and the radius R is 1000μm,the quality factor of the silicon-based Si_(3)N_(4)resonator is 2.58×10^(5),which is 1.58 times that of the silicon-on-insulator resonator.Moreover,the effective number of times the light travels around the ring before leaving the micro-ring is 5.93,which is 1.62 times that of the silicon-on-insulator resonator.The work fits the gyro dynamic output diagram,and solves the problem of low sensitivity at low speed by setting the phase offset.This results provide a basis for the further optimization of design and chip processing of the integrated optical gyroscope.展开更多
An indium tin oxide(ITO) and silicon nitride(Si_(3)N_(4)) assisted compact TE-pass waveguide polarizer based on lithiumniobate-on-insulator is proposed and numerically analyzed.By properly designing the ITO and Si_(3)...An indium tin oxide(ITO) and silicon nitride(Si_(3)N_(4)) assisted compact TE-pass waveguide polarizer based on lithiumniobate-on-insulator is proposed and numerically analyzed.By properly designing the ITO and Si_(3)N_(4) assisted structure and utilizing the epsilon-near-zero effect of ITO,the TM mode is strongly confined in the ITO layer with extremely high loss,while the TE mode is hardly affected and passes through the waveguide with low loss.The simulation results show that the polarizer has an extinction ratio of 22.5 dB and an insertion loss of 0.8 dB at the wavelength of 1.55 μm,and has an operating bandwidth of about 125 nm(from 1540 nm to 1665 nm) for an extinction ratio of>20 dB and an insertion loss of<0.95 dB.Moreover,the proposed device exhibits large fabrication tolerances.More notably,the device is compact,with a length of only 7.5 μm,and is appropriate for on-chip applications.展开更多
Micro-Opto-Electro-Mechanical Systems(MOEMS)accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems(MEMS)to enable high precision,small volume...Micro-Opto-Electro-Mechanical Systems(MOEMS)accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems(MEMS)to enable high precision,small volume and anti-electromagnetic disturbance measurement of acceleration.In recent years,with the in-depth research and development of MOEMS accelerometers,the community is flourishing with the possible applications in seismic monitoring,inertial navigation,aerospace and other industrial and military fields.There have been a variety of schemes of MOEMS accelerometers,whereas the performances differ greatly due to different measurement principles and corresponding application requirements.This paper aims to address the pressing issue of the current lack of systematic review of MOEMS accelerometers.According to the optical measurement principle,we divide the MOEMS accelerometers into three categories:the geometric optics based,the wave optics based,and the new optomechanical accelerometers.Regarding the most widely studied category,the wave optics based accelerometers are further divided into four sub-categories,which is based on grating interferometric cavity,Fiber Bragg Grating(FBG),Fabry-Perot cavity,and photonic crystal,respectively.Following a brief introduction to the measurement principles,the typical performances,advantages and disadvantages as well as the potential application scenarios of all kinds of MOEMS accelerometers are discussed on the basis of typical demonstrations.This paper also presents the status and development tendency of MOEMS accelerometers to meet the ever-increasing demand for high-precision acceleration measurement.展开更多
The ability to generate complex optical photon states involving entanglement between multiple optical modes is not only critical to advancing our understanding of quantum mechanics but will play a key role in generati...The ability to generate complex optical photon states involving entanglement between multiple optical modes is not only critical to advancing our understanding of quantum mechanics but will play a key role in generating many applications in quantum technologies.These include quantum communications,computation,imaging,microscopy and many other novel technologies that are constantly being proposed.However,approaches to generating parallel multiple,customisable bi-and multi-entangled quantum bits(qubits)on a chip are still in the early stages of development.Here,we review recent advances in the realisation of integrated sources of photonic quantum states,focusing on approaches based on nonlinear optics that are compatible with contemporary optical fibre telecommunications and quantum memory platforms as well as with chip-scale semiconductor technology.These new and exciting platforms hold the promise of compact,low-cost,scalable and practical implementations of sources for the generation and manipulation of complex quantum optical states on a chip,which will play a major role in bringing quantum technologies out of the laboratory and into the real world.展开更多
In recent years, there have been a significant number of demonstrations of small metallic and plasmonic lasers. The vast majority of these demonstrations have been for optically pumped devices. Electrically pumped dev...In recent years, there have been a significant number of demonstrations of small metallic and plasmonic lasers. The vast majority of these demonstrations have been for optically pumped devices. Electrically pumped devices are advantageous for applications and could demonstrate concepts not amenable for optical pumping. However, there have been relatively few demonstrations of electrically pumped small metal cavity lasers. This lack of results is due to the following reasons: there are limited types of electrically pumped gain media available; there is a significantly greater level of complexity required in the fabrication of electrically pumped devices; finally, the required components for electrical pumping restrict cavity design options and furthermore make it intrinsically more difficult to achieve lasing. This review looks at the motivation for electrically pumped nanolasers, the key issues that need addressing for them to be realized, the results that have been achieved so far including devices where lasing has not been achieved, and potential new directions that could be pursued.展开更多
Parallel multi-thread processing in advanced intelligent processors is the core to realize high-speed and high-capacity signal processing systems.Optical neural network(ONN)has the native advantages of high paralleliz...Parallel multi-thread processing in advanced intelligent processors is the core to realize high-speed and high-capacity signal processing systems.Optical neural network(ONN)has the native advantages of high parallelization,large bandwidth,and low power consumption to meet the demand of big data.Here,we demonstrate the dual-layer ONN with Mach-Zehnder interferometer(MZI)network and nonlinear layer,while the nonlinear activation function is achieved by optical-electronic signal conversion.Two frequency components from the microcomb source carrying digit datasets are simultaneously imposed and intelligently recognized through the ONN.We successfully achieve the digit classification of different frequency components by demultiplexing the output signal and testing power distribution.Efficient parallelization feasibility with wavelength division multiplexing is demonstrated in our high-dimensional ONN.This work provides a high-performance architecture for future parallel high-capacity optical analog computing.展开更多
We present an all polymer asymmetric Mach–Zehnder interferometer(AMZI) waveguide sensor based on imprinting bonding and laser polishing method. The fabrication methods are compatible with high accuracy waveguide sens...We present an all polymer asymmetric Mach–Zehnder interferometer(AMZI) waveguide sensor based on imprinting bonding and laser polishing method. The fabrication methods are compatible with high accuracy waveguide sensing structure. The rectangle waveguide structure of this sensor has three sensing surfaces contacting the test media, and its sensing accuracy can be increased 5 times compared with that of one surface sensing structure. An AMZI device structure is designed. The single mode condition, the length of the sensing arm, and the length deviation between the sensing arm and the reference arm are optimized. The length deviation is optimized to be 19.8 μm in a refractive index range between1.470 and 1.545. We fabricate the AMZI waveguide by lithography and wet etching method. The imprinting bonding and laser polishing method is proposed and investigated. The insertion loss is between-80.36 dB and-10.63 dB. The average and linear sensitivity are 768.1 d B/RIU and 548.95 dB/RIU, respectively. And the average and linear detection resolution of the sensor are 1.30×10^(-6) RIU(RIU: refractive index unit) and 1.82×10^(-5) RIU, respectively. This sensor has a fast and cost-effective fabrication process which can be used in the cases of requiring portability and disposability.展开更多
We report a low-cost manufacturing approach for fabricating monolithic multi-wavelength sources for dense wavelength division multiplexing(DWDM)systems that offers high yield and eliminates crystal regrowth and select...We report a low-cost manufacturing approach for fabricating monolithic multi-wavelength sources for dense wavelength division multiplexing(DWDM)systems that offers high yield and eliminates crystal regrowth and selective area epitaxy steps that are essential in traditional fabrication methods.The source integrates an array of distributed feedback(DFB)lasers with a passive coupler and semiconductor optical amplifier(SOA).Ridge waveguide lasers with sampled Bragg side wall gratings have been integrated using quantum well intermixing to achieve a fully functional four-channel DWDM source with 0.8 nm wavelength spacing and residual errors<0.13 nm.The output power from the SOA is>10 mW per channel making the source suitable for use in passive optical networks(PONs).We have also investigated using multisection phase-shifted sampled gratings to both increase the effective grating coupling coefficient and precisely control the channel lasing wavelength spacing.An 8-channel DFB laser array with 100 GHz channel spacing was demonstrated using a sampled grating with twoπ-phase-shifted sections in each sampling period.The entire array was fabricated by only a single step of electron beam lithography.展开更多
Beam deflectors are important optical elements which can control the propagation direction of the beam in free space.However,with the development of miniaturization of the optical systems,conventional reflector-based ...Beam deflectors are important optical elements which can control the propagation direction of the beam in free space.However,with the development of miniaturization of the optical systems,conventional reflector-based mechanical beam deflectors confront a huge challenge due to their large sizes and incompatibility to the device integration.Here we propose an all-dielectric flat metasurface beam deflector which is composed of a single layer array of TiO_2 nanoantennas resting on a fused-silica substrate.Numerical simulations are performed to demonstrate that the proposed deflectors are able to efficiently deflect the incident beam for different angles with transmission efficiency higher than 80%at visible frequencies.This ultrathin all-dielectric metasurface deflector may have great potential applications in integrated optics.展开更多
An efficient wavelet-based finite-difference time-domain(FDTD)method is implemented for analyzing nanoscale optical devices,especially optical resonator.Because of its highly linear numerical dispersion properties the...An efficient wavelet-based finite-difference time-domain(FDTD)method is implemented for analyzing nanoscale optical devices,especially optical resonator.Because of its highly linear numerical dispersion properties the high-spatial-order FDTD achieves significant reduction in the number of cells,i.e.used memory,while analyzing a high-index dielectric ring resonator working as an add/drop multiplexer.The main novelty is that the wavelet-based FDTD model is extended in a parallel computation environment to solve physical problems with large dimensions.To demonstrate the efficiency of the parallelized FDTD model,a mirrored cavity is analyzed.The analysis shows that the proposed model reduces computation time and memory cost,and the parallel computation result matches the theoretical model.展开更多
Monolayer transition metal dichalcogenides(TMDs) are widely used for integrated optical and photoelectric devices.Owing to their broken inversion symmetry, monolayer TMDs have a large second-order optical nonlinearity...Monolayer transition metal dichalcogenides(TMDs) are widely used for integrated optical and photoelectric devices.Owing to their broken inversion symmetry, monolayer TMDs have a large second-order optical nonlinearity. However, the optical second-order nonlinear conversion efficiency of monolayer TMDs is still limited by the interaction length. In this work, we theoretically study the second harmonic generation(SHG) from monolayer tungsten sulfide(WS2) enhanced by a silica microsphere cavity. By tuning the position, size, and crystal orientation of the material, second-order nonlinear coupling can occur between the fundamental pump mode and different second harmonic cavity modes, and we obtain an optimal SHG conversion efficiency with orders of magnitude enhancement. Our work demonstrates that the microsphere cavity can significantly enhance SHG from monolayer 2D materials under flexible conditions.展开更多
An optical phased array(OPA)is a promising non-mechanical technique for beam steering in solid-state light detection and ranging systems.The performance of the OPA largely depends on the phase shifter,which afects pow...An optical phased array(OPA)is a promising non-mechanical technique for beam steering in solid-state light detection and ranging systems.The performance of the OPA largely depends on the phase shifter,which afects power consumption,insertion loss,modulation speed,and footprint.However,for a thermo-optic phase shifter,achieving good performance in all aspects is challenging due to trade-ofs among these aspects.In this work,we propose and demonstrate two types of energy-efcient optical phase shifters that overcome these trade-ofs and achieve a well-balanced performance in all aspects.Additionally,the proposed round-spiral phase shifter is robust in fabrication and fully compatible with deep ultraviolet(DUV)processes,making it an ideal building block for large-scale photonic integrated circuits(PICs).Using the high-performance phase shifter,we propose a periodic OPA with low power consumption,whose maximum electric power consumption within the feld of view is only 0.33 W.Moreover,we designed Gaussian power distribution in both the azimuthal(ψ)and polar(θ)directions and experimentally achieved a large sidelobe suppression ratio of 15.1 and 25 dB,respectively.展开更多
We review recent work on broadband RF channelizers based on integrated optical frequency Kerr micro-combs combined with passive micro-ring resonator filters,with microcombs having channel spacings of 200 and 49 GHz.Th...We review recent work on broadband RF channelizers based on integrated optical frequency Kerr micro-combs combined with passive micro-ring resonator filters,with microcombs having channel spacings of 200 and 49 GHz.This approach to realizing RF channelizers offers reduced complexity,size,and potential cost for a wide range of applications to microwave signal detection.展开更多
Integrated diffractive optical neural networks(DONNs)have significant potential for complex machine learning tasks with high speed and ultralow energy consumption.However,the on-chip implementation of a high-performan...Integrated diffractive optical neural networks(DONNs)have significant potential for complex machine learning tasks with high speed and ultralow energy consumption.However,the on-chip implementation of a high-performance optical neural network is limited by input dimensions.In contrast to existing photonic neural networks,a space-time interleaving technology based on arrayed waveguides is designed to realize an on-chip DONN with high-speed,high-dimensional,and all-optical input signal modulation.To demonstrate the performance of the on-chip DONN with high-speed space-time interleaving modulation,an on-chip DONN with a designed footprint of 0.0945 mm~2is proposed to resolve the vowel recognition task,reaching a computation speed of about 1.4×10^(13)operations per second and yielding an accuracy of 98.3%in numerical calculation.In addition,the function of the specially designed arrayed waveguides for realizing parallel signal inputs using space-time conversion has been verified experimentally.This method can realize the on-chip DONN with higher input dimension and lower energy consumption.展开更多
Mode splitters that directly separate modes without changing their orders are highly promising to improve the flexibility of the mode-division multiplexing systems.In this paper,we design a high-performance mode split...Mode splitters that directly separate modes without changing their orders are highly promising to improve the flexibility of the mode-division multiplexing systems.In this paper,we design a high-performance mode splitter on the silicon-oninsulator platform with a compact footprint of 14μm×2.5μm using an inverse design method based on shape optimization.The fabrication of this mode splitter requires only a single lithography step and exhibits good fabrication tolerances.The experimental results show that the proposed device exhibits state-of-the-art insertion loss(<0.9 dB)and cross talk(<-16 dB)over a broad bandwidth(1500-1600 nm).Furthermore,the shape optimization method used is implemented to design a dual-mode(de)multiplexer,and the experimental results fulfill the design objective,demonstrating the excellent generality of the design method in this paper.展开更多
A flexible-grid 1×(2×3)mode-and wavelength-selective switch which comprises counter-tapered couplers and silicon microring resonators has been proposed,optimized,and demonstrated experimentally in this work....A flexible-grid 1×(2×3)mode-and wavelength-selective switch which comprises counter-tapered couplers and silicon microring resonators has been proposed,optimized,and demonstrated experimentally in this work.By carefully thermally tuning phase shifters and silicon microring resonators,mode and wavelength signals can be independently and flexibly conveyed to any one of the output ports,and different bandwidths can be generated as desired.The particle swarm optimization algorithm and finite difference time-domain method are employed to optimize structural parameters of the twomode(de)multiplexer and crossing waveguide.The bandwidth-tunable wavelength-selective optical router composed of12 microring resonators is studied by taking advantage of the transfer matrix method.Measurement results show that,for the fabricated module,cross talk less than-10.18 dB,an extinction ratio larger than 17.41 d B,an in-band ripple lower than0.79 dB,and a 3-dB bandwidth changing from 0.38 to 1.05 nm are obtained,as the wavelength-channel spacing is 0.40 nm.The corresponding response time is measured to be 13.64μs.展开更多
Applications of optical switches,such as signal routing and data-intensive computing,are critical in optical interconnects and optical computing.Integrated optical switches enabled by two-dimensional(2D)materials and ...Applications of optical switches,such as signal routing and data-intensive computing,are critical in optical interconnects and optical computing.Integrated optical switches enabled by two-dimensional(2D)materials and beyond,such as graphene and black phosphorus,have demonstrated many advantages in terms of speed and energy consumption compared to their conventional silicon-based counterparts.Here we review the state-of-the-art of optical switches enabled by 2D materials and beyond and organize them into several tables.The performance tables and future projections show the frontiers of optical switches fabricated from 2D materials and beyond,providing researchers with an overview of this field and enabling them to identify existing challenges and predict promising research directions.展开更多
This study proposes a novel interferometric fiber optic gyroscope(IFOG)based on an integrated optical chip,application-specific integrated circuit,and small-diameter sensing coil.The overall size and weight of the pro...This study proposes a novel interferometric fiber optic gyroscope(IFOG)based on an integrated optical chip,application-specific integrated circuit,and small-diameter sensing coil.The overall size and weight of the prototype are 30 mm × 30 mm ×30 mm and 68 g,respectively,making it the smallest closed-loop IFOG,to the best of our knowledge.A static experiment shows that the bias stability of the integrated IFOG is very close to the theoretical accuracy limit determined by the fiber coil and can satisfy the requirements of near-navigation-grade compact inertial navigation systems.展开更多
Photonics on thin-film lithium niobate(TFLN)has emerged as one of the most pursued disciplines within integrated optics.Ultracompact and low-loss optical waveguides and related devices on this modern material platform...Photonics on thin-film lithium niobate(TFLN)has emerged as one of the most pursued disciplines within integrated optics.Ultracompact and low-loss optical waveguides and related devices on this modern material platform have rejuvenated the traditional and commercial applications of lithium niobate for optical modulators based on the electro-optic effect,as well as optical wavelength converters based on secondorder nonlinear effects,e.g.,second-harmonic,sum-,and difference-frequency generations.TFLN has also created vast opportunities for applications and integrated solutions for optical parametric amplification and oscillation,cascaded nonlinear effects,such as low-harmonic generation;third-order nonlinear effects,such as supercontinuum generation;optical frequency comb generation and stabilization;and nonclassical nonlinear effects,such as spontaneous parametric downconversion for quantum optics.Recent progress in nonlinear integrated photonics on TFLN for all these applications,their current trends,and future opportunities and challenges are reviewed.展开更多
基金We acknowledges support by DFG grant PE 1832/1-1 and PE 1832/2-1the Helmholtz Society through grant HIRG-0005.
文摘Integrated optical chips have already been established for application in optical communication.They also offer interesting future perspectives for integrated quantum optics on a chip.At present,however,they are mostly fabricated using essentially planar fabrication approaches like electron-beam lithography or UV optical lithography.Many further design options would arise if one had complete fabrication freedom in regard to the third dimension normal to the chip without having to give up the virtues and the know-how of existing planar fabrication technologies.As a step in this direction,we here use three-dimensional dip-in direct-laser-writing optical lithography to fabricate three-dimensional polymeric functional devices on pre-fabricated planar optical chips containing Si3N4 waveguides as well as grating couplers made by standard electron-beam lithography.The first example is a polymeric dielectric rectangular-shaped waveguide which is connected to Si3N4 waveguides and that is adiabatically twisted along its axis to achieve geometrical rotation of linear polarization on the chip.The rotator’s broadband performance at around 1550 nm wavelength is verified by polarization-dependent grating couplers.Such polarization rotation on the optical chip cannot easily be achieved by other means.The second example is a whispering-gallery-mode optical resonator connected to Si_(3)N_(4) waveguides on the chip via polymeric waveguides.By mechanically connecting the latter to the disk,we can control the coupling to the resonator and,at the same time,guarantee mechanical stability of the three-dimensional architecture on the chip.
基金Project supported by the science and technology general project of Beijing Municipal Education Commission(Grant No.KM202111232019)Beijing Municipal Natural Science Foundation(Grant No.2214058)+4 种基金the Discipline Innovation Program of Higher Education(Grant No.D17021)the Open Project of the State Key Laboratory of Integrated Optoelectronics(Grant No.IOSKL2020KF22)Beijing Great Wall Scholars Program(Grant No.CIT&TCD20190323)the National Natural Science Foundation of China(Grant No.61875237)Beijing Youth Talent Support Program(Grant No.Z2019042)。
文摘By combining a silicon-based lithium niobate modulator and a silicon-based Si3N4resonator with silicon-based photonics technology,a highly systematic design of a hybrid integrated optical gyroscope with enhanced reciprocity sensitivity and a dual micro-ring structure is proposed for the first time in this paper.The relationship between the device's structural parameters and optical performance is also analyzed by constructing a complete simulation link,which provides a theoretical design reference to improve the system's sensitivity.When the wavelength is 1550 nm,the conversion frequency of the dual-ring optical path is 50 MHz,the coupling coefficient is 0.2,and the radius R is 1000μm,the quality factor of the silicon-based Si_(3)N_(4)resonator is 2.58×10^(5),which is 1.58 times that of the silicon-on-insulator resonator.Moreover,the effective number of times the light travels around the ring before leaving the micro-ring is 5.93,which is 1.62 times that of the silicon-on-insulator resonator.The work fits the gyro dynamic output diagram,and solves the problem of low sensitivity at low speed by setting the phase offset.This results provide a basis for the further optimization of design and chip processing of the integrated optical gyroscope.
基金Project supported by the National Natural Science Foundation of China (Grant No. 61875148)。
文摘An indium tin oxide(ITO) and silicon nitride(Si_(3)N_(4)) assisted compact TE-pass waveguide polarizer based on lithiumniobate-on-insulator is proposed and numerically analyzed.By properly designing the ITO and Si_(3)N_(4) assisted structure and utilizing the epsilon-near-zero effect of ITO,the TM mode is strongly confined in the ITO layer with extremely high loss,while the TE mode is hardly affected and passes through the waveguide with low loss.The simulation results show that the polarizer has an extinction ratio of 22.5 dB and an insertion loss of 0.8 dB at the wavelength of 1.55 μm,and has an operating bandwidth of about 125 nm(from 1540 nm to 1665 nm) for an extinction ratio of>20 dB and an insertion loss of<0.95 dB.Moreover,the proposed device exhibits large fabrication tolerances.More notably,the device is compact,with a length of only 7.5 μm,and is appropriate for on-chip applications.
基金supports from National Natural Science Foundation of China(No.62004166)Fundamental Research Funds for the Central Universities(No.31020190QD027)+2 种基金Natural Science Basic Research Program of Shaanxi(Program No.2020JQ-199)China National Postdoctoral Program for Innovative Talents(No.BX20200279)Key Research and Development Program of Shaanxi Province(2020GXLH-Z-027,2020ZDLGY04-08).
文摘Micro-Opto-Electro-Mechanical Systems(MOEMS)accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems(MEMS)to enable high precision,small volume and anti-electromagnetic disturbance measurement of acceleration.In recent years,with the in-depth research and development of MOEMS accelerometers,the community is flourishing with the possible applications in seismic monitoring,inertial navigation,aerospace and other industrial and military fields.There have been a variety of schemes of MOEMS accelerometers,whereas the performances differ greatly due to different measurement principles and corresponding application requirements.This paper aims to address the pressing issue of the current lack of systematic review of MOEMS accelerometers.According to the optical measurement principle,we divide the MOEMS accelerometers into three categories:the geometric optics based,the wave optics based,and the new optomechanical accelerometers.Regarding the most widely studied category,the wave optics based accelerometers are further divided into four sub-categories,which is based on grating interferometric cavity,Fiber Bragg Grating(FBG),Fabry-Perot cavity,and photonic crystal,respectively.Following a brief introduction to the measurement principles,the typical performances,advantages and disadvantages as well as the potential application scenarios of all kinds of MOEMS accelerometers are discussed on the basis of typical demonstrations.This paper also presents the status and development tendency of MOEMS accelerometers to meet the ever-increasing demand for high-precision acceleration measurement.
基金supported by the Natural Sciences and Engineering Research Council of Canada(NSERC)through the Steacie Memorial Fellowship as well as through the Canada Research Chair Program and the MEIE in Quebecsupported through the Australian Research Council Discovery Projects programme(DP150104327)+4 种基金the support of the People Programme(Marie Curie Actions)of the European Union’s FP7 Programme under REA Grant Agreements No.627478(THREEPLE)the Australian Research Council(ARC)Centre of Excellence(CUDOS,CE110001018)Laureate Fellowship(FL120100029)the Discovery Early Career Researcher Award(DE120100226)programmessupport from the ITMO and Professorship Program(grant 074-U 01)and the 1000 Talents Sichuan Program.
文摘The ability to generate complex optical photon states involving entanglement between multiple optical modes is not only critical to advancing our understanding of quantum mechanics but will play a key role in generating many applications in quantum technologies.These include quantum communications,computation,imaging,microscopy and many other novel technologies that are constantly being proposed.However,approaches to generating parallel multiple,customisable bi-and multi-entangled quantum bits(qubits)on a chip are still in the early stages of development.Here,we review recent advances in the realisation of integrated sources of photonic quantum states,focusing on approaches based on nonlinear optics that are compatible with contemporary optical fibre telecommunications and quantum memory platforms as well as with chip-scale semiconductor technology.These new and exciting platforms hold the promise of compact,low-cost,scalable and practical implementations of sources for the generation and manipulation of complex quantum optical states on a chip,which will play a major role in bringing quantum technologies out of the laboratory and into the real world.
基金Project supported by an Australian Research Council Future Fellowship Grant
文摘In recent years, there have been a significant number of demonstrations of small metallic and plasmonic lasers. The vast majority of these demonstrations have been for optically pumped devices. Electrically pumped devices are advantageous for applications and could demonstrate concepts not amenable for optical pumping. However, there have been relatively few demonstrations of electrically pumped small metal cavity lasers. This lack of results is due to the following reasons: there are limited types of electrically pumped gain media available; there is a significantly greater level of complexity required in the fabrication of electrically pumped devices; finally, the required components for electrical pumping restrict cavity design options and furthermore make it intrinsically more difficult to achieve lasing. This review looks at the motivation for electrically pumped nanolasers, the key issues that need addressing for them to be realized, the results that have been achieved so far including devices where lasing has not been achieved, and potential new directions that could be pursued.
基金Peng Xie acknowledges the support from the China Scholarship Council(Grant no.201804910829).
文摘Parallel multi-thread processing in advanced intelligent processors is the core to realize high-speed and high-capacity signal processing systems.Optical neural network(ONN)has the native advantages of high parallelization,large bandwidth,and low power consumption to meet the demand of big data.Here,we demonstrate the dual-layer ONN with Mach-Zehnder interferometer(MZI)network and nonlinear layer,while the nonlinear activation function is achieved by optical-electronic signal conversion.Two frequency components from the microcomb source carrying digit datasets are simultaneously imposed and intelligently recognized through the ONN.We successfully achieve the digit classification of different frequency components by demultiplexing the output signal and testing power distribution.Efficient parallelization feasibility with wavelength division multiplexing is demonstrated in our high-dimensional ONN.This work provides a high-performance architecture for future parallel high-capacity optical analog computing.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61605057,61475061,and 61575076)the Science and Technology Development Plan of Jilin Province,China(Grant No.20140519006JH)the Excellent Youth Foundation of Jilin Province,China(Grant No.20170520158JH)
文摘We present an all polymer asymmetric Mach–Zehnder interferometer(AMZI) waveguide sensor based on imprinting bonding and laser polishing method. The fabrication methods are compatible with high accuracy waveguide sensing structure. The rectangle waveguide structure of this sensor has three sensing surfaces contacting the test media, and its sensing accuracy can be increased 5 times compared with that of one surface sensing structure. An AMZI device structure is designed. The single mode condition, the length of the sensing arm, and the length deviation between the sensing arm and the reference arm are optimized. The length deviation is optimized to be 19.8 μm in a refractive index range between1.470 and 1.545. We fabricate the AMZI waveguide by lithography and wet etching method. The imprinting bonding and laser polishing method is proposed and investigated. The insertion loss is between-80.36 dB and-10.63 dB. The average and linear sensitivity are 768.1 d B/RIU and 548.95 dB/RIU, respectively. And the average and linear detection resolution of the sensor are 1.30×10^(-6) RIU(RIU: refractive index unit) and 1.82×10^(-5) RIU, respectively. This sensor has a fast and cost-effective fabrication process which can be used in the cases of requiring portability and disposability.
基金This work was supported by the U.K.Engineering and Physical Sciences Research Council(EP/R042578/1)and the National Science Foundation of China(61320106013).We would like to acknowledge the staff of the James Watt Nanofabrication Centre at the University of Glasgow for help in fabricatingthe devices.
文摘We report a low-cost manufacturing approach for fabricating monolithic multi-wavelength sources for dense wavelength division multiplexing(DWDM)systems that offers high yield and eliminates crystal regrowth and selective area epitaxy steps that are essential in traditional fabrication methods.The source integrates an array of distributed feedback(DFB)lasers with a passive coupler and semiconductor optical amplifier(SOA).Ridge waveguide lasers with sampled Bragg side wall gratings have been integrated using quantum well intermixing to achieve a fully functional four-channel DWDM source with 0.8 nm wavelength spacing and residual errors<0.13 nm.The output power from the SOA is>10 mW per channel making the source suitable for use in passive optical networks(PONs).We have also investigated using multisection phase-shifted sampled gratings to both increase the effective grating coupling coefficient and precisely control the channel lasing wavelength spacing.An 8-channel DFB laser array with 100 GHz channel spacing was demonstrated using a sampled grating with twoπ-phase-shifted sections in each sampling period.The entire array was fabricated by only a single step of electron beam lithography.
基金supported in part by the National Natural Science Foundation of China under Grant (61575092)support from the Thousand Talents Program for Young Professionals,Collaborative Innovations Center of Advanced Microstructures
文摘Beam deflectors are important optical elements which can control the propagation direction of the beam in free space.However,with the development of miniaturization of the optical systems,conventional reflector-based mechanical beam deflectors confront a huge challenge due to their large sizes and incompatibility to the device integration.Here we propose an all-dielectric flat metasurface beam deflector which is composed of a single layer array of TiO_2 nanoantennas resting on a fused-silica substrate.Numerical simulations are performed to demonstrate that the proposed deflectors are able to efficiently deflect the incident beam for different angles with transmission efficiency higher than 80%at visible frequencies.This ultrathin all-dielectric metasurface deflector may have great potential applications in integrated optics.
基金Supported by the Scientific Research Foundation of Nanjing University of Posts and Telecommunications(NY212008,NY213116)the National Science Foundation of Jiangsu Province(BK20131383)
文摘An efficient wavelet-based finite-difference time-domain(FDTD)method is implemented for analyzing nanoscale optical devices,especially optical resonator.Because of its highly linear numerical dispersion properties the high-spatial-order FDTD achieves significant reduction in the number of cells,i.e.used memory,while analyzing a high-index dielectric ring resonator working as an add/drop multiplexer.The main novelty is that the wavelet-based FDTD model is extended in a parallel computation environment to solve physical problems with large dimensions.To demonstrate the efficiency of the parallelized FDTD model,a mirrored cavity is analyzed.The analysis shows that the proposed model reduces computation time and memory cost,and the parallel computation result matches the theoretical model.
基金Project supported by the National Natural Science Foundation of China (Grant Nos. 11774333 and 62061160487)the Fundamental Research Funds for the Central Universities。
文摘Monolayer transition metal dichalcogenides(TMDs) are widely used for integrated optical and photoelectric devices.Owing to their broken inversion symmetry, monolayer TMDs have a large second-order optical nonlinearity. However, the optical second-order nonlinear conversion efficiency of monolayer TMDs is still limited by the interaction length. In this work, we theoretically study the second harmonic generation(SHG) from monolayer tungsten sulfide(WS2) enhanced by a silica microsphere cavity. By tuning the position, size, and crystal orientation of the material, second-order nonlinear coupling can occur between the fundamental pump mode and different second harmonic cavity modes, and we obtain an optimal SHG conversion efficiency with orders of magnitude enhancement. Our work demonstrates that the microsphere cavity can significantly enhance SHG from monolayer 2D materials under flexible conditions.
基金the Novo Nordisk Fonden(NNF22OC0080333)Villum Fonden(15401).
文摘An optical phased array(OPA)is a promising non-mechanical technique for beam steering in solid-state light detection and ranging systems.The performance of the OPA largely depends on the phase shifter,which afects power consumption,insertion loss,modulation speed,and footprint.However,for a thermo-optic phase shifter,achieving good performance in all aspects is challenging due to trade-ofs among these aspects.In this work,we propose and demonstrate two types of energy-efcient optical phase shifters that overcome these trade-ofs and achieve a well-balanced performance in all aspects.Additionally,the proposed round-spiral phase shifter is robust in fabrication and fully compatible with deep ultraviolet(DUV)processes,making it an ideal building block for large-scale photonic integrated circuits(PICs).Using the high-performance phase shifter,we propose a periodic OPA with low power consumption,whose maximum electric power consumption within the feld of view is only 0.33 W.Moreover,we designed Gaussian power distribution in both the azimuthal(ψ)and polar(θ)directions and experimentally achieved a large sidelobe suppression ratio of 15.1 and 25 dB,respectively.
文摘We review recent work on broadband RF channelizers based on integrated optical frequency Kerr micro-combs combined with passive micro-ring resonator filters,with microcombs having channel spacings of 200 and 49 GHz.This approach to realizing RF channelizers offers reduced complexity,size,and potential cost for a wide range of applications to microwave signal detection.
基金supported by the National Natural Science Foundation of China(NSFC)(No.62135009)the Beijing Municipal Science&Technology Commission,Administrative Commission of Zhongguancun Science Park(No.Z221100005322010)。
文摘Integrated diffractive optical neural networks(DONNs)have significant potential for complex machine learning tasks with high speed and ultralow energy consumption.However,the on-chip implementation of a high-performance optical neural network is limited by input dimensions.In contrast to existing photonic neural networks,a space-time interleaving technology based on arrayed waveguides is designed to realize an on-chip DONN with high-speed,high-dimensional,and all-optical input signal modulation.To demonstrate the performance of the on-chip DONN with high-speed space-time interleaving modulation,an on-chip DONN with a designed footprint of 0.0945 mm~2is proposed to resolve the vowel recognition task,reaching a computation speed of about 1.4×10^(13)operations per second and yielding an accuracy of 98.3%in numerical calculation.In addition,the function of the specially designed arrayed waveguides for realizing parallel signal inputs using space-time conversion has been verified experimentally.This method can realize the on-chip DONN with higher input dimension and lower energy consumption.
基金supported by the National Natural Science Foundation of China(Nos.62105167,62075188,and 61974078)the Natural Science Foundation of Zhejiang Province(Nos.LQ22F050008 and LY21F050007)+1 种基金the Natural Science Foundation of Ningbo(Nos.2021J074 and 2021J059)the Key Research and Development Program of Jiangsu Province(No.BE2021082)。
文摘Mode splitters that directly separate modes without changing their orders are highly promising to improve the flexibility of the mode-division multiplexing systems.In this paper,we design a high-performance mode splitter on the silicon-oninsulator platform with a compact footprint of 14μm×2.5μm using an inverse design method based on shape optimization.The fabrication of this mode splitter requires only a single lithography step and exhibits good fabrication tolerances.The experimental results show that the proposed device exhibits state-of-the-art insertion loss(<0.9 dB)and cross talk(<-16 dB)over a broad bandwidth(1500-1600 nm).Furthermore,the shape optimization method used is implemented to design a dual-mode(de)multiplexer,and the experimental results fulfill the design objective,demonstrating the excellent generality of the design method in this paper.
基金supported by the National Natural Science Foundation of China(Nos.62275134,62234008,61875098,and 61874078)the Zhejiang Provincial Natural Science Foundation(Nos.LY20F050003 and LY20F050001)+2 种基金the Natural Science Foundation of Ningbo(Nos.2022J099 and 202003N4159)the Youth Science and Technology Innovation Leading Talent Project of Ningbo(No.2023QL003)the K.C.Wong Magna Fund at Ningbo University。
文摘A flexible-grid 1×(2×3)mode-and wavelength-selective switch which comprises counter-tapered couplers and silicon microring resonators has been proposed,optimized,and demonstrated experimentally in this work.By carefully thermally tuning phase shifters and silicon microring resonators,mode and wavelength signals can be independently and flexibly conveyed to any one of the output ports,and different bandwidths can be generated as desired.The particle swarm optimization algorithm and finite difference time-domain method are employed to optimize structural parameters of the twomode(de)multiplexer and crossing waveguide.The bandwidth-tunable wavelength-selective optical router composed of12 microring resonators is studied by taking advantage of the transfer matrix method.Measurement results show that,for the fabricated module,cross talk less than-10.18 dB,an extinction ratio larger than 17.41 d B,an in-band ripple lower than0.79 dB,and a 3-dB bandwidth changing from 0.38 to 1.05 nm are obtained,as the wavelength-channel spacing is 0.40 nm.The corresponding response time is measured to be 13.64μs.
基金supported in part by the National Key Research and Development Project of China(No.2018YFB2201901)in part by the National Natural Science Foundation of China(Grant No.61805090).
文摘Applications of optical switches,such as signal routing and data-intensive computing,are critical in optical interconnects and optical computing.Integrated optical switches enabled by two-dimensional(2D)materials and beyond,such as graphene and black phosphorus,have demonstrated many advantages in terms of speed and energy consumption compared to their conventional silicon-based counterparts.Here we review the state-of-the-art of optical switches enabled by 2D materials and beyond and organize them into several tables.The performance tables and future projections show the frontiers of optical switches fabricated from 2D materials and beyond,providing researchers with an overview of this field and enabling them to identify existing challenges and predict promising research directions.
文摘This study proposes a novel interferometric fiber optic gyroscope(IFOG)based on an integrated optical chip,application-specific integrated circuit,and small-diameter sensing coil.The overall size and weight of the prototype are 30 mm × 30 mm ×30 mm and 68 g,respectively,making it the smallest closed-loop IFOG,to the best of our knowledge.A static experiment shows that the bias stability of the integrated IFOG is very close to the theoretical accuracy limit determined by the fiber coil and can satisfy the requirements of near-navigation-grade compact inertial navigation systems.
基金the authors’group were funded by Office of Naval Research(N000141712409)Division of Emerging Frontiers in Research and Innovation(1741694)the Defense Advanced Research Project Agency(DARPA)DODOS project,Grant No.HR0011-15-C-0057.
文摘Photonics on thin-film lithium niobate(TFLN)has emerged as one of the most pursued disciplines within integrated optics.Ultracompact and low-loss optical waveguides and related devices on this modern material platform have rejuvenated the traditional and commercial applications of lithium niobate for optical modulators based on the electro-optic effect,as well as optical wavelength converters based on secondorder nonlinear effects,e.g.,second-harmonic,sum-,and difference-frequency generations.TFLN has also created vast opportunities for applications and integrated solutions for optical parametric amplification and oscillation,cascaded nonlinear effects,such as low-harmonic generation;third-order nonlinear effects,such as supercontinuum generation;optical frequency comb generation and stabilization;and nonclassical nonlinear effects,such as spontaneous parametric downconversion for quantum optics.Recent progress in nonlinear integrated photonics on TFLN for all these applications,their current trends,and future opportunities and challenges are reviewed.
