Currently,the increasing demands for portable,implantable,and wearable electronics have triggered the interest in miniaturized energy storage devices.Different from conventional energy storage devices,interdigital mic...Currently,the increasing demands for portable,implantable,and wearable electronics have triggered the interest in miniaturized energy storage devices.Different from conventional energy storage devices,interdigital microbatteries(IMBs) are free of separators and prepared on a single substrate,potentially achieving a short ionic diffusion path and better performance.Meanwhile,they can be easily fabricated and integrated into on-chip miniaturized electronics,holding the promise to provide long-lasting power for advanced microelectronic devices.To date,while many seminal works have been reviewed the topic of microbatteries,there is no work that systematically summarizes the development of IMBs of high energy density and stable voltage platforms from fabrication,functionalization to integration.The current review focuses on the most recent progress in IMBs,discussing advanced micromachining techniques with compatible features to construct high-performance IMBs with smart functions and intelligent integrated systems.The future opportunities and challenges of IMBs are also highlighted,calling for more efforts in this dynamic and fast-growing research field.展开更多
Rechargeable microbatteries are important power supplies for microelectronic devices.Two essential targets for rechargeable microbatteries are high output energy and minimal footprint areas.In addition to the developm...Rechargeable microbatteries are important power supplies for microelectronic devices.Two essential targets for rechargeable microbatteries are high output energy and minimal footprint areas.In addition to the development of new high-performance electrode materials,the device configurations of microbatteries also play an important role in enhancing the output energy and miniaturizing the footprint area.To make a clear vision on the design principle of rechargeable microbatteries,we firstly summarize the typical configurations of microbatteries.The advantages of different configurations are thoroughly discussed from the aspects of fabrication technologies and material engineering.Towards the high energy output at a minimal footprint area,a revolutionary design for microbatteries is of great importance.In this perspective,we review the progress of fabricating microbatteries based on the rolled-up nanotechnology,a derivative origami technology.Finally,we discussed the challenges and perspectives in the device design and materials optimization.展开更多
The recent boom in flexible and wearable electronics requires their powersources not only to be adequately compact but also could undergo extremedeformation without significant degradation in performance. Here, flexib...The recent boom in flexible and wearable electronics requires their powersources not only to be adequately compact but also could undergo extremedeformation without significant degradation in performance. Here, flexibleand tailorable quasi‐solid‐state microsized Ag/Zn batteries (micro‐AZBs)were designed by combining mask‐assisted spray printing and electrochemicaldeposition strategies. The micro‐AZBs display ultrastable outputvoltage, excellent energy, and power densities, as well as stable cycling performance.Furthermore, the micro‐AZBs with desired shapes can be designedin series or in parallel on a flexible chip to output improved voltage or currentwith the internal connection. More importantly, the microelectrodes could besprayed on various substrates. Flexible micro‐AZBs could be achieved onflexible substrates and tailorable micro‐AZBs are obtained when they arefabricated on clothes. They exhibit stable electrochemical performance evenunder bending or cutting states. The novel design of such quasi‐solid‐statemicro‐AZBs would pave a way for the miniaturization and integration ofenergy storage devices.展开更多
Aqueous multivalent-metal-ion intercalation chemistries hold genuine promise to develop safe and powerful microbatteries for potential use in many miniaturized electronics.However,their development is beset by state-o...Aqueous multivalent-metal-ion intercalation chemistries hold genuine promise to develop safe and powerful microbatteries for potential use in many miniaturized electronics.However,their development is beset by state-of-the-art electrode materials having practical capacities far below their theoretical values.Here we demonstrate that high compatibility between layered transition-metal oxide hosts and hydrated cation guests substantially boost their multi-electron-redox reactions to offer higher capacities and rate capability,based on typical bipolar vanadium oxides preintercalated with hydrated cations(M_(x)V_(2)O_(5)).When seamlessly integrated on Au current microcollectors with a three-dimensional bicontinuous nanoporous architecture that offers high pathways of electron transfer and ion transport,the constituent Zn_(x)V_(2)O_(5) exhibits specific capacity of as high as∼527 mAh g^(−1) at 5 mV s^(−1) and retains∼300 mAh g^(−1) at 200 mV s^(−1) in 1 M ZnSO_(4) aqueous electrolyte,outperforming the M_(x)V_(2)O_(5)(M=Li,Na,K,Mg).This allows aqueous rechargeable zinc-ion microbatteries constructed with symmetric nanoporous Zn_(x)V_(2)O_(5)/Au interdigital microelectrodes as anode and cathode to show high-density energy of∼358 mWh cm^(−3)(a value that is forty-fold higher than that of 4 V/500μAh Li thin film battery)at high levels of power delivery.展开更多
The rapid progress of micro/nanoelectronic systems and miniaturized portable devices has tremendously increased the urgent demands for miniaturized and integrated power supplies.Miniaturized energy storage devices(MES...The rapid progress of micro/nanoelectronic systems and miniaturized portable devices has tremendously increased the urgent demands for miniaturized and integrated power supplies.Miniaturized energy storage devices(MESDs),with their excellent properties and additional intelligent functions,are considered to be the preferable energy supplies for uninterrupted powering of microsystems.In this review,we aim to provide a comprehensive overview of the background,fundamentals,device configurations,manufacturing processes,and typical applications of MESDs,including their recent advances.Particular attention is paid to advanced device configurations,such as two-dimensional(2D)stacked,2D planar interdigital,2D arbitrary-shaped,three-dimensional planar,and wire-shaped structures,and their corresponding manufacturing strategies,such as printing,scribing,and masking techniques.Additionally,recent developments in MESDs,including microbatteries and microsupercapacitors,as well as microhybrid metal ion capacitors,are systematically summarized.A series of on-chip microsystems,created by integrating functional MESDs,are also highlighted.Finally,the remaining challenges and future research scope on MESDs are discussed.展开更多
A betavoltaic Microbattery was studied.The diode was composed of a PIN structure with an active area of 10 mm×10 mm to collect the charge from a 10mCi Ni-63 source.An open circuit voltage of 0.16 V and a short ci...A betavoltaic Microbattery was studied.The diode was composed of a PIN structure with an active area of 10 mm×10 mm to collect the charge from a 10mCi Ni-63 source.An open circuit voltage of 0.16 V and a short circuit current density of 67.6 nA/cm2 were measured.An efficiency (η) of 1.44% was obtained.The performance of device was limited by high series resistance,edge recombination and attenuation of electron in PIN diodes.It is expected to be improved by optimizing the design and using more suitable radioisotope.展开更多
基金financial support from the National Natural Science Foundation of China(NSFC)(22109009)the China Postdoctoral Science Foundation(2020M680376)+2 种基金the National Key R&D Program of China(2017YFB1104300)the NSFC(21975027,22035005,52073159)the NSFC-STINT(21911530143)。
文摘Currently,the increasing demands for portable,implantable,and wearable electronics have triggered the interest in miniaturized energy storage devices.Different from conventional energy storage devices,interdigital microbatteries(IMBs) are free of separators and prepared on a single substrate,potentially achieving a short ionic diffusion path and better performance.Meanwhile,they can be easily fabricated and integrated into on-chip miniaturized electronics,holding the promise to provide long-lasting power for advanced microelectronic devices.To date,while many seminal works have been reviewed the topic of microbatteries,there is no work that systematically summarizes the development of IMBs of high energy density and stable voltage platforms from fabrication,functionalization to integration.The current review focuses on the most recent progress in IMBs,discussing advanced micromachining techniques with compatible features to construct high-performance IMBs with smart functions and intelligent integrated systems.The future opportunities and challenges of IMBs are also highlighted,calling for more efforts in this dynamic and fast-growing research field.
基金the support and funding from China Scholarship Council(CSC)financial support by the Leibniz Program of the German Research Foundation(SCHM 1298/26-1)。
文摘Rechargeable microbatteries are important power supplies for microelectronic devices.Two essential targets for rechargeable microbatteries are high output energy and minimal footprint areas.In addition to the development of new high-performance electrode materials,the device configurations of microbatteries also play an important role in enhancing the output energy and miniaturizing the footprint area.To make a clear vision on the design principle of rechargeable microbatteries,we firstly summarize the typical configurations of microbatteries.The advantages of different configurations are thoroughly discussed from the aspects of fabrication technologies and material engineering.Towards the high energy output at a minimal footprint area,a revolutionary design for microbatteries is of great importance.In this perspective,we review the progress of fabricating microbatteries based on the rolled-up nanotechnology,a derivative origami technology.Finally,we discussed the challenges and perspectives in the device design and materials optimization.
基金This study was supported by National Key R&D Programof China(Grant No.2017YFA0206701)National Natural Science Foundation of China(Grant No.51822205 and 21875121)+2 种基金China Postdoctoral Science Foundation(Grant No.2019M650045)Ministry of Education of China(Grant No.B12015)Natural Science Foundation of Tianjin(Grant No.18JCJQJC46300).
文摘The recent boom in flexible and wearable electronics requires their powersources not only to be adequately compact but also could undergo extremedeformation without significant degradation in performance. Here, flexibleand tailorable quasi‐solid‐state microsized Ag/Zn batteries (micro‐AZBs)were designed by combining mask‐assisted spray printing and electrochemicaldeposition strategies. The micro‐AZBs display ultrastable outputvoltage, excellent energy, and power densities, as well as stable cycling performance.Furthermore, the micro‐AZBs with desired shapes can be designedin series or in parallel on a flexible chip to output improved voltage or currentwith the internal connection. More importantly, the microelectrodes could besprayed on various substrates. Flexible micro‐AZBs could be achieved onflexible substrates and tailorable micro‐AZBs are obtained when they arefabricated on clothes. They exhibit stable electrochemical performance evenunder bending or cutting states. The novel design of such quasi‐solid‐statemicro‐AZBs would pave a way for the miniaturization and integration ofenergy storage devices.
基金supported by the National Natural Science Foundation of China (Nos. 51871107, 52130101, 51631004)Top-notch Young Talent Program of China (W02070051)+2 种基金Chang Jiang Scholar Program of China (Q2016064)the Program for JLU Science and Technology Innovative Research Team (JLUSTIRT, 2017TD-09)the Fundamental Research Funds for the Central Universities, the Program for Innovative Research Team (in Science and Technology) in University of Jilin Province。
文摘Aqueous multivalent-metal-ion intercalation chemistries hold genuine promise to develop safe and powerful microbatteries for potential use in many miniaturized electronics.However,their development is beset by state-of-the-art electrode materials having practical capacities far below their theoretical values.Here we demonstrate that high compatibility between layered transition-metal oxide hosts and hydrated cation guests substantially boost their multi-electron-redox reactions to offer higher capacities and rate capability,based on typical bipolar vanadium oxides preintercalated with hydrated cations(M_(x)V_(2)O_(5)).When seamlessly integrated on Au current microcollectors with a three-dimensional bicontinuous nanoporous architecture that offers high pathways of electron transfer and ion transport,the constituent Zn_(x)V_(2)O_(5) exhibits specific capacity of as high as∼527 mAh g^(−1) at 5 mV s^(−1) and retains∼300 mAh g^(−1) at 200 mV s^(−1) in 1 M ZnSO_(4) aqueous electrolyte,outperforming the M_(x)V_(2)O_(5)(M=Li,Na,K,Mg).This allows aqueous rechargeable zinc-ion microbatteries constructed with symmetric nanoporous Zn_(x)V_(2)O_(5)/Au interdigital microelectrodes as anode and cathode to show high-density energy of∼358 mWh cm^(−3)(a value that is forty-fold higher than that of 4 V/500μAh Li thin film battery)at high levels of power delivery.
基金This work was supported by the National Natural Science Foundation of China （No. 51102134）, the Natural Science Foundation of Jiangsu Province （No. BK20131349）, the China Postdoctoral Science Foundation （No. 2013M530258）, and the Jiangsu Planned Projects for Postdoctoral Research Funds （No. 1202001B）.
基金the financial support from the National Natural Science Foundation of China(Grant Nos.51702095,51722503,51975204)Natural Science Foundation of Hunan Province,China(Grant No.2018JJ3041)+1 种基金the Fundamental Research Funds for the Central Universities(531118010016)Science and Technology Bureau Foundation of Changsha City(kh1904005)。
文摘The rapid progress of micro/nanoelectronic systems and miniaturized portable devices has tremendously increased the urgent demands for miniaturized and integrated power supplies.Miniaturized energy storage devices(MESDs),with their excellent properties and additional intelligent functions,are considered to be the preferable energy supplies for uninterrupted powering of microsystems.In this review,we aim to provide a comprehensive overview of the background,fundamentals,device configurations,manufacturing processes,and typical applications of MESDs,including their recent advances.Particular attention is paid to advanced device configurations,such as two-dimensional(2D)stacked,2D planar interdigital,2D arbitrary-shaped,three-dimensional planar,and wire-shaped structures,and their corresponding manufacturing strategies,such as printing,scribing,and masking techniques.Additionally,recent developments in MESDs,including microbatteries and microsupercapacitors,as well as microhybrid metal ion capacitors,are systematically summarized.A series of on-chip microsystems,created by integrating functional MESDs,are also highlighted.Finally,the remaining challenges and future research scope on MESDs are discussed.
基金National High Technology Research and Development Programme of China(2006AA04Z338)Cultivation Fund of the Key Scientific and Technical Innovation Project of Ministry of Education of China(706055)
基金Sponsored by the National High Technology Research and Development Program of China (863 Program,Grant No.2009AA04Z318)
文摘A betavoltaic Microbattery was studied.The diode was composed of a PIN structure with an active area of 10 mm×10 mm to collect the charge from a 10mCi Ni-63 source.An open circuit voltage of 0.16 V and a short circuit current density of 67.6 nA/cm2 were measured.An efficiency (η) of 1.44% was obtained.The performance of device was limited by high series resistance,edge recombination and attenuation of electron in PIN diodes.It is expected to be improved by optimizing the design and using more suitable radioisotope.
