Ascientific research institute that was formerly supported financially by the state under the past organizational system has now become a holding company. Its stocks are available on the market and have broken from th...Ascientific research institute that was formerly supported financially by the state under the past organizational system has now become a holding company. Its stocks are available on the market and have broken from the conventional planning economic mode and developed into a famous leading economic entity that integrates trade with scientific research and industry. It is regarded as a strong successor in展开更多
The world New Fiber Materials Forum & the 23rd China International Man-made Fiber Conference Xiaoshan 2017)China is faced with external and internal development pressures,where the world economy is gestating depth...The world New Fiber Materials Forum & the 23rd China International Man-made Fiber Conference Xiaoshan 2017)China is faced with external and internal development pressures,where the world economy is gestating depth adjustment to accelerate the upgrade of manufacturing industry,while China's economy has entered the new normal to promote the supply-side structural reform.So,as an important raw material in the various fields of textile展开更多
Prof.Ye Hengqiang is a pioneer in China,probing the atomic imagery of solids.He has been engaged in this field for more than a decade and attained a series of important results. His work advances the theory and relate...Prof.Ye Hengqiang is a pioneer in China,probing the atomic imagery of solids.He has been engaged in this field for more than a decade and attained a series of important results. His work advances the theory and related techniques when he explores the fine structures of materials on the atomic scale,contributing much to the development of new materials with the aid of electron metalloscopy. In 1963, Ye graduated from the Beijing College of Iron & Steel and was admitted as a post-graduate to the tutelage of Prof.Guo Kexin,a renowned Chinese metal-展开更多
The concept of the combinatorial discovery and optimization of new materials, and its background,importance, and application, as well as its current status in the world, are briefly reviewed in this paper.
Shanghai Genius New Materials R&D Inc. is a business entity aimed at the development of the Chinese industry specializing in plastic manufacture. The firm is exclusively engaged in research, development and indust...Shanghai Genius New Materials R&D Inc. is a business entity aimed at the development of the Chinese industry specializing in plastic manufacture. The firm is exclusively engaged in research, development and industrialization of engineering plastics and plastics-made products. During recent years, it has won scores of honorary titles and prizes granted by the national and municipal administrations. By reliance on S&T development, the company makes its way into the market and establishes rewarding ties with many influential clients and business partners by taking advantage of its powerful technical strength and flawless reputation with the public. During succeeding years of the past, it was honoured as a pace-setter among hi-tech undertakings in the Shanghai Municipality. Now, it has grown into one of the brand-new and modernized enterprises with a business group beginning to take shape under its sponsorship. The company has undertaken a dozen State-sponsored and municipal R&D projects and succeeded in展开更多
Zhongjin Lingnan’s main business is mining,smelting and sales of non-ferrous metals such as lead,zinc,copper and silver.In its nonpublic offering scheme released earlier,a total of about 658 million yuan,including 46...Zhongjin Lingnan’s main business is mining,smelting and sales of non-ferrous metals such as lead,zinc,copper and silver.In its nonpublic offering scheme released earlier,a total of about 658 million yuan,including 460million yuan of raised funds will be invested in a new materials project.The construction projects include a high-performance展开更多
Economic Information Daily recently learnt from the Ministry of Industry and Information Technology(MIIT)that in order to further promote the new materials industry in China,it will,from this year on,formulate and int...Economic Information Daily recently learnt from the Ministry of Industry and Information Technology(MIIT)that in order to further promote the new materials industry in China,it will,from this year on,formulate and introduce a series of industrial promotion policies and measures,including preparing展开更多
The use of solar energy to drive the chemical and energy processes,and the chemical storage of solar energy are the key elements to move to a low-carbon economy,sustainable society and to foster energy transition.For ...The use of solar energy to drive the chemical and energy processes,and the chemical storage of solar energy are the key elements to move to a low-carbon economy,sustainable society and to foster energy transition.For this reason,there is a fast-growing scientific interest on this subject,which is part of the general effort for a solar-driven chemistry and energy,the chemistry of the future.To realize展开更多
With the continuous demand of material performance,the development of materials is rapid,and the professional curriculum teaching of“new inorganic materials”as well as its teaching methods related to the internet ma...With the continuous demand of material performance,the development of materials is rapid,and the professional curriculum teaching of“new inorganic materials”as well as its teaching methods related to the internet mandate a reform,in order to meet the needs of innovative high-quality personnel training.The update and optimization of the teaching content and methods assisted by the internet meet the needs of modern teaching and research work.More than 90%of students believe that internet teaching is conducive to the understanding of classroom knowledge and the development of innovative projects.展开更多
Energy is the key to our future.Whether to the production,storage or use of energy,carbon materials could provide a good solution.They are closely related to people’s daily life and regarded as one of the most promis...Energy is the key to our future.Whether to the production,storage or use of energy,carbon materials could provide a good solution.They are closely related to people’s daily life and regarded as one of the most promising candidates for the flexible electrodes in energy storage devices.Recently,a research team from the Qingdao Institute of Bioenergy and Bioprocess Technology,Chinese Academy of Sciences prepared a展开更多
At present,the academic researches on the issue of“pre-war deposits”in the banking industry mainly focus on the problems of inflation during the war and after the war,the business operation of the banking industry d...At present,the academic researches on the issue of“pre-war deposits”in the banking industry mainly focus on the problems of inflation during the war and after the war,the business operation of the banking industry during the war,the demobilization,reorganization,and currency reform of the banking industry after the war,and so on.The direct related researches are few and focus on the disputes between depositors and banks.Although some archival materials and newspaper materials have been excavated,various kinds of historical materials still need to be further excavated.Research methods need to further strengthen interdisciplinary and integration.Therefore,to deepen the study of“pre-war deposit”,it is necessary to continuously explore and utilize new historical materials,expand research fields,expand research horizons,and pay attention to the use of multi-scientific theories and methods.展开更多
Platinum group metals (PGM) include six elements, namely Pt, Pd, Rh, Ir, Os and Ru. PGM and their alloys are the important fundamental materials for modern industry and national defense construction, they have special...Platinum group metals (PGM) include six elements, namely Pt, Pd, Rh, Ir, Os and Ru. PGM and their alloys are the important fundamental materials for modern industry and national defense construction, they have special physical and chemical properties, widely used in metallurgy, chemical, electric, electronic, information, energy, environmental protection, aviation, aerospace, navigation and other high technology industry. Platinum group metals and their alloys, which have good plasticity and processability, can be processed to electrical contact materials, resistance materials, solder, electronic paste, temperature-measurement materials, elastic materials, magnetic materials and high temperature structural materials.展开更多
Using the nickel welding wire, the effect of alloying elements on the chilling tendency of partial fusion zone (PFZ) of arc-welded ferritic ductile iron and the mechanical properties of weld metal have been systematic...Using the nickel welding wire, the effect of alloying elements on the chilling tendency of partial fusion zone (PFZ) of arc-welded ferritic ductile iron and the mechanical properties of weld metal have been systematically studied. On this basis a new nickel electrode for arc welding of ferritic ductile iron (QT400-17) is developed for the first time. The mechanical properties of its weld metal can match those of ferritic ductile iron. The width of carbide layer (WCL) in PFZ is significantly decreased, the welded joint has excellent machinability and the weid metal has high hot cracking展开更多
Stem cell therapies are successfully used in various fields of medicine.This new approach of research is also expanding in ophthalmology.Huge investments,resources and important clinical trials have been performed in ...Stem cell therapies are successfully used in various fields of medicine.This new approach of research is also expanding in ophthalmology.Huge investments,resources and important clinical trials have been performed in stem cell research and in potential therapies.In recent years,great strides have been made in genetic research,which permitted and enhanced the differentiation of stem cells.Moreover,the possibility of exploiting stem cells from other districts(such as adipose,dental pulp,bone marrow stem cells,etc.)for the treatment of ophthalmic diseases,renders this topic fascinating.Furthermore,great strides have been made in biomedical engineering,which have proposed new materials and threedimensional structures useful for cell therapy of the eye.The encouraging results obtained on clinical trials conducted on animals have given a significant boost in the creation of study protocols also in humans.Results are limited to date,but clinical trials continue to evolve.Our attention is centered on the literature reported over the past 20 years,considering animal(the most represented in literature)and human clinical trials,which are limiting.The aim of our review is to present a brief overview of the main types of treatments based on stem cells in the field of ophthalmic pathologies.展开更多
Quantum chemical calculations were performed to investigate the structural and electronic properties of seven endofullerenes. The interaction energies indicated that all of the chemical species are stable inside the f...Quantum chemical calculations were performed to investigate the structural and electronic properties of seven endofullerenes. The interaction energies indicated that all of the chemical species are stable inside the fullerene for each complex. The ionization potential and electron affinity values suggest that the endofullerenes consisting of alkaline earth ions are the most reactive and that the dipole moment decreased according to the following order: Be2+@C60 (4.75) > Mg2+@C60 (3.14) > Ca2+@C60 (2.24) > Li+@C60 (1.26) > Na+@C60 (0.76) > H2O@C60 (0.24) > K+@C60 (0.00 Debye). These results imply that the solubility of endofullerenes in a polar solvent may increase from H2O@C60 to Be2+@C60. The energetic gaps indicate that Be2+@C60 and Mg2+@C60 possess a higher electrical conductivity, and the UV spectra show a shift in the bands to the visible light region. The results of this work may be useful for the development of new endofullerenes.展开更多
Additive manufacturing(AM),interchangeably termed as3D printing(3DP),has been defined as one of the key technologies in the national development strategies of a number of countries around the world.America Makes,as th...Additive manufacturing(AM),interchangeably termed as3D printing(3DP),has been defined as one of the key technologies in the national development strategies of a number of countries around the world.America Makes,as the National Additive Manufacturing Innovation Institute,is the nation’s leading and collaborative partner in AM/3DP technology research,discovery,creation,and innovation,working efficiently to innovate and accelerate AM/3DP to increase America’s global manufacturing competitiveness(https://americamakes.us).German展开更多
In deep underground mining,achieving stable support for roadways along with long service life is critical and the complex geological environment at such depths frequently presents a major challenge.Owing to the coupli...In deep underground mining,achieving stable support for roadways along with long service life is critical and the complex geological environment at such depths frequently presents a major challenge.Owing to the coupling action of multiple factors such as deep high stress,adjacent faults,cross-layer design,weak lithology,broken surrounding rock,variable cross-sections,wide sections up to 9.9 m,and clusters of nearby chambers,there was severe deformation and breakdown in the No.10 intersection of the roadway of large-scale variable cross-section at the−760 m level in a coal mine.As there are insufcient examples in engineering methods pertaining to the geological environment described above,the numerical calculation model was oversimplifed and support theory underdeveloped;therefore,it is imperative to develop an efective support system for the stability and sustenance of deep roadways.In this study,a quantitative analysis of the geological environment of the roadway through feld observations,borehole-scoping,and ground stress testing is carried out to establish the FLAC 3D variable cross-section crossing roadway model.This model is combined with the strain softening constitutive(surrounding rock)and Mohr–Coulomb constitutive(other deep rock formations)models to construct a compression arch mechanical model for deep soft rock,based on the quadratic parabolic Mohr criterion.An integrated control technology of bolting and grouting that is mainly composed of a high-strength hollow grouting cable bolt equipped with modifed cement grouting materials and a high-elongation cable bolt is developed by analyzing the strengthening properties of the surrounding rock before and after bolting,based on the Heok-Brown criterion.As a result of on-site practice,the following conclusions are drawn:(1)The plastic zone of the roof of the cross roadway is approximately 6 m deep in this environment,the tectonic stress is nearly 30 MPa,and the surrounding rock is severely fractured.(2)The deformation of the roadway progressively increases from small to large cross-sections,almost doubling at the largest cross-section.The plastic zone is concentrated at the top plate and shoulder and decreases progressively from the two sides to the bottom corner.The range of stress concentration at the sides of the intersection roadway close to the passageway is wider and higher.(3)The 7 m-thick reinforced compression arch constructed under the strengthening support scheme has a bearing capacity enhanced by 1.8 to 2.3 times and increase in thickness of the bearing structure by 1.76 times as compared to the original scheme.(4)The increase in the mechanical parameters c andφof the surrounding rock after anchoring causes a signifcant increase inσt;the pulling force of the cable bolt beneath the new grouting material is more than twice that of ordinary cement grout,and according to the test,the supporting stress feld shows that the 7.24 m surrounding rock is compacted and strengthened in addition to providing a strong foundation for the bolt(cable).On-site monitoring shows that the 60-days convergence is less than 30 mm,indicating that the stability control of the roadway is successful.展开更多
Compared to the conventional phase change materials,the new phase change material Ta-Sb2Te3 has the advantages of excellent data retention and good material stability.In this letter,the etching characteristics of Ta-S...Compared to the conventional phase change materials,the new phase change material Ta-Sb2Te3 has the advantages of excellent data retention and good material stability.In this letter,the etching characteristics of Ta-Sb2Te3 were studied by using CF4/Ar.The results showed that when CF4/Ar=25/25,the etching power was 600 W and the etching pressure was 2.5 Pa,the etching speed was up to 61 nm/min.The etching pattern of Ta-Sb2Te3 film had a smooth side wall and good perpendicularity(close to 90°),smooth surface of the etching(RMS was 0.51nm),and the etching uniformity was fine.Furthermore,the mechanism of this etching process was analyzed by X-ray photoelectron spectroscopy(XPS).The main damage mechanism of ICP etching in CF4/Ar was studied by X-ray diffraction(XRD).展开更多
文摘Ascientific research institute that was formerly supported financially by the state under the past organizational system has now become a holding company. Its stocks are available on the market and have broken from the conventional planning economic mode and developed into a famous leading economic entity that integrates trade with scientific research and industry. It is regarded as a strong successor in
文摘The world New Fiber Materials Forum & the 23rd China International Man-made Fiber Conference Xiaoshan 2017)China is faced with external and internal development pressures,where the world economy is gestating depth adjustment to accelerate the upgrade of manufacturing industry,while China's economy has entered the new normal to promote the supply-side structural reform.So,as an important raw material in the various fields of textile
文摘Prof.Ye Hengqiang is a pioneer in China,probing the atomic imagery of solids.He has been engaged in this field for more than a decade and attained a series of important results. His work advances the theory and related techniques when he explores the fine structures of materials on the atomic scale,contributing much to the development of new materials with the aid of electron metalloscopy. In 1963, Ye graduated from the Beijing College of Iron & Steel and was admitted as a post-graduate to the tutelage of Prof.Guo Kexin,a renowned Chinese metal-
文摘The concept of the combinatorial discovery and optimization of new materials, and its background,importance, and application, as well as its current status in the world, are briefly reviewed in this paper.
文摘Shanghai Genius New Materials R&D Inc. is a business entity aimed at the development of the Chinese industry specializing in plastic manufacture. The firm is exclusively engaged in research, development and industrialization of engineering plastics and plastics-made products. During recent years, it has won scores of honorary titles and prizes granted by the national and municipal administrations. By reliance on S&T development, the company makes its way into the market and establishes rewarding ties with many influential clients and business partners by taking advantage of its powerful technical strength and flawless reputation with the public. During succeeding years of the past, it was honoured as a pace-setter among hi-tech undertakings in the Shanghai Municipality. Now, it has grown into one of the brand-new and modernized enterprises with a business group beginning to take shape under its sponsorship. The company has undertaken a dozen State-sponsored and municipal R&D projects and succeeded in
文摘Zhongjin Lingnan’s main business is mining,smelting and sales of non-ferrous metals such as lead,zinc,copper and silver.In its nonpublic offering scheme released earlier,a total of about 658 million yuan,including 460million yuan of raised funds will be invested in a new materials project.The construction projects include a high-performance
文摘Economic Information Daily recently learnt from the Ministry of Industry and Information Technology(MIIT)that in order to further promote the new materials industry in China,it will,from this year on,formulate and introduce a series of industrial promotion policies and measures,including preparing
文摘The use of solar energy to drive the chemical and energy processes,and the chemical storage of solar energy are the key elements to move to a low-carbon economy,sustainable society and to foster energy transition.For this reason,there is a fast-growing scientific interest on this subject,which is part of the general effort for a solar-driven chemistry and energy,the chemistry of the future.To realize
基金the National Natural Science Foundations of China(Grant Number:51772247).
文摘With the continuous demand of material performance,the development of materials is rapid,and the professional curriculum teaching of“new inorganic materials”as well as its teaching methods related to the internet mandate a reform,in order to meet the needs of innovative high-quality personnel training.The update and optimization of the teaching content and methods assisted by the internet meet the needs of modern teaching and research work.More than 90%of students believe that internet teaching is conducive to the understanding of classroom knowledge and the development of innovative projects.
基金supported by the Chinese Academy of Sciencesthe Natural Science Foundation of Shandong Provincethe National Natural Science Foundation of China
文摘Energy is the key to our future.Whether to the production,storage or use of energy,carbon materials could provide a good solution.They are closely related to people’s daily life and regarded as one of the most promising candidates for the flexible electrodes in energy storage devices.Recently,a research team from the Qingdao Institute of Bioenergy and Bioprocess Technology,Chinese Academy of Sciences prepared a
基金This paper is a phased achievement of Chongqing Social Science Planning project“Research on the repayment of Pre-war Deposits in Chongqing Banking Industry after the victory of the Anti-Japanese War”(No.2020BS11).
文摘At present,the academic researches on the issue of“pre-war deposits”in the banking industry mainly focus on the problems of inflation during the war and after the war,the business operation of the banking industry during the war,the demobilization,reorganization,and currency reform of the banking industry after the war,and so on.The direct related researches are few and focus on the disputes between depositors and banks.Although some archival materials and newspaper materials have been excavated,various kinds of historical materials still need to be further excavated.Research methods need to further strengthen interdisciplinary and integration.Therefore,to deepen the study of“pre-war deposit”,it is necessary to continuously explore and utilize new historical materials,expand research fields,expand research horizons,and pay attention to the use of multi-scientific theories and methods.
基金supported by the National Nature Science Foundation of China(No.u0837601)
文摘Platinum group metals (PGM) include six elements, namely Pt, Pd, Rh, Ir, Os and Ru. PGM and their alloys are the important fundamental materials for modern industry and national defense construction, they have special physical and chemical properties, widely used in metallurgy, chemical, electric, electronic, information, energy, environmental protection, aviation, aerospace, navigation and other high technology industry. Platinum group metals and their alloys, which have good plasticity and processability, can be processed to electrical contact materials, resistance materials, solder, electronic paste, temperature-measurement materials, elastic materials, magnetic materials and high temperature structural materials.
文摘Using the nickel welding wire, the effect of alloying elements on the chilling tendency of partial fusion zone (PFZ) of arc-welded ferritic ductile iron and the mechanical properties of weld metal have been systematically studied. On this basis a new nickel electrode for arc welding of ferritic ductile iron (QT400-17) is developed for the first time. The mechanical properties of its weld metal can match those of ferritic ductile iron. The width of carbide layer (WCL) in PFZ is significantly decreased, the welded joint has excellent machinability and the weid metal has high hot cracking
文摘Stem cell therapies are successfully used in various fields of medicine.This new approach of research is also expanding in ophthalmology.Huge investments,resources and important clinical trials have been performed in stem cell research and in potential therapies.In recent years,great strides have been made in genetic research,which permitted and enhanced the differentiation of stem cells.Moreover,the possibility of exploiting stem cells from other districts(such as adipose,dental pulp,bone marrow stem cells,etc.)for the treatment of ophthalmic diseases,renders this topic fascinating.Furthermore,great strides have been made in biomedical engineering,which have proposed new materials and threedimensional structures useful for cell therapy of the eye.The encouraging results obtained on clinical trials conducted on animals have given a significant boost in the creation of study protocols also in humans.Results are limited to date,but clinical trials continue to evolve.Our attention is centered on the literature reported over the past 20 years,considering animal(the most represented in literature)and human clinical trials,which are limiting.The aim of our review is to present a brief overview of the main types of treatments based on stem cells in the field of ophthalmic pathologies.
文摘Quantum chemical calculations were performed to investigate the structural and electronic properties of seven endofullerenes. The interaction energies indicated that all of the chemical species are stable inside the fullerene for each complex. The ionization potential and electron affinity values suggest that the endofullerenes consisting of alkaline earth ions are the most reactive and that the dipole moment decreased according to the following order: Be2+@C60 (4.75) > Mg2+@C60 (3.14) > Ca2+@C60 (2.24) > Li+@C60 (1.26) > Na+@C60 (0.76) > H2O@C60 (0.24) > K+@C60 (0.00 Debye). These results imply that the solubility of endofullerenes in a polar solvent may increase from H2O@C60 to Be2+@C60. The energetic gaps indicate that Be2+@C60 and Mg2+@C60 possess a higher electrical conductivity, and the UV spectra show a shift in the bands to the visible light region. The results of this work may be useful for the development of new endofullerenes.
基金supported by the National Natural Science Foundation of China (51575267 and 51322509)the National Key Research and Development Program ‘‘Additive Manufacturing and Laser Manufacturing’’ (2016YFB1100101)+5 种基金the Top-Notch Young Talents Program of China, the NSFC-DFG Sino-German Research Project (GZ 1217)the Key Research and Development Program of Jiangsu Provincial Department of Science and Technology of China (BE2016181)the 333 High-level Talents Training Project (BRA2015368), the Aeronautical Science Foundation of China (2015ZE52051)the Outstanding Youth Foundation of Jiangsu Province of China (BK20130035)the Program for New Century Excellent Talents in University (NCET-13-0854)the Fundamental Research Funds for the Central Universities (NE2013103, NP2015206 and NZ2016108)
文摘Additive manufacturing(AM),interchangeably termed as3D printing(3DP),has been defined as one of the key technologies in the national development strategies of a number of countries around the world.America Makes,as the National Additive Manufacturing Innovation Institute,is the nation’s leading and collaborative partner in AM/3DP technology research,discovery,creation,and innovation,working efficiently to innovate and accelerate AM/3DP to increase America’s global manufacturing competitiveness(https://americamakes.us).German
基金supported by the National Natural Science Foundation of China(Grant Nos.52074296,52004286)the China Postdoctoral Science Foundation(Grant Nos.2020T130701,2019M650895).
文摘In deep underground mining,achieving stable support for roadways along with long service life is critical and the complex geological environment at such depths frequently presents a major challenge.Owing to the coupling action of multiple factors such as deep high stress,adjacent faults,cross-layer design,weak lithology,broken surrounding rock,variable cross-sections,wide sections up to 9.9 m,and clusters of nearby chambers,there was severe deformation and breakdown in the No.10 intersection of the roadway of large-scale variable cross-section at the−760 m level in a coal mine.As there are insufcient examples in engineering methods pertaining to the geological environment described above,the numerical calculation model was oversimplifed and support theory underdeveloped;therefore,it is imperative to develop an efective support system for the stability and sustenance of deep roadways.In this study,a quantitative analysis of the geological environment of the roadway through feld observations,borehole-scoping,and ground stress testing is carried out to establish the FLAC 3D variable cross-section crossing roadway model.This model is combined with the strain softening constitutive(surrounding rock)and Mohr–Coulomb constitutive(other deep rock formations)models to construct a compression arch mechanical model for deep soft rock,based on the quadratic parabolic Mohr criterion.An integrated control technology of bolting and grouting that is mainly composed of a high-strength hollow grouting cable bolt equipped with modifed cement grouting materials and a high-elongation cable bolt is developed by analyzing the strengthening properties of the surrounding rock before and after bolting,based on the Heok-Brown criterion.As a result of on-site practice,the following conclusions are drawn:(1)The plastic zone of the roof of the cross roadway is approximately 6 m deep in this environment,the tectonic stress is nearly 30 MPa,and the surrounding rock is severely fractured.(2)The deformation of the roadway progressively increases from small to large cross-sections,almost doubling at the largest cross-section.The plastic zone is concentrated at the top plate and shoulder and decreases progressively from the two sides to the bottom corner.The range of stress concentration at the sides of the intersection roadway close to the passageway is wider and higher.(3)The 7 m-thick reinforced compression arch constructed under the strengthening support scheme has a bearing capacity enhanced by 1.8 to 2.3 times and increase in thickness of the bearing structure by 1.76 times as compared to the original scheme.(4)The increase in the mechanical parameters c andφof the surrounding rock after anchoring causes a signifcant increase inσt;the pulling force of the cable bolt beneath the new grouting material is more than twice that of ordinary cement grout,and according to the test,the supporting stress feld shows that the 7.24 m surrounding rock is compacted and strengthened in addition to providing a strong foundation for the bolt(cable).On-site monitoring shows that the 60-days convergence is less than 30 mm,indicating that the stability control of the roadway is successful.
基金This work was financially supported by the Natural Science Foundation of China(61874129)the National Key Research and Development Program of China(2017YFB0405601).
文摘Compared to the conventional phase change materials,the new phase change material Ta-Sb2Te3 has the advantages of excellent data retention and good material stability.In this letter,the etching characteristics of Ta-Sb2Te3 were studied by using CF4/Ar.The results showed that when CF4/Ar=25/25,the etching power was 600 W and the etching pressure was 2.5 Pa,the etching speed was up to 61 nm/min.The etching pattern of Ta-Sb2Te3 film had a smooth side wall and good perpendicularity(close to 90°),smooth surface of the etching(RMS was 0.51nm),and the etching uniformity was fine.Furthermore,the mechanism of this etching process was analyzed by X-ray photoelectron spectroscopy(XPS).The main damage mechanism of ICP etching in CF4/Ar was studied by X-ray diffraction(XRD).
