In order to achieve the accurate measurement of displacement, this Letter presents a self-mixing interference displacement measurement method suitable for the speckle effect. Because of the speckle effect, the amplitu...In order to achieve the accurate measurement of displacement, this Letter presents a self-mixing interference displacement measurement method suitable for the speckle effect. Because of the speckle effect, the amplitude of the self-mixing interference signal fluctuates greatly, which will affect the measurement accuracy of displacement. The ensemble empirical mode decomposition is used to process the interference signal, which can filter out high-frequency noise and low-frequency noise at the same time. The envelope of the self-mixing interference signal is extracted by Hilbert transform, and it is used to realize the normalization of the signal. Through a series of signal processing, the influence of speckle can be effectively reduced, and the self-mixing interference signal can be transformed into standard form. The displacement can be reconstructed by fringe counting and the interpolation method. The experimental results show that the method is successfully applied to the displacement measurement in the presence of speckle, which verifies the effectiveness and feasibility of the method.展开更多
ASeblsf-tmraicxti：n gA innteewrf esreelnf-cme ioxcincgu rms iicnr oa -liansteerrf derioodmee t（eLrD b）a sbeyd r eofnl eecxtitnergn tahl ep lhiagshet fmroomdu ala tmioinrr oisr-plirkees etanrtgedet. in front of the ...ASeblsf-tmraicxti：n gA innteewrf esreelnf-cme ioxcincgu rms iicnr oa -liansteerrf derioodmee t（eLrD b）a sbeyd r eofnl eecxtitnergn tahl ep lhiagshet fmroomdu ala tmioinrr oisr-plirkees etanrtgedet. in front of the laser. Sinusoidal phase modulation of the beam is obtained by an electro-optic crystal （EOC） in the external cavity. The phase of the interference signal is demodulated by Fourier analysis method. The combination of the modulation and demodulation decreases the sensitivity of the instru-ment to fluctuations of the laser power and the noise induced by environment. Experimentally, the new micro-interferometer is applied to measure the micro-displacement of a high precision commer-cial PZT with an accuracy of 〈10 nm.展开更多
基金the National Natural Science Foundation of China(No.61803281)the Natural Science Foundation of Tianjin(Nos.18JCQNJC75500 and 18JCQNJC71200)the Scientific Research Project of Tianjin Education Commission(Nos.2017KJ253 and 2018KJ136).
文摘In order to achieve the accurate measurement of displacement, this Letter presents a self-mixing interference displacement measurement method suitable for the speckle effect. Because of the speckle effect, the amplitude of the self-mixing interference signal fluctuates greatly, which will affect the measurement accuracy of displacement. The ensemble empirical mode decomposition is used to process the interference signal, which can filter out high-frequency noise and low-frequency noise at the same time. The envelope of the self-mixing interference signal is extracted by Hilbert transform, and it is used to realize the normalization of the signal. Through a series of signal processing, the influence of speckle can be effectively reduced, and the self-mixing interference signal can be transformed into standard form. The displacement can be reconstructed by fringe counting and the interpolation method. The experimental results show that the method is successfully applied to the displacement measurement in the presence of speckle, which verifies the effectiveness and feasibility of the method.
基金Selected from Proceedings of the 7th International Conference on Frontiers of Design and Manufacturing (ICFDM’2006)This project is supported by Na-tional Natural Science Foundation of China (No. 50375074)Specialized Research Fund for the Doctoral Program of Higher Education (No. 20050319007).
文摘ASeblsf-tmraicxti：n gA innteewrf esreelnf-cme ioxcincgu rms iicnr oa -liansteerrf derioodmee t（eLrD b）a sbeyd r eofnl eecxtitnergn tahl ep lhiagshet fmroomdu ala tmioinrr oisr-plirkees etanrtgedet. in front of the laser. Sinusoidal phase modulation of the beam is obtained by an electro-optic crystal （EOC） in the external cavity. The phase of the interference signal is demodulated by Fourier analysis method. The combination of the modulation and demodulation decreases the sensitivity of the instru-ment to fluctuations of the laser power and the noise induced by environment. Experimentally, the new micro-interferometer is applied to measure the micro-displacement of a high precision commer-cial PZT with an accuracy of 〈10 nm.
