Ternary Ti-B-N coatings were synthesized on AISI 304 and Si wafer by plasma-enhanced chemical vapor deposition (PECVD) technique using a gaseous mixture of TiCl4,BCl3,H2,N2,and Ar.By virtue of X-ray diffraction analys...Ternary Ti-B-N coatings were synthesized on AISI 304 and Si wafer by plasma-enhanced chemical vapor deposition (PECVD) technique using a gaseous mixture of TiCl4,BCl3,H2,N2,and Ar.By virtue of X-ray diffraction analysis,X-ray photoelectron spectroscopy,scanning electron microscope,and high-resolution transmission electron microscope,the influences of B content on the microstructure and properties of Ti B N coatings were investigated systematically.The results indicated that the microstructure and mechanical properties of Ti-B-N coatings largely depend on the transformation from FCC-TiN phase to HCP-TiB2 phase.With increasing B content and decreasing N content in the coatings,the coating microstructure evolves gradually from FCC-TiN/a-BN to HCP-TiB2 /a-BN via FCC-TiN+HCP-TiB2/a-BN.The highest microhardness of about 34 GPa is achieved,which corresponds to the nanocomposite Ti-63%B-N (mole fraction) coating consisting of the HCP-TiB2 nano-crystallites and amorphous BN phase.The lowest friction-coefficient was observed for the nanocomposite Ti-41%B-N (mole fraction) coating consisting of the FCC-TiN nanocrystallites and amorphous BN展开更多
Friction and sliding wear behaviour of Ti-B-N coatings against AISI440C steel ba ll and WC-6wt%Co ball were studied by using pin-on-disk tribometer along with mi crostructure characterization using optical microscopy ...Friction and sliding wear behaviour of Ti-B-N coatings against AISI440C steel ba ll and WC-6wt%Co ball were studied by using pin-on-disk tribometer along with mi crostructure characterization using optical microscopy (OM), scanning electron m icroscopy (SEM) and X-ray photoelectron spectroscopy (XPS). It is shown that the wear resistance of film depended on the wear mechanism. In the case of AISI440C steel, adhesive wear were pre-dominant and the wear rate increased sharply to a maximum when N content reach ~38at.%. This might be related to the change of fi lm microstructure and phase configuration, so the least adhesive transfer of tri bo-film was observed. If WC-6wt%Co ball was used, less deformation wear debris w as observed, this was responsible for the rise of wear rate. Despite of differen t wear modes, friction coefficients in both cases were found to depend mainly on the formation and the amount of h-BN phase. Elemental analysis by energy disper sive spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS) revealed that oxygen participated in the wear behavior by reacting with films to form the deb ris comprised of various types of Ti oxide including TiO, TiO2 and Ti2O3 , which increased wear resistance.展开更多
TiB 2 and Ti B N films on various substrates were synthesized using ionized dc magnetron sputtering. A two turn coil powered by 13.56 MHz r.f. was used to enhance the ionization fraction of the plasma. The structure a...TiB 2 and Ti B N films on various substrates were synthesized using ionized dc magnetron sputtering. A two turn coil powered by 13.56 MHz r.f. was used to enhance the ionization fraction of the plasma. The structure and properties of the films are affected by several parameters such as substrate bias, total pressure and nitrogen partial pressure and by the substrate materials. The crystallinity and the hardness of the films increase with decreasing total pressure. Well crystallized TiB 2 films with strong (0001) texture and with hardness up to 50 GPa were produced. Nitrogen doping into TiB 2 films decreases their crystallinity and hardness. About 1 GPa residual compressive stress was determined by a wafer curvature technique. It was performed that the dry friction of several different hard films against hardened 52100 steel, which showed the TiB 2 and Ti B N films existing the lowest friction coefficient and the lowest wear rate. [展开更多
基金funded by a grant from the National Core Research Center(NCRC)Program through the National Research Foundation of Korea funded by the Ministry of Education,Science and Technology(No.2012-0000-957)by a grant from the Fundamental R&D Program for Core Technology of Materials funded by the Ministry of Knowledge Economy,Republic of Korea
文摘Ternary Ti-B-N coatings were synthesized on AISI 304 and Si wafer by plasma-enhanced chemical vapor deposition (PECVD) technique using a gaseous mixture of TiCl4,BCl3,H2,N2,and Ar.By virtue of X-ray diffraction analysis,X-ray photoelectron spectroscopy,scanning electron microscope,and high-resolution transmission electron microscope,the influences of B content on the microstructure and properties of Ti B N coatings were investigated systematically.The results indicated that the microstructure and mechanical properties of Ti-B-N coatings largely depend on the transformation from FCC-TiN phase to HCP-TiB2 phase.With increasing B content and decreasing N content in the coatings,the coating microstructure evolves gradually from FCC-TiN/a-BN to HCP-TiB2 /a-BN via FCC-TiN+HCP-TiB2/a-BN.The highest microhardness of about 34 GPa is achieved,which corresponds to the nanocomposite Ti-63%B-N (mole fraction) coating consisting of the HCP-TiB2 nano-crystallites and amorphous BN phase.The lowest friction-coefficient was observed for the nanocomposite Ti-41%B-N (mole fraction) coating consisting of the FCC-TiN nanocrystallites and amorphous BN
文摘Friction and sliding wear behaviour of Ti-B-N coatings against AISI440C steel ba ll and WC-6wt%Co ball were studied by using pin-on-disk tribometer along with mi crostructure characterization using optical microscopy (OM), scanning electron m icroscopy (SEM) and X-ray photoelectron spectroscopy (XPS). It is shown that the wear resistance of film depended on the wear mechanism. In the case of AISI440C steel, adhesive wear were pre-dominant and the wear rate increased sharply to a maximum when N content reach ~38at.%. This might be related to the change of fi lm microstructure and phase configuration, so the least adhesive transfer of tri bo-film was observed. If WC-6wt%Co ball was used, less deformation wear debris w as observed, this was responsible for the rise of wear rate. Despite of differen t wear modes, friction coefficients in both cases were found to depend mainly on the formation and the amount of h-BN phase. Elemental analysis by energy disper sive spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS) revealed that oxygen participated in the wear behavior by reacting with films to form the deb ris comprised of various types of Ti oxide including TiO, TiO2 and Ti2O3 , which increased wear resistance.
文摘TiB 2 and Ti B N films on various substrates were synthesized using ionized dc magnetron sputtering. A two turn coil powered by 13.56 MHz r.f. was used to enhance the ionization fraction of the plasma. The structure and properties of the films are affected by several parameters such as substrate bias, total pressure and nitrogen partial pressure and by the substrate materials. The crystallinity and the hardness of the films increase with decreasing total pressure. Well crystallized TiB 2 films with strong (0001) texture and with hardness up to 50 GPa were produced. Nitrogen doping into TiB 2 films decreases their crystallinity and hardness. About 1 GPa residual compressive stress was determined by a wafer curvature technique. It was performed that the dry friction of several different hard films against hardened 52100 steel, which showed the TiB 2 and Ti B N films existing the lowest friction coefficient and the lowest wear rate. [
