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Green Vertical‑Cavity Surface‑Emitting Lasers Based on InGaN Quantum Dots and Short Cavity
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作者 Tao Yang Yan‑Hui Chen +7 位作者 Ya‑Chao Wang Wei Ou Lei‑Ying Ying Yang Mei Ai‑Qin Tian Jian‑Ping Liu Hao‑Chung Guo Bao‑Ping Zhang 《Nano-Micro Letters》 SCIE EI CAS CSCD 2023年第12期115-125,共11页
Room temperature low threshold lasing of green GaNbased vertical cavity surface emitting laser(VCSEL)was demonstrated under continuous wave(CW)operation.By using self-formed InGaN quantum dots(QDs)as the active region... Room temperature low threshold lasing of green GaNbased vertical cavity surface emitting laser(VCSEL)was demonstrated under continuous wave(CW)operation.By using self-formed InGaN quantum dots(QDs)as the active region,the VCSEL emitting at 524.0 nm has a threshold current density of 51.97 A cm^(-2),the lowest ever reported.The QD epitaxial wafer featured with a high IQE of 69.94%and theδ-function-like density of states plays an important role in achieving low threshold current.Besides,a short cavity of the device(~4.0λ)is vital to enhance the spontaneous emission coupling factor to 0.094,increase the gain coefficient factor,and decrease the optical loss.To improve heat dissipation,AlN layer was used as the current confinement layer and electroplated copper plate was used to replace metal bonding.The results provide important guidance to achieving high performance GaN-based VCSELs. 展开更多
关键词 Green vertical cavity surface emitting laser GaN Low threshold InGaN quantum dots
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Power dissipation in oxide-confined 980-nm vertical-cavity surface-emitting lasers 被引量:1
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作者 史国柱 关宝路 +2 位作者 李硕 王强 沈光地 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第1期257-262,共6页
We presented 980-nm oxide-confined vertical-cavity surface-emitting lasers (VCSELs) with a 16-μm oxide aperture. Optical power, voltage, and emission wavelength are measured in an ambient temperature range of 5℃ C-8... We presented 980-nm oxide-confined vertical-cavity surface-emitting lasers (VCSELs) with a 16-μm oxide aperture. Optical power, voltage, and emission wavelength are measured in an ambient temperature range of 5℃ C-80℃. Measurements combined with an empirical model are used to analyse the power dissipation in the device and the physical mechanism contributing to the thermal rollover phenomenon in VCSEL. It is found that the carrier leakage induced selfheating in the active region and the Joule heating caused by the series resistance are the main sources of power dissipation. In addition, carrier leakage induced selfheating increases as the injection current increases, resulting in a rapid decrease of the internal quantum efficiency, which is a dominant contribution to the thermal rollover of the VCSEL at a larger current. Our study provides useful guidelines to design a 980-nm oxide-confined VCSEL for thermal performance enhancement. 展开更多
关键词 垂直腔表面发射激光器 氧化物 功率耗散 VCSEL 注入电流 氧化孔径 环境温度 发射波长
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Single-mode low threshold current multi-hole vertical-cavity surface-emitting lasers 被引量:1
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作者 赵振波 徐晨 +3 位作者 解意洋 周康 刘发 沈光地 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第3期232-235,共4页
A multi-hole vertical-cavity surface-emitting laser(VCSEL) operating in stable single mode with a low threshold current was produced by introducing multi-leaf scallop holes on the top distributed Bragg-reflector of an... A multi-hole vertical-cavity surface-emitting laser(VCSEL) operating in stable single mode with a low threshold current was produced by introducing multi-leaf scallop holes on the top distributed Bragg-reflector of an oxidationconfined 850 nm VCSEL.The single-mode output power of 2.6 mW,threshold current of 0.6 mA,full width of half maximum lasing spectrum of less than 0.1 nm,side mode suppression ratio of 28.4 dB,and far-field divergence angle of about 10 are obtained.The effects of different hole depths on the optical characteristics are simulated and analysed,including far-field divergence,spectrum and lateral cavity mode.The single-mode performance of this multi-hole device is attributed to the large radiation loss from the inter-hole spacing and the scattering loss at the bottom of the holes,particularly for higher order modes. 展开更多
关键词 垂直腔表面发射激光器 低阈值电流 单模 远场发散角 VCSEL 单一模式 边模抑制比 输出功率
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Polarization switching and synchronization of mutually coupled vertical-cavity surface-emitting semiconductor lasers 被引量:1
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作者 张伟利 潘炜 +3 位作者 罗斌 李孝峰 邹喜华 王梦遥 《Chinese Physics B》 SCIE EI CAS CSCD 2007年第7期1996-2002,共7页
关键词 垂直空腔 半导体 同步现象 极化
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Micromechanical tunable vertical-cavity surface-emitting lasers 被引量:1
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作者 关宝璐 郭霞 +5 位作者 邓军 渠红伟 廉鹏 董立敏 陈敏 沈光地 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第12期2959-2962,共4页
关键词 微机电装置 垂直空腔表面发射激光器 可调电桥 静电调谐
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An efficient approach to characterizing and calculating carrier loss due to heating and barrier height variation in vertical-cavity surface-emitting lasers
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作者 吴坚 H.D.Summers 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第1期361-365,共5页
It is important to determine quantitatively the internal carrier loss arising from heating and barrier height variation in a vertical-cavity surface-emitting quantum well laser (VCSEL). However, it is generally diffic... It is important to determine quantitatively the internal carrier loss arising from heating and barrier height variation in a vertical-cavity surface-emitting quantum well laser (VCSEL). However, it is generally difficult to realize this goal using purely theoretical formulas due to difficulty in deriving the parameters relating to the quantum well structure. In this paper, we describe an efficient approach to characterizing and calculating the carrier loss due to the heating and the barrier height change in the VCSEL. In the method, the thermal carrier loss mechanism is combined with gain measurement and calculation. The carrier loss is re-characterized in a calculable form by constructing the threshold current and gain detuning-related loss current using the measured gain data and then substituting them for the quantum well-related parameters in the formula. The result can be expressed as a product of an exponential weight factor linked to the barrier height change and the difference between the threshold current and gain detuning-related loss current. The gain variation at cavity frequency due to thermal carrier loss and gain detuning processes is measured by using an AlInGaAs-AlGaAs VCSEL structure. This work provides a useful approach to analysing threshold and loss properties of the VCSEL, particularly, gain offset design for high temperature operation of VCSELs. 展开更多
关键词 财产损失 高度变化 承运人 垂直腔 发射激光器 计算 加热 VCSEL
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Control of gain and thermal carrier loss profiles for mode optimization in 980-nm broad-area vertical-cavity surface-emitting lasers
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作者 吴坚 崔怀洋 +1 位作者 黄梦 马明磊 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第12期262-267,共6页
Optical gain and thermal carrier loss distributions regarding current diffusion and various electric contact areas are investigated to improve the near-field modes from the ring-shape to a Gaussian-like configuration ... Optical gain and thermal carrier loss distributions regarding current diffusion and various electric contact areas are investigated to improve the near-field modes from the ring-shape to a Gaussian-like configuration for extra-broad-area and oxide-confined vertical-cavity surface-emitting lasers. In this work an equivalent circuit network model is used. The resistance of the continuously-graded distributed Bragg reflectors(DBRs), the current diffusion and the temperature effect due to different electric-contact areas are calculated and analyzed at first, as these parameters affect one another and are the key factors in determining the gain and thermal carrier loss. Finally, the gain and thermal carrier loss distributions are calculated and discussed. 展开更多
关键词 垂直腔面发射激光器 热载流子 光学增益 损失 分布控制 垂直腔表面发射激光器 域模式 优化
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Graded index profiles and loss-induced single-mode characteristics in vertical-cavity surface-emitting lasers with petal-shape holey structure
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作者 刘安金 渠红伟 +4 位作者 陈微 江斌 周文君 邢名欣 郑婉华 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第2期247-254,共8页
The 850-nm oxide-confined vertical-cavity surface-emitting lasers with petal-shape holey structures are presented.An area-weighted average refractive index model is given to analyse their effective index profiles,and ... The 850-nm oxide-confined vertical-cavity surface-emitting lasers with petal-shape holey structures are presented.An area-weighted average refractive index model is given to analyse their effective index profiles,and the graded index distribution in the holey region is demonstrated.The index step between the optical aperture and the holey region is obtained which is related merely to the etching depth.Four types of holey vertical-cavity surface-emitting lasers with different parameters are fabricated as well as the conventional oxide-confined vertical-cavity surface-emitting laser.Compared with the conventional oxide-confined vertical-cavity surface-emitting laser without etched holes,the holey vertical-cavity surface-emitting laser possesses an improved beam quality due to its graded index distribution,but has a lower output power,higher threshold current and lower slope efficiency.With the hole number increased,the holey vertical-cavity surface-emitting laser can realize the single-mode operation throughout the entire current range,and reduces the beam divergence further.The loss mechanism is used to explain the single-mode characteristic,and the reduced beam divergence is attributed to the shallow etching.High coupling efficiency of 86% to a multi-mode fibre is achieved for the single-mode device in the experiment. 展开更多
关键词 垂直腔表面发射激光器 多孔结构 折射率剖面 单模特性 花瓣形 梯度 损失 纳米氧化物
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Investigation of the mode splitting induced by electro-optic birefringence in a vertical-cavity surface-emitting laser by polarized electroluminescence 被引量:1
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作者 章杰 俞金玲 +2 位作者 程树英 赖云锋 陈涌海 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第2期457-460,共4页
The mode splitting induced by electro-optic birefringence in a P–I–N InGaAs/GaAs/AlGaAs vertical-cavity surfaceemitting laser(VCSEL)has been studied by polarized electroluminescence(EL)at room temperature.The polari... The mode splitting induced by electro-optic birefringence in a P–I–N InGaAs/GaAs/AlGaAs vertical-cavity surfaceemitting laser(VCSEL)has been studied by polarized electroluminescence(EL)at room temperature.The polarized EL spectra with E[110]and E[1ˉ10]directions,are extracted for different injected currents.The mode splitting of the two orthogonal polarized modes for a VCSEL device is determined,and its value increases linearly with the increasing injected current due to electro-optic birefringence.This article demonstrates that the polarized EL is a powerful tool to study the mode splitting and polarization anisotropy of a VCSEL device. 展开更多
关键词 垂直腔表面发射激光器 偏振模式 双折射 电光学 分割 VCSEL 光电 INGAAS
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Current diffusion and efficiency droop in vertical light emitting diodes
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作者 万荣桥 李滔 +6 位作者 刘志强 伊晓燕 王军喜 李军辉 朱文辉 李晋闽 汪炼成 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第1期561-569,共9页
Current diffusion is an old issue, nevertheless, the relationship between the current diffusion and the efficiency of light emitting diodes(LEDs) needs to be further quantitatively clarified. By incorporating current ... Current diffusion is an old issue, nevertheless, the relationship between the current diffusion and the efficiency of light emitting diodes(LEDs) needs to be further quantitatively clarified. By incorporating current crowding effect(CCE) into the conventional ABC model, we have theoretically and directly correlated the current diffusion and the internal quantum efficiency(IQE), light extraction efficiency(LEE), and external quantum efficiency(EQE) droop of the lateral LEDs.However, questions still exist for the vertical LEDs(V-LEDs). Here firstly the current diffusion length L_s(I) and L_s(II) have been clarified. Based on this, the influence of CCE on the EQE, IQE, and LEE of V-LEDs were investigated. Specifically to our V-LEDs with moderate series resistivity, L_s(III) was developed by combining L_s(I) and L_s(II), and the CCE effect on the performance of V-LEDs was investigated. The wall-plug efficiency(WPE) of V-LEDs ware investigated finally. Our works provide a deep understanding of the current diffusion status and the correlated efficiency droop in V-LEDs, thus would benefit the V-LEDs' chip design and further efficiency improvement. 展开更多
关键词 efficiency droop vertical light emitting DIODES CURRENT CROWDING effect CURRENT BLOCKING layer
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Analytical modelling of end thermal coupling in a solid-state laser longitudinally bonded by a vertical-cavity top-emitting laser diode
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作者 吴坚 H.D.Summers 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第11期4912-4918,共7页
The intrinsic features involving a circularly symmetric beam profile with low divergence,planar geometry as well as the increasingly enhanced power of vertical-cavity surface-emitting lasers (VCSELs) have made the VCS... The intrinsic features involving a circularly symmetric beam profile with low divergence,planar geometry as well as the increasingly enhanced power of vertical-cavity surface-emitting lasers (VCSELs) have made the VCSEL a promising pump source in direct end bonding to a solid-state laser medium to form the minimized,on-wafer integrated laser system.This scheme will generate a surface contact pump configuration and thus additional end thermal coupling to the laser medium through the joint interface of both materials,apart from pump beam heating.This paper analytically models temperature distributions in both VCSEL and the laser medium from the end thermal coupling regarding surface contact pump configuration using a top-emitting VCSEL as the pump source for the first time.The analytical solutions are derived by introducing relative temperature and mean temperature expressions.The results show that the end contact heating by the VCSEL could lead to considerable temperature variations associated with thermal phase shift and thermal lensing in the laser medium.However,if the central temperature of the interface is increased by less than 20 K,the end contact heating does not have a significant thermal influence on the laser medium.In this case,the thermal effect should be dominated by pump beam heating.This work provides useful analytical results for further analysis of hybrid thermal effects on those lasers pumped by a direct VCSEL bond. 展开更多
关键词 热耦合 垂直腔 激光二极管 激光发射 顶部 固态 VCSEL 激光介质
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A low-threshold and high-power oxide-confined 850-nm AlInGaAs strained quantum-well vertical-cavity surface-emitting laser
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作者 关宝璐 任秀娟 +3 位作者 李川 李硕 史国柱 郭霞 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第9期222-225,共4页
A low-threshold and high-power oxide-confined 850-nm AlInGaAs strained quantum-well (QW) vertical-cavity surface-emitting laser (VCSEL) based on an intra-cavity contacted structure is fabricated.A threshold current of... A low-threshold and high-power oxide-confined 850-nm AlInGaAs strained quantum-well (QW) vertical-cavity surface-emitting laser (VCSEL) based on an intra-cavity contacted structure is fabricated.A threshold current of 1.5 mA for a 22 μm oxide aperture device is achieved,which corresponds to a threshold current density of 0.395 kA/cm 2.The peak output optical power reaches 17.5 mW at an injection current of 30 mA at room temperature under pulsed operation.While under continuous-wave (CW) operation,the maximum power attains 10.5 mW.Such a device demonstrates a high characteristic temperature of 327 K within a temperature range from 12℃ to 96℃ and good reliability under a lifetime test.There is almost no decrease of the optical power when the device operates at a current of 5 mA at room temperature under the CW injection current. 展开更多
关键词 垂直腔面发射激光器 量子阱 氧化物 高功率 纳米 门槛 阈值电流密度 可靠性寿命试验
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Characteristics of selective oxidation during the fabrication of vertical cavity surface emitting laser
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作者 郝永芹 钟景昌 +2 位作者 马建立 张永明 王立军 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第8期1806-1809,共4页
关键词 激光技术 选择性氧化 垂直腔表面发射激光 量子阱 半导体激光器
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Vertical cavity surface emitting laser transverse mode and polarization control by elliptical hole photonic crystal
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作者 曹田 徐晨 +4 位作者 解意洋 阚强 魏思民 毛明明 陈弘达 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第2期261-264,共4页
The polarization of traditional photonic crystal(PC) vertical cavity surface emitting laser(VCSEL) is uncontrollable,resulting in the bit error increasing easily.Elliptical hole photonic crystal can control the transv... The polarization of traditional photonic crystal(PC) vertical cavity surface emitting laser(VCSEL) is uncontrollable,resulting in the bit error increasing easily.Elliptical hole photonic crystal can control the transverse mode and polarization of VCSEL efficiently.We analyze the far field divergence angle,and birefringence of elliptical hole PC VCSEL.When the ratio of minor axis to major axis b/a = 0.7,the PC VCSEL can obtain single mode and polarization.According to the simulation results,we fabricate the device successfully.The output power is 1.7 mW,the far field divergence angle is less than 10°,and the side mode suppression ratio is over 30 dB.The output power in the Y direction is 20 times that in the X direction. 展开更多
关键词 垂直腔面发射激光器 光子晶体 偏振控制 椭圆孔 垂直腔表面发射激光器 VCSEL 远场发散角 横模
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The improved output performance of a broad-area vertical-cavity surface-emitting laser with an optimized electrode diameter
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作者 张星 宁永强 +3 位作者 秦莉 佟存柱 刘云 王立军 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第6期395-400,共6页
The output performance of a 980-nm broad-area vertical-cavity surface-emitting laser(VCSEL) is improved by optimizing the p-electrode diameter in this study.Based on a three-dimensional finite-element method,the curre... The output performance of a 980-nm broad-area vertical-cavity surface-emitting laser(VCSEL) is improved by optimizing the p-electrode diameter in this study.Based on a three-dimensional finite-element method,the current density distribution within the active region of the VCSEL is optimized through the appropriate adjustment of the p-electrode diameter,and uniform current-density distribution is achieved.Then,the effects of this optimization are studied experimentally.The L-I-V characteristics under different temperatures of the VCSELs with different p-electrode diameters are investigated,and better temperature stability is demonstrated in the VCSEL with an optimized p-electrode diameter.The far-field measurements show that with an injected current of 2 A,the far-field divergence angle of the VCSEL with an optimized p-electrode diameter is 9°,which is much lower than the far-field angle of the VCSEL without this optimization.Also the VCSEL with an optimized p-electrode diameter shows a better near-field distribution. 展开更多
关键词 vertical-cavity surface-emitting lasers finite-element analysis far-field divergence near-field distribution
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Simplified modeling of frequency behavior in photonic crystal vertical cavity surface emitting laser with tunnel injection quantum dot in active region
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作者 Mehdi Riahinasab Vahid Ahmadi Elham Darabi 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第2期260-267,共8页
In this work, the characteristics of the photonic crystal tunneling injection quantum dot vertical cavity surface emitting lasers(Ph C-TIQD-VCSEL) are studied through analyzing a modified modulation transfer function.... In this work, the characteristics of the photonic crystal tunneling injection quantum dot vertical cavity surface emitting lasers(Ph C-TIQD-VCSEL) are studied through analyzing a modified modulation transfer function. The function is based on the rate equations describing the carrier dynamics at different energy levels of dot and injector well. Although the frequency modulation response component associated with carrier dynamics in wetting layer(WL) and at excited state(ES) levels of dots limits the total bandwidth in conventional QD-VCSEL, our study shows that it can be compensated for by electron tunneling from the injector well into the dot in TIQD structure. Carrier back tunneling time is one of the most important parameters, and by increment of that, the bias current dependence of the total bandwidth will be insignificant. It is proved that at high bias current, the limitation of the WL-ES level plays an important role in reducing the total bandwidth and results in rollovers on 3-d B bandwidth-I curves. In such a way, for smaller air hole diameter of photonic crystal, the effect of this reduction is stronger. 展开更多
关键词 垂直腔面发射激光器 光子晶体 频率特性 隧道 量子点 有源区 调制传递函数 建模
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Effect of Mesa Size on Thermal Characteristics of Ver tical-cavity Surface-emitting Lasers
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作者 HOU Shi-hua ZHAO Ding +2 位作者 SUN Yong-wei TAN Man-qing CHEN Liang-hui 《Semiconductor Photonics and Technology》 CAS 2005年第3期170-173,共4页
The effect of mesa size on th e thermal characteristics of etched mesa vertical-cavity surface-emitting lase rs(VCSELs) is studied. The numerical results show that the mesa size of the top mirror strongly influences t... The effect of mesa size on th e thermal characteristics of etched mesa vertical-cavity surface-emitting lase rs(VCSELs) is studied. The numerical results show that the mesa size of the top mirror strongly influences the temperature distribution inside the etched mesa V CSEL. Under a certain driving voltage, with decreasing mesa size, the location o f the maximal temperature moves towards the p-contact metal, the temperature in the core region of the active layer rises greatly, and the thermal characterist ics of the etched mesa VCSELs will deteriorate. 展开更多
关键词 激光器 表面放射 热量特性 半导体 温度分布
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Modeling of resistance characteristics of a continuously-graded distributed Bragg reflector in a 980-nm vertical-cavity surface-emitting laser
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作者 黄梦 吴坚 +2 位作者 崔怀洋 钱建强 宁永强 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第10期283-289,共7页
The resistance characteristics of a continuously-graded distributed Bragg reflector(DBR) in a 980-nm verticalcavity surface-emitting laser(VCSEL) are modeled in detail.The junction resistances between the layers of bo... The resistance characteristics of a continuously-graded distributed Bragg reflector(DBR) in a 980-nm verticalcavity surface-emitting laser(VCSEL) are modeled in detail.The junction resistances between the layers of both the p-and n-DBR mirrors are analysed by combining the thermionic emission model and the finite difference method.In the meantime,the intrinsic resistance of the DBR material system is calculated to make a comparison with the junction resistance.The minimal values of series resistances of the graded p-and n-type DBR mirrors and the lateral temperature-dependent resistance variation are calculated and discussed.The result indicates the potential to optimize the design of the DBR reflectors of the 980-nm VCSELs. 展开更多
关键词 垂直腔表面发射激光器 分布布拉格反射器 电阻特性 建模 梯度 分布布拉格反射镜 VCSEL 阻抗计算
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基于ICESat-2多波束激光测高数据的全球海洋重力异常反演分析
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作者 李真 郭金运 +3 位作者 孙中苗 贾永君 黄令勇 孙和平 《测绘学报》 EI CSCD 北大核心 2024年第2期252-262,共11页
卫星测高技术是获取精细海洋重力数据的重要技术手段之一。常规卫星测高反演海洋重力异常主要是利用沿轨测高数据,而跨轨数据因较长的时间间隔或者稀疏的地面轨间距往往不能用于海洋重力异常反演,进而影响了海洋重力异常模型精度的进一... 卫星测高技术是获取精细海洋重力数据的重要技术手段之一。常规卫星测高反演海洋重力异常主要是利用沿轨测高数据,而跨轨数据因较长的时间间隔或者稀疏的地面轨间距往往不能用于海洋重力异常反演,进而影响了海洋重力异常模型精度的进一步改善。新型激光测高ICESat-2能够同时获得3对光束观测数据,相邻激光束的地面间距约为3 km,为结合跨轨数据改善海洋重力异常模型提供了可能。本文首先给出了集成沿轨和跨轨数据反演海洋重力异常的处理策略;然后,分别利用沿轨数据和集成的数据构建了ICESat-2全球海洋重力异常模型(IS2Gra_alo和IS2Gra_alo_acr),结果表明通过补充跨轨数据能够有效提高沿轨数据反演海洋重力异常的精度,并验证了ICESat-2测高数据反演全球海洋重力异常的可靠性。此外,本文还探讨了ICESat-2不同跨轨数据组合对海洋重力异常模型反演精度的影响,在沿轨数据的基础上集成适当距离的跨轨观测数据能够有利于改善海洋重力异常模型的精度。本文研究为后续SWOT宽刈幅测高数据和我国双星跟飞模式测高数据反演海洋重力异常模型提供了参考意义。 展开更多
关键词 ICESat-2 卫星激光测高 海洋重力异常 垂线偏差 海面高
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带宽超30 GHz的850 nm方形横向耦合腔VCSEL
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作者 佟海霞 王延靖 +4 位作者 田思聪 蒋宁 李浩 佟存柱 魏志鹏 《发光学报》 EI CAS CSCD 北大核心 2024年第3期493-499,共7页
如今,人们对研究耦合腔面发射激光器结构的兴趣逐渐增加。这种结构通过向主腔施加调制电的同时向每个反馈腔施加直流电来实现带宽提升。然而,单独驱动主腔对器件性能的影响尚未得到深入研究。为了更全面地了解耦合腔激光器,我们设计并... 如今,人们对研究耦合腔面发射激光器结构的兴趣逐渐增加。这种结构通过向主腔施加调制电的同时向每个反馈腔施加直流电来实现带宽提升。然而,单独驱动主腔对器件性能的影响尚未得到深入研究。为了更全面地了解耦合腔激光器,我们设计并制备了边长为30μm×30μm的方形横向耦合腔VCSEL,并研究了在方形横向耦合腔中单独驱动主腔时器件性能的变化。室温下,-3 dB带宽达30.1 GHz,在非归零调制下,在背对背传输速率40 Gbit/s时获得清晰的眼图,相对强度噪声值为-160 dB/Hz。证明了反馈腔在不加驱动的条件下仍会对主腔的性能提供正向作用。设计的TCC-VCSEL器件只需要一个电源驱动,使其适用于高密度集成,为封装集成应用提供了新的思路。 展开更多
关键词 垂直腔面发射激光器 横向耦合腔 高速
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