We develope a simple method to stabilize the beam during propagation. Combination of the self-developed control module and the large diameter mirrors reconstruct the beam stabilization system, and some important proce...We develope a simple method to stabilize the beam during propagation. Combination of the self-developed control module and the large diameter mirrors reconstruct the beam stabilization system, and some important procedures are presented, such as calibration arid average filter. The results show that the horizontal pointing and vertical pointing are stabilized to within 8.43 and 7.59 μrad, and the beam horizontal position and vertical position are stabilized to within 2.16 and 2.11 μm respectively. The regulating time is within 84 ms. Thus the method presented is effective for the current stabilization system applied in lithography tools.展开更多
The basic concepts about the active structures and some attributes of the modes were presented in paper “Liner Active Structures and Modes]( I) ". The characteristics of the active discrete systems and active be...The basic concepts about the active structures and some attributes of the modes were presented in paper “Liner Active Structures and Modes]( I) ". The characteristics of the active discrete systems and active beams were discussed, especially, the stability of the active structures and the orthogonality of the eigenvectors. The notes about modes were portrayed by a model of a seven-storeyed building with sensors and actuators. The concept of the adjoint active structure was extended from the discrete systems to the beams that were the representations of the continuous structures. Two types of beams with different placements of the measuring and actuating systems were discussed in detail. One is the beam with the discrete sensors and actuators, and the other is the beam with distributed sensor and actuator function. The orthogonality conditions were derived with the modal shapes of the active beam and its adjoint active beam. An example shows that the variation of eigenvalues with feedback amplitude for the homo-configuration and non-homo-configuration active structures.展开更多
The activated chemisorption of N<sub>2</sub> on Ni （poly） and La film was performed on a molecular beam—surface scattering apparatus. Experimental results indicate that the initial sticking probability ...The activated chemisorption of N<sub>2</sub> on Ni （poly） and La film was performed on a molecular beam—surface scattering apparatus. Experimental results indicate that the initial sticking probability s<sub>o</sub> increases linearly from 0 to 0.03 as normal component of translational energy of the molecuar beam E<sub>n</sub> increases from 11.00 to 19.91 kcal/mol for N<sub>2</sub>/Ni system and S<sub>0</sub> from 0 to 0. 10 as E<sub>n</sub> from 10. 40 to 19.91 kcal/mol for N<sub>2</sub>/La system. The apparent activation energy △E are 6.16 kcal/mol and 5.30 kcal/mol for N<sub>2</sub>/Ni and N<sub>2</sub>/La systems respectively.展开更多
Though bacteria of the radiation-resistant Deinococcus radiodurans have a high resistance to the lethal and mutagenic effects of many DNA-damaging agents, the mechanisms involved in the response of these bacteria to o...Though bacteria of the radiation-resistant Deinococcus radiodurans have a high resistance to the lethal and mutagenic effects of many DNA-damaging agents, the mechanisms involved in the response of these bacteria to oxidative stress are poorly understood. In this report, the superoxide dismutase (SOD) and catalase (CAT) activities produced by these bacteria were measured, and the change of SOD and CAT activities by 20 keV N+ beam exposure was examined. Their activities were increased by N+ beam exposure from 8x 1014 ions/cm2 to 6x1015 ions/cm2.The treatment of H2O2 and [ CHC13 +CH3 CH2OH ] and the measurement of absorption spectrum showed that the increase in SOD activity was resulted from inducible activities of MnSOD in D. radiodurans AS1.633 by N+ beam exposure . These results suggested that this bacteria possess inducible defense mechanisms against the deleterious effects of oxidization.展开更多
Vapor deposited coatings onto strip steel are a promising alternative as functional layers for corrosion protection or high abrasion resistance.Conventional coating systems have some limits regarding environmental com...Vapor deposited coatings onto strip steel are a promising alternative as functional layers for corrosion protection or high abrasion resistance.Conventional coating systems have some limits regarding environmental compatibility,the range of coating materials and application properties. Physical vapor deposition(PVD) is an environment-friendly technology and enables nearly unlimited material and process variety.Electron beam high-rate evaporation with deposition rates up to some micrometers per second is the most productive PVD technology for low cost coating.The combination of evaporation with powerful plasma is an efficient way to improve the layer properties.The developed plasma sources can be used for special plasma enhanced chemical vapor deposition(PECVD) processes too. The paper gives an overview about the latest developments in these technologies.Furthermore,the paper explains some examples of new layer stacks onto steel strips.While enhanced corrosion protection can be obtained by magnesium,aluminium or copper containing coatings other functional surface properties come more and more in the focus of interest.For instance,decorative gold colored layers,transparent scratch resistant layers,hard coatings and photo catalytic layers were deposited on running steel strips.Functional layers and layer systems for energy saving and sun energy absorption by solar thermal effects and photo voltaics are under development.The coatings are prepared under the conditions of very high deposition rates using our in-line vacuum coater for metallic strips and sheets with the name MAXI.The influence of the process and plasma parameters on the layer properties were investigated and will be demonstrated for some applications.展开更多
基金the National Science and Technology Major Project of China(No.2011ZX02402)the International Science & Technology Cooperation Program of China(No.2011DFR10010)
文摘We develope a simple method to stabilize the beam during propagation. Combination of the self-developed control module and the large diameter mirrors reconstruct the beam stabilization system, and some important procedures are presented, such as calibration arid average filter. The results show that the horizontal pointing and vertical pointing are stabilized to within 8.43 and 7.59 μrad, and the beam horizontal position and vertical position are stabilized to within 2.16 and 2.11 μm respectively. The regulating time is within 84 ms. Thus the method presented is effective for the current stabilization system applied in lithography tools.
文摘The basic concepts about the active structures and some attributes of the modes were presented in paper “Liner Active Structures and Modes]( I) ". The characteristics of the active discrete systems and active beams were discussed, especially, the stability of the active structures and the orthogonality of the eigenvectors. The notes about modes were portrayed by a model of a seven-storeyed building with sensors and actuators. The concept of the adjoint active structure was extended from the discrete systems to the beams that were the representations of the continuous structures. Two types of beams with different placements of the measuring and actuating systems were discussed in detail. One is the beam with the discrete sensors and actuators, and the other is the beam with distributed sensor and actuator function. The orthogonality conditions were derived with the modal shapes of the active beam and its adjoint active beam. An example shows that the variation of eigenvalues with feedback amplitude for the homo-configuration and non-homo-configuration active structures.
基金Project supportec by the National Natural Science Foundation of China
文摘The activated chemisorption of N<sub>2</sub> on Ni （poly） and La film was performed on a molecular beam—surface scattering apparatus. Experimental results indicate that the initial sticking probability s<sub>o</sub> increases linearly from 0 to 0.03 as normal component of translational energy of the molecuar beam E<sub>n</sub> increases from 11.00 to 19.91 kcal/mol for N<sub>2</sub>/Ni system and S<sub>0</sub> from 0 to 0. 10 as E<sub>n</sub> from 10. 40 to 19.91 kcal/mol for N<sub>2</sub>/La system. The apparent activation energy △E are 6.16 kcal/mol and 5.30 kcal/mol for N<sub>2</sub>/Ni and N<sub>2</sub>/La systems respectively.
基金This work was supported by the National Nature Science Foundation of China! No.19605005
文摘Though bacteria of the radiation-resistant Deinococcus radiodurans have a high resistance to the lethal and mutagenic effects of many DNA-damaging agents, the mechanisms involved in the response of these bacteria to oxidative stress are poorly understood. In this report, the superoxide dismutase (SOD) and catalase (CAT) activities produced by these bacteria were measured, and the change of SOD and CAT activities by 20 keV N+ beam exposure was examined. Their activities were increased by N+ beam exposure from 8x 1014 ions/cm2 to 6x1015 ions/cm2.The treatment of H2O2 and [ CHC13 +CH3 CH2OH ] and the measurement of absorption spectrum showed that the increase in SOD activity was resulted from inducible activities of MnSOD in D. radiodurans AS1.633 by N+ beam exposure . These results suggested that this bacteria possess inducible defense mechanisms against the deleterious effects of oxidization.
文摘Vapor deposited coatings onto strip steel are a promising alternative as functional layers for corrosion protection or high abrasion resistance.Conventional coating systems have some limits regarding environmental compatibility,the range of coating materials and application properties. Physical vapor deposition(PVD) is an environment-friendly technology and enables nearly unlimited material and process variety.Electron beam high-rate evaporation with deposition rates up to some micrometers per second is the most productive PVD technology for low cost coating.The combination of evaporation with powerful plasma is an efficient way to improve the layer properties.The developed plasma sources can be used for special plasma enhanced chemical vapor deposition(PECVD) processes too. The paper gives an overview about the latest developments in these technologies.Furthermore,the paper explains some examples of new layer stacks onto steel strips.While enhanced corrosion protection can be obtained by magnesium,aluminium or copper containing coatings other functional surface properties come more and more in the focus of interest.For instance,decorative gold colored layers,transparent scratch resistant layers,hard coatings and photo catalytic layers were deposited on running steel strips.Functional layers and layer systems for energy saving and sun energy absorption by solar thermal effects and photo voltaics are under development.The coatings are prepared under the conditions of very high deposition rates using our in-line vacuum coater for metallic strips and sheets with the name MAXI.The influence of the process and plasma parameters on the layer properties were investigated and will be demonstrated for some applications.
