In this paper,the etching characteristics of the ultra-high resistivity silicon(UHRS) by using the Bosch process were investigated.The experimental results indicated that the sulfur hexafluoride flux,the temperature o...In this paper,the etching characteristics of the ultra-high resistivity silicon(UHRS) by using the Bosch process were investigated.The experimental results indicated that the sulfur hexafluoride flux,the temperature of the substrate,the platen power and the etching intermittence had important influence on the etching rate and the etching morphology of the UHRS.The profiles and morphologies of sidewall were characterized with scanning electron microscopy(SEM).By using an improved three-stage Bosch process,380-μm deep through holes were fabricated on the UHRS with the average etching rate of about 3.14 μm/min.Meanwhile,the fabrication mechanism of deep through holes on the UHRS by using the three-stage Bosch process was illustrated on the basis of the experimental results.展开更多
Tremendous efforts have been devoted to explore energy-efficient strategies of ammonia synthesis to replace Haber–Bosch process which accounts for 1.4% of the annual energy consumption. In this study,atomically dispe...Tremendous efforts have been devoted to explore energy-efficient strategies of ammonia synthesis to replace Haber–Bosch process which accounts for 1.4% of the annual energy consumption. In this study,atomically dispersed Au_1 catalyst is synthesized and applied in electrochemical synthesis of ammonia under ambient conditions. A high NH_4^+ Faradaic efficiency of 11.1% achieved by our Au_1 catalyst surpasses most of reported catalysts under comparable conditions. Benefiting from efficient atom utilization, an NH_4^+ yield rate of 1,305 lg h^(-1) mg_(Au)^(-1) has been reached, which is roughly 22.5 times as high as that by supported Au nanoparticles. We also demonstrate that by employing our Au_1 catalyst, NH4+can be electrochemically produced directly from N_2 and H_2 with an energy utilization rate of 4.02 mmol kJ^(-1). Our study provides a possibility of replacing the Haber–Bosch process with environmentally benign and energy-efficient electrochemical strategies.展开更多
基金Project supported by the National Natural Science Foundation of China(Nos.61574108,61574112,61504099)
文摘In this paper,the etching characteristics of the ultra-high resistivity silicon(UHRS) by using the Bosch process were investigated.The experimental results indicated that the sulfur hexafluoride flux,the temperature of the substrate,the platen power and the etching intermittence had important influence on the etching rate and the etching morphology of the UHRS.The profiles and morphologies of sidewall were characterized with scanning electron microscopy(SEM).By using an improved three-stage Bosch process,380-μm deep through holes were fabricated on the UHRS with the average etching rate of about 3.14 μm/min.Meanwhile,the fabrication mechanism of deep through holes on the UHRS by using the three-stage Bosch process was illustrated on the basis of the experimental results.
基金supported by the National Key R&D Program of China (2017YFA0208300)the National Natural Science Foundation of China (21522107, 21671180, 21521091, 21390393, U1463202, and 21522305)
文摘Tremendous efforts have been devoted to explore energy-efficient strategies of ammonia synthesis to replace Haber–Bosch process which accounts for 1.4% of the annual energy consumption. In this study,atomically dispersed Au_1 catalyst is synthesized and applied in electrochemical synthesis of ammonia under ambient conditions. A high NH_4^+ Faradaic efficiency of 11.1% achieved by our Au_1 catalyst surpasses most of reported catalysts under comparable conditions. Benefiting from efficient atom utilization, an NH_4^+ yield rate of 1,305 lg h^(-1) mg_(Au)^(-1) has been reached, which is roughly 22.5 times as high as that by supported Au nanoparticles. We also demonstrate that by employing our Au_1 catalyst, NH4+can be electrochemically produced directly from N_2 and H_2 with an energy utilization rate of 4.02 mmol kJ^(-1). Our study provides a possibility of replacing the Haber–Bosch process with environmentally benign and energy-efficient electrochemical strategies.
