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Harmonics in the Squirrel Cage Induction Motor Analytic Calculation Part III: Influence on the Torque-speed Characteristic
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作者 G.Kovács 《CES Transactions on Electrical Machines and Systems》 EI CSCD 2024年第1期86-102,共17页
The harmonics that appear in the squirrel cage asynchronous machine have been discussed in great detail in the literature for a long time. However, the systematization of the phenomenon is still pending, so we made an... The harmonics that appear in the squirrel cage asynchronous machine have been discussed in great detail in the literature for a long time. However, the systematization of the phenomenon is still pending, so we made an attempt to fill this gap in the previous parts of our study by elaborating formulas for calculation of parasitic torques. It was a general demand among those who work in this field towards the author to verify his formulas with measurements. In the literature, it seems,only one detailed, purposeful series of measurements has been published so far, the purpose of which was to investigate the effect of the number of rotor slots on the torque-speed characteristic curve of the machine. The main goal of this study is to verify the correctness of the formulas by comparing them with the referred series of measurements. Relying on this, the expected synchronous parasitic torques were developed for the frequently used rotor slot numbers-as a design guide for the engineer.Thus, together with our complete table for radial magnetic pull published in our previous work, the designer has all the principles, data and formulas available for the right number of rotor slots for his given machine and for the drive system. This brings this series of papers to an end. 展开更多
关键词 Asynchronous parasitic torques Induction motor Squirrel cage rotor Space harmonics Synchronous parasitic torques
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Harmonics in the Squirrel Cage Induction Motor,Analytic Calculation Part Ⅱ:Synchronous Parasitic Torques,Radial Magnetic Forces 被引量:1
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作者 G.Kovács 《CES Transactions on Electrical Machines and Systems》 CSCD 2023年第4期404-421,共18页
The magnetic field generated in the air gap of the cage asynchronous machine and the harmonics of the magnetomotive forces creating that magnetic field,as well as the synchronous parasitic torques,radial magnetic forc... The magnetic field generated in the air gap of the cage asynchronous machine and the harmonics of the magnetomotive forces creating that magnetic field,as well as the synchronous parasitic torques,radial magnetic forces have been discussed in great detail in the literature,but always separately,for a long time.However,systematization of the phenomenon still awaits.Therefore,it is worth summarizing the completeness of the phenomena in a single study–with a new approach at the same time-in order to reveal the relationships between them.The role of rotor slot number is emphasized much more than before.New formulas derived for both synchronous torques and radial magnetic forces are used for further investigation.It will be shown that both phenomena in subject must be treated together.Formulas will be provided to take into account attenuation.Design guide will be provided to avoid dangerous rotor slot numbers.It will be shown that the generation of synchronous torques and radial magnetic forces do not depend–in this new approach-on the slot combination,but on the rotor slot number itself. 展开更多
关键词 Squirrel cage induction motor Synchronous parasitic torques Radial magnetic forces Winding harmonics
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Harmonics in the Squirrel Cage Induction Motor Analytic Calculation-Part Ⅰ: Differential Leakage, Attenuation, Asynchronous Parasitic Torques 被引量:1
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作者 G.Kovács 《CES Transactions on Electrical Machines and Systems》 CSCD 2023年第3期320-329,共10页
The magnetic field generated in the air gap of the cage asynchronous machine and the harmonics of the magnetomotive forces creating that magnetic field, as well as the related differential leakage, attenuation, asynch... The magnetic field generated in the air gap of the cage asynchronous machine and the harmonics of the magnetomotive forces creating that magnetic field, as well as the related differential leakage, attenuation, asynchronous parasitic torques have been discussed in great detail in the literature, but always separately, for a long time. However, systematization of the phenomenon still awaits. Therefore, it is worth summarizing the completeness of the phenomena in a single study – with a new approach at the same time-in order to reveal the relationships between them. The role of rotor slot number is emphasized much more than before. An existing, commonly used, but still impractical basic figure has been modified to more clearly demonstrate the response of the rotor for the harmonics of the stator. The need to treat differential leakage, asynchronous parasitic torques and attenuation together will be demonstrated: new formula for asynchronous parasitic torque is derived;the long-used characteristic curves for differential leakage and attenuation used separately so far was merged into one, correct curve in order to provide a correct design guide for the engineers. 展开更多
关键词 Asynchronous parasitic torque ATTENUATION Differential leakage Squirrel cage induction motor Winding harmonics
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Spectral shift of solid high-order harmonics from different channels in a combined laser field
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作者 曹冬冬 潘雪飞 +1 位作者 张军 刘学深 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第3期244-251,共8页
We investigate theoretically the spectral shift of the high-order harmonic generation(HHG)in ZnO driven by a combined laser field by solving the two-band semiconductor Bloch equations(SBEs)in the velocity gauge.The co... We investigate theoretically the spectral shift of the high-order harmonic generation(HHG)in ZnO driven by a combined laser field by solving the two-band semiconductor Bloch equations(SBEs)in the velocity gauge.The combined laser field is synthesized by a fundamental laser pulse and its seventh-frequency laser pulse.When the seventh-frequency laser pulse is added to the rising or falling parts of the fundamental laser field,we find that the spectral blueshift or redshift appears,which is due to the unequal contribution of the rising and falling parts in the fundamental laser field to the harmonics.By analyzing the time-dependent conduction band population in k space,we found that,in addition to the tunneling ionization channel,there is also the resonant electron injection channels which is induced by the seventh-frequency laser pulse.The harmonics generated by the different channels show the spectral redshift or the spectral blueshift,respectively.Through analyzing the k-integrated transient conduction band population of the electrons from different channels,we found that if there is a certain delay in the process of the electron excitation,it will lead to the delay in the harmonic emission,which results in the spectral redshift of the harmonics. 展开更多
关键词 high-order harmonic generation ZnO crystal spectral shift of harmonics resonant electron injection channels
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Hybrid simulation of q=1 high-order harmonics driven by passing energetic particles in tokamak plasmas
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作者 刘胜 任珍珍 +3 位作者 汪卫华 申伟 杨锦宏 宁洪伟 《Plasma Science and Technology》 SCIE EI CAS CSCD 2023年第12期31-39,共9页
High-order harmonics q(ψ_(s))=1 energetic particle modes(EPMs)have been observed in toroidal plasmas experiments with neutral beam injection.To investigate these phenomena,linear properties and nonlinear dynamics of ... High-order harmonics q(ψ_(s))=1 energetic particle modes(EPMs)have been observed in toroidal plasmas experiments with neutral beam injection.To investigate these phenomena,linear properties and nonlinear dynamics of these EPMs driven by passing energetic particles(EPs)are studied via the global hybrid kinetic-magnetohydrodynamic code M3D-K.Simulation results demonstrate that passing EPs'effects on high mode-number harmonics(q(ψ_(s))=m/n=2/2,3/3,4/4)instability are more obvious than the q(ψ_(s))=1/1 mode,especially when q-profile is sufficiently flat in the core region.Furthermore,the effects of the pitch angleΛ_0 and beam ion pressure P_(hot)/P_(total)on the features of high n components are also analyzed specifically.It is found that there exists only one resonant condition for these EPMs.In the nonlinear phase,these high mode-number harmonics can induce significant energetic ions redistribution and chirping up phenomena,which differs from the classical fishbone excited by passing EPs.These discoveries are conducive to better apprehend the underlying physical mechanisms of the highorder harmonics driven by passing EPs. 展开更多
关键词 high-order harmonics passing energetic particles wave-particle resonance TOKAMAK
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Crystal-Momentum-Resolved Contributions to Harmonics in Laser-Driven Graphene
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作者 彭朝阳 郎跃 +4 位作者 朱雅蕾 赵晶 张栋文 赵增秀 袁建民 《Chinese Physics Letters》 SCIE EI CAS CSCD 2023年第5期47-51,共5页
We investigate the crystal-momentum-resolved contributions to high-order harmonic generation in laser-driven graphene by semi-conductor Bloch equations in the velocity gauge.It is shown that each harmonic is generated... We investigate the crystal-momentum-resolved contributions to high-order harmonic generation in laser-driven graphene by semi-conductor Bloch equations in the velocity gauge.It is shown that each harmonic is generated by electrons with the specific initial crystal momentum.The higher harmonics are primarily contributed by the electrons of larger initial crystal momentum because they possess larger instantaneous energies during the intraband motion.Particularly,we observe circular interference fringes in the crystal-momentum-resolved harmonics spectrum,which result from the inter-cycle interference of harmonic generation.These circular fringes will disappear if the inter-cycle interference is disrupted by the strong dephasing effect.Our findings can help to better analyze the mechanism of high harmonics in graphene. 展开更多
关键词 effect motion harmonics
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Generation of Higher Terahertz Harmonics in Nonlinear Paraelectrics under Focusing in a Wide Temperature Range
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作者 Volodymyr Grimalsky Jesus Escobedo-Alatorre +1 位作者 Christian Castrejon-Martinez Yered Gomez-Badillo 《Journal of Electromagnetic Analysis and Applications》 2023年第4期43-58,共16页
It is theoretically investigated the generation of higher harmonics of two-dimensional and three-dimensional terahertz electromagnetic beams in nonlinear crystals. The attention is paid to crystalline paraelectrics li... It is theoretically investigated the generation of higher harmonics of two-dimensional and three-dimensional terahertz electromagnetic beams in nonlinear crystals. The attention is paid to crystalline paraelectrics like SrTiO<sub>3</sub> under the temperatures 60 - 200 K, these crystals possess the cubic nonlinearity. The bias electric field is applied to provide the dominating quadratic nonlinearity. The initial focusing of the beams not only increases the efficiency of generation of higher harmonics, but alto makes possible to select maxima of different higher harmonics at some distances from the input. At lower temperatures the nonlinearity behaves at smaller input amplitudes, whereas at higher temperatures the harmonic generation can be observed at higher frequencies up to 1.5 THz. In three-dimensional beams the peak amplitudes of higher harmonics can be bigger than in two-dimensional beams, but the ratios of these peak values to the maximum values of the focused first harmonic are smaller than in two-dimensional beams. 展开更多
关键词 Terahertz Wave Beams Nonlinear Crystalline Paraelectrics Different Temperatures Generation of harmonics Initial Focusing
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Earthquake, Volcano and Earth Rotation Harmonics
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作者 Sheng Zhao 《Open Journal of Earthquake Research》 2023年第3期139-158,共20页
Earthquake prediction is considered impossible for there is no scientific way to find the date and time, the location, and the magnitude of an earthquake. A new idea is introduced in this paper—earth rotation harmoni... Earthquake prediction is considered impossible for there is no scientific way to find the date and time, the location, and the magnitude of an earthquake. A new idea is introduced in this paper—earth rotation harmonics triggered natural volcano and earthquake. With earth rotation harmonics response model for a location, it could be possible to calculate the earthquake date and time, and the magnitude. Properties of earth rotation harmonics triggered earthquake are discussed and verified with earthquake data from USGS website. Also, both earth tide and ocean tide effects on earthquake are discussed and verified with earthquake data—tides did not trigger the natural earthquake, they only affect the earthquake activities and time. 展开更多
关键词 EARTHQUAKE VOLCANO Prediction and Forecast Tidal Effects Earth Rotation harmonics
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Effect of laser focus in two-color synthesized waveform on generation of soft x-ray high harmonics
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作者 陈炎波 李保昌 +3 位作者 李胥红 唐翔宇 张弛 金成 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第1期319-326,共8页
Synthesis of multi-color laser pulses has been developed as a promising way to improve low conversion efficiency of high-order harmonic generation(HHG). Here we systematically study the effect of laser focus in a two-... Synthesis of multi-color laser pulses has been developed as a promising way to improve low conversion efficiency of high-order harmonic generation(HHG). Here we systematically study the effect of laser focus in a two-color waveform on generation of macroscopic HHG in soft x-rays. We find that the dependence of HHG yields on laser focus at low or high gas pressure is sensitive to the characteristics of single-atom harmonic response, in which “short”-or “long”-trajectory emissions can be selectively controlled by changing the waveform of two-color synthesized laser pulse. We uncover the phase-matching mechanism of HHG in the gas medium by examining the propagation of the two-color waveform and the evolution of time-frequency emissions of high-harmonic field. We further reveal that the nonlinear effects, such as geometric phase, atomic dispersion, and plasma defocusing, are responsible for modification of two-color waveform upon propagation. This work can be used to find better macroscopic conditions for generating soft x-ray HHG by employing two-color optimized waveforms. 展开更多
关键词 high-order harmonic generation two-color waveform soft x-rays macroscopic propagation laser focus
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Genetic Algorithm Based 7-Level Step-Up Inverter with Reduced Harmonics and Switching Devices
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作者 T.Anand Kumar M.Kaliamoorthy I.Gerald Christopher Raj 《Intelligent Automation & Soft Computing》 SCIE 2023年第3期3081-3097,共17页
This paper presents a unique voltage-raising topology for a single-phase seven-level inverter with triple output voltage gain using single input source and two switched capacitors.The output voltage has been boosted u... This paper presents a unique voltage-raising topology for a single-phase seven-level inverter with triple output voltage gain using single input source and two switched capacitors.The output voltage has been boosted up to three times the value of input voltage by configuring the switched capacitors in series and parallel combinations which eliminates the use of additional step-up converters and transformers.The selective harmonic elimination(SHE)approach is used to remove the lower-order harmonics.The optimal switching angles for SHE is determined using the genetic algorithm.These switching angles are com-bined with a level-shifted pulse width modulation(PWM)technique for pulse generation,resulting in reduced total harmonic distortion(THD).A detailed com-parison has been made against other relevant seven-level inverter topologies in terms of the number of switches,drivers,diodes,capacitors,and boosting facil-ities to emphasize the benefits of the proposed model.The proposed topology is simulated using MATLAB/SIMULINK and an experimental prototype has been developed to validate the results.The Digital Signal Processing(DSP)TMS320F2812 board is used to generate the switching pulses for the proposed technique and the experimental results concur with the simulated model outputs. 展开更多
关键词 Genetic algorithm multilevel inverter pulse width modulation selective harmonic elimination switched capacitor
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Harmonics Extraction Scheme for Power Quality Improvement Using Chbmli-Dstatcom Module
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作者 R.Hemalatha M.Ramasamy 《Intelligent Automation & Soft Computing》 SCIE 2023年第2期1505-1525,共21页
In recent day’s power distribution system is distress from acute power quality issues.In this work,for compensating Power Quality(PQ)disturbances a seven level cascaded H-bridge inverter is implemented in distributio... In recent day’s power distribution system is distress from acute power quality issues.In this work,for compensating Power Quality(PQ)disturbances a seven level cascaded H-bridge inverter is implemented in distribution static com-pensator which protects power quality problems in currents.Distribution Static Compensator(DSTATCOM)aid to enhances power factor and removes total har-monic distortion which is drawn from non-linear load.The D–Q reference theory based hysteresis current controller is employed to generate reference current for compensation of harmonics and reactive power,additionally Probabilistic Neural Network(PNN)classifier is used which easily separates exact harmonics.In the meantime fuzzy logic controller is also used to maintain capacitor DC-link poten-tial.When comparing to PI controller it decreases steady state time and reduces maximum peak overshoot.Cascaded H-bridge multilevel inverter converts direct current to Alternating current,through inductor opposite harmonics are injected in Power Control Centre reduces source current harmonics and reactive power.The implementation of CHBMLI in distribution STATic COMpensator simulation model is simulated by means of MATLAB. 展开更多
关键词 CHBMLI distribution STATic COMpensator(DSTATCOM) probabilistic neural network(PNN) PI(proportional–integral) fuzzy logic control(FLC) total harmonic distortion(THD)
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Load Static Models for Conservation Voltage Reduction in the Presence of Harmonics
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作者 William Douglas Caetano Patrícia Romeiro da Silva Jota 《Energy and Power Engineering》 2016年第2期62-75,共14页
The Conservation Voltage Reduction (CVR) is a technique that aims to achieve the decrease of power consumption as a result of voltage reduction. The customer is supplied with the lowest possible voltage level compatib... The Conservation Voltage Reduction (CVR) is a technique that aims to achieve the decrease of power consumption as a result of voltage reduction. The customer is supplied with the lowest possible voltage level compatible with the stipulated level by the regulatory agency. International Standards ANSI C84.1-2006 and IEEE std 1250-1995 specify the range of supply voltage to electronics equipment from 0.9 to 1.05 pu of nominal voltage. To analyse the CVR effect in distribution systems with different load characteristics (residential, commercial, industrial or a combination of these), mathematical load models are used. Typically, these equipment/load models are used to analyse load aggregation without any consideration of its nonlinearity characteristics. Aiming to analyse the nonlinear characteristics and its consequences, this paper presents a discussion of the neglected variables as well as the results of a set of measurements of nonlinear loads. Different mathematical models are applied to obtain them for each load. Using these models the load aggregation is evaluated. It is presented that although the models show adequate results for individual loads, the same does not occur for aggregated models if the harmonic contribution is not considered. Consequently, to apply the load model in CVR it is necessary to consider the harmonics presence and the model has to be done using only the fundamental frequency data. The discussion about the causes is done and the models are compared with the measurements. 展开更多
关键词 CVR Load Model in the Presence of harmonics Conservation Voltage Reduction Load Model Aggregation in the Presence of harmonics
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Distorted Waveform Balancing Using an Artificial Bee Colony (ABC) Based Optimal Control for Mitigating Total Harmonics in Single Phase Inverter
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作者 N. M. Spencer Prathap Singh Kesavan Nair T. Ajith Bosco Raj 《Circuits and Systems》 2016年第9期2154-2167,共14页
The main objective of this paper is to reduce the total harmonics in a single phase voltage source inverter using Artificial Bee Colony (ABC) optimization technique for critical load applications. Single phase inverte... The main objective of this paper is to reduce the total harmonics in a single phase voltage source inverter using Artificial Bee Colony (ABC) optimization technique for critical load applications. Single phase inverter is a non-linear load using power electronic components causing distortions in the load voltage and current wave patterns from the sinusoidal waveforms due to harmonics. The mapping state space model for a full bridge voltage source inverter was developed using output load resistance. An optimal ABC technique has been designed and optimized values are estimated using a full bridge voltage controlled inverter using Proportional Integral Algorithm. The MATLAB/SIMULINK tool and Experimental setup were implemented and their THD values were estimated. Also this ABC scheme is compared with the previous results such as PI Algorithm, Fuzzy logic controller and Neuro-fuzzy controllers. From the simulation and experimental results using ABC algorithm, it is observed that the total harmonics are mitigated considerably compared to previous results with respect to the power quality standards such as IEEE-519 and IEC 61000. 展开更多
关键词 Voltage Source Inverter THD Proportional Integral Controller Artificial Bee Colony Voltage harmonics Current harmonics
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Wavelet analysis method of harmonics and electromagnetic interference in coal mines 被引量:5
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作者 ZHANG Fan LI Ming 《Mining Science and Technology》 EI CAS 2010年第4期576-580,共5页
In this study we propose an analytical method based on orthogonal wavelet transforms for detecting harmonic noise and Electromagnetic Interference (EMI) from power supply systems and equipment in coal mines. The metho... In this study we propose an analytical method based on orthogonal wavelet transforms for detecting harmonic noise and Electromagnetic Interference (EMI) from power supply systems and equipment in coal mines. The method will separate interference from signals through wavelet packet decomposition and then accomplish wavelet packet synthesis towards decomposition results after filtering, to remove harmonic noise and electromagnetic interference. Detailed simulation experiments are presented to study power harmonics and Electrical Fast Transient Burst (EFT/B) interference and to validate the effectiveness of our proposed method. The experimental results show that the proposed method, suitable for mutant and non-stationary signal detection, can accurately analyze harmonic interference and EMI in coal mines, as well as establish EMI source models and perform underground Electromagnetic Compatibility (EMC) prediction analyses. 展开更多
关键词 coal mine harmonics interference EMI EMC wavelet analysis
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Higher Harmonics in Free Electron Laser with a Two-Wavenumber Plane Wiggler Magnetic Field 被引量:1
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作者 LU Bo YANG Zhonghai +1 位作者 LIU Shenggang YU Junsheng 《Chinese Physics Letters》 SCIE CAS CSCD 1993年第4期223-226,共4页
The higher harmonics of the free electron laser(FEL)with a two-wavenumber plane wiggler magnetic field,which may induce a lot of higher harmonics,are investigated.Using a two-wavenumber wiggler comprised of two separa... The higher harmonics of the free electron laser(FEL)with a two-wavenumber plane wiggler magnetic field,which may induce a lot of higher harmonics,are investigated.Using a two-wavenumber wiggler comprised of two separate periodicities,k_(ω)and k_(ω)+Δk,numerical simulations show that the higher harmonic may be amplified and the first harmonic may be suppressed in this kind of FEL with an optimized parameterΔk.The coupling coefficient and gain coefficient in low-gain regime of the harmonic are also obtained. 展开更多
关键词 HARMONIC harmonics number
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Consonance of Complex Tones with Harmonics of Different Intensity 被引量:1
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作者 Antonio Bernini Federico Talamucci 《Open Journal of Acoustics》 2014年第2期78-89,共12页
The starting point of this study is the theory of tonal consonance by Plomp and Levelt. The major reference point is the theory of Critical Band and its use for evaluating consonance of simple tones. On the basis of s... The starting point of this study is the theory of tonal consonance by Plomp and Levelt. The major reference point is the theory of Critical Band and its use for evaluating consonance of simple tones. On the basis of such empirical criterion, our aim consists in providing a method of estimating the value of consonance of complex tones, by taking account not only of the number of harmonics, but also of the intensity of the partials which contribute to forming the tone. By introducing a specific algorithm, the level of consonance of a chord of complex tones is expressed in terms both of frequency differences and sound intensity of the partials. The results give rise to a series of considerations and applications, ranging from displaying the order of consonance of all intervals within the octave up to evaluating the hierarchy of chords in the frame of a musical scale. 展开更多
关键词 CONSONANCE Complex TONES Scale Critical BANDWIDTH INTENSITY of harmonics LOUDNESS
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An Improved Chirplet Transform and Its Application for Harmonics Detection 被引量:1
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作者 Guo-Sheng Hu Feng-Feng Zhu 《Circuits and Systems》 2011年第3期107-111,共5页
The chirplet transform is the generalization form of fast Fourier transform , short-time Fourier transform, and wavelet transform. It has the most flexible time frequency window and successfully used in practices. How... The chirplet transform is the generalization form of fast Fourier transform , short-time Fourier transform, and wavelet transform. It has the most flexible time frequency window and successfully used in practices. However, the chirplet transform has not inherent inverse transform, and can not overcome the signal reconstructing problem. In this paper, we proposed the improved chirplet transform (ICT) and constructed the inverse ICT. Finally, by simulating the harmonic voltages, The power of the improved chirplet transform are illustrated for harmonic detection. The contours clearly showed the harmonic occurrence time and harmonic duration. 展开更多
关键词 harmonics IMPROVED CHIRPLET Transform (ICT) S-TRANSFORM TIME-FREQUENCY Representation (TFR)
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Lock-in-Amplifier Model for Analyzing the Behavior of Signal Harmonics in Magnetic Particle Imaging 被引量:1
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作者 Kenya Murase Kazuki Shimada 《Open Journal of Applied Sciences》 2018年第5期170-183,共14页
The purpose of this study was to present a lock-in-amplifier model for analyzing the behavior of signal harmonics in magnetic particle imaging (MPI) and some simulation results based on this model. In the lock-in-ampl... The purpose of this study was to present a lock-in-amplifier model for analyzing the behavior of signal harmonics in magnetic particle imaging (MPI) and some simulation results based on this model. In the lock-in-amplifier model, the signal induced by magnetic nanoparticles (MNPs) in a receiving coil was multiplied with a reference signal, and was then fed through a low-pass filter to extract the DC component of the signal (output signal). The MPI signal was defined as the mean of the absolute value of the output signal. The magnetization and particle size distribution of MNPs were assumed to obey the Langevin theory of paramagnetism and a log-normal distribution, respectively, and the strength of the selection magnetic field (SMF) in MPI was assumed to be given by the product of the gradient strength of the SMF and the distance from the field-free region (x). In addition, Gaussian noise was added to the signal induced by MNPs using normally-distributed random numbers. The relationships between the MPI signal and x were calculated for the odd- and even-numbered harmonics and were investigated for various time constants of the low-pass filter used in the lock-in amplifier and particle sizes and their distributions of MNPs. We found that the behavior of the MPI signal largely depended on the time constant of the low-pass filter and the particle size of MNPs. This lock-in-amplifier model will be useful for better understanding, optimizing, and developing MPI, and for designing MNPs appropriate for MPI. 展开更多
关键词 MAGNETIC Particle IMAGING (MPI) Lock-in-Amplifier Model SIGNAL harmonics MAGNETIC Nanoparticles (MNPs)
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At wavelength coherent scatterometry microscope using high-order harmonics for EUV mask inspection 被引量:1
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作者 Yutaka Nagata Tetsuo Harada +2 位作者 Takeo Watanabe Hiroo Kinoshita Katsumi Midorikawa 《International Journal of Extreme Manufacturing》 2019年第3期1-12,共12页
In this review,we describe our research on the development of the 13.5 nm coherent microscope using high-order harmonics for the mask inspection of extreme ultraviolet(EUV)lithography.EUV lithography is a game-changin... In this review,we describe our research on the development of the 13.5 nm coherent microscope using high-order harmonics for the mask inspection of extreme ultraviolet(EUV)lithography.EUV lithography is a game-changing piece of technology for high-volume manufacturing of commercial semiconductors.Many top manufacturers apply EUV technology for fabricating the most critical layers of 7 nm chips.Fabrication and inspection of defect-free masks,however,still remain critical issues in EUV technology.Thus,in our pursuit for a resolution,we have developed the coherent EUV scatterometry microscope(CSM)system with a synchrotron radiation(SR)source to establish the actinic metrology,along with inspection algorithms.The intensity and phase images of patterned EUV masks were reconstructed from diffraction patterns using ptychography algorithms.To expedite the practical application of the CSM,we have also developed a standalone CSM,based on high-order harmonic generation,as an alternative to the SR-CSM.Since the application of a coherent 13.5 nm harmonic enabled the production of a high contrast diffraction pattern,diffraction patterns of sub-100 ns size defects in a 2D periodic pattern mask could be observed.Reconstruction of intensity and phase images from diffraction patterns were also performed for a periodic line-and-space structure,an aperiodic angle edge structure,as well as a cross pattern in an EUV mask. 展开更多
关键词 high-order harmonics coherent EUV light EUV lithography coherent EUV scatterometry microscope synchrotron radiation EUV mask inspection
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