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Design of a High Precision Multichannel 3D Bioprinter
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作者 Jintao Li Bin Zhang +1 位作者 Yichen Luo Huayong Yang 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2023年第6期127-146,共20页
Three-dimensional(3D)printing technology is expected to solve the organ shortage problem.However,owing to the accuracy limitations,it is difficult for the current bioprinting technology to achieve an accurate control ... Three-dimensional(3D)printing technology is expected to solve the organ shortage problem.However,owing to the accuracy limitations,it is difficult for the current bioprinting technology to achieve an accurate control of the spatial position and distribution of a single cell or single component droplet.In this study,to accurately achieve the directional deposition of different cells and biological materials in the spatial position for the construction of large transplantable tissues and organs,a high-precision multichannel 3D bioprinter with submicron-level motion accuracy is designed,and concurrent and synergistic printing methods are proposed.Based on the high-precision motion characteristics of the gantry structure and the requirements of concurrent and synergistic printing,a 3D bioprint-ing system with a set of 6 channels is designed to achieve six-in-one printing.Based on the Visual C++environ-ment,a control system software that integrates the programmable multi-axis controller(PMAC)motion,pneumatic,and temperature control subsystems was developed and designed.Finally,based on measurements and experiments,the 3D bioprinter and its control system was verified to fulfil the requirements of multichannel,concurrent,and syn-ergistic printing with submicron-level motion accuracy,significantly shortening the printing time and improving the printing efficiency.This study not only provides an equipment basis for printing complex heterogeneous tissue structures,but also improves the flexibility and functionality of bioprinting,and ultimately makes the construction of complex multicellular tissues or organs possible. 展开更多
关键词 3D bioprinting high precision Concurrent and synergistic printing MULTICHANNEL Control system Six-in-one printing
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High Precision Tungsten Isotope Measurements by MC-ICPMS
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作者 MEI Qingfeng YANG Jinhui 《Acta Geologica Sinica(English Edition)》 SCIE CAS CSCD 2017年第S1期273-274,共2页
1 Introduction The short-lived 182Hf-182W system is generally acknowledged as the best chronometer of metal-silicate segregation that occurred during the early evolution of asteroids and terrestrial planets due to its... 1 Introduction The short-lived 182Hf-182W system is generally acknowledged as the best chronometer of metal-silicate segregation that occurred during the early evolution of asteroids and terrestrial planets due to its following properties:(1)Hf-W fractionation commonly occurs during metal-silicate differentiation;(2)Both Hf and W are highly refractory elements,therefore most 展开更多
关键词 high precision Tungsten Isotope Measurements by MC-ICPMS HF MC
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NONEL High Precision MS Delay Detonator
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作者 Daze Lin, Peng Yang Civil and Environmental Engineering School, University of Science and Technology Beijing, Beijing 100083, China 《Journal of University of Science and Technology Beijing》 CSCD 2001年第3期164-166,共3页
The NONEL high precision MS Delay Detonator (FDG-1 detonator) is introduced. The main aspects about the FDG-1 deton- ator include the choice of structure, delay composition, control of the gas chamber, optimum charge ... The NONEL high precision MS Delay Detonator (FDG-1 detonator) is introduced. The main aspects about the FDG-1 deton- ator include the choice of structure, delay composition, control of the gas chamber, optimum charge and density suitable explosives per meter in the NONEL tube, base firing charge and the main specifications. The improvement of the characteristics of FDG-1 detonator has been tested systematically The testing method is reliable and its precision can meet the demand for usage. 展开更多
关键词 NONEL high precision MS delay detonator delay time
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A novel high precision Doppler frequency estimation method based on the third-order phase-locked loop
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作者 Tao Deng Mao-Li Ma +1 位作者 Qing-Hui Liu Ya-Jun Wu 《Research in Astronomy and Astrophysics》 SCIE CAS CSCD 2021年第9期83-90,共8页
In deep space exploration,many engineering and scientific requirements require the accuracy of the measured Doppler frequency to be as high as possible.In our paper,we analyze the possible frequency measurement points... In deep space exploration,many engineering and scientific requirements require the accuracy of the measured Doppler frequency to be as high as possible.In our paper,we analyze the possible frequency measurement points of the third-order phase-locked loop(PLL)and find a new Doppler measurement strategy.Based on this finding,a Doppler frequency measurement algorithm with significantly higher measurement accuracy is obtained.In the actual data processing,compared with the existing engineering software,the accuracy of frequency of 1 second integration is about 5.5 times higher when using the new algorithm.The improved algorithm is simple and easy to implement.This improvement can be easily combined with other improvement methods of PLL,so that the performance of PLL can be further improved. 展开更多
关键词 Doppler frequency measurement:deep space exploration:carrier tracking:phase locked loop:high precision
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Study of high-precision earth sensor with triple-FOV 被引量:6
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作者 WANG Hongjian XING Fei +2 位作者 YOU Zheng CHU Daping ZHENG Lungui 《Instrumentation》 2014年第2期23-29,共7页
Earth sensors are widely used in spacecraft for attitude determination. They need to have a very large field of view(FOV)( > 120°) and relatively low accuracy while being used in the aircrafts around orbit. A ... Earth sensors are widely used in spacecraft for attitude determination. They need to have a very large field of view(FOV)( > 120°) and relatively low accuracy while being used in the aircrafts around orbit. A triple-FOV infrared earth sensor is proposed in this paper. It uses three pieces of standard infrared detectors with a wavelength range of 14;16μm,to sense the horizontal circle by detecting the infrared light emitted from the earth. From which,the geocentric vector can be obtained. A mathematic model is established and a validation model is set up to provide input parameters for the mathematic model. The simulation results of the two models show that the output of the mathematic model coincides with the known parameters. Based on the above analysis,a prototype has been built and tested. The test results show that the angle measurement error is about 0. 002° and hence such a triple-FOV earth sensor is capable to provide high-precision position information for autonomous navigation. 展开更多
关键词 Earth Sensor Validation Model high precision Autonomous Navigation
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High Resolution ID-TIMS Redefines the Distribution and Age of the Main Mesozoic Lacustrine Hydrocarbon Source Rocks in the Ordos Basin,China 被引量:1
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作者 CUI Jingwei ZHU Rukai +2 位作者 ZHANG Zhongyi Jahandar RAMEZANI LI Yang 《Acta Geologica Sinica(English Edition)》 SCIE CAS CSCD 2023年第2期581-588,共8页
Using high-precision zircon U-Pb ID-TIMS geochronology,tuffs from the Chang 9 shale and the Chang 7 shale were dated.The tuff in the Chang 9 shale is 241.47±0.17 Ma,which falls between the top tuff age of 241.06&... Using high-precision zircon U-Pb ID-TIMS geochronology,tuffs from the Chang 9 shale and the Chang 7 shale were dated.The tuff in the Chang 9 shale is 241.47±0.17 Ma,which falls between the top tuff age of 241.06±0.12 Ma and the bottom tuff age of 241.558±0.093 Ma in the Chang 7 shale.These reveal that the Chang 9 and Chang 7 shales are contemporaneous,belonging to the Ladinian stage of the Middle Triassic.This insight expands the region of the main source rock of Chang 7 to the northeast and will inform the search for the deep Chang 9 shale petroleum system,increasing the scope for exploring the Chang 7 shale system in northern Shaanxi.The research results clarify the relationship between the two sets of shale in the Yanchang Formation and redefine the distribution range of the Chang 7 shale in the Ordos Basin.At the same time,it shows that there is a cross-layer problem in the stratigraphic division of the Yanchang Formation in different regions,the high-precision U-Pb dating technology providing a reference for the fine stratigraphic correlation of other continental basins in the world. 展开更多
关键词 ID-TIMS high precision age redefining distribution Chang 7 shale Chang 9 shale Ordos Basin
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A High Precision Forecasting Model and Its Constructing Method for Vein Type Gold Deposits
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作者 Zhang Jun Faculty of Earth Resources, China University of Geosciences, Wuhan 430074 《Journal of China University of Geosciences》 SCIE CSCD 2001年第2期100-107,共8页
A high precision forecasting and prospecting model incorporating the “field theory field structure analysis field simulation”, a temporal and spatial structural framework reflecting local extremely fine structures, ... A high precision forecasting and prospecting model incorporating the “field theory field structure analysis field simulation”, a temporal and spatial structural framework reflecting local extremely fine structures, is established to make an effective extraction and an integrated analysis of multivariate forecasting information. This model can best show not only the coupling between metallogenic anomalous structure, mineralized structure and information structure, but also the extraction, optimization, matching and summarization of key forecasting information. The technological keys to this model are the fine structural analysis of geological and geophysical and geochemical anomalous fields and metallogenic fields, and the establishment of occurrence patterns for the spatial location of orebodies. 展开更多
关键词 high precision forecasting model anomalous structure mineralized structure orebody location.
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Geodynamic hazards and risk assessment at the Karachaganak oil,gas,and condensate field
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作者 A.Аbetov S.Kudaibergenova 《Geodesy and Geodynamics》 CSCD 2023年第1期80-89,共10页
The geodynamic hazards and risk assessment at the Karachaganak oil,gas,and condensate field(KOGCF)were explored on the northern board of the Pre-Caspian Basin to predict the consequences of the longterm exploitation o... The geodynamic hazards and risk assessment at the Karachaganak oil,gas,and condensate field(KOGCF)were explored on the northern board of the Pre-Caspian Basin to predict the consequences of the longterm exploitation of this field.We integrate multiple measurements,including repeated accurate leveling,Global Positioning System(GPS)measurements,and high precision gravimetric and seismological monitoring at the KOGCF.The results of geodynamic monitoring at the KOGCF for the first time made it possible to prove noticeable seismic deformation processes in the sedimentary cover under the influence of hydrocarbon production.The vertical displacements and horizontal movement along faults,changes in local gravity anomalies,and earthquake sources at depths comparable to hydrocarbon production intervals at the KOGCF have been identified.The maximum amplitudes of modern vertical movement of the earth’s surface and the minimum values of the differently oriented horizontal movement were revealed within the projection on the ground surface of the crest of the carbonate massif(Upper Devonian-Lower Permian age).The results suggest the expansion of uneven compression in the crest of the KOGCF while tension processes occur on its periphery.There is a decrease in gravity variations in relation to the slopes of this massif in areas with active hydrocarbon production.An extended zone of high-gradient steps of AGa anomalies,spatially coinciding with the position of fault zones,is mapped along the periphery of the contour of production wells.In the northeastern part of the KOGCF,seismic events were registered practically in the depth intervals of the productive horizons from which hydrocarbons are produced.A spatial relationship between the seismic events and the anomalous deformation activity in the northeast KOGCF has been revealed.Consequently,the field development has provoked both intense deformation of the earth’s surface and weak local seismicity. 展开更多
关键词 Geodynamic monitoring high precision gravimetric GPS measurements Repeat accurate leveling Seismological observation
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Current sensor based on diamond nitrogen-vacancy color center
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作者 史子阳 高伟 +6 位作者 王启 郭浩 唐军 李中豪 温焕飞 马宗敏 刘俊 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第7期118-123,共6页
High precision current measurement is very important for the calibration of various high-precision equipment and the measurement of other precision detection fields.A new current sensor based on diamond nitrogen-vacan... High precision current measurement is very important for the calibration of various high-precision equipment and the measurement of other precision detection fields.A new current sensor based on diamond nitrogen-vacancy(NV)color center magnetic measurement method is proposed to realize the accurate measurement of current.This new current method can greatly improve the accuracy of current measurement.Experiments show that the linearity of the current sensor based on diamond NV color center can reach up to 33 ppm,which is superior to other current sensors and solves the problem of low linearity.When the range of input current is 5-40 A,the absolute error of the calculated current is less than 51μA,and the relative error is 2.42×10^(-6) at 40 A.Combined with the research content and results of the experiment,the application of the current sensor in the field of current precision measurement is prospected. 展开更多
关键词 current sensor DIAMOND high precision nitrogen-vacancy(NV)color center
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Establishment and Error Analysis of Model of Interference Fringe Contrast for Laser Tracing Measurement Optical System
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作者 Hongfang Chen Mengyang Sun +3 位作者 Yinglun Ma Liang Tang Yu Wang Huixu Song 《Journal of Harbin Institute of Technology(New Series)》 CAS 2023年第4期37-49,共13页
A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performa... A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performance.A comprehensive model of the interference fringe contrast based on the laser tracing system s measurement principle was established in this study.Simulation results based on ZEMAX verified the model.According to the simulation results,the placement angle of the analyzer had a direct influence on the interference fringe contrast.When the angle of the polarized light to the analyzer’s transmission axis increased from 65°to 85°,each contrast of the four-way interference fringes decreased from 0.9996 to 0.3528,the interference fringe contrast is decreased by 65%.Under the split ratio of beam splitters in the interference part(BS 1)of 5∶5,when the splitting ratio of BS 2 changed from 2∶8 to 8∶2,the fringe contrast of the interference signals received by the photodetectors increased,but the injection light intensity onto the PSD reflected by BS 2 decreased.The significant influence of the tracing performance was verified by the experiments.When splitting ratio of BS 2 increased,the contrast of the interference fringes increased.Due to the weakening of the incident light intensity of the PSD caused by the change of BS 2 splitting ratio,the response time of the tracing system is increased by 23.7 ms.As a result,the tracing performance of the laser tracing measurement optical system was degraded.An important theoretical basis was provided to evaluate and improve the accuracy and reliability of laser tracing measurement systems. 展开更多
关键词 interference fringe contrast laser tracing measurement high precision measurement ZEMAX.
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Multiple Regression and Big Data Analysis for Predictive Emission Monitoring Systems
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作者 Zinovi Krougly Vladimir Krougly Serge Bays 《Applied Mathematics》 2023年第5期386-410,共25页
Predictive Emission Monitoring Systems (PEMS) offer a cost-effective and environmentally friendly alternative to Continuous Emission Monitoring Systems (CEMS) for monitoring pollution from industrial sources. Multiple... Predictive Emission Monitoring Systems (PEMS) offer a cost-effective and environmentally friendly alternative to Continuous Emission Monitoring Systems (CEMS) for monitoring pollution from industrial sources. Multiple regression is one of the fundamental statistical techniques to describe the relationship between dependent and independent variables. This model can be effectively used to develop a PEMS, to estimate the amount of pollution emitted by industrial sources, where the fuel composition and other process-related parameters are available. It often makes them sufficient to predict the emission discharge with acceptable accuracy. In cases where PEMS are accepted as an alternative method to CEMS, which use gas analyzers, they can provide cost savings and substantial benefits for ongoing system support and maintenance. The described mathematical concept is based on the matrix algebra representation in multiple regression involving multiple precision arithmetic techniques. Challenging numerical examples for statistical big data analysis, are investigated. Numerical examples illustrate computational accuracy and efficiency of statistical analysis due to increasing the precision level. The programming language C++ is used for mathematical model implementation. The data for research and development, including the dependent fuel and independent NOx emissions data, were obtained from CEMS software installed on a petrochemical plant. 展开更多
关键词 Matrix Algebra in Multiple Linear Regression Numerical Integration high precision Computation Applications in Predictive Emission Monitoring Systems
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Magnetic field data processing methods of the China Seismo-Electromagnetic Satellite 被引量:9
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作者 Bin Zhou YanYan Yang +4 位作者 YiTeng Zhang XiaoChen Gou BingJun Cheng JinDong Wang Lei Li 《Earth and Planetary Physics》 2018年第6期455-461,共7页
The High Precision Magnetometer(HPM) on board the China Seismo-Electromagnetic Satellite(CSES) allows highly accurate measurement of the geomagnetic field; it includes FGM(Fluxgate Magnetometer) and CDSM(Coupled Dark ... The High Precision Magnetometer(HPM) on board the China Seismo-Electromagnetic Satellite(CSES) allows highly accurate measurement of the geomagnetic field; it includes FGM(Fluxgate Magnetometer) and CDSM(Coupled Dark State Magnetometer)probes. This article introduces the main processing method, algorithm, and processing procedure of the HPM data. First, the FGM and CDSM probes are calibrated according to ground sensor data. Then the FGM linear parameters can be corrected in orbit, by applying the absolute vector magnetic field correction algorithm from CDSM data. At the same time, the magnetic interference of the satellite is eliminated according to ground-satellite magnetic test results. Finally, according to the characteristics of the magnetic field direction in the low latitude region, the transformation matrix between FGM probe and star sensor is calibrated in orbit to determine the correct direction of the magnetic field. Comparing the magnetic field data of CSES and SWARM satellites in five continuous geomagnetic quiet days, the difference in measurements of the vector magnetic field is about 10 nT, which is within the uncertainty interval of geomagnetic disturbance. 展开更多
关键词 China Seismo-Electromagnetic Satellite(CSES) high precision Magnetometer(HPM) fluxgate magnetometer CPT magnetometer data processing
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A precision sampling system for fast corrector power supply of photon source
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作者 Peng Liu F.L.Long Y.Z.Du 《Radiation Detection Technology and Methods》 CSCD 2023年第1期139-148,共10页
Purpose At present,the high-energy photon source(HEPS)is under construction in Beijing.HEPS has beam emittance lower than 40 pm rad.In order to ensure low beam emittance,a high-performance fast orbit feedback system(F... Purpose At present,the high-energy photon source(HEPS)is under construction in Beijing.HEPS has beam emittance lower than 40 pm rad.In order to ensure low beam emittance,a high-performance fast orbit feedback system(FOFB)is designed for fast and accurate correction of beam orbit.The FOFB needs to have the smallest adjustment step.Therefore,as the execution unit of the FOFB system,the output current resolution of the fast corrector power supply needs to be as small as possible.In FOFB systems,precise correction of beam orbit is required for fast corrector power supply with output current resolution better than 60μA.A precision digital sampling system needs to be designed to meet the high requirements of output current resolution.Method The precision operational amplifier is used to complete the scaling and sampling of signals.The precision operational amplifier is used as the front-end processing in the circuit design to complete the amplitude processing and filtering.Meanwhile,the precision operational amplifier is used as the driver of the precision analog to digital converter(ADC)chip.A precision ADC chips based on oversampling technology is used.With this scheme,the selected ADC chip can have the advantages of both high speed and high precision.A simulation prototype is built for test,and the performance parameters of key chips in the design are given.Results A precision voltage reference is used to test the designed digital sampling system.The test results showed that the acquisition system has an effective resolution of 21.6 bits.The HEPS fast corrector power supply is used for testing the developed precision sampling system.The test result showed that the output current resolution of fast corrector power supply is lower than 16μA. 展开更多
关键词 Photon source FOFB Fast corrector high precision Over sampling ADC high resolution
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日本热处理装备的发展动向 被引量:2
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作者 高桥庸夫 《热处理》 CAS 2000年第3期25-29,共5页
本文从提高产品性能,降低制造成本和环境保护等方面简述了21世纪日本材料及热处理装备的发展动向。
关键词 环境保护 热处理装备 渗碳 渗氮 制造成本
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Design of precision acquisition system for precision power supply of photon source
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作者 P.Liu F.L.Long Y.Z.Du 《Radiation Detection Technology and Methods》 CSCD 2021年第4期586-593,共8页
Purpose Photon source has developed to the fourth generation.The requirements for beam stability and power supply output current stability have been greatly improved.In this paper,a precision acquisition system is des... Purpose Photon source has developed to the fourth generation.The requirements for beam stability and power supply output current stability have been greatly improved.In this paper,a precision acquisition system is designed for improving the stability for power supply output current.Method The acquisition system consists of two parts,the analog to digital converter(ADC)system and the temperature control system.The composition and software simulation analysis are given in this paper.Results A prototype is made and tested.The test results showed that the acquisition system has an effective resolution of 15.5 bits,signal-to-noise ratio(SNR)of 98 dB,and integral nonlinearity(INL)of 86 ppm.The internal temperature stable range is±0.06℃.Conclusions The acquisition system can fully meet the requirements of the developed photon source. 展开更多
关键词 Photon source Beam stability high precision Digital temperature control SNR
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Highly Precise Corneal Surgery and All-Optical Histology with Femtosecond Lasers
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作者 Leander Zickler Guenter Giese +1 位作者 Josef F. Bille Frieder H. Loesel 《光学学报》 EI CAS CSCD 北大核心 2003年第S1期811-812,共2页
We present an optimized femtosecond laser system for intrastromal tissue manipulation, application studies of commercial fs-LASIK procedures and results from the first successful demonstration of nonlinear (SHG) imagi... We present an optimized femtosecond laser system for intrastromal tissue manipulation, application studies of commercial fs-LASIK procedures and results from the first successful demonstration of nonlinear (SHG) imaging of corneal ultrastrucrure and fs-induced morphology modification. 展开更多
关键词 with as in of highly Precise Corneal Surgery and All-Optical Histology with Femtosecond Lasers that SHG been were for
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Design and derivation of the dual transponder carrier ranging system 被引量:2
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作者 Ming-chen ZHAO Chun-hui WANG Zhong-he JIN 《Journal of Zhejiang University-Science C(Computers and Electronics)》 SCIE EI 2013年第5期383-394,共12页
The accuracy of microwave ranging is mainly limited by the frequency instability of the oscillator that generates the carrier phase signal. A dual transponder carrier ranging method is used to minimize the oscillator ... The accuracy of microwave ranging is mainly limited by the frequency instability of the oscillator that generates the carrier phase signal. A dual transponder carrier ranging method is used to minimize the oscillator noise by combining the reference and the to-and-fro measurements. This ranging approach together with pseudo-noise ranging or other means can be used to measure the inter-satellite distance with a high precision. The pseudo-noise ranging system or other ranging systems help to solve the integer circles while the dual transponder ranging system guarantees the accurate fractional circle. The two satellites work in the master-slave mode. The range measurements are derived on the master satellite while the slave satellite just coherently transfers the received signal, so that the dual transponder ranging system does not need to rely on the time tagging system to synchronize the two satellites. This study first describes the dual transponder carrier ranging system and shows how the system removes most of the oscillator noise components effectively. Then, a detailed design scheme on the frequency planning of the ranging system is presented and the supporting analysis illustrates the feasibility of this system. Based on the design innovation, a laboratory demonstration system is assembled to verify the realizability of the dual transponder ranging system. The experimental results demonstrate that a high level of accuracy (about 30 μm under laboratory circumstance) can be achieved by the use of the proposed dual transponder carrier ranging system. 展开更多
关键词 Inter-satellite Carrier ranging Oscillator noise high precision Ranging accuracy
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Analysis and elimination of tri-band beacon interference with the fluxgate sensors onboard CSES 被引量:1
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作者 TONG YuQi CHENG BingJun +13 位作者 MIAO YuanQing ZHOU Bin ZHU XingHong YANG YanYan LIU Ji GOU XiaoChen ZHANG YiTeng WANG JinDong LI Lei MAGNES Werner LAMMEGGER Roland POLLINGER Andreas ZEREN Zhima SHEN XuHui 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2021年第10期2328-2336,共9页
High precision magnetometer(HPM)is a magnetic field detection payload onboard China Seismo-Electromagnetic Satellite(CSES),including two fluxgate magnetometers(FGM)and a coupled dark state magnetometer(CDSM).Observati... High precision magnetometer(HPM)is a magnetic field detection payload onboard China Seismo-Electromagnetic Satellite(CSES),including two fluxgate magnetometers(FGM)and a coupled dark state magnetometer(CDSM).Observations show that FGM appears to be influenced when tri-band beacon(TBB)is powered on and emits electromagnetic waves.The interference phenomenon is further validated based on both in-orbit observation analysis and electromagnetic compatibility(EMC)tests on the ground.A joint correction algorithm based on the least square fitting and first-order difference method according to scalar magnetometer data is proposed to eliminate the interference.The algorithm significantly improves the consistency of HPM data.After correction,the average scalar deviation error could be reduced from 9.0 nT to around 0.7 nT. 展开更多
关键词 China Seismo-Electromagnetic Satellite high precision magnetometer MAGNETOMETER data processing
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Analyses of dynamic characteristics of a fluid-filled thin rectangular porous plate with various boundary conditions 被引量:1
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作者 Yu Xiang 《Acta Mechanica Solida Sinica》 SCIE EI CSCD 2017年第1期87-97,共11页
Based on the classical theory of thin plate and Biot theory, a precise model of the transverse vibrations of a thin rectangular porous plate is proposed. The first order differential equations of the porous plate are ... Based on the classical theory of thin plate and Biot theory, a precise model of the transverse vibrations of a thin rectangular porous plate is proposed. The first order differential equations of the porous plate are derived in the frequency domain. By considering the coupling effect between the solid phase and the fluid phase and without any hypothesis for the fluid displacement, the model presented here is rigorous and close to the real materials. Owing to the use of extended homogeneous capacity precision integration method and precise element method, the model can be applied in higher frequency range than pure numerical methods. This model also easily adapts to various boundary conditions. Numerical results are given for two different porous plates under different excitations and boundary conditions. 展开更多
关键词 Thin rectangular porous plate Biot theory Vibration First order differential equations Extended homogeneous capacity high precision integration method
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Comparison of EUV Photomask Metrology Between CD-AFM and TEM
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作者 Gaoliang Dai Kai Hahm +1 位作者 Lipfert Sebastian Markus Heidelmann 《Nanomanufacturing and Metrology》 EI 2022年第2期91-100,共10页
Accurate metrology of extreme ultraviolet (EUV) photomask is a crucial task. In this paper, two different methods for reference EUV photomask metrology are compared. One is the critical dimension atomic force microsco... Accurate metrology of extreme ultraviolet (EUV) photomask is a crucial task. In this paper, two different methods for reference EUV photomask metrology are compared. One is the critical dimension atomic force microscopy (CD-AFM). In the measurements, the contribution of its AFM tip geometry is usually the dominant error source, as measured AFM images are the dilated results of measured structures by the AFM tip geometry. To solve this problem, a bottom-up approach has been applied in calibrating the (effective) AFM tip geometry where the result is traceably calibrated to the lattice constant of silicon crystals. The other is transmission electron microscopy (TEM). For achieving measurement traceability, structure features are measured in pairs in TEM images;thus the distance between the structure pair calibrated by a metrological AFM in prior can be applied to determine the magnification of the TEM image. In this study, selected photomask structures are calibrated by the CD-AFM, and then sample prepared and measured by high-resolution TEM nearly at the same location. The results are then compared. Of six feature groups compared, the results agree well within the measurement uncertainty, indicating excellent performance of the developed methodology. This research supports the development of a photomask standard, which is applied as a “reference ruler” with improved low measurement uncertainty in photomask fabs. 展开更多
关键词 Extreme ultraviolet(EUV)photomask standard Traceable calibration METROLOGY Critical dimension(CD) Atomic force microscopy(AFM) Transmission electron microscopy(TEM) high precision Low measurement uncertainty
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