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Plasma parameter diagnosis using hydrogen emission spectra of a quartz-chamber 2.45 GHz ECRIS at Peking University
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作者 WenBin Wu HaiTao Ren +8 位作者 ShiXiang Peng Yuan Xu JiaMei Wen Tao Zhang JingFeng Zhang AiLin Zhang Jiang Sun ZhiYu Guo JiaEr Chen 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS CSCD 2018年第4期69-74,共6页
A quartz-chamber 2.45 GHz electron cyclotron resonance ion source(ECRIS) was designed for diagnostic purposes at Peking University [Patent Number: ZL 201110026605.4]. This ion source can produce a maximum 84 m A hydro... A quartz-chamber 2.45 GHz electron cyclotron resonance ion source(ECRIS) was designed for diagnostic purposes at Peking University [Patent Number: ZL 201110026605.4]. This ion source can produce a maximum 84 m A hydrogen ion beam at 50 k V with a duty factor of 10%. The root-mean-square(RMS) emittance of this beam is less than 0.12π mm mrad. In our initial work,the electron temperature and electron density inside the plasma chamber had been measured with the line intensity ratio of noble gases. Based on these results, the atomic and molecular emission spectra of hydrogen were applied to determine the dissociation degree of hydrogen and the vibrational temperature of hydrogen molecules in the ground state, respectively. Measurements were performed at gas pressures from 4×10^(-4) to 1×10^(-3) Pa and at input peak RF power ranging from 1000 to 1800 W. The dissociation degree of hydrogen in the range of 0.5%-10% and the vibrational temperature of hydrogen molecules in the ground state in the range of 3500-8500 K were obtained. The plasma processes inside this ECRIS chamber were discussed based on these results. 展开更多
关键词 electron cyclotron resonance ion source(ECRIS) hydrogen plasma optical emission spectroscopy dissociation degree of hydrogen vibrational temperature
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