As an important part of buoy-type ocean monitoring systems,the inductively coupled mooring chain solves the problem of data cotransmission through the multinode sensors that it carries,which is significant for the rap...As an important part of buoy-type ocean monitoring systems,the inductively coupled mooring chain solves the problem of data cotransmission through the multinode sensors that it carries,which is significant for the rapid acquisition of fish,hydrology,and other information.This paper is based on a seawater channel transmission model with a depth of 300 m and a bandwidth of 2 MHz.An orthogonal frequency division multiplexing(OFDM)technology is used to overcome the multipath effect of signal transmission on a seawater medium.The adaptive technology is integrated into the OFDM,and an improved joint subcarrier and bit power allocation algorithm is proposed.This algorithm solves the problem of dynamic subcarrier allocation during the cotransmission of underwater multinode user data in seawater channels.The results show that the algorithm complexity can be reduced by 0.18126×10^(-2)s during one complete OFDM system data transmission by the improved greedy algorithm,and a total of 216 bits are transmitted by the OFDM.The normalized channel capacity can be improved by 0.012 bit s^(-1)Hz^(-1).At the bit error ratio(BER)of 10^(-3),the BER performance can be improved by approximately 6 d B.When the numbers of users are 4 and 8,the improved algorithm increases the channel capacity,and the higher the number of users,the more evident the channel capacity improvement effect is.The results of this paper have an important reference value for enhancing the transmission performance of inductively coupled mooring chain underwater multinode data.展开更多
To maintain the high-density plasma source in inductively coupled plasma(ICP),very high radiofrequency power is often delivered to the antenna,which can heat the dielectric windows near the antenna to high temperature...To maintain the high-density plasma source in inductively coupled plasma(ICP),very high radiofrequency power is often delivered to the antenna,which can heat the dielectric windows near the antenna to high temperature.This high temperature can modulate the plasma characteristics to a large degree.We thus study the effect of dielectric window temperature on plasma parameters in two different ICP structures based on COMSOL software.The distributions of various plasma species are examined at different dielectric window temperatures.The concentration of neutral gas is found to be largely modulated at high dielectric window temperature,which further affects the electron collision probability with neutrals and the electron temperature.However,the electron density profiles are barely affected by the dielectric window temperature,which is mainly concentrated at the center of the reactor due to the fixed power input and pressure.展开更多
In this work,a two-dimensional hybrid model,which consists of a bulk fluid module,a sheath module and an ion Monte-Carlo module,is developed to investigate the modulation of ion energy and angular distributions at dif...In this work,a two-dimensional hybrid model,which consists of a bulk fluid module,a sheath module and an ion Monte-Carlo module,is developed to investigate the modulation of ion energy and angular distributions at different radial positions in a biased argon inductively coupled plasma.The results indicate that when the bias voltage amplitude increases or the bias frequency decreases,the ion energy peak separation width becomes wider.Besides,the widths of the ion energy peaks at the edge of the substrate are smaller than those at the center due to the lower plasma density there,indicating the nonuniformity of the ion energy distribution function(IEDF)along the radial direction.As the pressure increases from 1 to 10 Pa,the discrepancy of the IEDFs at different radial positions becomes more obvious,i.e.the IEDF at the radial edge is characterized by multiple low energy peaks.When a dual frequency bias source is applied,the IEDF exhibits three or four peaks,and it could be modulated efficiently by the relative phase between the two bias frequencies.The results obtained in this work could help to improve the radial uniformity of the IEDF and thus the etching process.展开更多
The effects of driving frequency on plasma parameters and electron heating efficiency are studied in cylindrical inductively coupled plasma(ICP) source. Measurements are made in an Ar discharge for driving frequency a...The effects of driving frequency on plasma parameters and electron heating efficiency are studied in cylindrical inductively coupled plasma(ICP) source. Measurements are made in an Ar discharge for driving frequency at 13.56/2 MHz, and pressures of 0.4-1.2 Pa. In 13.56 MHz discharge, higher electron density(n_e) and higher electron temperature(T_e) are observed in comparison with 2 MHz discharge at 0.6-1.2 Pa. However, slightly higher n_e and T_e are observed in 2 MHz discharge at 0.4 Pa. This observation is explained by enhanced electron heating efficiency due to the resonance between the oscillation of 2 MHz electromagnetic field and electron-neutral collision process at 0.4 Pa. It is also found that the variation of T_edistribution is different in 13.56 and 2 MHz discharge.For ICP at 13.56 MHz, T_eshows an edge-high profile at 0.4-1.2 Pa. For 2 MHz discharge, T_e remains an edge-high distribution at 0.4-0.8 Pa. However, the distribution pattern involves into a center-high profile at 0.9-1.2 Pa. The spatial profiles of n_e remain a center-high shape in both 13.56 and 2 MHz discharges, which indicates the nonlocal kinetics at low pressures. Better uniformity could be achieved by using 2 MHz discharge. The effects of gas pressure on plasma parameters are also examined. An increase in gas pressure necessitates the rise of n_e in both 13.56 and 2 MHz discharges. Meanwhile, T_e drops when gas pressure increases and shows a flatter distribution at higher pressure.展开更多
Amorphous spherical silica powders were prepared by inductively coupled thermal plasma treatment at a radio frequency of 36.2 MHz. The effects of the added content of hydrogen and nitrogen into argon(serving as the sh...Amorphous spherical silica powders were prepared by inductively coupled thermal plasma treatment at a radio frequency of 36.2 MHz. The effects of the added content of hydrogen and nitrogen into argon(serving as the sheath gas), as well as the carrier gas flow rate, on the spheroidization rate of silica powders, were investigated. The prepared silica powders before and after plasma treatment were examined by scanning electron microscopy, X-ray diffraction, and laser granulometric analysis. Results indicated that the average size of the silica particles increased, and the transformation of crystals into the amorphous state occurred after plasma treatment. Discharge image processing was employed to analyze the effect of the plasma temperature field on the spheroidization rate. The spheroidization rate of the silica powder increased with the increase of the hydrogen content in the sheath gas. On the other hand, the spheroidization rate of the silica power first increased and then decreased with the increase of the nitrogen content in the sheath gas. Moreover, the amorphous content increased with the increase of the spheroidization rate of the silica powder.展开更多
A numerical model is developed to study the conductivity effects during the transition from collisionless to collisional regimes in cylindrical inductively coupled argon plasmas at pressures of 0.1-20 Pa.The model con...A numerical model is developed to study the conductivity effects during the transition from collisionless to collisional regimes in cylindrical inductively coupled argon plasmas at pressures of 0.1-20 Pa.The model consists of electron kinetics module,electromagnetics module,and global model module.It allows for self-consistent description of non-local electron kinetics and collisionless electron heating in terms of the conductivity of homogeneous hot plasma.Simulation results for non-local conductivity case are compared with predictions for the assumption of local conductivity case.Electron densities and effective electron temperatures under non-local and local conductivities show obvious differences at relatively low pressures.As increasing pressure,the results under the two cases of conductivities tend to converge,which indicates the transition from collisionless to collisional regimes.At relatively low pressures the local negative power absorption is predicted by non-local conductivity case but not captured by local conductivity case.The two-dimensional(2D)profiles of electron current density and electric field are coincident for local conductivity case in the pressure range of interest,but it roughly holds true for non-local conductivity case at very high pressure.In addition,an effective conductivity with consideration of non-collisional stochastic heating effect is introduced.The effective conductivity almost reproduces the electron density and effective electron temperature for the non-local conductivity case,but does not capture the non-local relation between electron current and electric field as well as the local negative power absorption that is observed for nonlocal conductivity case at low pressures.展开更多
In the inductively coupled data transmission system of the mooring buoy, the carrier signal frequency of the transmission channel is limited due to the inherent characteristics of the system, resulting in limited chan...In the inductively coupled data transmission system of the mooring buoy, the carrier signal frequency of the transmission channel is limited due to the inherent characteristics of the system, resulting in limited channel bandwidth. The limited channel bandwidth limits the increase in inductively coupled data transmission rate.In order to improve the inductively coupled data transmission rate of mooring buoy as much as possible without damaging the data transmission performance, a new method was proposed in this paper. The method is proposed to improve the data transmission rate by selecting the appropriate carrier signal frequencies based on the principle of maximizing the amplitude value of amplitude-frequency characteristic curve of the system. Research has been done according to this method as follows. Firstly, according to the inductively coupled transmission mooring buoy structure, the inductively coupled data transmission circuit model was established. The binary frequency shift keying(2FSK) digital signal modulation mode was selected. Through theoretical analysis, the relation between the carrier signal frequency and the data transmission performance, the relation between the carrier signal frequency and the 2FSK signal bandwidth were obtained. Secondly, the performance and the bandwidth of the signal transmission were studied for the inherent characteristics of the actual inductively coupled data transmission system. The amplitude-frequency characteristic of the system was analyzed by experiments. By selecting the appropriate carrier signal frequency parameters, an excellent data transmission performance was guaranteed and a large 2FSK signal bandwidth was obtained. Finally, an inductively coupled data transmission rate optimization experiment and a bit error rate analysis experiment were designed and carried out. The results show that the high-speed and reliable data transmission of the system was realized and the rate can reach 100 kbps.展开更多
In this study, a simple method for the simultaneous determination of trace metals(Cu, V, Co, Zn) in coastal seawater using the Mg(OH)2 coprecipitation inductively coupled plasma mass spectrometry(ICP-MS) was developed...In this study, a simple method for the simultaneous determination of trace metals(Cu, V, Co, Zn) in coastal seawater using the Mg(OH)2 coprecipitation inductively coupled plasma mass spectrometry(ICP-MS) was developed. This multi-element method enables the simultaneous extraction of four metals, particularly Co and V. The recoveries of Cu, Co, V and Zn after Mg(OH)2 coprecipitation were 73%, 96%, 94% and 92%, which means that our procedure was well-suited to the determination of these four trace metals. The detection limits were 3.81, 0.18, 6.09 and 1.91 nmol L-1, respectively. Then, applying this method to the simultaneous determination of these four metals in coastal water samples from the East China Sea revealed that the concentrations of Cu, Zn, Co and V were higher in bottom waters compared to water at other depths, and higher concentrations were generally observed at the Yangtze River estuary. Additionally, example vertical profiles of dissolved trace metal concentrations for the East China Sea in spring and autumn are compared. These findings indicate that Zn had the greatest seasonal variation followed by Cu, V and Co. For Zn and Co, the concentrations were higher during spring than during autumn. For Cu and V, the seasonal variation in the concentrations was opposite.展开更多
Infant rice cereals were analyzed for total arsenic, inorganic arsenic (i-As) and the organic arsenic species monomethylarsonoic acid (MMA) and dimethylarsinic acid (DMA) using liquid chromatography inductively couple...Infant rice cereals were analyzed for total arsenic, inorganic arsenic (i-As) and the organic arsenic species monomethylarsonoic acid (MMA) and dimethylarsinic acid (DMA) using liquid chromatography inductively coupled plasma mass spectrometry (LC-ICP-MS). Total arsenic concentrations in the samples ranged from 110 ng/gup to 420 ng/g. The i-As in the rice cereals accounted for 33% to 77% of the total arsenic. The observed variability between infant rice cereals makes a dietary survey approach to accessing arsenic exposures difficult.展开更多
This paper gives a numerical study on the flow and temperature fields in an induced plasma reactor, which worked in 0.5 ATM with air as a working gas. We employed a two-dimensional mode of an inductively coupled plasm...This paper gives a numerical study on the flow and temperature fields in an induced plasma reactor, which worked in 0.5 ATM with air as a working gas. We employed a two-dimensional mode of an inductively coupled plasma to calculate the temperature and flow field of the reactor as well as the generator. The algorithm is based on the solutions of the two-dimensional continuity, momentum, and energy equations in term of vorticity, stream function and enthalpy. An upwind finite-difference scheme was adopted to solve those equations with appropriate boundary conditions. The computed results show that there is a flat region with little parameter change in the reactor, that the diameter of the region is not much larger than that of the generator and that a deep change of parameter exists in the outer side of the region.展开更多
The development of laser sampling for optical emission spectrometry is reviewed.Advantages and limitations of pulsed laser sampling are compared with those of continuouslaser sampling.A novel method of laser sampling ...The development of laser sampling for optical emission spectrometry is reviewed.Advantages and limitations of pulsed laser sampling are compared with those of continuouslaser sampling.A novel method of laser sampling of liquid samples for inductively coup-led plasma—atomic emission spectrometry has been proposed,and its analytical perform-ance investigated.Experimental results showed that,as a method of sample introduction,laser vaporization of liquid samples enjoyed certain advantages,e.g.,much higher sensitivi-ty,much lower detection limit and reduced sample volume,over solution nebulization.Aperspective of the application of laser sampling—inductively coupled plasma——actomic emis-sion spectrometry for rock and mineral analysis is estimated as well.展开更多
A system is described in which a graphite furnace electrothermal vaporization device is employed for the introduction of microlitre liquid sample into an inductively coupled argon plasma. The technique provides a pico...A system is described in which a graphite furnace electrothermal vaporization device is employed for the introduction of microlitre liquid sample into an inductively coupled argon plasma. The technique provides a picogram detection limit and an adequate precision with a relative standard deviation of 4%. Mechanism of analyte condensation in transport process is explored. As an application, the technique combined with DDTC/CCl4 extraction is used to enrich and determine non- rare earth impurities in highly pure La2O3.展开更多
Element zirconium reacted with polytetrafluoroethylene (PTFE) dispersed in isopropanol-water mixture to form volatile fluoride when heated in an electrothermal graphite furnace, and the fluorides formed subsequently w...Element zirconium reacted with polytetrafluoroethylene (PTFE) dispersed in isopropanol-water mixture to form volatile fluoride when heated in an electrothermal graphite furnace, and the fluorides formed subsequently were vaporized into ICP for atomization and excitation. The technique provides a picogram detectkm limit and adequate precision of 4% relative standard deviation. Linear dynamic range covers over three orders of magnitude. The process of sample preparation it very convenient. It is expected that the method proposed is suitable for determination of other refractory elements.展开更多
In this work, incompressible and compressible flows of background gas are characterized in argon inductively coupled plasma by using a fluid model, and the respective influence of the two flows on the plasma propertie...In this work, incompressible and compressible flows of background gas are characterized in argon inductively coupled plasma by using a fluid model, and the respective influence of the two flows on the plasma properties is specified. In the incompressible flow, only the velocity variable is calculated, while in the compressible flow, both the velocity and density variables are calculated. The compressible flow is more realistic; nevertheless, a comparison of the two types of flow is convenient for people to investigate the respective role of velocity and density variables. The peripheral symmetric profile of metastable density near the chamber sidewall is broken in the incompressible flow. At the compressible flow, the electron density increases and the electron temperature decreases. Meanwhile, the metastable density peak shifts to the dielectric window from the discharge center, besides for the peripheral density profile distortion, similar to the incompressible flow.The velocity profile at incompressible flow is not altered when changing the inlet velocity, whereas clear peak shift of velocity profile from the inlet to the outlet at compressible flow is observed as increasing the gas flow rate. The shift of velocity peak is more obvious at low pressures for it is easy to compress the rarefied gas. The velocity profile variations at compressible flow show people the concrete residing processes of background molecule and plasma species in the chamber at different flow rates. Of more significance is it implied that in the usual linear method that people use to calculate the residence time, one important parameter in the gas flow dynamics, needs to be rectified. The spatial profile of pressure simulated exhibits obvious spatial gradient. This is helpful for experimentalists to understand their gas pressure measurements that are always taken at the chamber outlet. At the end, the work specification and limitations are listed.展开更多
This study aimed to evaluate the uncertainty of simultaneous determination of lead(Pb),cadmium(Cd)and arsenic(As)in cosmetics by microwave digestion-inductively coupled plasma mass spectrometry(ICP-MS)with ^72Ge,^115I...This study aimed to evaluate the uncertainty of simultaneous determination of lead(Pb),cadmium(Cd)and arsenic(As)in cosmetics by microwave digestion-inductively coupled plasma mass spectrometry(ICP-MS)with ^72Ge,^115In and ^209Bi as internal standards.According to the method of Safety and Technical Standards for Cosmetics(2015),a mathematical model was established to evaluate the sources and components of uncertainty for the determination of lead,cadmium and arsenic in cosmetics.The results showed that the uncertainties in the determination of lead,cadmium,and arsenic elements in cosmetics were(10.1±0.6)mg/kg,k=2,(4.84±0.28)mg/kg,k=2,(2.04±0.18)mg/kg,k=2,respectively.The main factors that affect the uncertainty of determination results were standard substance,calibration curve,recovery and measurement repeatability.展开更多
Inductively coupled channels are based on the electromagnetic induction principle and realize long-distance current signal transmission through seawater.Due to a few difficulties in performing actual experiments,it is...Inductively coupled channels are based on the electromagnetic induction principle and realize long-distance current signal transmission through seawater.Due to a few difficulties in performing actual experiments,it is unclear how the seawater medium affects the frequency selectivity of the current signal.In this paper,a dual dipole model of the inductively coupled seawater transmission channel is established for the traditional short-distance current field transmission mode.The transmission characteristics of electrical signals in seawater are theoretically derived.A platform is used to measure the amplitude-frequency and phase-frequency characteristics of the current signal transmission in seawater with transmission frequencies ranging from 30 kHz to 1 MHz,and transmission distances in the vertical range of 4 m.The COMSOL Multiphysics simulation and practical test analysis are carried out to analyze the frequency selectivity of seawater conductivity.It is proved that the seawater resistance increases as the frequency increases,which is the key problem that affects the current signal.This study provides an important theoretical support and experimental evidence for improving the transmission performance of long-distance underwater current signals.展开更多
Time-resolved radial uniformity of pulse-modulated inductively coupled O_(2)/Ar plasma has been investigated by means of a Langmuir probe as well as an optical probe in this paper. The radial uniformity of plasma has ...Time-resolved radial uniformity of pulse-modulated inductively coupled O_(2)/Ar plasma has been investigated by means of a Langmuir probe as well as an optical probe in this paper. The radial uniformity of plasma has been discussed through analyzing the nonuniformity factor β(calculated by the measured n_e, lower β means higher plasma radial uniformity). The results show that during the active-glow period, the radial distribution of ne exhibits an almost flat profile at the beginning phase, but it converts into a parabola-like profile during the steady state. The consequent evolution for β is that when the power is turned on, it declines to a minimum at first, and then it increases to a maximum, after that, it decays until it keeps constant. This phenomenon can be explained by the fact that the ionization gradually becomes stronger at the plasma center and meanwhile the rebuilt electric field(plasma potential and ambipolar potential) will confine the electrons at the plasma center as well. Besides, the mean electron energy( <ε>_(on)) at the pulse beginning decreases with the increasing duty cycle. This will postpone the plasma ignition after the power is turned on. This phenomenon has been verified by the emission intensity of Ar(λ = 750.4 nm). During the after-glow period, it is interesting to find that the electrons have a large depletion rate at the plasma center. Consequently, ne forms a hollow distribution in the radial direction at the late stage of after-glow. Therefore, β exhibits a maximum at the same time. This can be attributed to the formation of negative oxygen ion(O^(-)) at the plasma center when the power has been turned off.展开更多
Compared to the conventional phase change materials,the new phase change material Ta-Sb2Te3 has the advantages of excellent data retention and good material stability.In this letter,the etching characteristics of Ta-S...Compared to the conventional phase change materials,the new phase change material Ta-Sb2Te3 has the advantages of excellent data retention and good material stability.In this letter,the etching characteristics of Ta-Sb2Te3 were studied by using CF4/Ar.The results showed that when CF4/Ar=25/25,the etching power was 600 W and the etching pressure was 2.5 Pa,the etching speed was up to 61 nm/min.The etching pattern of Ta-Sb2Te3 film had a smooth side wall and good perpendicularity(close to 90°),smooth surface of the etching(RMS was 0.51nm),and the etching uniformity was fine.Furthermore,the mechanism of this etching process was analyzed by X-ray photoelectron spectroscopy(XPS).The main damage mechanism of ICP etching in CF4/Ar was studied by X-ray diffraction(XRD).展开更多
The characteristics of an innovative configuration of multiple radiofrequency(RF)coils immersed in a large metallic chamber are presented.Water-cooled copper coils were mounted within the slits of double-walled glass ...The characteristics of an innovative configuration of multiple radiofrequency(RF)coils immersed in a large metallic chamber are presented.Water-cooled copper coils were mounted within the slits of double-walled glass tubes,which were immersed into a stainless-steel chamber.The coils were connected in parallel to a gamma-type matching network,powered by an RF generator operating at industrial frequency.Adjustable leads enabled optimisation of the line impedances and thus uniformly distributed RF power across the four coils.Transitions from E-to H-mode and vice versa were measured for all coils at various oxygen pressures between 5 and 25 Pa.A uniform plasma was sustained in H-mode at the absorbed power threshold,which increased monotonously with increasing pressure in the metallic chamber.All coils exhibit the same E-to H-mode transition hysteresis and need the same amount of power for transitioning from E-to H-mode.The setup enables maintaining uniform plasma in virtually any number of coils at high power without the risk of arcing and without the dead volume typical for a classical configuration with coils mounted outside the metallic chamber.展开更多
基金the National Natural Science Foundation of China(No.62071329)the National Science Foundation of Tianjin(No.20JCYB JC00130)。
文摘As an important part of buoy-type ocean monitoring systems,the inductively coupled mooring chain solves the problem of data cotransmission through the multinode sensors that it carries,which is significant for the rapid acquisition of fish,hydrology,and other information.This paper is based on a seawater channel transmission model with a depth of 300 m and a bandwidth of 2 MHz.An orthogonal frequency division multiplexing(OFDM)technology is used to overcome the multipath effect of signal transmission on a seawater medium.The adaptive technology is integrated into the OFDM,and an improved joint subcarrier and bit power allocation algorithm is proposed.This algorithm solves the problem of dynamic subcarrier allocation during the cotransmission of underwater multinode user data in seawater channels.The results show that the algorithm complexity can be reduced by 0.18126×10^(-2)s during one complete OFDM system data transmission by the improved greedy algorithm,and a total of 216 bits are transmitted by the OFDM.The normalized channel capacity can be improved by 0.012 bit s^(-1)Hz^(-1).At the bit error ratio(BER)of 10^(-3),the BER performance can be improved by approximately 6 d B.When the numbers of users are 4 and 8,the improved algorithm increases the channel capacity,and the higher the number of users,the more evident the channel capacity improvement effect is.The results of this paper have an important reference value for enhancing the transmission performance of inductively coupled mooring chain underwater multinode data.
基金financially supported by National Natural Science Foundation of China(NSFC)(Nos.12105035 and 11935005)Guangdong Basic and Applied Basic Research Foundation(No.2021B1515120018)+1 种基金the Fundamental Research Funds for the Central Universities(No.DUT21TD104)the Advanced Space Propulsion Laboratory of BICE and Beijing Engineering Research Center of Efficient and Green Aerospace Propulsion Technology(No.Lab ASP-2020-01)。
文摘To maintain the high-density plasma source in inductively coupled plasma(ICP),very high radiofrequency power is often delivered to the antenna,which can heat the dielectric windows near the antenna to high temperature.This high temperature can modulate the plasma characteristics to a large degree.We thus study the effect of dielectric window temperature on plasma parameters in two different ICP structures based on COMSOL software.The distributions of various plasma species are examined at different dielectric window temperatures.The concentration of neutral gas is found to be largely modulated at high dielectric window temperature,which further affects the electron collision probability with neutrals and the electron temperature.However,the electron density profiles are barely affected by the dielectric window temperature,which is mainly concentrated at the center of the reactor due to the fixed power input and pressure.
基金financially supported by National Natural Science Foundation of China(Nos.11935005 and 11875101)the Fundamental Research Funds for the Central Universities(No.DUT21LAB110)。
文摘In this work,a two-dimensional hybrid model,which consists of a bulk fluid module,a sheath module and an ion Monte-Carlo module,is developed to investigate the modulation of ion energy and angular distributions at different radial positions in a biased argon inductively coupled plasma.The results indicate that when the bias voltage amplitude increases or the bias frequency decreases,the ion energy peak separation width becomes wider.Besides,the widths of the ion energy peaks at the edge of the substrate are smaller than those at the center due to the lower plasma density there,indicating the nonuniformity of the ion energy distribution function(IEDF)along the radial direction.As the pressure increases from 1 to 10 Pa,the discrepancy of the IEDFs at different radial positions becomes more obvious,i.e.the IEDF at the radial edge is characterized by multiple low energy peaks.When a dual frequency bias source is applied,the IEDF exhibits three or four peaks,and it could be modulated efficiently by the relative phase between the two bias frequencies.The results obtained in this work could help to improve the radial uniformity of the IEDF and thus the etching process.
基金supported by National Natural Science Foundation of China (No. 11475038)
文摘The effects of driving frequency on plasma parameters and electron heating efficiency are studied in cylindrical inductively coupled plasma(ICP) source. Measurements are made in an Ar discharge for driving frequency at 13.56/2 MHz, and pressures of 0.4-1.2 Pa. In 13.56 MHz discharge, higher electron density(n_e) and higher electron temperature(T_e) are observed in comparison with 2 MHz discharge at 0.6-1.2 Pa. However, slightly higher n_e and T_e are observed in 2 MHz discharge at 0.4 Pa. This observation is explained by enhanced electron heating efficiency due to the resonance between the oscillation of 2 MHz electromagnetic field and electron-neutral collision process at 0.4 Pa. It is also found that the variation of T_edistribution is different in 13.56 and 2 MHz discharge.For ICP at 13.56 MHz, T_eshows an edge-high profile at 0.4-1.2 Pa. For 2 MHz discharge, T_e remains an edge-high distribution at 0.4-0.8 Pa. However, the distribution pattern involves into a center-high profile at 0.9-1.2 Pa. The spatial profiles of n_e remain a center-high shape in both 13.56 and 2 MHz discharges, which indicates the nonlocal kinetics at low pressures. Better uniformity could be achieved by using 2 MHz discharge. The effects of gas pressure on plasma parameters are also examined. An increase in gas pressure necessitates the rise of n_e in both 13.56 and 2 MHz discharges. Meanwhile, T_e drops when gas pressure increases and shows a flatter distribution at higher pressure.
基金financially supported by the National Natural Science Foundation of China (Nos. 21377133, 11535003, and 11405221)
文摘Amorphous spherical silica powders were prepared by inductively coupled thermal plasma treatment at a radio frequency of 36.2 MHz. The effects of the added content of hydrogen and nitrogen into argon(serving as the sheath gas), as well as the carrier gas flow rate, on the spheroidization rate of silica powders, were investigated. The prepared silica powders before and after plasma treatment were examined by scanning electron microscopy, X-ray diffraction, and laser granulometric analysis. Results indicated that the average size of the silica particles increased, and the transformation of crystals into the amorphous state occurred after plasma treatment. Discharge image processing was employed to analyze the effect of the plasma temperature field on the spheroidization rate. The spheroidization rate of the silica powder increased with the increase of the hydrogen content in the sheath gas. On the other hand, the spheroidization rate of the silica power first increased and then decreased with the increase of the nitrogen content in the sheath gas. Moreover, the amorphous content increased with the increase of the spheroidization rate of the silica powder.
基金sponsored by National Natural Science Foundation of China(Nos.12105041,11935005 and 12035003)Fundamental Research Funds for the Central Universities(No.2232020D-40)Shanghai Sailing Program(No.20YF1401300)。
文摘A numerical model is developed to study the conductivity effects during the transition from collisionless to collisional regimes in cylindrical inductively coupled argon plasmas at pressures of 0.1-20 Pa.The model consists of electron kinetics module,electromagnetics module,and global model module.It allows for self-consistent description of non-local electron kinetics and collisionless electron heating in terms of the conductivity of homogeneous hot plasma.Simulation results for non-local conductivity case are compared with predictions for the assumption of local conductivity case.Electron densities and effective electron temperatures under non-local and local conductivities show obvious differences at relatively low pressures.As increasing pressure,the results under the two cases of conductivities tend to converge,which indicates the transition from collisionless to collisional regimes.At relatively low pressures the local negative power absorption is predicted by non-local conductivity case but not captured by local conductivity case.The two-dimensional(2D)profiles of electron current density and electric field are coincident for local conductivity case in the pressure range of interest,but it roughly holds true for non-local conductivity case at very high pressure.In addition,an effective conductivity with consideration of non-collisional stochastic heating effect is introduced.The effective conductivity almost reproduces the electron density and effective electron temperature for the non-local conductivity case,but does not capture the non-local relation between electron current and electric field as well as the local negative power absorption that is observed for nonlocal conductivity case at low pressures.
基金supported by the National Natural Science Foundation of China [Grant number 61733012]Qingdao Ocean Engineering and Technology Think Tank Joint Fund Project [Grant number 20190131-2]the Shandong Provincial Natural Science Fund Project [Grant number ZR2017MEE072]。
文摘In the inductively coupled data transmission system of the mooring buoy, the carrier signal frequency of the transmission channel is limited due to the inherent characteristics of the system, resulting in limited channel bandwidth. The limited channel bandwidth limits the increase in inductively coupled data transmission rate.In order to improve the inductively coupled data transmission rate of mooring buoy as much as possible without damaging the data transmission performance, a new method was proposed in this paper. The method is proposed to improve the data transmission rate by selecting the appropriate carrier signal frequencies based on the principle of maximizing the amplitude value of amplitude-frequency characteristic curve of the system. Research has been done according to this method as follows. Firstly, according to the inductively coupled transmission mooring buoy structure, the inductively coupled data transmission circuit model was established. The binary frequency shift keying(2FSK) digital signal modulation mode was selected. Through theoretical analysis, the relation between the carrier signal frequency and the data transmission performance, the relation between the carrier signal frequency and the 2FSK signal bandwidth were obtained. Secondly, the performance and the bandwidth of the signal transmission were studied for the inherent characteristics of the actual inductively coupled data transmission system. The amplitude-frequency characteristic of the system was analyzed by experiments. By selecting the appropriate carrier signal frequency parameters, an excellent data transmission performance was guaranteed and a large 2FSK signal bandwidth was obtained. Finally, an inductively coupled data transmission rate optimization experiment and a bit error rate analysis experiment were designed and carried out. The results show that the high-speed and reliable data transmission of the system was realized and the rate can reach 100 kbps.
基金financially supported by the National Natural Science Foundation of China (Nos. 41140037, 41276069)the Young Scientist Award Science Foundation of Shandong, China (BS2010HZ026)the Open Science Funding of the Key Laboratory of the First Institute of Oceanography, SOA (MESE-2011-03)
文摘In this study, a simple method for the simultaneous determination of trace metals(Cu, V, Co, Zn) in coastal seawater using the Mg(OH)2 coprecipitation inductively coupled plasma mass spectrometry(ICP-MS) was developed. This multi-element method enables the simultaneous extraction of four metals, particularly Co and V. The recoveries of Cu, Co, V and Zn after Mg(OH)2 coprecipitation were 73%, 96%, 94% and 92%, which means that our procedure was well-suited to the determination of these four trace metals. The detection limits were 3.81, 0.18, 6.09 and 1.91 nmol L-1, respectively. Then, applying this method to the simultaneous determination of these four metals in coastal water samples from the East China Sea revealed that the concentrations of Cu, Zn, Co and V were higher in bottom waters compared to water at other depths, and higher concentrations were generally observed at the Yangtze River estuary. Additionally, example vertical profiles of dissolved trace metal concentrations for the East China Sea in spring and autumn are compared. These findings indicate that Zn had the greatest seasonal variation followed by Cu, V and Co. For Zn and Co, the concentrations were higher during spring than during autumn. For Cu and V, the seasonal variation in the concentrations was opposite.
文摘Infant rice cereals were analyzed for total arsenic, inorganic arsenic (i-As) and the organic arsenic species monomethylarsonoic acid (MMA) and dimethylarsinic acid (DMA) using liquid chromatography inductively coupled plasma mass spectrometry (LC-ICP-MS). Total arsenic concentrations in the samples ranged from 110 ng/gup to 420 ng/g. The i-As in the rice cereals accounted for 33% to 77% of the total arsenic. The observed variability between infant rice cereals makes a dietary survey approach to accessing arsenic exposures difficult.
文摘This paper gives a numerical study on the flow and temperature fields in an induced plasma reactor, which worked in 0.5 ATM with air as a working gas. We employed a two-dimensional mode of an inductively coupled plasma to calculate the temperature and flow field of the reactor as well as the generator. The algorithm is based on the solutions of the two-dimensional continuity, momentum, and energy equations in term of vorticity, stream function and enthalpy. An upwind finite-difference scheme was adopted to solve those equations with appropriate boundary conditions. The computed results show that there is a flat region with little parameter change in the reactor, that the diameter of the region is not much larger than that of the generator and that a deep change of parameter exists in the outer side of the region.
文摘The development of laser sampling for optical emission spectrometry is reviewed.Advantages and limitations of pulsed laser sampling are compared with those of continuouslaser sampling.A novel method of laser sampling of liquid samples for inductively coup-led plasma—atomic emission spectrometry has been proposed,and its analytical perform-ance investigated.Experimental results showed that,as a method of sample introduction,laser vaporization of liquid samples enjoyed certain advantages,e.g.,much higher sensitivi-ty,much lower detection limit and reduced sample volume,over solution nebulization.Aperspective of the application of laser sampling—inductively coupled plasma——actomic emis-sion spectrometry for rock and mineral analysis is estimated as well.
文摘A system is described in which a graphite furnace electrothermal vaporization device is employed for the introduction of microlitre liquid sample into an inductively coupled argon plasma. The technique provides a picogram detection limit and an adequate precision with a relative standard deviation of 4%. Mechanism of analyte condensation in transport process is explored. As an application, the technique combined with DDTC/CCl4 extraction is used to enrich and determine non- rare earth impurities in highly pure La2O3.
基金Present address: Centre of Material Research and Testing. Wuhan Univeraity of Technology, Wuhan
文摘Element zirconium reacted with polytetrafluoroethylene (PTFE) dispersed in isopropanol-water mixture to form volatile fluoride when heated in an electrothermal graphite furnace, and the fluorides formed subsequently were vaporized into ICP for atomization and excitation. The technique provides a picogram detectkm limit and adequate precision of 4% relative standard deviation. Linear dynamic range covers over three orders of magnitude. The process of sample preparation it very convenient. It is expected that the method proposed is suitable for determination of other refractory elements.
基金Project supported by the National Natural Science Foundations of China(Grant No.11305023)
文摘In this work, incompressible and compressible flows of background gas are characterized in argon inductively coupled plasma by using a fluid model, and the respective influence of the two flows on the plasma properties is specified. In the incompressible flow, only the velocity variable is calculated, while in the compressible flow, both the velocity and density variables are calculated. The compressible flow is more realistic; nevertheless, a comparison of the two types of flow is convenient for people to investigate the respective role of velocity and density variables. The peripheral symmetric profile of metastable density near the chamber sidewall is broken in the incompressible flow. At the compressible flow, the electron density increases and the electron temperature decreases. Meanwhile, the metastable density peak shifts to the dielectric window from the discharge center, besides for the peripheral density profile distortion, similar to the incompressible flow.The velocity profile at incompressible flow is not altered when changing the inlet velocity, whereas clear peak shift of velocity profile from the inlet to the outlet at compressible flow is observed as increasing the gas flow rate. The shift of velocity peak is more obvious at low pressures for it is easy to compress the rarefied gas. The velocity profile variations at compressible flow show people the concrete residing processes of background molecule and plasma species in the chamber at different flow rates. Of more significance is it implied that in the usual linear method that people use to calculate the residence time, one important parameter in the gas flow dynamics, needs to be rectified. The spatial profile of pressure simulated exhibits obvious spatial gradient. This is helpful for experimentalists to understand their gas pressure measurements that are always taken at the chamber outlet. At the end, the work specification and limitations are listed.
文摘This study aimed to evaluate the uncertainty of simultaneous determination of lead(Pb),cadmium(Cd)and arsenic(As)in cosmetics by microwave digestion-inductively coupled plasma mass spectrometry(ICP-MS)with ^72Ge,^115In and ^209Bi as internal standards.According to the method of Safety and Technical Standards for Cosmetics(2015),a mathematical model was established to evaluate the sources and components of uncertainty for the determination of lead,cadmium and arsenic in cosmetics.The results showed that the uncertainties in the determination of lead,cadmium,and arsenic elements in cosmetics were(10.1±0.6)mg/kg,k=2,(4.84±0.28)mg/kg,k=2,(2.04±0.18)mg/kg,k=2,respectively.The main factors that affect the uncertainty of determination results were standard substance,calibration curve,recovery and measurement repeatability.
文摘Inductively coupled channels are based on the electromagnetic induction principle and realize long-distance current signal transmission through seawater.Due to a few difficulties in performing actual experiments,it is unclear how the seawater medium affects the frequency selectivity of the current signal.In this paper,a dual dipole model of the inductively coupled seawater transmission channel is established for the traditional short-distance current field transmission mode.The transmission characteristics of electrical signals in seawater are theoretically derived.A platform is used to measure the amplitude-frequency and phase-frequency characteristics of the current signal transmission in seawater with transmission frequencies ranging from 30 kHz to 1 MHz,and transmission distances in the vertical range of 4 m.The COMSOL Multiphysics simulation and practical test analysis are carried out to analyze the frequency selectivity of seawater conductivity.It is proved that the seawater resistance increases as the frequency increases,which is the key problem that affects the current signal.This study provides an important theoretical support and experimental evidence for improving the transmission performance of long-distance underwater current signals.
基金supported by the National Natural Science Foundation of China (Grant Nos. 11805150, 11875100, 11705141, and 11775282)the Dean Fund of the School of Optoelectronic Engineering (Grant No. 2019GDYT04)+1 种基金the Fund from the Xi'an Key Laboratory of Intelligent Detection and Perception (Grant No. 201805061ZD12CG45)the Key Industry Innovation Chain Project of Shaanxi Provincial Science and the Technology Department,China (Grant No. 2018ZDCXL-GY-08-02-01)。
文摘Time-resolved radial uniformity of pulse-modulated inductively coupled O_(2)/Ar plasma has been investigated by means of a Langmuir probe as well as an optical probe in this paper. The radial uniformity of plasma has been discussed through analyzing the nonuniformity factor β(calculated by the measured n_e, lower β means higher plasma radial uniformity). The results show that during the active-glow period, the radial distribution of ne exhibits an almost flat profile at the beginning phase, but it converts into a parabola-like profile during the steady state. The consequent evolution for β is that when the power is turned on, it declines to a minimum at first, and then it increases to a maximum, after that, it decays until it keeps constant. This phenomenon can be explained by the fact that the ionization gradually becomes stronger at the plasma center and meanwhile the rebuilt electric field(plasma potential and ambipolar potential) will confine the electrons at the plasma center as well. Besides, the mean electron energy( <ε>_(on)) at the pulse beginning decreases with the increasing duty cycle. This will postpone the plasma ignition after the power is turned on. This phenomenon has been verified by the emission intensity of Ar(λ = 750.4 nm). During the after-glow period, it is interesting to find that the electrons have a large depletion rate at the plasma center. Consequently, ne forms a hollow distribution in the radial direction at the late stage of after-glow. Therefore, β exhibits a maximum at the same time. This can be attributed to the formation of negative oxygen ion(O^(-)) at the plasma center when the power has been turned off.
基金This work was financially supported by the Natural Science Foundation of China(61874129)the National Key Research and Development Program of China(2017YFB0405601).
文摘Compared to the conventional phase change materials,the new phase change material Ta-Sb2Te3 has the advantages of excellent data retention and good material stability.In this letter,the etching characteristics of Ta-Sb2Te3 were studied by using CF4/Ar.The results showed that when CF4/Ar=25/25,the etching power was 600 W and the etching pressure was 2.5 Pa,the etching speed was up to 61 nm/min.The etching pattern of Ta-Sb2Te3 film had a smooth side wall and good perpendicularity(close to 90°),smooth surface of the etching(RMS was 0.51nm),and the etching uniformity was fine.Furthermore,the mechanism of this etching process was analyzed by X-ray photoelectron spectroscopy(XPS).The main damage mechanism of ICP etching in CF4/Ar was studied by X-ray diffraction(XRD).
基金funded by the Slovenian Research Agency,project No.L2-9235(Innovative configuration of inductively coupled gaseous plasma sources for up-scaling to industrialsize reactors)core funding P2-0082(thin-film structures and plasma surface engineering)。
文摘The characteristics of an innovative configuration of multiple radiofrequency(RF)coils immersed in a large metallic chamber are presented.Water-cooled copper coils were mounted within the slits of double-walled glass tubes,which were immersed into a stainless-steel chamber.The coils were connected in parallel to a gamma-type matching network,powered by an RF generator operating at industrial frequency.Adjustable leads enabled optimisation of the line impedances and thus uniformly distributed RF power across the four coils.Transitions from E-to H-mode and vice versa were measured for all coils at various oxygen pressures between 5 and 25 Pa.A uniform plasma was sustained in H-mode at the absorbed power threshold,which increased monotonously with increasing pressure in the metallic chamber.All coils exhibit the same E-to H-mode transition hysteresis and need the same amount of power for transitioning from E-to H-mode.The setup enables maintaining uniform plasma in virtually any number of coils at high power without the risk of arcing and without the dead volume typical for a classical configuration with coils mounted outside the metallic chamber.
