A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performa...A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performance.A comprehensive model of the interference fringe contrast based on the laser tracing system s measurement principle was established in this study.Simulation results based on ZEMAX verified the model.According to the simulation results,the placement angle of the analyzer had a direct influence on the interference fringe contrast.When the angle of the polarized light to the analyzer’s transmission axis increased from 65°to 85°,each contrast of the four-way interference fringes decreased from 0.9996 to 0.3528,the interference fringe contrast is decreased by 65%.Under the split ratio of beam splitters in the interference part(BS 1)of 5∶5,when the splitting ratio of BS 2 changed from 2∶8 to 8∶2,the fringe contrast of the interference signals received by the photodetectors increased,but the injection light intensity onto the PSD reflected by BS 2 decreased.The significant influence of the tracing performance was verified by the experiments.When splitting ratio of BS 2 increased,the contrast of the interference fringes increased.Due to the weakening of the incident light intensity of the PSD caused by the change of BS 2 splitting ratio,the response time of the tracing system is increased by 23.7 ms.As a result,the tracing performance of the laser tracing measurement optical system was degraded.An important theoretical basis was provided to evaluate and improve the accuracy and reliability of laser tracing measurement systems.展开更多
An absolute gravimeter is a precision instrument for measuring gravitational acceleration, which plays an important role in earthquake monitoring, crustal deformation, national defense construction, etc. The frequency...An absolute gravimeter is a precision instrument for measuring gravitational acceleration, which plays an important role in earthquake monitoring, crustal deformation, national defense construction, etc. The frequency of laser interference fringes of an absolute gravimeter gradually increases with the fall time. Data are sparse in the early stage and dense in the late stage. The fitting accuracy of gravitational acceleration will be affected by least-squares fitting according to the fixed number of zero-crossing groups. In response to this problem, a method based on Fourier series fitting is proposed in this paper to calculate the zero-crossing point. The whole falling process is divided into five frequency bands using the Hilbert transformation. The multiplicative auto-regressive moving average model is then trained according to the number of optimal zero-crossing groups obtained by the honey badger algorithm. Through this model, the number of optimal zero-crossing groups determined in each segment is predicted by the least-squares fitting. The mean value of gravitational acceleration in each segment is then obtained. The method can improve the accuracy of gravitational measurement by more than 25% compared to the fixed zero-crossing groups method. It provides a new way to improve the measuring accuracy of an absolute gravimeter.展开更多
Measurements of frictional resistance play an important role in engineering practice. There are several types of air resistance acting on an aircraft, for example. One of them, frictional resistance, accounts for half...Measurements of frictional resistance play an important role in engineering practice. There are several types of air resistance acting on an aircraft, for example. One of them, frictional resistance, accounts for half of the air resistance. Oil film interferometry is one of methods for measuring the frictional resistance. Oil dropped on an object is thinly stretched by the frictional resistance. The bright and dark fringe pattern is generated when monochromatic light is applied to the oil film. The gradient of the oil thickness decreases with the lapse of time, and thus the spacing between neighboring the dark lines increases. The rate at which the spacing increases is proportional to the frictional resistance. In this study, the frictional resistance acting on a small area on a plate was measured and compared with the theoretical value. As a result, these results qualitatively agree well with each other.展开更多
The coupled wave theory for volume holographic grating with curved interference fringes has been proposed based on the Kogelnik’s coupled wave theory with the plane interference fringes. The formula about the magnitu...The coupled wave theory for volume holographic grating with curved interference fringes has been proposed based on the Kogelnik’s coupled wave theory with the plane interference fringes. The formula about the magnitude and directional angle of grating vector in arbitrary position of volume holographic grating with curved grating has been deduced. We found that the wavelength selectivity and angular selectivity may be different in different position of volume holographic curved stripe grating which depend on the angle between the propagation vector of reference beam and signal beam. The larger the angle, the greater the angle and wavelength selectivity, whereas the weaker.展开更多
Laser interference lithography is an attractive method for the fabrication of a large-area two-dimensional planar scale grating,which can be employed as a scale for multi-axis optical encoders or a diffractive optical...Laser interference lithography is an attractive method for the fabrication of a large-area two-dimensional planar scale grating,which can be employed as a scale for multi-axis optical encoders or a diffractive optical element in many types of optical sensors.Especially,optical configurations such as Lloyd's mirror interferometer based on the division of wavefront method can generate interference fringe fields for the patterning of grating pattern structures at a single exposure in a stable manner.For the fabrication of a two-dimensional scale grating to be used in a planar/surface encoder,an orthogonal two-axis Lloyd's mirror interferometer,which has been realized through innovation to Lloyd’s mirror interferometer,has been developed.In addition,the concept of the patterning of the two-dimensional orthogonal pattern structure at a single exposure has been extended to the non-orthogonal two-axis Lloyd’s mirror interferometer.Furthermore,the optical setup for the non-orthogonal two-axis Lloyd's mirror interferometer has been optimized for the fabrication of a large-area scale grating.In this review article,principles of generating interference fringe fields for the fabrication of a scale grating based on the interference lithography are reviewed,while focusing on the fabrication of a two-dimensional scale grating for planar/surface encoders.Verification of the pitch of the fabricated pattern structures,whose accuracy strongly affects the performance of planar/surface encoders,is also an important task to be addressed.In this paper,major methods for the evaluation of a grating pitch are also reviewed.展开更多
基金Sponsored by the National Natural Science Foundation of China(Grant No.52175491).
文摘A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performance.A comprehensive model of the interference fringe contrast based on the laser tracing system s measurement principle was established in this study.Simulation results based on ZEMAX verified the model.According to the simulation results,the placement angle of the analyzer had a direct influence on the interference fringe contrast.When the angle of the polarized light to the analyzer’s transmission axis increased from 65°to 85°,each contrast of the four-way interference fringes decreased from 0.9996 to 0.3528,the interference fringe contrast is decreased by 65%.Under the split ratio of beam splitters in the interference part(BS 1)of 5∶5,when the splitting ratio of BS 2 changed from 2∶8 to 8∶2,the fringe contrast of the interference signals received by the photodetectors increased,but the injection light intensity onto the PSD reflected by BS 2 decreased.The significant influence of the tracing performance was verified by the experiments.When splitting ratio of BS 2 increased,the contrast of the interference fringes increased.Due to the weakening of the incident light intensity of the PSD caused by the change of BS 2 splitting ratio,the response time of the tracing system is increased by 23.7 ms.As a result,the tracing performance of the laser tracing measurement optical system was degraded.An important theoretical basis was provided to evaluate and improve the accuracy and reliability of laser tracing measurement systems.
基金Project supported by the National Key R&D Program of China (Grant No. 2022YFF0607504)。
文摘An absolute gravimeter is a precision instrument for measuring gravitational acceleration, which plays an important role in earthquake monitoring, crustal deformation, national defense construction, etc. The frequency of laser interference fringes of an absolute gravimeter gradually increases with the fall time. Data are sparse in the early stage and dense in the late stage. The fitting accuracy of gravitational acceleration will be affected by least-squares fitting according to the fixed number of zero-crossing groups. In response to this problem, a method based on Fourier series fitting is proposed in this paper to calculate the zero-crossing point. The whole falling process is divided into five frequency bands using the Hilbert transformation. The multiplicative auto-regressive moving average model is then trained according to the number of optimal zero-crossing groups obtained by the honey badger algorithm. Through this model, the number of optimal zero-crossing groups determined in each segment is predicted by the least-squares fitting. The mean value of gravitational acceleration in each segment is then obtained. The method can improve the accuracy of gravitational measurement by more than 25% compared to the fixed zero-crossing groups method. It provides a new way to improve the measuring accuracy of an absolute gravimeter.
文摘Measurements of frictional resistance play an important role in engineering practice. There are several types of air resistance acting on an aircraft, for example. One of them, frictional resistance, accounts for half of the air resistance. Oil film interferometry is one of methods for measuring the frictional resistance. Oil dropped on an object is thinly stretched by the frictional resistance. The bright and dark fringe pattern is generated when monochromatic light is applied to the oil film. The gradient of the oil thickness decreases with the lapse of time, and thus the spacing between neighboring the dark lines increases. The rate at which the spacing increases is proportional to the frictional resistance. In this study, the frictional resistance acting on a small area on a plate was measured and compared with the theoretical value. As a result, these results qualitatively agree well with each other.
文摘The coupled wave theory for volume holographic grating with curved interference fringes has been proposed based on the Kogelnik’s coupled wave theory with the plane interference fringes. The formula about the magnitude and directional angle of grating vector in arbitrary position of volume holographic grating with curved grating has been deduced. We found that the wavelength selectivity and angular selectivity may be different in different position of volume holographic curved stripe grating which depend on the angle between the propagation vector of reference beam and signal beam. The larger the angle, the greater the angle and wavelength selectivity, whereas the weaker.
基金supported by the Japan Society for the Promotion of Science(JSPS).The author would like to thank Professor Wei Gao(Tohoku University,Japan)for the fruitful discussions and valuable comments on the topic of this review article.
文摘Laser interference lithography is an attractive method for the fabrication of a large-area two-dimensional planar scale grating,which can be employed as a scale for multi-axis optical encoders or a diffractive optical element in many types of optical sensors.Especially,optical configurations such as Lloyd's mirror interferometer based on the division of wavefront method can generate interference fringe fields for the patterning of grating pattern structures at a single exposure in a stable manner.For the fabrication of a two-dimensional scale grating to be used in a planar/surface encoder,an orthogonal two-axis Lloyd's mirror interferometer,which has been realized through innovation to Lloyd’s mirror interferometer,has been developed.In addition,the concept of the patterning of the two-dimensional orthogonal pattern structure at a single exposure has been extended to the non-orthogonal two-axis Lloyd’s mirror interferometer.Furthermore,the optical setup for the non-orthogonal two-axis Lloyd's mirror interferometer has been optimized for the fabrication of a large-area scale grating.In this review article,principles of generating interference fringe fields for the fabrication of a scale grating based on the interference lithography are reviewed,while focusing on the fabrication of a two-dimensional scale grating for planar/surface encoders.Verification of the pitch of the fabricated pattern structures,whose accuracy strongly affects the performance of planar/surface encoders,is also an important task to be addressed.In this paper,major methods for the evaluation of a grating pitch are also reviewed.
