Beyond extreme ultraviolet(BEUV)radiation with a wavelength of 6.x nm for lithography is responsible for reducing the source wavelength to enable continued miniaturization of semiconductor devices.In this work,the Req...Beyond extreme ultraviolet(BEUV)radiation with a wavelength of 6.x nm for lithography is responsible for reducing the source wavelength to enable continued miniaturization of semiconductor devices.In this work,the Required BEUV light at 6.x nm wavelength was generated in dense and hot Nd:YAG laser-produced Er plasmas.The spectral contributions from the 4p–4d and 4d–4f transitions of singly,doubly and triply excited states of Er XXIV–Er XXXII in the BEUV band were calculated using Cowan and the Flexible Atomic Code.It was also found that the radiative transitions between multiply excited states dominate the narrow wavelength window around 6.x nm.Under the assumption of collisional radiative equilibrium of the laser-produced Er plasmas,the relative ion abundance in the experiment was inferred.Using the Boltzmann quantum state energy level distribution and Gram–Charlier fitting function of unresolved transition arrays(UTAs),the synthetic spectrum around 6.x nm was finally obtained and compared with the experimental spectrum.The spatio-temporal distributions of electron density and electron temperature were calculated based on radiation hydrodynamic simulation in order to identify the contributions of various ionic states to the UTAs arising from the Er plasmas near 6.x nm.展开更多
We have studied laser-produced plasma based on mass-limited thin-film Gd targets for beyond the current extreme ultraviolet(EUV)light source of 13.5 nm wavelength based on tin.The influences of the laser intensity on ...We have studied laser-produced plasma based on mass-limited thin-film Gd targets for beyond the current extreme ultraviolet(EUV)light source of 13.5 nm wavelength based on tin.The influences of the laser intensity on the emission spectra centered around 6.7 nm from thin-film Gd targets were first investigated.It is found that the conversion efficiency of the produced plasma is saturated when the laser intensity goes beyond 2×10^(11)W cm^(-2).We have systematically compared the emission spectra of the laser-produced plasma with the changes in the thicknesses of the thin-film Gd targets.It is proved that a minimum-mass target with a thickness of 400 nm is sufficient to provide the maximum conversion efficiency,which also implies that this thickness is the ablation depth for the targets.These findings should be helpful in the exploration of next-generation EUV sources,as the thin-film Gd targets will reduce the debris during the plasma generation process compared with the bulk targets.展开更多
Radiation from laser-produced plasmas was examined as a potential wavelength calibration source for spectrographs in the extreme ultraviolet(EUV) region.Specifically, the EUV emission of chromium(Cr) plasmas was acqui...Radiation from laser-produced plasmas was examined as a potential wavelength calibration source for spectrographs in the extreme ultraviolet(EUV) region.Specifically, the EUV emission of chromium(Cr) plasmas was acquired via spatiotemporally resolved emission spectroscopy.With the aid of Cowan and flexible atomic code(FAC) structure calculations,and a comparative analysis with the simulated spectra, emission peaks in the 6.5–15.0 nm range were identified as 3 p–4 d, 5 d and 3 p–4 s transition lines from Cr5+–Cr10+ions.A normalized Boltzmann distribution among the excited states and a steady-state collisional-radiative model were assumed for the spectral simulations, and used to estimate the electron temperature and density in the plasma.The results indicate that several relatively isolated emission lines of highly charged ions would be useful for EUV wavelength calibration.展开更多
We have made a detailed comparison of the atomic and ionic debris, as well as the emission features of Sn and SnO2 plasmas under identical experimental conditions. Planar slabs of pure metal Sn and ceramic SnO2 are ir...We have made a detailed comparison of the atomic and ionic debris, as well as the emission features of Sn and SnO2 plasmas under identical experimental conditions. Planar slabs of pure metal Sn and ceramic SnO2 are irradiated with 1.06 μm, 8 ns Nd：YAG laser pulses. Fast photography employing an intensified charge coupled device （ICCD）, optical emission spectroscopy （OES）, and optical time of flight emission spectroscopy are used as diagnostic tools. Our results show that the Sn plasma provides a higher extreme ultraviolet （EUV） conversion efficiency （CE） than the SnO2 plasma. However, the kinetic energies of Sn ions are relatively low compared with those of SnO2. OES studies show that the Sn plasma parameters （electron temperature and density） are lower compared to those of the SnO2 plasma. Furthermore, we also give the effects of the vacuum degree and the laser pulse energy on the plasma parameters.展开更多
A Fokker-Planck code is developed based upon Epperlein＇s scheme to investigate laser-produced plasmas in relevance to inertial confinement fusion. The equations are integrated implicitly by time-splitting method. Thr...A Fokker-Planck code is developed based upon Epperlein＇s scheme to investigate laser-produced plasmas in relevance to inertial confinement fusion. The equations are integrated implicitly by time-splitting method. Three test problems are simulated to show the versatility of the code. The results are in good agreement with the existing simulations.展开更多
A state diagnosis of laser-produced plasma in air generated by a 1064 nm pulse laser was investigated by the Thomson scattering(TS)method.The evolutions of the electron temperature and electron density were obtained a...A state diagnosis of laser-produced plasma in air generated by a 1064 nm pulse laser was investigated by the Thomson scattering(TS)method.The evolutions of the electron temperature and electron density were obtained as a function of the time delay which ranged from 300-3200 ns.The heating effect produced by the 532 nm probe beam with different energies on the air plasma at different interaction times was further studied using a time-resolved optical emission spectroscopy technique.The influence of the probe beam on the electron density was found to be negligible,whereas its influence on electron temperature is evident.In addition,the heating effect of the probe beam on the plasma strongly depends on the energy of the probe beam,and gradually weakens with increasing time delay.Our results are helpful for further understanding the TS method and its application in plasma diagnostics.展开更多
The temporal evolution of extreme ultraviolet(EUV)emission spectra of laser-produced antimony(Sb)plasmas has been measured in the 7-16 nm wavelength region using spatio?temporally resolved lase-produced plasma spectro...The temporal evolution of extreme ultraviolet(EUV)emission spectra of laser-produced antimony(Sb)plasmas has been measured in the 7-16 nm wavelength region using spatio?temporally resolved lase-produced plasma spectroscopy technique.The spectral profiles involve an intense quasi-continuous band with superimposed intense characteristic radiation and are different with the increase of delay time.The spectral structures were also analyzed according to Hartree-Fock calculations with configuration interaction effects and contributed from 4d^4/;4d-4p,and 4d-5f unresolved transition arrays of Sb7*-Sb131.A steady-state collisionalradiative model was used to estimate the electron temperature and density range of Sb plasmas.This work would enrich the spectral data of highly-charged ions and provided a possible selection for developing EUV light sources.展开更多
A grazing incidence flat-field spectrograph using a concave grating was constructed to measure extreme ultraviolet （EUV） emission from a CO 2 laser-produced tin plasma throughout the wavelength region of 5 nm to 20 ...A grazing incidence flat-field spectrograph using a concave grating was constructed to measure extreme ultraviolet （EUV） emission from a CO 2 laser-produced tin plasma throughout the wavelength region of 5 nm to 20 nm for lithography. Spectral efficiency of the EUV emission around 13.5 nm from plate, cavity, and thin foil tin targets was studied. By translating the focusing lens along the laser axis, the dependence of EUV spectra on the amount of defocus was investigated. The results showed that the spectral efficiency was higher for the cavity target in comparison to the plate or foil target, while it decreased with an increase in the defocus distance. The source＇s spectra and the EUV emission intensity normalized to the incident pulse energy at 45 from the target normal were characterized for the in-band （2% of bandwidth） region as a function of laser energy spanning from 46 mJ to 600 mJ for the pure tin plate target. The energy normalized EUV emission was found to increase with the increasing incident pulse energy. It reached the optimum value for the laser energy of around 343 mJ, after which it dropped rapidly.展开更多
In order to provide detailed information about Cd structure and gain more insight regarding ionization degrees and types of transition,as well as the understanding of the temporal evolution behavior of laser produced ...In order to provide detailed information about Cd structure and gain more insight regarding ionization degrees and types of transition,as well as the understanding of the temporal evolution behavior of laser produced Cd plasmas,extreme ultraviolet spectra of laser-produced cadmium(Cd)plasmas have been measured in the 8.4-12 nm region using spatiotemporally resolved laser-produced plasma spectroscopy technique.Spectral features were analyzed by the Hartree-Fock(HF)method with relativistic correlations(HFR)using the Cowan code.The results showed that the 4p-5s resonance transition arrays from Cd^9+to Cd^13+merged to form intense lines in this spectral region.A number of new spectral features from Cd^9+and Cd^10+ions are reported in this study.Based on the assumption of a normalized Boltzmann distribution among the excited states associated with a steady-state collisional-radiative model,the plasma parameters were obtained by comparing the experimental and simulated spectra.As a result,we succeeded in reproducing the synthetic spectra for different time delays,which yielded good agreement with the experiments.The temporal evolution behaviors of electron temperature and electron density of plasma were also analyzed.展开更多
Armed with four different steady-state collisional-radiative(CR) models,we investigated the effect of dielectronic recombination(DR) on the charge-state distribution in laser-produced silicon plasma. To assess this ef...Armed with four different steady-state collisional-radiative(CR) models,we investigated the effect of dielectronic recombination(DR) on the charge-state distribution in laser-produced silicon plasma. To assess this effect,we performed a series of temporally resolved spectra of highly charged Si ions in the extreme ultraviolet region.Ab initio calculations of the DR rate coefficients were done for Si^(6+)–Si^(4+) ions. We also analyzed the evolution of the collisional ionization, radiative recombination, three-body recombination, photo-ionization, and DR rate coefficients as a function of electron temperature. The electron temperature and electron density for different delay times were obtained by comparing the normalized experimental and simulated spectra. The ion fraction and average charge state from the four different CR models were also obtained. The results indicate that the DR process has a greater influence in the stage of plasma evolution that cannot be neglected in plasma diagnoses.展开更多
In the femtosecond laser-produced Cu-plasma, the transient transition dynamics that the excited state 5s4D7/2 via electron-ion recombination transfers to 4p4F9/20 （465.11 nm, Λ1 line） and 4p4D7/20 （529.25 nm, Λ2 ...In the femtosecond laser-produced Cu-plasma, the transient transition dynamics that the excited state 5s4D7/2 via electron-ion recombination transfers to 4p4F9/20 （465.11 nm, Λ1 line） and 4p4D7/20 （529.25 nm, Λ2 line） states are investigated by using the time-resolved spectroscopy. The occupation number and relevant lifetime of the excited state 5s4D7/2, the temporal evolutions of spectral intensities for Λ1 line and Λ2 line emissions are demonstrated to be in direct proportion to the employed laser intensity, which reveals the transient features of transition dynamics clearly differing from that resulted in the traditional collision excitation. Furthermore, some unique characteristics for Λ1 and Λ2 transitions stemming from electron-ion recombination are examined in detail.展开更多
A possible novel application of hard x-ray emitted during laser-plasma interaction was discussed. We established an Optical Transform Function to study the joint effect of the spectral distribution and temporal profil...A possible novel application of hard x-ray emitted during laser-plasma interaction was discussed. We established an Optical Transform Function to study the joint effect of the spectral distribution and temporal profile of the laser-produced x-ray on x-ray phase imaging. Though the laser-produced x-ray pulse duration is short and incoherent, the analysis confirms that the current x-ray phase imaging theory still holds for laser-produced x-ray phase imaging.展开更多
Extreme ultraviolet lithography(EUVL)has been demonstrated to meet the industrial requirements of new-generation semiconductor fabrication.The development of high-power EUV sources is a long-term critical challenge to...Extreme ultraviolet lithography(EUVL)has been demonstrated to meet the industrial requirements of new-generation semiconductor fabrication.The development of high-power EUV sources is a long-term critical challenge to the implementation of EUVL in high-volume manufacturing(HVM),together with other technologies such as photoresist and mask.Historically,both theoretical studies and experiments have clearly indicated that the CO 2 laser-produced plasma(LPP)system is a promising solution for EUVL source,able to realize high conversion efficiency(CE)and output power.Currently,ASML’s NXE:3400B EUV scanner configuring CO_(2) LPP source sys-tem has been installed and operated at chipmaker customers.Mean-while,other research teams have made different progresses in the development of LPP EUV sources.However,in their technologies,some critical areas need to be further improved to meet the requirements of 5 nm node and below.Critically needed improvements include higher laser power,stable droplet generation system and longer collector life-time.In this paper,we describe the performance characteristics of the laser system,droplet generator and mirror collector for different EUV sources,and also the new development results.展开更多
Measuring the electron density of a laser-produced plasma is most important to laser plasma interaction physics, especially to laser fusion and X-ray laser.Because the gain of X-ray laser is much influenced by the ele...Measuring the electron density of a laser-produced plasma is most important to laser plasma interaction physics, especially to laser fusion and X-ray laser.Because the gain of X-ray laser is much influenced by the electron density, the most suitable electron density should be determined.There are some ways to measure the electron density, such as the method of Stark-broadening.Here, a new way of展开更多
The soft X-ray lithography using a repetitively laser-produced plasma(LPP)source isone of the key techniques and methods for making microdevices and microstructures ofsubmicron and submicron levels in the world.But we...The soft X-ray lithography using a repetitively laser-produced plasma(LPP)source isone of the key techniques and methods for making microdevices and microstructures ofsubmicron and submicron levels in the world.But we have not found relevant reportsdomestically.展开更多
The optical shadowgraphy has been used to investigate the inhomogeneous structures in laser-produced plasmas, especially the small-scale jet structure on the rearside of the A1 foil target due to hydrodynamic instabil...The optical shadowgraphy has been used to investigate the inhomogeneous structures in laser-produced plasmas, especially the small-scale jet structure on the rearside of the A1 foil target due to hydrodynamic instability.展开更多
A spectroscopic study on laser-produced tin plasma utilizing the optical emission spectroscopy （OES） technique is presented. Plasma is produced from a solid tin target irradiated with pulsed laser in room environmen...A spectroscopic study on laser-produced tin plasma utilizing the optical emission spectroscopy （OES） technique is presented. Plasma is produced from a solid tin target irradiated with pulsed laser in room environment. Electron temperature is determined at different laser peak powers from the ratio of line intensities, while electron density is deduced from Saha-Boltzmann equation. A limited number of suitable tin lines are detected, and the effect of the laser peak power on the intensity of emission lines is discussed. Electron temperatures are measured in the range of 0.36eV-0.44eV with electron densities of the order 1017cm-3 as the laser peak power is varied from 11 MW to 22 MW.展开更多
This paper reports the results of spectral measurements and a theoretical analysis of the temporal and spatial evolution of laser-produced Cu plasma in vacuum in the range of 8–14 nm.The time dependence of the extrem...This paper reports the results of spectral measurements and a theoretical analysis of the temporal and spatial evolution of laser-produced Cu plasma in vacuum in the range of 8–14 nm.The time dependence of the extreme ultraviolet band spectrum at different positions near the target surface was obtained and found to be dominated by three broad-band features.The 3p and 3d excitations of Cu5+–Cu9+ions were calculated using the Hartree–Fock theory with configuration interactions.The characteristics of the spectral line distribution for the 3p–nd and 3d–nf transition arrays were analyzed.Based on the steady-state collisional radiation model and the normalized Boltzmann distribution,the complex spectral structure in the band of 13–14 nm is accurately explained through consistency comparisons and benchmarking between the experimental and theoretical simulation spectra,demonstrating that the structure mainly stems from the overlapping contribution of the 3d–4f and 3p–3d transition arrays for the Cu5+–Cu9+ions.These results may help in studying the radiation characteristics of isoelectronic series highly-charged ions involving the 3d excitation process.展开更多
The effect of the matrix temperature on laser-induced plasma generated in bulk water by using a532 nm pulsed laser beam has been studied.Ca Ⅰ and Ⅱ emission line intensities were recorded for an aqueous solution of ...The effect of the matrix temperature on laser-induced plasma generated in bulk water by using a532 nm pulsed laser beam has been studied.Ca Ⅰ and Ⅱ emission line intensities were recorded for an aqueous solution of CaCl2 in the temperature range of 7℃-70℃.The emission line intensities did not follow the matrix temperature in our experiments.Maximum intensities were observed at ~18℃ for both lines.Herein,a possible mechanism responsible for the observed variation in intensity is suggested,in which laser-produced bubbles play important roles.Bubble formation is essential to ignite plasma in the liquid and more feasible at the higher liquid temperature.However,the abundant bubbles at the higher temperature can scatter the incident laser beam more effectively to decrease the energy delivered for the laser-induced plasma.Thus,these two roles have effects on the optical emission intensities in opposite ways.The validity of the suggested mechanism is discussed based on the plasma temperature,temperature dependence of the refractive index of water,plasma electron density,scattered light intensity,and plasma ignition threshold energy.Our result indicates that the temperature of the liquid is also an important parameter to be considered in the laser-induced breakdown spectroscopy analysis of bulk liquid samples and its application in deep-sea exploration.展开更多
Based on the multi-configuration Dirac-Fock method, theoretical calculations are carried out for the dielectronic recombination （DR） rate coefficients and the collision excitation rate coefficients of Sn^10＋ ions. ...Based on the multi-configuration Dirac-Fock method, theoretical calculations are carried out for the dielectronic recombination （DR） rate coefficients and the collision excitation rate coefficients of Sn^10＋ ions. It is found that the total DR rate coefficient has its maximum value between 10eV and 100eV and is greater than either the radiative recombination or three-body recombination rate coefficients （the number of free electrons per unit is 10^21 cm^3） for the ease of Te 〉 1 eV. Therefore, DR can strongly influence the ionization balance of laser produced multi-charged tin ions. The related dieleetronie satellite cannot be ignored at low temperature Te 〈 5 eV.展开更多
基金support from Guangdong Major Project of Basic and Applied Basic Research(No.2019B030302003)。
文摘Beyond extreme ultraviolet(BEUV)radiation with a wavelength of 6.x nm for lithography is responsible for reducing the source wavelength to enable continued miniaturization of semiconductor devices.In this work,the Required BEUV light at 6.x nm wavelength was generated in dense and hot Nd:YAG laser-produced Er plasmas.The spectral contributions from the 4p–4d and 4d–4f transitions of singly,doubly and triply excited states of Er XXIV–Er XXXII in the BEUV band were calculated using Cowan and the Flexible Atomic Code.It was also found that the radiative transitions between multiply excited states dominate the narrow wavelength window around 6.x nm.Under the assumption of collisional radiative equilibrium of the laser-produced Er plasmas,the relative ion abundance in the experiment was inferred.Using the Boltzmann quantum state energy level distribution and Gram–Charlier fitting function of unresolved transition arrays(UTAs),the synthetic spectrum around 6.x nm was finally obtained and compared with the experimental spectrum.The spatio-temporal distributions of electron density and electron temperature were calculated based on radiation hydrodynamic simulation in order to identify the contributions of various ionic states to the UTAs arising from the Er plasmas near 6.x nm.
基金supported by National Natural Science Foundation of China(Nos.61427812,61805118,12104216 and 12241403)the Natural Science Foundation of Jiangsu Province of China(Nos.BK20192006,BK20180056 and BK20200307)。
文摘We have studied laser-produced plasma based on mass-limited thin-film Gd targets for beyond the current extreme ultraviolet(EUV)light source of 13.5 nm wavelength based on tin.The influences of the laser intensity on the emission spectra centered around 6.7 nm from thin-film Gd targets were first investigated.It is found that the conversion efficiency of the produced plasma is saturated when the laser intensity goes beyond 2×10^(11)W cm^(-2).We have systematically compared the emission spectra of the laser-produced plasma with the changes in the thicknesses of the thin-film Gd targets.It is proved that a minimum-mass target with a thickness of 400 nm is sufficient to provide the maximum conversion efficiency,which also implies that this thickness is the ablation depth for the targets.These findings should be helpful in the exploration of next-generation EUV sources,as the thin-film Gd targets will reduce the debris during the plasma generation process compared with the bulk targets.
基金Project supported by the National Key Research and Development Program of China(Grant No.2017YFA0402300)the National Natural Science Foundation of China(Grant Nos.11874051,11274254,and 11564037)
文摘Radiation from laser-produced plasmas was examined as a potential wavelength calibration source for spectrographs in the extreme ultraviolet(EUV) region.Specifically, the EUV emission of chromium(Cr) plasmas was acquired via spatiotemporally resolved emission spectroscopy.With the aid of Cowan and flexible atomic code(FAC) structure calculations,and a comparative analysis with the simulated spectra, emission peaks in the 6.5–15.0 nm range were identified as 3 p–4 d, 5 d and 3 p–4 s transition lines from Cr5+–Cr10+ions.A normalized Boltzmann distribution among the excited states and a steady-state collisional-radiative model were assumed for the spectral simulations, and used to estimate the electron temperature and density in the plasma.The results indicate that several relatively isolated emission lines of highly charged ions would be useful for EUV wavelength calibration.
基金Project supported by the National Natural Science Foundation of China(Grant No.11304235)the Director Fund of WNLO,China
文摘We have made a detailed comparison of the atomic and ionic debris, as well as the emission features of Sn and SnO2 plasmas under identical experimental conditions. Planar slabs of pure metal Sn and ceramic SnO2 are irradiated with 1.06 μm, 8 ns Nd：YAG laser pulses. Fast photography employing an intensified charge coupled device （ICCD）, optical emission spectroscopy （OES）, and optical time of flight emission spectroscopy are used as diagnostic tools. Our results show that the Sn plasma provides a higher extreme ultraviolet （EUV） conversion efficiency （CE） than the SnO2 plasma. However, the kinetic energies of Sn ions are relatively low compared with those of SnO2. OES studies show that the Sn plasma parameters （electron temperature and density） are lower compared to those of the SnO2 plasma. Furthermore, we also give the effects of the vacuum degree and the laser pulse energy on the plasma parameters.
基金National Natural Science Foundation of China(Nos.10375064,10575102,10625523)Nation High-Tech ICF Committee
文摘A Fokker-Planck code is developed based upon Epperlein＇s scheme to investigate laser-produced plasmas in relevance to inertial confinement fusion. The equations are integrated implicitly by time-splitting method. Three test problems are simulated to show the versatility of the code. The results are in good agreement with the existing simulations.
基金This work is supported by the National Key Research and Development Program of China(No.2017YFA0402300)National Natural Science Foundation of China(Nos.11874051,11564037,61741513,11904293)the Special Fund Project for Guiding Scientific and Technological Inno-vation of Gansu Province(No.2019zx-10).
文摘A state diagnosis of laser-produced plasma in air generated by a 1064 nm pulse laser was investigated by the Thomson scattering(TS)method.The evolutions of the electron temperature and electron density were obtained as a function of the time delay which ranged from 300-3200 ns.The heating effect produced by the 532 nm probe beam with different energies on the air plasma at different interaction times was further studied using a time-resolved optical emission spectroscopy technique.The influence of the probe beam on the electron density was found to be negligible,whereas its influence on electron temperature is evident.In addition,the heating effect of the probe beam on the plasma strongly depends on the energy of the probe beam,and gradually weakens with increasing time delay.Our results are helpful for further understanding the TS method and its application in plasma diagnostics.
文摘The temporal evolution of extreme ultraviolet(EUV)emission spectra of laser-produced antimony(Sb)plasmas has been measured in the 7-16 nm wavelength region using spatio?temporally resolved lase-produced plasma spectroscopy technique.The spectral profiles involve an intense quasi-continuous band with superimposed intense characteristic radiation and are different with the increase of delay time.The spectral structures were also analyzed according to Hartree-Fock calculations with configuration interaction effects and contributed from 4d^4/;4d-4p,and 4d-5f unresolved transition arrays of Sb7*-Sb131.A steady-state collisionalradiative model was used to estimate the electron temperature and density range of Sb plasmas.This work would enrich the spectral data of highly-charged ions and provided a possible selection for developing EUV light sources.
基金supported by the Scientific Research Foundation of the Education Department of Hubei Province (No.Q20131512)National Natural Science Foundation of China (No.61078024)
文摘A grazing incidence flat-field spectrograph using a concave grating was constructed to measure extreme ultraviolet （EUV） emission from a CO 2 laser-produced tin plasma throughout the wavelength region of 5 nm to 20 nm for lithography. Spectral efficiency of the EUV emission around 13.5 nm from plate, cavity, and thin foil tin targets was studied. By translating the focusing lens along the laser axis, the dependence of EUV spectra on the amount of defocus was investigated. The results showed that the spectral efficiency was higher for the cavity target in comparison to the plate or foil target, while it decreased with an increase in the defocus distance. The source＇s spectra and the EUV emission intensity normalized to the incident pulse energy at 45 from the target normal were characterized for the in-band （2% of bandwidth） region as a function of laser energy spanning from 46 mJ to 600 mJ for the pure tin plate target. The energy normalized EUV emission was found to increase with the increasing incident pulse energy. It reached the optimum value for the laser energy of around 343 mJ, after which it dropped rapidly.
基金Project supported by the National Key Research and Development Program of China(Grant No.2017YFA0402300)the National Natural Science Foundation of China(Grant Nos.11874051,11904293,and 61965015)the Special Fund Project for Guiding Scientific and Technological Innovation of Gansu Province,China(Grant No.2019zx-10).
文摘In order to provide detailed information about Cd structure and gain more insight regarding ionization degrees and types of transition,as well as the understanding of the temporal evolution behavior of laser produced Cd plasmas,extreme ultraviolet spectra of laser-produced cadmium(Cd)plasmas have been measured in the 8.4-12 nm region using spatiotemporally resolved laser-produced plasma spectroscopy technique.Spectral features were analyzed by the Hartree-Fock(HF)method with relativistic correlations(HFR)using the Cowan code.The results showed that the 4p-5s resonance transition arrays from Cd^9+to Cd^13+merged to form intense lines in this spectral region.A number of new spectral features from Cd^9+and Cd^10+ions are reported in this study.Based on the assumption of a normalized Boltzmann distribution among the excited states associated with a steady-state collisional-radiative model,the plasma parameters were obtained by comparing the experimental and simulated spectra.As a result,we succeeded in reproducing the synthetic spectra for different time delays,which yielded good agreement with the experiments.The temporal evolution behaviors of electron temperature and electron density of plasma were also analyzed.
基金supported by the National Key Research and Development Program of China (Grant No. 2017YFA0402300)National Natural Science Foundation of China (NSFC) (Grant Nos. 11904293, 11874051)。
文摘Armed with four different steady-state collisional-radiative(CR) models,we investigated the effect of dielectronic recombination(DR) on the charge-state distribution in laser-produced silicon plasma. To assess this effect,we performed a series of temporally resolved spectra of highly charged Si ions in the extreme ultraviolet region.Ab initio calculations of the DR rate coefficients were done for Si^(6+)–Si^(4+) ions. We also analyzed the evolution of the collisional ionization, radiative recombination, three-body recombination, photo-ionization, and DR rate coefficients as a function of electron temperature. The electron temperature and electron density for different delay times were obtained by comparing the normalized experimental and simulated spectra. The ion fraction and average charge state from the four different CR models were also obtained. The results indicate that the DR process has a greater influence in the stage of plasma evolution that cannot be neglected in plasma diagnoses.
基金Project supported by the National Natural Science Foundation of China(Grant No.51705009)the NSAF of China(Grant No.U1530153)
文摘In the femtosecond laser-produced Cu-plasma, the transient transition dynamics that the excited state 5s4D7/2 via electron-ion recombination transfers to 4p4F9/20 （465.11 nm, Λ1 line） and 4p4D7/20 （529.25 nm, Λ2 line） states are investigated by using the time-resolved spectroscopy. The occupation number and relevant lifetime of the excited state 5s4D7/2, the temporal evolutions of spectral intensities for Λ1 line and Λ2 line emissions are demonstrated to be in direct proportion to the employed laser intensity, which reveals the transient features of transition dynamics clearly differing from that resulted in the traditional collision excitation. Furthermore, some unique characteristics for Λ1 and Λ2 transitions stemming from electron-ion recombination are examined in detail.
基金This work is supported in part by the National Natural Science Foundation of China under Grant No. 69978023.
文摘A possible novel application of hard x-ray emitted during laser-plasma interaction was discussed. We established an Optical Transform Function to study the joint effect of the spectral distribution and temporal profile of the laser-produced x-ray on x-ray phase imaging. Though the laser-produced x-ray pulse duration is short and incoherent, the analysis confirms that the current x-ray phase imaging theory still holds for laser-produced x-ray phase imaging.
基金supported by the National Key R&D Program of China(2019YFB1704600).
文摘Extreme ultraviolet lithography(EUVL)has been demonstrated to meet the industrial requirements of new-generation semiconductor fabrication.The development of high-power EUV sources is a long-term critical challenge to the implementation of EUVL in high-volume manufacturing(HVM),together with other technologies such as photoresist and mask.Historically,both theoretical studies and experiments have clearly indicated that the CO 2 laser-produced plasma(LPP)system is a promising solution for EUVL source,able to realize high conversion efficiency(CE)and output power.Currently,ASML’s NXE:3400B EUV scanner configuring CO_(2) LPP source sys-tem has been installed and operated at chipmaker customers.Mean-while,other research teams have made different progresses in the development of LPP EUV sources.However,in their technologies,some critical areas need to be further improved to meet the requirements of 5 nm node and below.Critically needed improvements include higher laser power,stable droplet generation system and longer collector life-time.In this paper,we describe the performance characteristics of the laser system,droplet generator and mirror collector for different EUV sources,and also the new development results.
文摘Measuring the electron density of a laser-produced plasma is most important to laser plasma interaction physics, especially to laser fusion and X-ray laser.Because the gain of X-ray laser is much influenced by the electron density, the most suitable electron density should be determined.There are some ways to measure the electron density, such as the method of Stark-broadening.Here, a new way of
文摘The soft X-ray lithography using a repetitively laser-produced plasma(LPP)source isone of the key techniques and methods for making microdevices and microstructures ofsubmicron and submicron levels in the world.But we have not found relevant reportsdomestically.
文摘The optical shadowgraphy has been used to investigate the inhomogeneous structures in laser-produced plasmas, especially the small-scale jet structure on the rearside of the A1 foil target due to hydrodynamic instability.
文摘A spectroscopic study on laser-produced tin plasma utilizing the optical emission spectroscopy （OES） technique is presented. Plasma is produced from a solid tin target irradiated with pulsed laser in room environment. Electron temperature is determined at different laser peak powers from the ratio of line intensities, while electron density is deduced from Saha-Boltzmann equation. A limited number of suitable tin lines are detected, and the effect of the laser peak power on the intensity of emission lines is discussed. Electron temperatures are measured in the range of 0.36eV-0.44eV with electron densities of the order 1017cm-3 as the laser peak power is varied from 11 MW to 22 MW.
基金supported by National Natural Science Foundation of China(Nos.12064040,11874051,11904293,11864036)the Science and Technology Project of Gansu Province(Nos.21JR7RA122,20JR5RA530)the Funds for Innovative Fundamental Research Group Project of Gansu Province(No.20JR5RA541)。
文摘This paper reports the results of spectral measurements and a theoretical analysis of the temporal and spatial evolution of laser-produced Cu plasma in vacuum in the range of 8–14 nm.The time dependence of the extreme ultraviolet band spectrum at different positions near the target surface was obtained and found to be dominated by three broad-band features.The 3p and 3d excitations of Cu5+–Cu9+ions were calculated using the Hartree–Fock theory with configuration interactions.The characteristics of the spectral line distribution for the 3p–nd and 3d–nf transition arrays were analyzed.Based on the steady-state collisional radiation model and the normalized Boltzmann distribution,the complex spectral structure in the band of 13–14 nm is accurately explained through consistency comparisons and benchmarking between the experimental and theoretical simulation spectra,demonstrating that the structure mainly stems from the overlapping contribution of the 3d–4f and 3p–3d transition arrays for the Cu5+–Cu9+ions.These results may help in studying the radiation characteristics of isoelectronic series highly-charged ions involving the 3d excitation process.
基金supported by the Korea Basic Science Institute(KBSI)National Research Facilities&Equipment Center(NFEC)grant funded by the Korean government(Ministry of Education)(No.2019R1A6C1010005)。
文摘The effect of the matrix temperature on laser-induced plasma generated in bulk water by using a532 nm pulsed laser beam has been studied.Ca Ⅰ and Ⅱ emission line intensities were recorded for an aqueous solution of CaCl2 in the temperature range of 7℃-70℃.The emission line intensities did not follow the matrix temperature in our experiments.Maximum intensities were observed at ~18℃ for both lines.Herein,a possible mechanism responsible for the observed variation in intensity is suggested,in which laser-produced bubbles play important roles.Bubble formation is essential to ignite plasma in the liquid and more feasible at the higher liquid temperature.However,the abundant bubbles at the higher temperature can scatter the incident laser beam more effectively to decrease the energy delivered for the laser-induced plasma.Thus,these two roles have effects on the optical emission intensities in opposite ways.The validity of the suggested mechanism is discussed based on the plasma temperature,temperature dependence of the refractive index of water,plasma electron density,scattered light intensity,and plasma ignition threshold energy.Our result indicates that the temperature of the liquid is also an important parameter to be considered in the laser-induced breakdown spectroscopy analysis of bulk liquid samples and its application in deep-sea exploration.
基金Supported by the National Natural Science Foundation of China under Grant Nos 10434100 and 10774122, the Foundation of China/Ireland Science and Technology Collaboration Research under Grant No CI-2004-07, the Specialized Research Fund for the Doctoral Programme of Higher Education of China under Grant No 20070736001, and the Foundation of Northwest Normal University under Grant No NWNU-KJCXGC-03-21.
文摘Based on the multi-configuration Dirac-Fock method, theoretical calculations are carried out for the dielectronic recombination （DR） rate coefficients and the collision excitation rate coefficients of Sn^10＋ ions. It is found that the total DR rate coefficient has its maximum value between 10eV and 100eV and is greater than either the radiative recombination or three-body recombination rate coefficients （the number of free electrons per unit is 10^21 cm^3） for the ease of Te 〉 1 eV. Therefore, DR can strongly influence the ionization balance of laser produced multi-charged tin ions. The related dieleetronie satellite cannot be ignored at low temperature Te 〈 5 eV.
