A novel phase-locked loop( PLL)-based closed-loop driving circuit with ultra-low-noise trans-impedance amplifier( TIA) is proposed. The TIA is optimized to achieve ultra-low input-referred current noise. To track driv...A novel phase-locked loop( PLL)-based closed-loop driving circuit with ultra-low-noise trans-impedance amplifier( TIA) is proposed. The TIA is optimized to achieve ultra-low input-referred current noise. To track drive-mode resonant frequency and reduce frequency jitter of actuation voltage,a PLL-based driving technique is adopted. Implemented on printed circuit board( PCB),the proposed driving loop has successfully excited MEMS element into resonance,with a settling time of 3 s. The stable frequency and amplitude of TIA output voltage are 10.14 KHz and 800 mVPP,respectively. With sense-channel electronics,the gyroscope exhibits a scale factor of 0.04 mV/°/s and a bias instability of 57.6°/h,which demonstrates the feasibility of the proposed driving circuit.展开更多
Microelectromechanical systems (MEMSs) pose unique measurement and control problems compared with conventional ones because of their small size,low cost,and low power consumption.The vibrating gyroscope is one of thos...Microelectromechanical systems (MEMSs) pose unique measurement and control problems compared with conventional ones because of their small size,low cost,and low power consumption.The vibrating gyroscope is one of those MEMS devices that have significant potential in many industry applications.When the MEMS gyroscope system is considered simultaneously with the coupling terms,the exogenous disturbances and the parameter variations,the controller design of this system becomes very challenging.This paper investigates the primary control problem of a perturbed vibrating MEMS gyroscope.A nonlinear robust adaptive control scheme is proposed for the drive axis of a vibrating MEMS gyroscope.By combining the dynamic surface control (DSC) method with the H-infinity disturbance attenuation technique,a simpler systematic design procedure is developed.The derived H-infinity controller has a simplified structure,and it can drive the drive axis to resonance,regulate the output amplitude of the drive axis to a desired value,and attenuate the generalized disturbances.The features of the derived controller are discussed and illustrated by the simulation of a closed-loop system.The analysis and simulation show that the obtained controller possesses good adaptability and robustness to system uncertainties.展开更多
Aiming at the application environment of paddy agricultural machinery with bumpy and undulating changes,the problems affecting the method for steering wheel angle measurement by MEMS gyroscope were analyzed,and a whee...Aiming at the application environment of paddy agricultural machinery with bumpy and undulating changes,the problems affecting the method for steering wheel angle measurement by MEMS gyroscope were analyzed,and a wheel angle measurement method combining Dual-MEMS gyroscope(dual MEMS gyroscope)and RTK-GNSS was designed.The adaptive weighting method was used to fuse the heading angle differentiation of RTK-GNSS,the MEMS gyroscope angle rate,and velocity data,and the rod-arm compensation was performed to accurately obtain the angle rates of the body and steering wheels of agricultural machinery;the difference between the combined angular rate of the steering wheel of the agricultural machinery and the angular rate of the agricultural machinery body was obtained,and the integrator is used to integrate the difference to get the wheel steering angle value,and the Kalman filter was designed to make feedback correction for the integration process of angle calculation to eliminate the errors caused by the gyroscope zero bias,random drift,and gyroscope rod arm effect,and to obtain the accurate value of wheel steering angle.A comparative test with the connecting rod wheel angle sensor was designed,and the results show that the maximum deviation is 4.99°,the average absolute average value is 1.61°,and the average standard deviation is 0.98°.The method in this study and the connecting rod wheel angle sensor were used on paddy farm machinery.The wheel angle measurement deviation of the proposed method and the connecting rod wheel angle sensor was not more than 1°,which is relatively small.It has good stability,speed adaptability,and dynamic responsiveness that meets the accuracy requirements of steering wheel angle measurement for paddy field agricultural machinery unmanned driving and can be used instead of connecting rod angle sensors for unmanned agricultural machinery.展开更多
Micro-electro-mechanical system(MEMS)gyroscopes are an important sort of inertial sensor for identifying parameters of spinning structures,such as the spinning speed and angular deviation,based on the Coriolis effect....Micro-electro-mechanical system(MEMS)gyroscopes are an important sort of inertial sensor for identifying parameters of spinning structures,such as the spinning speed and angular deviation,based on the Coriolis effect.In this paper,the nonlinear mechanism of MEMS vibratory ring gyroscopes is analyzed by applying a fully coupled nonlinear model,in which the gyroscopic coupling and geometrically and structurally nonlinear couplings are all taken into account.The coupled differential equations governing the drive and sense motions are established via the Lagrangian equations.Numerical simulation is conducted,and the key nonlinear components and energy transfer behaviors between the drive and sense modes are elucidated.It is revealed that the cubic rigidity nonlinearity is another significant factor leading to the coupling between the drive and sense modes other than the gyroscopic coupling.Perturbation analysis is also carried out by using the method of multiple scales.The nonlinear frequency-amplitude responses of the drive and sense vibrations are obtained,and comprehensive parametric studies are performed.The significant effects of system damping,excitation amplitude,drive amplitude and spinning speed on the responses are discussed,which will facilitate to improve the nonlinear performance and sensitivity of the gyroscope.展开更多
This paper reports on a new type of high-frequency mode-matched gyroscope with significantly reduced dependencies on environmental stimuli such as temperature,vibration,and shock.A novel stress-isolation system is use...This paper reports on a new type of high-frequency mode-matched gyroscope with significantly reduced dependencies on environmental stimuli such as temperature,vibration,and shock.A novel stress-isolation system is used to effectively decouple an axis-symmetric bulk-acoustic wave(BAW)vibratory gyro from its substrate,minimizing the effect that external sources of error have on the offset and scale factor of the device.Substrate-decoupled(SD)BAW gyros with a resonance frequency of 4.3 MHz and Q values near 60000 were implemented using the high aspect ratio poly and single-crystal silicon(HARPSS)process to achieve ultra-narrow capacitive gaps.Wafer-level packaged sensors were interfaced with a customized application-specific integrated circuit(ASIC)to achieve low variations in the offset across temperature(±26°s^(−1) from−40 to 85℃),supreme random-vibration immunity(0.012°s^(−1) gRMS−1)and excellent shock rejection.With a scale factor of 800μV(°s^(−1))^(−1),the SD-BAW gyro system attains a large full-scale range(±1250°s^(−1))with a non-linearity of less than 0.07%.A measured angle-random walk(ARW)of 0.39°/√h and a bias instability of 10.5°h^(−1) are dominated by the thermal and flicker noise of the integrated circuit(IC),respectively.Additional measurements using external electronics show bias-instability values as low as 3.5°h−1,which are limited by feed-through signals coupled from the drive loop to the sense channel,which can be further reduced through proper re-routing of the gyroscope pin-out configuration.展开更多
This paper presents the design,fabrication,and characterization of a novel high quality factor(Q)resonant pitch/roll gyroscope implemented in a 40μm(100)silicon-on-insulator(SOI)substrate without using the deep react...This paper presents the design,fabrication,and characterization of a novel high quality factor(Q)resonant pitch/roll gyroscope implemented in a 40μm(100)silicon-on-insulator(SOI)substrate without using the deep reactive-ion etching(DRIE)process.The featured silicon gyroscope has a mode-matched operating frequency of 200 kHz and is the first out-of-plane pitch/roll gyroscope with electrostatic quadrature tuning capability to fully compensate for fabrication non-idealities and variation in SOI thickness.The quadrature tuning is enabled by slanted electrodes with sub-micron capacitive gaps along the(111)plane created by an anisotropic wet etching.The quadrature cancellation enables a 20-fold improvement in the scale factor for a typical fabricated device.Noise measurement of quadrature-cancelled mode-matched devices shows an angle random walk(ARW)of 0.63°√h^(−1) and a bias instability of 37.7°h^(−1),partially limited by the noise of the interface electronics.The elimination of silicon DRIE in the anisotropically wet-etched gyroscope improves the gyroscope robustness against the process variation and reduces the fabrication costs.The use of a slanted electrode for quadrature tuning demonstrates an effective path to reach high-performance in future pitch and roll gyroscope designs for the implementation of single-chip high-precision inertial measurement units(IMUs).展开更多
In this paper,a miniature video stabilization system is designed to deal with the image jitter and motion blur problem for°apping-wing aerial vehicles(FWAVs).First,a light and two-axis pan–tilt(about 13 g)is bui...In this paper,a miniature video stabilization system is designed to deal with the image jitter and motion blur problem for°apping-wing aerial vehicles(FWAVs).First,a light and two-axis pan–tilt(about 13 g)is built for the FWAV to counteract most of the jitter e®ect.Then,an electronic image stabilization method combined with a Micro-Electro Mechanical Systems(MEMSs)gyroscope is proposed to further stabilize the images.Finally,°ight experiment results show that the designed video stabilization system e®ectively improves the quality of aerial videos.展开更多
基金supported by the National Natural Science Foundation of China (grant: 61234007)the subproject of the Very Large Scale Integrated Circuits Manufacturing Equipment and Complete Technology (No.2 National Major Projects of China) (No.: 2013ZX02502-001)
文摘A novel phase-locked loop( PLL)-based closed-loop driving circuit with ultra-low-noise trans-impedance amplifier( TIA) is proposed. The TIA is optimized to achieve ultra-low input-referred current noise. To track drive-mode resonant frequency and reduce frequency jitter of actuation voltage,a PLL-based driving technique is adopted. Implemented on printed circuit board( PCB),the proposed driving loop has successfully excited MEMS element into resonance,with a settling time of 3 s. The stable frequency and amplitude of TIA output voltage are 10.14 KHz and 800 mVPP,respectively. With sense-channel electronics,the gyroscope exhibits a scale factor of 0.04 mV/°/s and a bias instability of 57.6°/h,which demonstrates the feasibility of the proposed driving circuit.
基金supported by K. C. Wong Magna Fund in Ningbo UniversityK. C. Wong Education Foundation,Hong Kong+2 种基金the Natural Science Foundation (NSF) of China (No. 60874020)the Scientific Research Foundation for the Returned Overseas Chinese Scholars,State Education MinistryNSF of Ningbo City (No. 2010A61013)
文摘Microelectromechanical systems (MEMSs) pose unique measurement and control problems compared with conventional ones because of their small size,low cost,and low power consumption.The vibrating gyroscope is one of those MEMS devices that have significant potential in many industry applications.When the MEMS gyroscope system is considered simultaneously with the coupling terms,the exogenous disturbances and the parameter variations,the controller design of this system becomes very challenging.This paper investigates the primary control problem of a perturbed vibrating MEMS gyroscope.A nonlinear robust adaptive control scheme is proposed for the drive axis of a vibrating MEMS gyroscope.By combining the dynamic surface control (DSC) method with the H-infinity disturbance attenuation technique,a simpler systematic design procedure is developed.The derived H-infinity controller has a simplified structure,and it can drive the drive axis to resonance,regulate the output amplitude of the drive axis to a desired value,and attenuate the generalized disturbances.The features of the derived controller are discussed and illustrated by the simulation of a closed-loop system.The analysis and simulation show that the obtained controller possesses good adaptability and robustness to system uncertainties.
基金supported by Science and Technology Innovation 2030–“New Generation Artificial Intelligence”Major Project(Grant No.2021ZD011090202,No.2021ZD011090503)the National Key Research and Development Program of China(Grant No.2021YFD2000602)the National Natural Science Foundation of China(Grant No.32071913,No.32101623).
文摘Aiming at the application environment of paddy agricultural machinery with bumpy and undulating changes,the problems affecting the method for steering wheel angle measurement by MEMS gyroscope were analyzed,and a wheel angle measurement method combining Dual-MEMS gyroscope(dual MEMS gyroscope)and RTK-GNSS was designed.The adaptive weighting method was used to fuse the heading angle differentiation of RTK-GNSS,the MEMS gyroscope angle rate,and velocity data,and the rod-arm compensation was performed to accurately obtain the angle rates of the body and steering wheels of agricultural machinery;the difference between the combined angular rate of the steering wheel of the agricultural machinery and the angular rate of the agricultural machinery body was obtained,and the integrator is used to integrate the difference to get the wheel steering angle value,and the Kalman filter was designed to make feedback correction for the integration process of angle calculation to eliminate the errors caused by the gyroscope zero bias,random drift,and gyroscope rod arm effect,and to obtain the accurate value of wheel steering angle.A comparative test with the connecting rod wheel angle sensor was designed,and the results show that the maximum deviation is 4.99°,the average absolute average value is 1.61°,and the average standard deviation is 0.98°.The method in this study and the connecting rod wheel angle sensor were used on paddy farm machinery.The wheel angle measurement deviation of the proposed method and the connecting rod wheel angle sensor was not more than 1°,which is relatively small.It has good stability,speed adaptability,and dynamic responsiveness that meets the accuracy requirements of steering wheel angle measurement for paddy field agricultural machinery unmanned driving and can be used instead of connecting rod angle sensors for unmanned agricultural machinery.
基金This study was supported by the National Natural Science Foundation of China(Grant Nos.1167218911772009 and 12072311)and High-Level Talents Program of Yangzhou University.
文摘Micro-electro-mechanical system(MEMS)gyroscopes are an important sort of inertial sensor for identifying parameters of spinning structures,such as the spinning speed and angular deviation,based on the Coriolis effect.In this paper,the nonlinear mechanism of MEMS vibratory ring gyroscopes is analyzed by applying a fully coupled nonlinear model,in which the gyroscopic coupling and geometrically and structurally nonlinear couplings are all taken into account.The coupled differential equations governing the drive and sense motions are established via the Lagrangian equations.Numerical simulation is conducted,and the key nonlinear components and energy transfer behaviors between the drive and sense modes are elucidated.It is revealed that the cubic rigidity nonlinearity is another significant factor leading to the coupling between the drive and sense modes other than the gyroscopic coupling.Perturbation analysis is also carried out by using the method of multiple scales.The nonlinear frequency-amplitude responses of the drive and sense vibrations are obtained,and comprehensive parametric studies are performed.The significant effects of system damping,excitation amplitude,drive amplitude and spinning speed on the responses are discussed,which will facilitate to improve the nonlinear performance and sensitivity of the gyroscope.
文摘This paper reports on a new type of high-frequency mode-matched gyroscope with significantly reduced dependencies on environmental stimuli such as temperature,vibration,and shock.A novel stress-isolation system is used to effectively decouple an axis-symmetric bulk-acoustic wave(BAW)vibratory gyro from its substrate,minimizing the effect that external sources of error have on the offset and scale factor of the device.Substrate-decoupled(SD)BAW gyros with a resonance frequency of 4.3 MHz and Q values near 60000 were implemented using the high aspect ratio poly and single-crystal silicon(HARPSS)process to achieve ultra-narrow capacitive gaps.Wafer-level packaged sensors were interfaced with a customized application-specific integrated circuit(ASIC)to achieve low variations in the offset across temperature(±26°s^(−1) from−40 to 85℃),supreme random-vibration immunity(0.012°s^(−1) gRMS−1)and excellent shock rejection.With a scale factor of 800μV(°s^(−1))^(−1),the SD-BAW gyro system attains a large full-scale range(±1250°s^(−1))with a non-linearity of less than 0.07%.A measured angle-random walk(ARW)of 0.39°/√h and a bias instability of 10.5°h^(−1) are dominated by the thermal and flicker noise of the integrated circuit(IC),respectively.Additional measurements using external electronics show bias-instability values as low as 3.5°h−1,which are limited by feed-through signals coupled from the drive loop to the sense channel,which can be further reduced through proper re-routing of the gyroscope pin-out configuration.
基金This work is supported by the DARPA MTO,Single-Chip Timing and Inertial Measurement Unit(TIMU)program under contract#N66001-11-C-4176.
文摘This paper presents the design,fabrication,and characterization of a novel high quality factor(Q)resonant pitch/roll gyroscope implemented in a 40μm(100)silicon-on-insulator(SOI)substrate without using the deep reactive-ion etching(DRIE)process.The featured silicon gyroscope has a mode-matched operating frequency of 200 kHz and is the first out-of-plane pitch/roll gyroscope with electrostatic quadrature tuning capability to fully compensate for fabrication non-idealities and variation in SOI thickness.The quadrature tuning is enabled by slanted electrodes with sub-micron capacitive gaps along the(111)plane created by an anisotropic wet etching.The quadrature cancellation enables a 20-fold improvement in the scale factor for a typical fabricated device.Noise measurement of quadrature-cancelled mode-matched devices shows an angle random walk(ARW)of 0.63°√h^(−1) and a bias instability of 37.7°h^(−1),partially limited by the noise of the interface electronics.The elimination of silicon DRIE in the anisotropically wet-etched gyroscope improves the gyroscope robustness against the process variation and reduces the fabrication costs.The use of a slanted electrode for quadrature tuning demonstrates an effective path to reach high-performance in future pitch and roll gyroscope designs for the implementation of single-chip high-precision inertial measurement units(IMUs).
基金supported by the National Key Research and Development Program of China under Grant 2019YFB1703603the National Natural Science Foundation of China under Grants 61803025,62173031,and 62073031+1 种基金the Interdisciplinary Research Project for Young Teachers of USTB(Fundamental Research Funds for the Central Universities)under Grant FRF-IDRY-19-010and the Beijing Top Discipline for Arti-cial Intelligent Science and Engineering,University of Science and Technology Beijing.
文摘In this paper,a miniature video stabilization system is designed to deal with the image jitter and motion blur problem for°apping-wing aerial vehicles(FWAVs).First,a light and two-axis pan–tilt(about 13 g)is built for the FWAV to counteract most of the jitter e®ect.Then,an electronic image stabilization method combined with a Micro-Electro Mechanical Systems(MEMSs)gyroscope is proposed to further stabilize the images.Finally,°ight experiment results show that the designed video stabilization system e®ectively improves the quality of aerial videos.
