期刊文献+
共找到44篇文章
< 1 2 3 >
每页显示 20 50 100
Design of portable and intelligent infuser device for rapid fluid transfusion based on micro-electro-mechanical system 被引量:1
1
作者 WANG Qing CHONG Yinbao +1 位作者 ZHAO An LIU Jiuling 《Journal of Medical Colleges of PLA(China)》 CAS 2013年第2期100-106,共7页
Objective: A novel portable and intelligent fluid resuscitation infuser is proposed in this paper. It satisfies the demands of long time use in harsh environment, such as traffic accident, natural disaster, battlefie... Objective: A novel portable and intelligent fluid resuscitation infuser is proposed in this paper. It satisfies the demands of long time use in harsh environment, such as traffic accident, natural disaster, battlefield, evacuation, pre-hospital emergency and so on. Methods: Miniature linear motor and liquid blood cartridge compose the pump body. It's based on the biological impedance method to measure and control, which resolve the disadvantage of traditional infuser device: large power dissipation, big size, AC power supply only and can't be use in field. The whole device weights 250 gram and sizes as two mobile phone together Results: Model device experiment shows: six number 7 standard AAA size alkaline batteries will run the pump for approximately 8-10 h at 6 liters per hour; IV bag can be placed at any position of patient, even under the stretcher. Conclusion: It provides accurate and reliable intravenous infusion for fwst-aid treatment in field. 展开更多
关键词 micro-electro-mechanical system Blood transfusion infusion Miniature linear motor Air eliminate membrane Bio-logical impedance
原文传递
Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces 被引量:2
2
作者 Chen LI Mangu JIA +2 位作者 Yingping HONG Yanan XUE Jijun XIONG 《Frontiers of Information Technology & Electronic Engineering》 SCIE EI CSCD 2022年第5期801-809,共9页
We propose an inductor-capacitor(LC)wireless passive flexible accelerometer,which eliminates the difficulty in measuring the acceleration on the surface of a bending structure.The accelerometer is composed of a flexib... We propose an inductor-capacitor(LC)wireless passive flexible accelerometer,which eliminates the difficulty in measuring the acceleration on the surface of a bending structure.The accelerometer is composed of a flexible polyimide(PI)substrate and a planar spiral inductance coil(thickness 300 nm),made using micro-electro-mechanical system(MEMS)technology.It can be bent or folded at will,and can be attached firmly to the surface of objects with a bending structure.The principle of radio frequency wireless transmission is used to measure the acceleration signal by changing the distance between the accelerometer and the antenna.Compared with other accelerometers with a lead wire,the accelerometer can prevent the lead from falling off in the course of vibration,thereby prolonging its service life.Through establishment of an experimental platform,when the distance between the antenna and accelerometer was 5 mm,the characterization of the surface of bending structures demonstrated the sensing capabilities of the accelerometer at accelerations of 20-100 m/s2.The results indicate that the acceleration and peak-to-peak output voltage were nearly linear,with accelerometer sensitivity reaching 0.27 mV/(m·s-2).Moreover,the maximum error of the accelerometer was less than 0.037%. 展开更多
关键词 Bending structure surfaces Flexible accelerometer micro-electro-mechanical system(MEMS)technology Wireless non-contact measurement
原文传递
Photoacoustic Imaging by Use of Micro-Electro-Mechanical System Scanner 被引量:1
3
作者 陈松良 《Journal of Shanghai Jiaotong university(Science)》 EI 2018年第1期1-10,共10页
Photoacoustic imaging acquires the absorption contrast of biological tissue with ultrasound resolution. It has been broadly investigated in biomedicine for animal and clinical studies. Recently, a micro-electromechani... Photoacoustic imaging acquires the absorption contrast of biological tissue with ultrasound resolution. It has been broadly investigated in biomedicine for animal and clinical studies. Recently, a micro-electromechanical system(MEMS) scanner has been utilized in photoacoustic imaging systems to enhance their performance and extend the realm of applications. The review provides a recap of recent developments in photoacoustic imaging using MEMS scanner, from instrumentation to applications. The topics include the design of MEMS scanner, its use in photoacoustic microscopy, miniature imaging probes, development of dual-modality systems,as well as cutting-edge bio-imaging studies. 展开更多
关键词 photoacoustic imaging micro-electro-mechanical system(MEMS) photoacoustic microscopy high-speed imaging photoacoustic endoscopy
原文传递
A Micro-Electro-Mechanical System-Based Bulk Acoustic Wave Piezoelectric Disk Resonator for Detecting z-axis Rotation Rate
4
作者 许仲兴 张卫平 +4 位作者 唐健 张弓 成宇翔 陈文元 关冉 《Journal of Shanghai Jiaotong university(Science)》 EI 2015年第3期286-292,共7页
This paper presents a bulk acoustic wave piezoelectric disk resonator based on a special pair of degenerative modes, to detect z-axis angular velocity. A single piezoelectric disk is operated in its appropriate modes ... This paper presents a bulk acoustic wave piezoelectric disk resonator based on a special pair of degenerative modes, to detect z-axis angular velocity. A single piezoelectric disk is operated in its appropriate modes in the k Hz frequency range to achieve this function. This design combines the bulk acoustic wave drive/sense mode with lead zirconate titanate resonator which improves device's performance and simplifies its structural complexity. The operation principle of piezoelectric disk resonator is given and validated by finite element method,and the scale factor of piezoelectric disk resonator is 0.977 μV/[(°) · s-1] without any amplification section.The results of impedance analysis for the prototype in the air, which is fabricated on lead zirconate titanate wafer by Micro-Electro-Mechanical System process, show that the resonant frequency of the piezoelectric disk resonator is about 190 k Hz. Moreover, the measured frequency split between drive and sense mode is about290 Hz without any tuning methods. At last, a closed-loop driving and detecting circuit system is designed and its modulation/demodulation method is studied, preliminary experiments show that this device is not sensitive to acceleration, but is sensitive to angular velocity, its performance parameters need follow-up experiments. 展开更多
关键词 micro-electro-mechanical System angular velocity bulk acoustic wave piezoelectric resonator mode matching
原文传递
Chaos and Nonlinear Feedback Control of the Arch Micro-Electro-Mechanical System 被引量:3
5
作者 LUO Shaohua LI Shaobo TAJADDODIANFAR Farid 《Journal of Systems Science & Complexity》 SCIE EI CSCD 2018年第6期1510-1524,共15页
This paper addresses a nonlinear feedback control problem for the chaotic arch micro- electro-mechanical system with unknown parameters,immeasurable states and partial state-constraint subjected to the distributed ele... This paper addresses a nonlinear feedback control problem for the chaotic arch micro- electro-mechanical system with unknown parameters,immeasurable states and partial state-constraint subjected to the distributed electrostatic actuation.To reflect inherent properties and design controller, the phase diagrams,bifurcation diagram and Poincare section are presented to investigate the nonlinear dynamics.The authors employ a symmetric barrier Lyapunov function to prevent violation of constraint when the arch micro-electro-mechanical system faces some limits.An RBF neural network system integrating with an update law is adopted to estimate unknown function with arbitrarily small error. To eliminate chaotic oscillation,a neuro-adaptive backstepping control scheme fused with an extended state tracking differentiator and an observer is constructed to lower requirements on measured states and precise system model.Besides,introducing an extended state tracking differentiator avoids repeated derivative for the virtual control signal associated with conventional backstepping.Finally,simulation results are presented to illustrate feasibility of the proposed scheme. 展开更多
关键词 ARCH micro-electro-mechanical system CHAOS SUPPRESSION Neuro-adaptive BACKSTEPPING nonlinear FEEDBACK control uncertainty.
原文传递
Chaos in a fractional-order micro-electro-mechanical resonator and its suppression 被引量:3
6
作者 Mohammad Pourmahmood Aghababa 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第10期159-167,共9页
The present paper investigates the existence of chaos in a non-autonomous fractional-order micro-electromechanical resonator system(FOMEMRS).Using the maximal Lyapunov exponent criterion,we show that the FOMEMRS exh... The present paper investigates the existence of chaos in a non-autonomous fractional-order micro-electromechanical resonator system(FOMEMRS).Using the maximal Lyapunov exponent criterion,we show that the FOMEMRS exhibits chaos.Strange attractors of the system are plotted to validate its chaotic behavior.Afterward,a novel fractional finite-time controller is introduced to suppress the chaos of the FOMEMRS with model uncertainties and external disturbances in a given finite time.Using the latest version of the fractional Lyapunov theory,the finite time stability and robustness of the proposed scheme are proved.Finally,we present some computer simulations to illustrate the usefulness and applicability of the proposed method. 展开更多
关键词 micro-electro-mechanical resonator chaotic behavior fractional calculus fractional finite-time controller
原文传递
Method of improving pedestrian navigation performance based on chest card
7
作者 CHENG Hao GAO Shuang +2 位作者 CAI Xiaowen WANG Yuxuan WANG Jie 《Journal of Systems Engineering and Electronics》 SCIE CSCD 2024年第4期987-998,共12页
With the development of positioning technology,loca-tion services are constantly in demand by people.As a primary location service pedestrian navigation has two main approaches based on radio and inertial navigation.T... With the development of positioning technology,loca-tion services are constantly in demand by people.As a primary location service pedestrian navigation has two main approaches based on radio and inertial navigation.The pedestrian naviga-tion based on radio is subject to environmental occlusion lead-ing to the degradation of positioning accuracy.The pedestrian navigation based on micro-electro-mechanical system inertial measurement unit(MIMU)is less susceptible to environmental interference,but its errors dissipate over time.In this paper,a chest card pedestrian navigation improvement method based on complementary correction is proposed in order to suppress the error divergence of inertial navigation methods.To suppress atti-tude errors,optimal feedback coefficients are established by pedestrian motion characteristics.To extend navigation time and improve positioning accuracy,the step length in subsequent movements is compensated by the first step length.The experi-mental results show that the positioning accuracy of the pro-posed method is improved by more than 47%and 44%com-pared with the pure inertia-based method combined with step compensation and the traditional complementary filtering com-bined method with step compensation.The proposed method can effectively suppress the error dispersion and improve the positioning accuracy. 展开更多
关键词 pedestrian navigation micro-electro-mechanical sy-stem(MEMS) inertial navigation complementary filtering
下载PDF
RF MEMS switches based on thermal actuator 被引量:2
8
作者 黄继伟 王志功 《Journal of Southeast University(English Edition)》 EI CAS 2007年第4期520-523,共4页
A new switching circuit is presented for the application in the frequency range of 0 to 8 GHz. This switch is electro-thermally actuated and exhibits high radio frequency (RF) performance due to its lateral contact ... A new switching circuit is presented for the application in the frequency range of 0 to 8 GHz. This switch is electro-thermally actuated and exhibits high radio frequency (RF) performance due to its lateral contact mechanism, It composes of electroplated nickel and silicon nitride as structural materials. The isolation between bias and signal ports is realized by using silicon nitride. In the case of a small deformation, the relation between the displacement of the vertex and the pre-bending angle is analyzed. The metal contact is realized by in-plane motion and sidewall connection. The switches were fabricated using the MetalMUMPs process from MEMSCAP. The RF testing results show that the switch has a low insertion loss of 0. 9 dB at 8 GHz and a high isolation of 30 dB below 8 GHz. 展开更多
关键词 RF MEMS (radio frequency micro-electro-mechanical systems) thermal actuator lateral contact ISOLATION
下载PDF
用于MEMS惯性开关的微弹簧有限元动力学分析 被引量:3
9
作者 杨卓青 丁桂甫 +2 位作者 蔡豪刚 付世 赵小林 《机械强度》 EI CAS CSCD 北大核心 2008年第4期586-589,共4页
设计水平和垂直方向两种驱动形式MEMS(micro-electro-mechanical system)惯性开关,应用ANSYS10.0有限元软件对其中的镍质微弹簧结构进行实体建模和动力学模拟分析,得到其在动载荷下的应力分布情况和端部位移响应曲线,并比较静动载荷下... 设计水平和垂直方向两种驱动形式MEMS(micro-electro-mechanical system)惯性开关,应用ANSYS10.0有限元软件对其中的镍质微弹簧结构进行实体建模和动力学模拟分析,得到其在动载荷下的应力分布情况和端部位移响应曲线,并比较静动载荷下结构参数对微弹簧水平和垂直方向上弹性常数(klevel和kvertic)的影响规律。文中的有限元动力学分析方法为较准确地评定类似MEMS微弹簧弹性常数提供一条有效途径,具有工程实际应用价值,特别是为动载荷下工作的惯性类微器件中弹簧的进一步优化与加工提供重要依据。 展开更多
关键词 微机电系统(micro-electro-mechanical system MEMS) 惯性开关 有限元 动力学 弹性系数
下载PDF
静电微泵吸合与释放特性研究 被引量:2
10
作者 应济 李俊 +1 位作者 王硕 徐亮 《机械强度》 CAS CSCD 北大核心 2011年第1期68-72,共5页
为避免静电微泵因驱动电压过高而出现吸合现象,建立描述静电泵膜吸合与释放现象的一维集中质量模型、二维分布式模型和三维有限元模型,对比研究静电致动泵膜在准静态下吸合与释放的循环过程,获得整个循环过程的泵膜挠曲线变化、泵腔体... 为避免静电微泵因驱动电压过高而出现吸合现象,建立描述静电泵膜吸合与释放现象的一维集中质量模型、二维分布式模型和三维有限元模型,对比研究静电致动泵膜在准静态下吸合与释放的循环过程,获得整个循环过程的泵膜挠曲线变化、泵腔体积变形、电容变化等大量的数据与曲线。比较结果表明,二维分布式模型求解效果最好,并利用三维有限元模型和宏模型的计算结果,验证该模型在泵膜大变形下计算吸合过程的准确性,获得的吸合电压为确定静电微泵驱动电压的上限值提供有效依据。 展开更多
关键词 微机电系统(micro-electro-mechanical system MEMS) 静电 微泵 吸合 释放
下载PDF
Direct ink writing of 3D-Honeycombed CL-20 structures with low critical size 被引量:10
11
作者 Bao-yun Ye Chang-kun Song +3 位作者 Hao Huang Qian-bing Li Chong-wei An Jing-yu Wang 《Defence Technology(防务技术)》 SCIE EI CAS CSCD 2020年第3期588-595,共8页
3D-Honeycombed CL-20 structures with low critical size of detonation have been fabricated successfully for intelligent weapon systems using a micro-flow direct ink writing(DIW) technology.The CL-20-based explosive ink... 3D-Honeycombed CL-20 structures with low critical size of detonation have been fabricated successfully for intelligent weapon systems using a micro-flow direct ink writing(DIW) technology.The CL-20-based explosive ink for DIW technology was prepared by a two-component adhesive system with waterborne polyurethane(WPU) and ethyl cellulose(EC).Not only the preparation of the explosive ink but also the principle of DIW process have been investigated systematically.The explosive ink displayed stro ng shea rthinning behavior that permitted layer-by-laye r deposition from a fine nozzle onto a substrate to produce complex shapes.The EC content was varied to alter the pore structure distribution and rheological behavior of ink samples after curing.The deposited explosive composite materials are of a honeycombed structure with high porosity,and the pore size distribution increases with the increase of EC content.No phase change was observed during the preparation process.Both WPU and EC show good compatibility with CL-20 particles.Apparently high activation energy was realized in the CL-20-based composite ink compared with that of the refined CL-20 due to the presence of non-energetic but stable WPU.The detonation performance of the composite materials can be precisely controlled by an adjustment in the content of binders.The 3D honeyco mbed CL-20 structures,which are fabricated by DIW technology,have a very small critical detonation size of less than 69 μm,as demonstrated by wedge shaped charge test.The ink can be used to create 3D structures with complex geometries not possible with traditional manufacturing techniques,which presents a bright future for the development of intelligent weapon systems. 展开更多
关键词 Hexanitrohexaazaisowurtzitane(CL-20) Direct ink writing micro-electro-mechanical system(MEMS) Pore structure Detonation performance
下载PDF
HIGH PERFORMANCE ELECTRIC FIELD MICRO SENSOR WITH COMBINED DIFFERENTIAL STRUCTURE 被引量:7
12
作者 Wen Xiaolong Peng Chunrong +4 位作者 Fang Dongming Yang Pengfei Chen Bo Zheng Fengjie Xia Shanhong 《Journal of Electronics(China)》 2014年第2期143-150,共8页
This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combin... This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combined differential structure effectively reduces various environmental affections,such as thermal drift,humidity drift and electrostatic charge accumulation.The sensor is tested in near-ground place as well as balloon-borne sounding.In different weather conditions,the measurement results showed good agreement with those of the commercial electric field mill. 展开更多
关键词 micro-electro-mechanical System(MEMS) Electric field sensor Atmospheric electric field Differential structure
下载PDF
Detecting magnetic field direction by a micro beam operating in different vibration modes 被引量:4
13
作者 陈洁 秦明 黄庆安 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第9期323-328,共6页
A new method to detect the magnetic field direction by using a silicon structure is presented in this paper. The structure includes a micro beam and an in-plane coil electrode. When the electrode under a magnetic fiel... A new method to detect the magnetic field direction by using a silicon structure is presented in this paper. The structure includes a micro beam and an in-plane coil electrode. When the electrode under a magnetic field is applied with an alternating current, the micro beam is actuated under the effect of the Lorentz forces. Magnetic fields of different directions cause different vibration profiles. The direction of the magnetic field is obtained by measuring the vibration amplitudes of the micro beam, which is driven to work at first- and second-order resonant modes. A micro structure has been fabricated using the bulk microma^hined silicon process. A laser Doppler vibrometer system is implemented to measure the vibration amplitudes. The experimental results show that the amplitude of the structure, which depends on the different modes, is a sine or cosine function of the angle of the magnetic field. It agrees well with the simulation result. Currently a resolution of 10~ for the magnetic field direction measurement can be obtained using the detecting principle. 展开更多
关键词 BEAM micro-electro-mechanical systems Lorentz force RESONANCE
原文传递
NONLINEAR DYNAMICS OF LATERAL MICRO-RESONATOR INCLUDING VISCOUS AIR DAMPING 被引量:3
14
作者 GAO Rong WANG Xiaojing +2 位作者 WANG Min YU Maohua XIE Mingchun 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2007年第3期75-78,共4页
The nonlinear dynamics of the lateral micro-resonator including the air damping effect is researched. The air damping force is varied periodically during the resonator oscillating, and the air damp coefficient can not... The nonlinear dynamics of the lateral micro-resonator including the air damping effect is researched. The air damping force is varied periodically during the resonator oscillating, and the air damp coefficient can not be fixed as a constant. Therefore the linear dynamic analysis which used the constant air damping coefficient can not describe the actual dynamic characteristics of the mi-cro-resonator. The nonlinear dynamic model including the air damping force is established. On the base of Navier-Stokes equation and nonlinear dynamical equation, a coupled fluid-solid numerical simulation method is developed and demonstrates that damping force is a vital factor in micro-comb structures. Compared with existing experimental result, the nonlinear numerical value has quite good agreement with it. The differences of the amplitudes (peak) between the experimental data and the results by the linear model and the nonlinear model are 74.5% and 6% respectively. Nonlinear nu-merical value is more exact than linear value and the method can be applied in other mi-cro-electro-mechanical systeme (MEMS) structures to simulate the dynamic performance. 展开更多
关键词 Air damping Nonlinear dynamics MICRO-RESONATOR micro-electro-mechanical systems(MEMS)
下载PDF
Ultrasonic Linear Motor with Anisotropic Composite 被引量:3
15
作者 曾周末 王新辉 赵伯雷 《Transactions of Tianjin University》 EI CAS 2004年第2期98-101,共4页
An idea to make up the vibrating body of ultrasonic motor with anisotropic composite is proposed and a linear piezoelectric motor is developed in this paper. Relative problems such as actuating mechanism, resonant fre... An idea to make up the vibrating body of ultrasonic motor with anisotropic composite is proposed and a linear piezoelectric motor is developed in this paper. Relative problems such as actuating mechanism, resonant frequency are discussed theoretically. According to the feature that impulse exists between the elastic body of composite ultrasonic linear motor and the base, an impulse analysis is presented to calculate the motor′s friction driving force and frictional conversion efficiency. The impulse analysis essentially explains the reason why the ultrasonic motor has great driving force, and can be applied to analyze the non-linear ultrasonic motor. 展开更多
关键词 ultrasonic linear motor COMPOSITE frictional driving micro-electro-mechanical system(MEMS) MICROACTUATOR
下载PDF
Analysis and Prevention for Oscillation Failure of Capacitive Micro-accelerometers 被引量:2
16
作者 WAN Caixin DONG Jingxin HAN Fengtian 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2010年第3期336-345,共10页
As actuator of the force-rebalanced servo loop, the electrostatic force generator of the micro-accelerometer shows high nonlinearity while the interpole of the micro-electro-mechanical system(MEMS) sensor is far awa... As actuator of the force-rebalanced servo loop, the electrostatic force generator of the micro-accelerometer shows high nonlinearity while the interpole of the micro-electro-mechanical system(MEMS) sensor is far away from its balance position. The control system cannot rebalance itself with the limited bandwidth after an external long overload, because the characteristics of the force generator differ from normal case. Although for similar problems, solutions with cascading lead-lag blocks, with the anti-windup(AW) technology, or with the sliding-mode control, are widely reported, the problems such as performance loss or difficulty to synthesize a digital controller still remain. Based on existing researches, remedies are developed by analyzing the characteristic of the system not only near the balance position, but also corresponding to the whole moveable range of the interpole, and a new controller is proposed. The solution is compared with the common solutions of cascading lead-lag blocks method, AW methods, and sliding mode methods. Comparison results show that the proposed solution avoid performance loss, compared to cascading lead-lag blocks solution; the proposed solution is easily synthesized and implemented in the analog servo loop of the micro-accelerometer, compared to digital AW methods; at the same time, the proposed solution avoids suffering the chattering effect problem but just utilize it, compared to the sliding-mode control solution. Nevertheless, comparison results show the solution is lack of commonality, since the solution is only more suitable to micro electrostatic force-rebalance system. The SIMULINK models with and without the proposed solution, taking typical micro-accelerometer parameters, have been set up for simulation; corresponding experiments utilizing electrometric method are also conducted after the successful simulations. Simulation and experiment results verify that the micro-accelerometer will reliably return to normal operation after external long overload with the proposed solution. Therefore, it is expected to design the analog servo loop of high performance micro electrostatic force-rebalance system so as to ensure the rebalance after long overload without performance loss. 展开更多
关键词 variable structure systems micro-electro-mechanical system acceleration measurement oscillation failure
下载PDF
Correcting dynamic residual aberrations of conformal optical systems using AO technology 被引量:2
17
作者 李岩 李林 +1 位作者 黄一帆 杜保林 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第7期2769-2773,共5页
This paper analyses the dynamic residual aberrations of a conformal optical system and introduces adaptive optics (AO) correction technology to this system. The image sharpening AO system is chosen as the correction... This paper analyses the dynamic residual aberrations of a conformal optical system and introduces adaptive optics (AO) correction technology to this system. The image sharpening AO system is chosen as the correction scheme.Communication between MATLAB and Code V is established via ActiveX technique in computer simulation.The SPGD algorithm is operated at seven zoom positions to calculate the optimized surface shape of the deformable mirror.After comparison of performance of the corrected system with the baseline system,AO technology is proved to be a good way of correcting the dynamic residual aberration in conformal optical design. 展开更多
关键词 conformal optical design dynamic residual aberration SPGD algorithm micro-electro-mechanical systems deformable mirror
原文传递
Suppressing the mechanical quadrature error of a quartz double-H gyroscope through laser trimming 被引量:2
18
作者 赵克 冯立辉 +4 位作者 王茜蒨 刘明智 王本国 崔芳 孙雨南 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第11期622-628,共7页
In this paper, we introduce a z-axis quartz gyroscope using a double-H tuning fork, which has a high sensitivity. However, it also causes a large mechanical quadrature error. The laser trimming method is used to suppr... In this paper, we introduce a z-axis quartz gyroscope using a double-H tuning fork, which has a high sensitivity. However, it also causes a large mechanical quadrature error. The laser trimming method is used to suppress this error at quartz level. The trimming law is obtained through the finite element method (FEM). A femtosecond laser processing system is used to trim the gold balancing masses on the beams, and experimental results are basically consistent with the simulated ones. The mechanical quadrature error is suppressed by 96%, from 26.3° s-1 to 1.1° s-1. Nonlinearity changes from 1.48% to 0.30%, angular random walk (ARW) is reduced from 2.19° h-1/2 to 1.42° h-1/2, and bias instability is improved by a factor of 7.7, from 197.6° h-1 to 25.4° h-1. 展开更多
关键词 femtosecond laser trimming micro-electro-mechanical system (MEMS) gyroscope finite elementmethod (FEM) simulation
原文传递
Size-dependent modal interactions of a piezoelectrically laminated microarch resonator with 3:1 internal resonance 被引量:1
19
作者 A.NIKPOURIAN M.R.GHAZAVI S.AZIZI 《Applied Mathematics and Mechanics(English Edition)》 SCIE EI CSCD 2020年第10期1517-1538,共22页
The nonlinear interactions of a microarch resonator with 3:1 internal resonance are studied.The microarch is subjected to a combination of direct current(DC)and alternating current(AC)electric voltages.Thin piezoelect... The nonlinear interactions of a microarch resonator with 3:1 internal resonance are studied.The microarch is subjected to a combination of direct current(DC)and alternating current(AC)electric voltages.Thin piezoelectric layers are thoroughly bonded on the top and bottom surfaces of the microarch.The piezoelectric actuation is not only used to modulate the stiffness and resonance frequency of the resonator but also to provide the suitable linear frequency ratio for the activation of the internal resonance.The size effect is incorporated by using the so-called modified strain gradient theory.The system is highly nonlinear due to the co-existence of the initial curvature,the mid-plane stretching resulting from clamped anchors,and the electrostatic excitation.The eigenvalue problem is solved to conduct a frequency analysis and identify the possible regions for activating the internal resonance.The effects of the piezoelectric actuation,the electric excitation,and the small-scale effect are investigated on the internal resonance.Exclusive nonlinear phenomena such as Hopf bifurcation and hysteresis are identified in the microarch response.It is shown that by applying appropriate piezoelectric actuation,one is able to activate microarch internal resonance regardless of the initial rise level of the microarch.It is also disclosed that among all the parameters,AC electric voltage has the greatest effect on the energy exchange between the interacting modes.The results can be used to design resonators and internal resonance based micro-electro-mechanical system(MEMS)energy harvesters. 展开更多
关键词 microarch resonator internal resonance multiple time scales method micro-electro-mechanical system(MEMS) piezoelectric actuation electrostatic excitation
下载PDF
Novel On-Line North-Seeking Method Based on a Three-Axis MEMS Gyroscope 被引量:1
20
作者 Yu Liu Gaojun Xiang +1 位作者 Junqi Guo Min Zhou and Hongzhi Liu 《Journal of Beijing Institute of Technology》 EI CAS 2018年第4期623-629,共7页
A novel on-line north-seeking method based on a three-axis micro-electro-mechanical system(MEMS)gyroscope is designed.This system processes data by using a Kalman filter to calibrate the installation error of the thre... A novel on-line north-seeking method based on a three-axis micro-electro-mechanical system(MEMS)gyroscope is designed.This system processes data by using a Kalman filter to calibrate the installation error of the three-axis MEMS gyroscope in complex environment.The attitude angle updating for quaternion,based on which the attitude instrument will be rotated in real-time and the true north will be found.Our experimental platform constitutes the dual-axis electric rotary table and the attitude instrument,which is developed independently by our scientific research team.The experimental results show that the accuracy of north-seeking is higher than 1°,while the maximum root mean square error and the maximum mean absolute error are 0.906 7 and 0.910 0,respectively.The accuracy of north-seeking is much higher than the traditional method. 展开更多
关键词 micro-electro-mechanical system(MEMS)gyroscope QUATERNION rotating system in realtime NORTH-SEEKING
下载PDF
上一页 1 2 3 下一页 到第
使用帮助 返回顶部