Purpose:The aim of the current study was to investigate the association of accelerometer-measured sleep duration and different intensities of physical activity(PA)with the risk of incident type 2 diabetes in a populat...Purpose:The aim of the current study was to investigate the association of accelerometer-measured sleep duration and different intensities of physical activity(PA)with the risk of incident type 2 diabetes in a population-based prospective cohort study.Methods:Altogether,88,000 participants(mean age=62.2±7.9 years,mean±SD)were included from the UK Biobank.Sleep duration(short:<6 h/day;normal:6-8 h/day;long:>8 h/day)and PA of different intensities were measured using a wrist-won accelerometer over a 7-day period between 2013 and 2015.PA was classified according to the median or World Health Organization-recommendation:total volume of PA(high,low),moderate-to-vigorous PA(MVPA)(recommended,not recommended),and light-intensity PA(high,low).Incidence of type 2diabetes was ascertained using hospital records or death registries.Results:During a median follow-up of 7.0 years,1615 incident type 2 diabetes cases were documented.Compared with normal sleep duration,short(hazard ratio(HR)=1.21,95%confidence interval(95%CI):1.03-1.41)but not long sleep duration(HR=1.01,95%CI:0.89-1.15)was associated with excessive type 2 diabetes risk.This increased risk among short sleepers seems to be protected against by PA.Compared with normal sleepers with high or recommended PA,short sleepers with low volume of PA(HR=1.81,95%CI:1.46-2.25),not recommended(below the World Health Organization-recommended level of)MVPA(HR=1.92,95%CI:1.55-2.36),or low light-intensity PA(HR=1.49,95%CI:1.13-1.90)had a higher risk of type 2 diabetes,while short sleepers with a high volume of PA(HR=1.14,95%CI:0.88-1.49),recommended MVPA(HR=1.02,95%CI:0.71-1.48),or high light-intensity PA(HR=1.14,95%CI:0.92-1.41)did not.Conclusion:Accelerometer-measured short but not long sleep duration was associated with a higher risk of incident type 2 diabetes.A higher level of PA,regardless of intensity,potentially ameliorates this excessive risk.展开更多
The nitrogen-vacancy (NV) center quantum systems have emerged as versatile tools in the field of precision measurement because of their high sensitivity in spin state detection and miniaturization potential as solid-s...The nitrogen-vacancy (NV) center quantum systems have emerged as versatile tools in the field of precision measurement because of their high sensitivity in spin state detection and miniaturization potential as solid-state platforms.In this paper,an acceleration sensing scheme based on NV spin–strain coupling is proposed,which can effectively eliminate the influence of the stray noise field introduced by traditional mechanical schemes.Through the finite element simulation,it is found that the measurement bandwidth of this ensemble NV spin system ranges from 3 kHz to hundreds of kHz with structure√optimization.The required power is at the sub-μW level,corresponding to a noise-limited sensitivity of 6.7×10^(-5) /√Hz.Compared with other types of accelerometers,this micro-sized diamond sensor proposed here has low power consumption,exquisite sensitivity,and integration potential.This research opens a fresh perspective to realize an accelerometer with appealing comprehensive performance applied in biomechanics and inertial measurement fields.展开更多
Purpose: This study focused on maintaining and improving the walking function of late-stage older individuals while longitudinally tracking the effects of regular exercise programs in a day-care service specialized fo...Purpose: This study focused on maintaining and improving the walking function of late-stage older individuals while longitudinally tracking the effects of regular exercise programs in a day-care service specialized for preventive care over 5 years, using detailed gait function measurements with an accelerometer-based system. Methods: Seventy individuals (17 male and 53 female) of a daycare service in Tokyo participated in a weekly exercise program, meeting 1 - 2 times. The average age of the participants at the start of the program was 81.4 years. Gait function, including gait speed, stride length, root mean square (RMS) of acceleration, gait cycle time and its standard deviation, and left-right difference in stance time, was evaluated every 6 months. Results: Gait speed and stride length improved considerably within six months of starting the exercise program, confirming an initial improvement in gait function. This suggests that regular exercise programs can maintain or improve gait function even age groups that predictably have a gradual decline in gait ability due to enhanced age. In the long term, many indicators tended to approach baseline values. However, the exercise program seemingly counteracts age-related changes in gait function and maintains a certain level of function. Conclusions: While a decline in gait ability with aging is inevitable, establishing appropriate exercise habits in late-stage older individuals may contribute to long-term maintenance of gait function.展开更多
Vector accelerometer has attracted much attention for its great application potential in underground seismic signal measurement. We propose and demonstrate a novel vector accelerometer based on the three fiber Bragg g...Vector accelerometer has attracted much attention for its great application potential in underground seismic signal measurement. We propose and demonstrate a novel vector accelerometer based on the three fiber Bragg gratings(FBGs)embedded in a silicone rubber compliant cylinder at 120° distributed uniformly. The accelerometer is capable of detecting the orientation of vibration with a range of 0°–360° and the acceleration through monitoring the central wavelength shifts of three FBGs simultaneously. The experimental results show that the natural frequency of the accelerometer is about 85 Hz, and the sensitivity is 84.21 pm/g in the flat range of 20 Hz–60 Hz. Through experimental calibration, the designed accelerometer can accurately obtain vibration vector information, including vibration orientation and acceleration. In addition, the range of resonant frequency and sensitivity can be expanded by adjusting the hardness of the silicone rubber materials. Due to the characteristics of small size and orientation recognition, the accelerometer can be applied to low-frequency vibration acceleration vector measurement in narrow spaces.展开更多
A calculation and test method for the natural frequency of a high-g micro accelerometer with complex structures is presented. A universal formula for natural frequency, which can significantly simplify the structural ...A calculation and test method for the natural frequency of a high-g micro accelerometer with complex structures is presented. A universal formula for natural frequency, which can significantly simplify the structural design process, is deduced and confirmed by experiment. A simplified analytical model is established to describe the accelerometer＇s mechanical behavior and deduce the formula for the natural frequency. Finite element modeling is also conducted to evaluate the natural frequency of the micro-accelerometer and verify the formula. The results obtained from the analytical model and the finite element simulation show good agreement. Finally, a shock comparison method designed for acquiring the high frequency characteristics of the accelerometer is introduced to verify the formula by testing its actual natural frequency.展开更多
In allusion to the limitations of the traditional attitude measurement system consisting of a three-axis magnetic sensor and two accelerometers on high-spinning projectile, a new scheme comprised of two magnetic senso...In allusion to the limitations of the traditional attitude measurement system consisting of a three-axis magnetic sensor and two accelerometers on high-spinning projectile, a new scheme comprised of two magnetic sensors and two accelerometers installed in a particular way is given. The configuration of the sensors is described. The calculation method and the mathematical model of the projectile attitude based on the sensor configuration are discussed. The basic calculation method including the Magsonde Window, the proof of the ratios of maximums and minimums and the calculation of the attitude angles are analyzed in theory. Finally, the system is simulated under the given conditions. The simulation result indicates that the estimated attitude angles are in agreement with the true attitude angles.展开更多
Resonant accelerometer is designed,which includes two double-ended tuning forks,a proof mass,four-leverage system amplifying inertial force,and drive/sense combs.Each tuning fork is electrostatically actuated and sens...Resonant accelerometer is designed,which includes two double-ended tuning forks,a proof mass,four-leverage system amplifying inertial force,and drive/sense combs.Each tuning fork is electrostatically actuated and sensed at resonance using comb electrodes.The device is fabricated using MEMS bulk-silicon technology,whose sensitive degree is 27 3Hz/g,and the resolution is 167 8μg.展开更多
A tunneling accelerometer is fabricated and characterized based on the extension of the silicon-glass anodic-bonding and deep etching releasing process provided by Peking University.The tunneling current under open lo...A tunneling accelerometer is fabricated and characterized based on the extension of the silicon-glass anodic-bonding and deep etching releasing process provided by Peking University.The tunneling current under open loop operation is tested in the air by HP4145B semiconductor analyzer,which verifies the presence of tunneling current and the exponential relationship between tunneling gap and tunneling current.The tunneling barrier is extrapolated to be from 1.182 to 2.177eV.The threshold voltages are tested to be 14～16V for most of the devices.The threshold voltages under -1,0,and +1g are tested,respectively,which shows the sensitivity of the accelerometer is about 87mV/g.展开更多
A novel capacitive biaxial microaccelerometer with a highly symmetrical microstructure is developed. The sensor is composed of a single seismic mass, grid strip, supporting beam, joint beam, and damping adjusting comb...A novel capacitive biaxial microaccelerometer with a highly symmetrical microstructure is developed. The sensor is composed of a single seismic mass, grid strip, supporting beam, joint beam, and damping adjusting combs. The sensing method of changing capacitance area is used in the design,which depresses the requirement of the DRIE process, and de- creases electronic noise by increasing sensing voltage to improve the resolution. The parameters and characteristics of the biaxial microaccelerometer are discussed with the FEM tool ANSYS. The simulated results show that the transverse sensitivity of the sensor is equal to zero. The testing devices based on the slide-film damping effect are fabricated, and the testing quality factor is 514, which shows that the designed structure can improve the resolution and proves the feasibility of the designed process.展开更多
This paper presents two approaches for system-level simulation of force-balance accelerometers. The derivation of the system-level model is elaborated and simulation results are obtained from the implementation of tho...This paper presents two approaches for system-level simulation of force-balance accelerometers. The derivation of the system-level model is elaborated and simulation results are obtained from the implementation of those strategies on the fabricated silicon force-balance MEMS accelerometer. The mathematical model presented is implemented in VHDL- AMS and SIMULINK TM,respectively. The simulation results from the two approaches are compared and show a slight difference. Using VHDL-AMS is flexible,reusable,and more accurate. But there is not a mature solver developed for the language and this approach takes more time, while the simulation model can be easily built and quickly evaluated using SIMULINK.展开更多
A piezoresistive silicon accelerometer fabricated by a selective,self-stopping porous silicon (PS) etching method using an epitaxial layer for movable microstructures is described and analyzed.The technique is capable...A piezoresistive silicon accelerometer fabricated by a selective,self-stopping porous silicon (PS) etching method using an epitaxial layer for movable microstructures is described and analyzed.The technique is capable of constructing a microstructure precisely.PS is used as a sacrificial layer,and releasing holes are etched in the film.TMAH solution with additional Si powder and (NH_4)_2S_2O_8 is used to remove PS through the small releasing holes without eroding uncovered Al.The designed fabrication process is full compatible with standard CMOS process.展开更多
For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-...For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-resolution inertial-grade novel micro resonant accelerometer is studied.Based on the detecting theory of the resonant sensors,the accelerometer is designed,fabricated,and tested.The accelerometer consists of one proofmass,two micro leverages and two double-ended-tuning-fork （DETF） resonators.The sensing principle of this accelerometer is based on that the natural frequency of the DETF resonator shifts with its axial load which is caused by inertial force.The push-pull configuration of the DETF is for temperature compensation.The two-stage micro leverage mechanisms are employed to amplify the force and increase the sensitivity of the accelerometer.The micro leverage and the resonator are modeled for static analysis and nonlinear modal analysis via theory method and finite element method （FEM）,respectively.The geometrical parameters of them are optimized.The amplification factor of the leverage is 102,and the sensitivity of the resonator on theory is about 62 Hz/g.The samples of the accelerometer are fabricated with deep reactive ion etching （DRIE） technology which can get a high-aspect ratio structure for contributing a greater sensing-capacitance.The measuring results of the samples by scanning electron microscopy （SEM） show that the process is feasible,because of the complete structure,the sound combs and micro leverages,and the acceptable errors.The frequency of the resonator and the sensitivity of the accelerometer are tested via printed circuit board （PCB）,respectively.The result of the test shows that the frequency of the push-resonator is about 54 530 Hz and the sensitivity of the accelerometer is about 55 Hz/g.The amplification factor of the leverage is calculated more accurately because the coupling of the two stages leverage is considered during derivation of the analysis formula.In addition,the novel differential structure of the accelerometer can greatly improve the sensitivity of the accelerometers.展开更多
In view of the problem that the current single-antenna GPS attitude determination system can only determine the body attitude when the sideslip angle is zero and the multiantenna GPS/SINS integrated navigation system ...In view of the problem that the current single-antenna GPS attitude determination system can only determine the body attitude when the sideslip angle is zero and the multiantenna GPS/SINS integrated navigation system is of large volume, high cost, and complex structure, this approach is presented to determine the attitude based on vector space with single-antenna GPS and accelerometers in the micro inertial measurement unit （MIMU）. It can provide real-time and accurate attitude information. Subsequently, the single-antenna GPS/SINS integrated navigation system is designed based on the combination of position, velocity, and attitude. Finally the semi- physical simulations of single-antenna GPS attitude determination system and single-antenna GPS/SINS integrated navigation system are carried out. The simulation results, based on measured data, show that the single-antenna GPS/SINS system can provide more accurate navigation information compared to the GPS/SINS system, based on the combination of position and velocity. Furthermore, the single-antenna GPS/SINS system is characteristic of lower cost and simpler structure. It provides the basis for the application of a single-antenna GPS/SINS integrated navigation system in a micro aerial vehicle （MAV）.展开更多
This paper reports a piezoelectric nanogenerator(NG) with a thickness of approximately 80 μm for miniaturized self-powered acceleration sensors. To deposit the piezoelectric zinc oxide(ZnO) thin film, a magnetron spu...This paper reports a piezoelectric nanogenerator(NG) with a thickness of approximately 80 μm for miniaturized self-powered acceleration sensors. To deposit the piezoelectric zinc oxide(ZnO) thin film, a magnetron sputtering machine was used. Polymethyl methacrylate(PMMA) and aluminum-doped zinc oxide(AZO) were used as the insulating layer and the top electrode of the NG, respectively. The experimental results show that the ZnO thin films annealed at 150℃ exhibited the highest crystallinity among the prepared films and an optical band gap of 3.24 eV. The NG fabricated with an AZO/PMMA/ZnO/stainless steel configuration exhibited a higher output voltage than the device with an AZO/ZnO/PMMA/stainless steel configuration. In addition, the annealing temperature affected the open-circuit voltage of the NGs;the output voltage reached 3.81 V when the annealing temperature was 150℃. The open-circuit voltage of the prepared self-powered accelerometer increased linearly with acceleration. In addition, the small NG-based accelerometer, which exhibited excellent fatigue resistance, can be used for acceleration measurements of small and lightweight devices.展开更多
Micro-Opto-Electro-Mechanical Systems(MOEMS)accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems(MEMS)to enable high precision,small volume...Micro-Opto-Electro-Mechanical Systems(MOEMS)accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems(MEMS)to enable high precision,small volume and anti-electromagnetic disturbance measurement of acceleration.In recent years,with the in-depth research and development of MOEMS accelerometers,the community is flourishing with the possible applications in seismic monitoring,inertial navigation,aerospace and other industrial and military fields.There have been a variety of schemes of MOEMS accelerometers,whereas the performances differ greatly due to different measurement principles and corresponding application requirements.This paper aims to address the pressing issue of the current lack of systematic review of MOEMS accelerometers.According to the optical measurement principle,we divide the MOEMS accelerometers into three categories:the geometric optics based,the wave optics based,and the new optomechanical accelerometers.Regarding the most widely studied category,the wave optics based accelerometers are further divided into four sub-categories,which is based on grating interferometric cavity,Fiber Bragg Grating(FBG),Fabry-Perot cavity,and photonic crystal,respectively.Following a brief introduction to the measurement principles,the typical performances,advantages and disadvantages as well as the potential application scenarios of all kinds of MOEMS accelerometers are discussed on the basis of typical demonstrations.This paper also presents the status and development tendency of MOEMS accelerometers to meet the ever-increasing demand for high-precision acceleration measurement.展开更多
A combination of large mass,weak spring and nano-grating is the key for a nano-grating accelerometer to measure nano-G acceleration.A novel compact nano-grating accelerometer integrating a large mass with nano-grating...A combination of large mass,weak spring and nano-grating is the key for a nano-grating accelerometer to measure nano-G acceleration.A novel compact nano-grating accelerometer integrating a large mass with nano-grating is proposed.First,the numbers of diffraction orders are calculated.Then,structure parameters are optimized by finite element analysis to achieve a high sensitivity in an ideal vibration mode.Finally,we design the fabrication method to form such a compact nano-grating accelerometer and successfully fabricate the uniform and well-designed nano-gratings with a period of 847 nm,crater of 451 nm by an FIB/SEM dual beam system.Based on the ANSYS simulation,a nano-grating accelerometer is predicted to work in the first modal and enables the accelerometer to have displacement sensitivity at 197 nm/G with a measurement range of±1 G,corresponding to zeroth diffraction beam optical sensitivity 1%/mG.The nano-gratings fabricated are very close to those designed ones within experimental error to lay the foundation for the sequent fabrication.These results provide a theoretical basis for the design and fabrication of nano-grating accelerometers.展开更多
Parkinson’s disease is neurodegenerative in nature and associated with characteristic movement disorders, such as hand tremor. Wireless accelerometer applications may advance the quality of care for Parkinson’s dise...Parkinson’s disease is neurodegenerative in nature and associated with characteristic movement disorders, such as hand tremor. Wireless accelerometer applications may advance the quality of care for Parkinson’s disease patients. The acceleration waveform of the respective hand tremor can be recorded and stored for post-processing and progressive status tracking. A wireless accelerometer configuration for monitoring Parkinson’s disease hand tremor is presented. The proposed configuration is envisioned to be conducted with the assistance of a caregiver. For initial engineering proof of concept simulated Parkinson’s disease tremor is recorded through a wireless accelerometer node and contrasted to a statically positioned and tandem activated wireless accelerometer node. Statistical significance is acquired regarding the quantification of the simulated Parkinson’s disease tremor acceleration waveform and statically positioned acceleration waveform, while demonstrating a considerable degree of accuracy, consistency, and reliability.展开更多
Tremor is a manifestation of a variety of human neurodegenerative diseases, notably Parkinson’s disease (PD) and Essential Tremor (ET), both affecting millions worldwide. PD is primarily caused by a progressive loss ...Tremor is a manifestation of a variety of human neurodegenerative diseases, notably Parkinson’s disease (PD) and Essential Tremor (ET), both affecting millions worldwide. PD is primarily caused by a progressive loss of dopamine neurons in the nigrostriatal system that leads to widespread motor symptoms such as bradykinesia, rigidity, tremor and postural instability. ET typically involves a tremor of the arms, hands or fingers. No definitive test or biomarker is yet available for PD or ET, so the rate of misdiagnosis is relatively high. As tremor is a very common feature at the onset of both diseases, it is crucial to be able to characterize it. This is made possible using acce?lerometers to quantify the tremor amplitude and frequency. In this work we aim to find tasks involving upper limb movements that are suitable to modulate both types of tremor. Four tasks were tested, differing on whether the arms moved together or alternatingly and whether loads were added. Significant differences in tremor measures were found when patients were asked to perform simultaneous rapid arms movements with loads placed on their wrists. These results may allow the design of an efficient fMRI protocol for identifying the cortical circuits responsible for the modulation of tremor.展开更多
A triaxial high-g accelerometer of microelectro mechanical systems （MEMS） has a struc- ture of multi-chips combination and will be used in aerospace field, civil and military fields. The ac- celerometer can measure ...A triaxial high-g accelerometer of microelectro mechanical systems （MEMS） has a struc- ture of multi-chips combination and will be used in aerospace field, civil and military fields. The ac- celerometer can measure the acceleration of the carrier. The chips with island-membrane structures on its back surfaces are made by MEMS dry processing. The chip is reasonable and can work well under high impact load; Titanium alloy base is also stronger in high shock environment, these are proved by finite element analysis. Finally, the MEMS combined triaxial high-g accelerometer is vali- dated by high impact calibration experiments in order to get a key performance index, including range, sensitivity and transverse sensitivity and so on. These data can satisfy the need of design but some problems remain, these will be eliminated by improvement of the processing technology and materials.展开更多
基金supported by the National Key R&D Program of China(2021YFC2501500)National Natural Science Foundation of China(82171476)。
文摘Purpose:The aim of the current study was to investigate the association of accelerometer-measured sleep duration and different intensities of physical activity(PA)with the risk of incident type 2 diabetes in a population-based prospective cohort study.Methods:Altogether,88,000 participants(mean age=62.2±7.9 years,mean±SD)were included from the UK Biobank.Sleep duration(short:<6 h/day;normal:6-8 h/day;long:>8 h/day)and PA of different intensities were measured using a wrist-won accelerometer over a 7-day period between 2013 and 2015.PA was classified according to the median or World Health Organization-recommendation:total volume of PA(high,low),moderate-to-vigorous PA(MVPA)(recommended,not recommended),and light-intensity PA(high,low).Incidence of type 2diabetes was ascertained using hospital records or death registries.Results:During a median follow-up of 7.0 years,1615 incident type 2 diabetes cases were documented.Compared with normal sleep duration,short(hazard ratio(HR)=1.21,95%confidence interval(95%CI):1.03-1.41)but not long sleep duration(HR=1.01,95%CI:0.89-1.15)was associated with excessive type 2 diabetes risk.This increased risk among short sleepers seems to be protected against by PA.Compared with normal sleepers with high or recommended PA,short sleepers with low volume of PA(HR=1.81,95%CI:1.46-2.25),not recommended(below the World Health Organization-recommended level of)MVPA(HR=1.92,95%CI:1.55-2.36),or low light-intensity PA(HR=1.49,95%CI:1.13-1.90)had a higher risk of type 2 diabetes,while short sleepers with a high volume of PA(HR=1.14,95%CI:0.88-1.49),recommended MVPA(HR=1.02,95%CI:0.71-1.48),or high light-intensity PA(HR=1.14,95%CI:0.92-1.41)did not.Conclusion:Accelerometer-measured short but not long sleep duration was associated with a higher risk of incident type 2 diabetes.A higher level of PA,regardless of intensity,potentially ameliorates this excessive risk.
基金Project supported by the National Natural Science Foundation of China (Grant No.62071118)the Primary Research & Development Plan of Jiangsu Province (Grant No.BE2021004-3)。
文摘The nitrogen-vacancy (NV) center quantum systems have emerged as versatile tools in the field of precision measurement because of their high sensitivity in spin state detection and miniaturization potential as solid-state platforms.In this paper,an acceleration sensing scheme based on NV spin–strain coupling is proposed,which can effectively eliminate the influence of the stray noise field introduced by traditional mechanical schemes.Through the finite element simulation,it is found that the measurement bandwidth of this ensemble NV spin system ranges from 3 kHz to hundreds of kHz with structure√optimization.The required power is at the sub-μW level,corresponding to a noise-limited sensitivity of 6.7×10^(-5) /√Hz.Compared with other types of accelerometers,this micro-sized diamond sensor proposed here has low power consumption,exquisite sensitivity,and integration potential.This research opens a fresh perspective to realize an accelerometer with appealing comprehensive performance applied in biomechanics and inertial measurement fields.
文摘Purpose: This study focused on maintaining and improving the walking function of late-stage older individuals while longitudinally tracking the effects of regular exercise programs in a day-care service specialized for preventive care over 5 years, using detailed gait function measurements with an accelerometer-based system. Methods: Seventy individuals (17 male and 53 female) of a daycare service in Tokyo participated in a weekly exercise program, meeting 1 - 2 times. The average age of the participants at the start of the program was 81.4 years. Gait function, including gait speed, stride length, root mean square (RMS) of acceleration, gait cycle time and its standard deviation, and left-right difference in stance time, was evaluated every 6 months. Results: Gait speed and stride length improved considerably within six months of starting the exercise program, confirming an initial improvement in gait function. This suggests that regular exercise programs can maintain or improve gait function even age groups that predictably have a gradual decline in gait ability due to enhanced age. In the long term, many indicators tended to approach baseline values. However, the exercise program seemingly counteracts age-related changes in gait function and maintains a certain level of function. Conclusions: While a decline in gait ability with aging is inevitable, establishing appropriate exercise habits in late-stage older individuals may contribute to long-term maintenance of gait function.
基金Project supported by the National Natural Science Foundation of China (Grant Nos. 61927812, 61735014, and 62105261)。
文摘Vector accelerometer has attracted much attention for its great application potential in underground seismic signal measurement. We propose and demonstrate a novel vector accelerometer based on the three fiber Bragg gratings(FBGs)embedded in a silicone rubber compliant cylinder at 120° distributed uniformly. The accelerometer is capable of detecting the orientation of vibration with a range of 0°–360° and the acceleration through monitoring the central wavelength shifts of three FBGs simultaneously. The experimental results show that the natural frequency of the accelerometer is about 85 Hz, and the sensitivity is 84.21 pm/g in the flat range of 20 Hz–60 Hz. Through experimental calibration, the designed accelerometer can accurately obtain vibration vector information, including vibration orientation and acceleration. In addition, the range of resonant frequency and sensitivity can be expanded by adjusting the hardness of the silicone rubber materials. Due to the characteristics of small size and orientation recognition, the accelerometer can be applied to low-frequency vibration acceleration vector measurement in narrow spaces.
基金the National Natural Science Foundation of China(No.50775209)NCET~~
文摘A calculation and test method for the natural frequency of a high-g micro accelerometer with complex structures is presented. A universal formula for natural frequency, which can significantly simplify the structural design process, is deduced and confirmed by experiment. A simplified analytical model is established to describe the accelerometer＇s mechanical behavior and deduce the formula for the natural frequency. Finite element modeling is also conducted to evaluate the natural frequency of the micro-accelerometer and verify the formula. The results obtained from the analytical model and the finite element simulation show good agreement. Finally, a shock comparison method designed for acquiring the high frequency characteristics of the accelerometer is introduced to verify the formula by testing its actual natural frequency.
文摘In allusion to the limitations of the traditional attitude measurement system consisting of a three-axis magnetic sensor and two accelerometers on high-spinning projectile, a new scheme comprised of two magnetic sensors and two accelerometers installed in a particular way is given. The configuration of the sensors is described. The calculation method and the mathematical model of the projectile attitude based on the sensor configuration are discussed. The basic calculation method including the Magsonde Window, the proof of the ratios of maximums and minimums and the calculation of the attitude angles are analyzed in theory. Finally, the system is simulated under the given conditions. The simulation result indicates that the estimated attitude angles are in agreement with the true attitude angles.
文摘Resonant accelerometer is designed,which includes two double-ended tuning forks,a proof mass,four-leverage system amplifying inertial force,and drive/sense combs.Each tuning fork is electrostatically actuated and sensed at resonance using comb electrodes.The device is fabricated using MEMS bulk-silicon technology,whose sensitive degree is 27 3Hz/g,and the resolution is 167 8μg.
文摘A tunneling accelerometer is fabricated and characterized based on the extension of the silicon-glass anodic-bonding and deep etching releasing process provided by Peking University.The tunneling current under open loop operation is tested in the air by HP4145B semiconductor analyzer,which verifies the presence of tunneling current and the exponential relationship between tunneling gap and tunneling current.The tunneling barrier is extrapolated to be from 1.182 to 2.177eV.The threshold voltages are tested to be 14～16V for most of the devices.The threshold voltages under -1,0,and +1g are tested,respectively,which shows the sensitivity of the accelerometer is about 87mV/g.
文摘A novel capacitive biaxial microaccelerometer with a highly symmetrical microstructure is developed. The sensor is composed of a single seismic mass, grid strip, supporting beam, joint beam, and damping adjusting combs. The sensing method of changing capacitance area is used in the design,which depresses the requirement of the DRIE process, and de- creases electronic noise by increasing sensing voltage to improve the resolution. The parameters and characteristics of the biaxial microaccelerometer are discussed with the FEM tool ANSYS. The simulated results show that the transverse sensitivity of the sensor is equal to zero. The testing devices based on the slide-film damping effect are fabricated, and the testing quality factor is 514, which shows that the designed structure can improve the resolution and proves the feasibility of the designed process.
文摘This paper presents two approaches for system-level simulation of force-balance accelerometers. The derivation of the system-level model is elaborated and simulation results are obtained from the implementation of those strategies on the fabricated silicon force-balance MEMS accelerometer. The mathematical model presented is implemented in VHDL- AMS and SIMULINK TM,respectively. The simulation results from the two approaches are compared and show a slight difference. Using VHDL-AMS is flexible,reusable,and more accurate. But there is not a mature solver developed for the language and this approach takes more time, while the simulation model can be easily built and quickly evaluated using SIMULINK.
文摘A piezoresistive silicon accelerometer fabricated by a selective,self-stopping porous silicon (PS) etching method using an epitaxial layer for movable microstructures is described and analyzed.The technique is capable of constructing a microstructure precisely.PS is used as a sacrificial layer,and releasing holes are etched in the film.TMAH solution with additional Si powder and (NH_4)_2S_2O_8 is used to remove PS through the small releasing holes without eroding uncovered Al.The designed fabrication process is full compatible with standard CMOS process.
文摘For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-resolution inertial-grade novel micro resonant accelerometer is studied.Based on the detecting theory of the resonant sensors,the accelerometer is designed,fabricated,and tested.The accelerometer consists of one proofmass,two micro leverages and two double-ended-tuning-fork （DETF） resonators.The sensing principle of this accelerometer is based on that the natural frequency of the DETF resonator shifts with its axial load which is caused by inertial force.The push-pull configuration of the DETF is for temperature compensation.The two-stage micro leverage mechanisms are employed to amplify the force and increase the sensitivity of the accelerometer.The micro leverage and the resonator are modeled for static analysis and nonlinear modal analysis via theory method and finite element method （FEM）,respectively.The geometrical parameters of them are optimized.The amplification factor of the leverage is 102,and the sensitivity of the resonator on theory is about 62 Hz/g.The samples of the accelerometer are fabricated with deep reactive ion etching （DRIE） technology which can get a high-aspect ratio structure for contributing a greater sensing-capacitance.The measuring results of the samples by scanning electron microscopy （SEM） show that the process is feasible,because of the complete structure,the sound combs and micro leverages,and the acceptable errors.The frequency of the resonator and the sensitivity of the accelerometer are tested via printed circuit board （PCB）,respectively.The result of the test shows that the frequency of the push-resonator is about 54 530 Hz and the sensitivity of the accelerometer is about 55 Hz/g.The amplification factor of the leverage is calculated more accurately because the coupling of the two stages leverage is considered during derivation of the analysis formula.In addition,the novel differential structure of the accelerometer can greatly improve the sensitivity of the accelerometers.
基金the Astronautic Technology Foundation (HTZC0405)
文摘In view of the problem that the current single-antenna GPS attitude determination system can only determine the body attitude when the sideslip angle is zero and the multiantenna GPS/SINS integrated navigation system is of large volume, high cost, and complex structure, this approach is presented to determine the attitude based on vector space with single-antenna GPS and accelerometers in the micro inertial measurement unit （MIMU）. It can provide real-time and accurate attitude information. Subsequently, the single-antenna GPS/SINS integrated navigation system is designed based on the combination of position, velocity, and attitude. Finally the semi- physical simulations of single-antenna GPS attitude determination system and single-antenna GPS/SINS integrated navigation system are carried out. The simulation results, based on measured data, show that the single-antenna GPS/SINS system can provide more accurate navigation information compared to the GPS/SINS system, based on the combination of position and velocity. Furthermore, the single-antenna GPS/SINS system is characteristic of lower cost and simpler structure. It provides the basis for the application of a single-antenna GPS/SINS integrated navigation system in a micro aerial vehicle （MAV）.
基金supported by the National Natural Science Foundation of China (No. 61671017)Key Project of Excellent Youth Talent Support Program in Colleges and Universities of Anhui Province (No. gxyqZD2018004)+1 种基金Provincial Natural Science Foundation of Anhui Higher Education Institution of China (No. KJ2016A787)Anhui Provincial Natural Science Foundation of China (No. 1508085ME72)
文摘This paper reports a piezoelectric nanogenerator(NG) with a thickness of approximately 80 μm for miniaturized self-powered acceleration sensors. To deposit the piezoelectric zinc oxide(ZnO) thin film, a magnetron sputtering machine was used. Polymethyl methacrylate(PMMA) and aluminum-doped zinc oxide(AZO) were used as the insulating layer and the top electrode of the NG, respectively. The experimental results show that the ZnO thin films annealed at 150℃ exhibited the highest crystallinity among the prepared films and an optical band gap of 3.24 eV. The NG fabricated with an AZO/PMMA/ZnO/stainless steel configuration exhibited a higher output voltage than the device with an AZO/ZnO/PMMA/stainless steel configuration. In addition, the annealing temperature affected the open-circuit voltage of the NGs;the output voltage reached 3.81 V when the annealing temperature was 150℃. The open-circuit voltage of the prepared self-powered accelerometer increased linearly with acceleration. In addition, the small NG-based accelerometer, which exhibited excellent fatigue resistance, can be used for acceleration measurements of small and lightweight devices.
基金supports from National Natural Science Foundation of China(No.62004166)Fundamental Research Funds for the Central Universities(No.31020190QD027)+2 种基金Natural Science Basic Research Program of Shaanxi(Program No.2020JQ-199)China National Postdoctoral Program for Innovative Talents(No.BX20200279)Key Research and Development Program of Shaanxi Province(2020GXLH-Z-027,2020ZDLGY04-08).
文摘Micro-Opto-Electro-Mechanical Systems(MOEMS)accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems(MEMS)to enable high precision,small volume and anti-electromagnetic disturbance measurement of acceleration.In recent years,with the in-depth research and development of MOEMS accelerometers,the community is flourishing with the possible applications in seismic monitoring,inertial navigation,aerospace and other industrial and military fields.There have been a variety of schemes of MOEMS accelerometers,whereas the performances differ greatly due to different measurement principles and corresponding application requirements.This paper aims to address the pressing issue of the current lack of systematic review of MOEMS accelerometers.According to the optical measurement principle,we divide the MOEMS accelerometers into three categories:the geometric optics based,the wave optics based,and the new optomechanical accelerometers.Regarding the most widely studied category,the wave optics based accelerometers are further divided into four sub-categories,which is based on grating interferometric cavity,Fiber Bragg Grating(FBG),Fabry-Perot cavity,and photonic crystal,respectively.Following a brief introduction to the measurement principles,the typical performances,advantages and disadvantages as well as the potential application scenarios of all kinds of MOEMS accelerometers are discussed on the basis of typical demonstrations.This paper also presents the status and development tendency of MOEMS accelerometers to meet the ever-increasing demand for high-precision acceleration measurement.
基金Supported by the National Natural Science Foundation of China under Grant No 60908016.
文摘A combination of large mass,weak spring and nano-grating is the key for a nano-grating accelerometer to measure nano-G acceleration.A novel compact nano-grating accelerometer integrating a large mass with nano-grating is proposed.First,the numbers of diffraction orders are calculated.Then,structure parameters are optimized by finite element analysis to achieve a high sensitivity in an ideal vibration mode.Finally,we design the fabrication method to form such a compact nano-grating accelerometer and successfully fabricate the uniform and well-designed nano-gratings with a period of 847 nm,crater of 451 nm by an FIB/SEM dual beam system.Based on the ANSYS simulation,a nano-grating accelerometer is predicted to work in the first modal and enables the accelerometer to have displacement sensitivity at 197 nm/G with a measurement range of±1 G,corresponding to zeroth diffraction beam optical sensitivity 1%/mG.The nano-gratings fabricated are very close to those designed ones within experimental error to lay the foundation for the sequent fabrication.These results provide a theoretical basis for the design and fabrication of nano-grating accelerometers.
文摘Parkinson’s disease is neurodegenerative in nature and associated with characteristic movement disorders, such as hand tremor. Wireless accelerometer applications may advance the quality of care for Parkinson’s disease patients. The acceleration waveform of the respective hand tremor can be recorded and stored for post-processing and progressive status tracking. A wireless accelerometer configuration for monitoring Parkinson’s disease hand tremor is presented. The proposed configuration is envisioned to be conducted with the assistance of a caregiver. For initial engineering proof of concept simulated Parkinson’s disease tremor is recorded through a wireless accelerometer node and contrasted to a statically positioned and tandem activated wireless accelerometer node. Statistical significance is acquired regarding the quantification of the simulated Parkinson’s disease tremor acceleration waveform and statically positioned acceleration waveform, while demonstrating a considerable degree of accuracy, consistency, and reliability.
文摘Tremor is a manifestation of a variety of human neurodegenerative diseases, notably Parkinson’s disease (PD) and Essential Tremor (ET), both affecting millions worldwide. PD is primarily caused by a progressive loss of dopamine neurons in the nigrostriatal system that leads to widespread motor symptoms such as bradykinesia, rigidity, tremor and postural instability. ET typically involves a tremor of the arms, hands or fingers. No definitive test or biomarker is yet available for PD or ET, so the rate of misdiagnosis is relatively high. As tremor is a very common feature at the onset of both diseases, it is crucial to be able to characterize it. This is made possible using acce?lerometers to quantify the tremor amplitude and frequency. In this work we aim to find tasks involving upper limb movements that are suitable to modulate both types of tremor. Four tasks were tested, differing on whether the arms moved together or alternatingly and whether loads were added. Significant differences in tremor measures were found when patients were asked to perform simultaneous rapid arms movements with loads placed on their wrists. These results may allow the design of an efficient fMRI protocol for identifying the cortical circuits responsible for the modulation of tremor.
基金Supported by the National Natural Science Foundation of China(61273346)the National Defense Major Fundamental Research Program of China(20110003)+3 种基金the National Defense Key Fundamental Research Program of China(20132010)Specialized Research Fund for the Doctoral Program of Higher Education(20121101120009)Excellent Young Scholars Research Fund of Beijing Institute of Technology(2012YG0203)the Program for the Fundamental Research of Beijing Institute of Technology(2015CX02034)
文摘A triaxial high-g accelerometer of microelectro mechanical systems （MEMS） has a struc- ture of multi-chips combination and will be used in aerospace field, civil and military fields. The ac- celerometer can measure the acceleration of the carrier. The chips with island-membrane structures on its back surfaces are made by MEMS dry processing. The chip is reasonable and can work well under high impact load; Titanium alloy base is also stronger in high shock environment, these are proved by finite element analysis. Finally, the MEMS combined triaxial high-g accelerometer is vali- dated by high impact calibration experiments in order to get a key performance index, including range, sensitivity and transverse sensitivity and so on. These data can satisfy the need of design but some problems remain, these will be eliminated by improvement of the processing technology and materials.
