Recently,electronic skins and fl exible wearable devices have been developed for widespread applications in medical monitoring,artifi cial intelligence,human–machine interaction,and artifi cial prosthetics.Flexible p...Recently,electronic skins and fl exible wearable devices have been developed for widespread applications in medical monitoring,artifi cial intelligence,human–machine interaction,and artifi cial prosthetics.Flexible proximity sensors can accurately perceive external objects without contact,introducing a new way to achieve an ultrasensitive perception of objects.This article reviews the progress of fl exible capacitive proximity sensors,fl exible triboelectric proximity sensors,and fl exible gate-enhanced proximity sensors,focusing on their applications in the electronic skin fi eld.Herein,their working mechanism,materials,preparation methods,and research progress are discussed in detail.Finally,we summarize the future challenges in developing fl exible proximity sensors.展开更多
In this paper,the mission and the thermal environment of the Solar Close Observations and Proximity Experiments(SCOPE)spacecraft are analyzed,and an advanced thermal management system(ATMS)is designed for it.The relat...In this paper,the mission and the thermal environment of the Solar Close Observations and Proximity Experiments(SCOPE)spacecraft are analyzed,and an advanced thermal management system(ATMS)is designed for it.The relationship and functions of the integrated database,the intelligent thermal control system and the efficient liquid cooling system in the ATMS are elaborated upon.For the complex thermal field regulation system and extreme space thermal environment,a modular simulation and thermal field planning method are proposed,and the feasibility of the planning algorithm is verified by numerical simulation.A solar array liquid cooling system is developed,and the system simulation results indicate that the temperatures of the solar arrays meet the requirements as the spacecraft flies by perihelion and aphelion.The advanced thermal management study supports the development of the SCOPE program and provides a reference for the thermal management in other deep-space exploration programs.展开更多
Achieving increasingly finely targeted drug delivery to organs,tissues,cells,and even to intracellular biomacromolecules is one of the core goals of nanomedicines.As the delivery destination is refined to cellular and...Achieving increasingly finely targeted drug delivery to organs,tissues,cells,and even to intracellular biomacromolecules is one of the core goals of nanomedicines.As the delivery destination is refined to cellular and subcellular targets,it is essential to explore the delivery of nanomedicines at the molecular level.However,due to the lack of technical methods,the molecular mechanism of the intracellular delivery of nanomedicines remains unclear to date.Here,we develop an enzyme-induced proximity labeling technology in nanoparticles(nano-EPL)for the real-time monitoring of proteins that interact with intracellular nanomedicines.Poly(lactic-co-glycolic acid)nanoparticles coupled with horseradish peroxidase(HRP)were fabricated as a model(HRP(+)-PNPs)to evaluate the molecular mechanism of nano delivery in macrophages.By adding the labeling probe biotin-phenol and the catalytic substrate H_(2)O_(2)at different time points in cellular delivery,nano-EPL technology was validated for the real-time in situ labeling of proteins interacting with nanoparticles.Nano-EPL achieves the dynamic molecular profiling of 740 proteins to map the intracellular delivery of HRP(+)-PNPs in macrophages over time.Based on dynamic clustering analysis of these proteins,we further discovered that different organelles,including endosomes,lysosomes,the endoplasmic reticulum,and the Golgi apparatus,are involved in delivery with distinct participation timelines.More importantly,the engagement of these organelles differentially affects the drug delivery efficiency,reflecting the spatial–temporal heterogeneity of nano delivery in cells.In summary,these findings highlight a significant methodological advance toward understanding the molecular mechanisms involved in the intracellular delivery of nanomedicines.展开更多
Two-dimensional(2D)magnet/superconductor heterostructures can promote the design of artificial materials for exploring 2D physics and device applications by exotic proximity effects.However,plagued by the low Curie te...Two-dimensional(2D)magnet/superconductor heterostructures can promote the design of artificial materials for exploring 2D physics and device applications by exotic proximity effects.However,plagued by the low Curie temperature and instability in air,it is hard to realize practical applications for the reported layered magnetic materials at present.In this paper,we developed a space-confined chemical vapor deposition method to synthesize ultrathin air-stable ε-Fe_(2)O_(3) nanosheets with Curie temperature above 350 K.The ε-Fe_(2)O_(3)/NbSe_(2) heterojunction was constructed to study the magnetic proximity effect on the superconductivity of the NbSe_(2) multilayer.The electrical transport results show that the subtle proximity effect can modulate the interfacial spin–orbit interaction while undegrading the superconducting critical parameters.Our work paves the way to construct 2D heterojunctions with ultrathin nonlayered materials and layered van der Waals(vdW)materials for exploring new physical phenomena.展开更多
The interaction between a promoter and an active metal crucially impacts catalytic performance.Nowadays,the influence of promoter contents and species has been intensively considered.In this study,we investigate the e...The interaction between a promoter and an active metal crucially impacts catalytic performance.Nowadays,the influence of promoter contents and species has been intensively considered.In this study,we investigate the effect of the iron(Fe)-zinc(Zn)proximity of Fe-Zn bimetallic catalysts on CO_(2)hydrogenation performance.To eliminate the size effect,Fe_(2)O_(3)and ZnO nanoparticles with uniform size are first prepared by the thermal decomposition method.By changing the loading sequence or mixing method,a series of Fe-Zn bimetallic catalysts with different Fe-Zn distances are obtained.Combined with a series of characterization techniques and catalytic performances,Fe-Zn bimetallic proximity for compositions of Fe species is discussed.Furthermore,we observe that a smaller Fe-Zn distance inhibits the reduction and carburization of the Fe species and facilitates the oxidation of carbides.Appropriate proximity of Fe and Zn(i.e.,Fe_1Zn_(1)-imp and Fe_(1)Zn_(1)-mix samples)results in a suitable ratio of the Fe_5C_(2)and Fe_(3)O_(4)phases,simultaneously promoting the reverse water-gas shift and Fischer-Tropsch synthesis reactions.This study provides insight into the proximity effect of bimetallic catalysts on CO_(2)hydrogenation performance.展开更多
The study of the neuron has always been a fundamental aspect when it came to studying mental illnesses such as autism and depression. The protein protocadherin-9 (PCDH9) is an important transmembrane protein in the de...The study of the neuron has always been a fundamental aspect when it came to studying mental illnesses such as autism and depression. The protein protocadherin-9 (PCDH9) is an important transmembrane protein in the development of the neuron synapse. Hence, research on its protein interactome is key to understanding its functionality and specific properties. A newly discovered biotin ligase, TurboID, is a proximity labeler that is designed to be able to label and observe transmembrane proteins, something that previous methods struggled with. The TurboID method is verified in HEK293T cells and primary cultured mouse cortical neurons. Results have proven the validity of the TurboID method in observing PCDH9-interacting proteins.展开更多
The interrupted-sampling repeater jamming(ISRJ)can cause false targets to the radio-frequency proximity sensors(RFPSs),resulting in a serious decline in the target detection capability of the RFPS.This article propose...The interrupted-sampling repeater jamming(ISRJ)can cause false targets to the radio-frequency proximity sensors(RFPSs),resulting in a serious decline in the target detection capability of the RFPS.This article proposes a recognition method for RFPSs to identify the false targets caused by ISRJ.The proposed method is realized by assigning a unique identity(ID)to each RFPS,and each ID is a periodically and chaotically encrypted in every pulse period.The processing technique of the received signal is divided into ranging and ID decryption.In the ranging part,a high-resolution range profile(HRRP)can be obtained by performing pulse compression with the binary chaotic sequences.To suppress the noise,the singular value decomposition(SVD)is applied in the preprocessing.Regarding ID decryption,targets and ISRJ can be recognized through the encryption and decryption processes,which are controlled by random keys.An adaptability analysis conducted in terms of the peak-to-side lobe ratio(PSLR)and bit error rate(BER)indicates that the proposed method performs well within a 70-k Hz Doppler shift.A simulation and experimental results show that the proposed method achieves extremely stable target and ISRJ recognition accuracies at different signal-to-noise ratios(SNRs)and jamming-to-signal ratios(JSRs).展开更多
A new method for determining proximity parameters α,β ,and η in electron beam lithography is introduced on the assumption that the point exposure spread function is composed of two Gaussians.A single line i...A new method for determining proximity parameters α,β ,and η in electron beam lithography is introduced on the assumption that the point exposure spread function is composed of two Gaussians.A single line is used as test pattern to determine proximity effect parameters and the normalization approach is adopted in experimental data transaction in order to eliminate the need of measuring exposure clearing dose of the resist.Furthermore,the parameters acquired by this method are successfully used for proximity effect correction in electron beam lithography on the same experimental conditions.展开更多
Considering the efficiency and veracity of rules based optical proximity correction (OPC),the importance of rules in rules based OPC is pointed out.And how to select,to construct and to apply more concise and practi...Considering the efficiency and veracity of rules based optical proximity correction (OPC),the importance of rules in rules based OPC is pointed out.And how to select,to construct and to apply more concise and practical rules base is disscussed.Based on those ideas,four primary rules are suggested.Some data resulted in rules base are shown in table.The patterns on wafer are clearly improved by applying these rules to correct mask.OPCL,the automatic construction of the rules base is an important part of the whole rules based OPC system.展开更多
We present a detailed routing algorithm considering the optical proximity effect. The light intensity is calculated beforehand and stored in look-up tables. These costs are used as a constraint to guide the sequential...We present a detailed routing algorithm considering the optical proximity effect. The light intensity is calculated beforehand and stored in look-up tables. These costs are used as a constraint to guide the sequential routing. The routing algorithm is based on constructed force directed Steiner tree routing to enhance routing efficien- cy. Experimental results on industrial benchmark circuits show that the presented routing algorithm can obtain much improvement considering optical effects short runtime.展开更多
In order to analyze the electrostatic field concerned with electrostatic proximity fuze problem using the available finite analysis software package, the technology to model the problem with a scale reduction object a...In order to analyze the electrostatic field concerned with electrostatic proximity fuze problem using the available finite analysis software package, the technology to model the problem with a scale reduction object and boundary was presented. The boundary is determined by the maximum distance the sensor can detect. The object model is obtained by multiplying the terms in Poisson's equation with a scale reduction factor and the real value can be reconstructed with the same reverse process after software calculation. Using the finite element analysis program, the simulation value is close to the theoretical value with a little error. The boundary determination and scale reduction method is suitable to modeling the irregular electrostatic field around air targets, such as airplane, missile and so on, which is based on commonly used personal computer (PC). The technology reduces the calculation and storage cost greatly.展开更多
We describe the fabrication of metal nanogaps of sub-20nm in feature size using the proximity effect in electron beam lithography （EBL）. The proximity effect is extended to develop a flexible and practical method fo...We describe the fabrication of metal nanogaps of sub-20nm in feature size using the proximity effect in electron beam lithography （EBL）. The proximity effect is extended to develop a flexible and practical method for preparing metal （e. g. Au or Ag） nanogaps and arrays in combination with a transfer process （e. g., deposition/lift-off）. Different from the direct gap-writing process,the nanogap precursor structures （nanoconnections） were designed by GDSII software and then written by electron beam. Following a deposition and lift-off process, the metal nanogaps were obtained and the nanogap size can be lowered to -10nm by controlling the exposure dose in EBL.展开更多
Transport infrastructure plays an important role in shaping the configuration of spatial socio-economic structures and influences regional accessibility. This paper defines transport dominance from three aspects： qua...Transport infrastructure plays an important role in shaping the configuration of spatial socio-economic structures and influences regional accessibility. This paper defines transport dominance from three aspects： quafity, quantity, and advantage, measured by density, proximity, and accessibility indices. County is the basic unit for analysis. The results reveal： （1） Transport dominance statistically follows a partial normal distribution. A very few counties, 1.4% of the total, have extremely high transport dominance which strongly supports the socio-economic development in these areas. In contrast, one eighth of all counties have poor transport dominance which impedes local socio-economic development to some extent. The remaining areas, about 70% of the counties, have median transport dominance. （2） Transport dominance is spatially unevenly distributed, with values decreasing gradually from the coastal area to the inland area. Areas in the first-highest level of transport dominance are mainly concentrated in the Yangtze River Delta, the Greater Beijing area, and the Pearl River Delta. Areas in the second-highest level are focused in Chengdu, Chongqing, and Wuhan metropolitan areas. Provincial capitals and a few other counties belong to the third-highest level.展开更多
The rails of electromagnetic railgun can be ablated by the temperature rise due to current concentration.The current distributions on the rails and armature are not only affected by the skin effect,but also influenced...The rails of electromagnetic railgun can be ablated by the temperature rise due to current concentration.The current distributions on the rails and armature are not only affected by the skin effect,but also influenced by the proximity effect which is rarely mentioned.This paper illustrated the difference between skin effect and proximity effect,and the influencing factors of proximity effect were investigated.Results show that the current is concentrated on the surface around rails due to the skin effect,and the proximity effect exacerbates the current density on the inner surfaces of rails.Decrease in distance from rails enhances the proximity effect,but has nothing to do with the skin effect,which also augments the rail resistance,resulting in temperature rise.It can explain the reason why the ablation is often detected in the small caliber railgun.Research results in this paper can provide support for design and optimization of electromagnetic railgun.展开更多
Topographic feature points and lines are the framework of topography,and their spatial distance relationship is an breakthrough in the study of topographical geometry,internal structure and development level.Proximity...Topographic feature points and lines are the framework of topography,and their spatial distance relationship is an breakthrough in the study of topographical geometry,internal structure and development level.Proximity distance(PD)is an indicator to describe the distance between the gully source point(GSP)and the watershed boundary.In the upstream catchment area,PDs can be expressed by the streamline proximity distance(SPD),as well as by the horizontal proximity distance(HPD)and the vertical proximity distance(VPD)in the horizontal and vertical dimensions,respectively.The series of indicators(e.g.,SPD,HPD and VPD)are important for quantifying the geomorphological development process of a loess basin because of the headward erosion of loess gullies.In this study,the digital elevation model data with 5 m resolution and a digital topographic analysis method are used for the statistical analyses of the SPD,VPD and HPD in 50 sample areas of 6 geomorphic types in the Loess Plateau of northern Shaanxi.The spatial characteristics and the influencing factors are also analysed.Results show that:1)Central tendencies for the HPDs and the VPDs for the whole study area and the six typical loess landforms are evident.2)Spatial patterns of the HPDs and the VPDs exhibit evident trends and zonal distributions over the whole study area.3)The HPDs have a strong positive correlation with gully density(GD)and hypsometric integral.The VPDs also correlates with GD to an extent.Vegetation cover,mean annual precipitation and loess thickness have stronger effects on the VPD than on the HPD.展开更多
The formation maintenance of multiple unmanned aerial vehicles(UAVs)based on proximity behavior is explored in this study.Individual decision-making is conducted according to the expected UAV formation structure and t...The formation maintenance of multiple unmanned aerial vehicles(UAVs)based on proximity behavior is explored in this study.Individual decision-making is conducted according to the expected UAV formation structure and the position,velocity,and attitude information of other UAVs in the azimuth area.This resolves problems wherein nodes are necessarily strongly connected and communication is strictly consistent under the traditional distributed formation control method.An adaptive distributed formation flight strategy is established for multiple UAVs by exploiting proximity behavior observations,which remedies the poor flexibility in distributed formation.This technique ensures consistent position and attitude among UAVs.In the proposed method,the azimuth area relative to the UAV itself is established to capture the state information of proximal UAVs.The dependency degree factor is introduced to state update equation based on proximity behavior.Finally,the formation position,speed,and attitude errors are used to form an adaptive dynamic adjustment strategy.Simulations are conducted to demonstrate the effectiveness and robustness of the theoretical results,thus validating the effectiveness of the proposed method.展开更多
High resolution Fresnel zone plates for nanoscale three-dimensional imaging of materials by both soft and hard x-rays are increasingly needed by the broad applications in nanoscience and nanotechnology.When the outmos...High resolution Fresnel zone plates for nanoscale three-dimensional imaging of materials by both soft and hard x-rays are increasingly needed by the broad applications in nanoscience and nanotechnology.When the outmost zone-width is shrinking down to 50 nm or even below,patterning the zone plates with high aspect ratio by electron beam lithography still remains a challenge because of the proximity effect.The uneven charge distribution in the exposed resist is still frequently observed even after standard proximity effect correction(PEC),because of the large variety in the line width.This work develops a new strategy,nicknamed as local proximity effect correction(LPEC),efficiently modifying the deposited energy over the whole zone plate on the top of proximity effect correction.By this way,50 nm zone plates with the aspect ratio from 4:1 up to 15:1 and the duty cycle close to 0.5 have been fabricated.Their imaging capability in soft(1.3 keV)and hard(9 keV)x-ray,respectively,has been demonstrated in Shanghai Synchrotron Radiation Facility(SSRF)with the resolution of 50 nm.The local proximity effect correction developed in this work should also be generally significant for the generation of zone plates with high resolutions beyond 50 nm.展开更多
基金supported by the National Key R&D Program of China(Nos.2022 YFF 1202700 and 2022YFB3203500)National Natural Science Foundation of China(Nos.62225403,62375046,51973024,an d U19A2091)+2 种基金“111”Project(No.B13013)Natur al Sci ence Foundation of Jilin Pro vin ce(No.20230101113JC)the Funding from Jilin Pr ovince(No.20220502002GH).
文摘Recently,electronic skins and fl exible wearable devices have been developed for widespread applications in medical monitoring,artifi cial intelligence,human–machine interaction,and artifi cial prosthetics.Flexible proximity sensors can accurately perceive external objects without contact,introducing a new way to achieve an ultrasensitive perception of objects.This article reviews the progress of fl exible capacitive proximity sensors,fl exible triboelectric proximity sensors,and fl exible gate-enhanced proximity sensors,focusing on their applications in the electronic skin fi eld.Herein,their working mechanism,materials,preparation methods,and research progress are discussed in detail.Finally,we summarize the future challenges in developing fl exible proximity sensors.
文摘In this paper,the mission and the thermal environment of the Solar Close Observations and Proximity Experiments(SCOPE)spacecraft are analyzed,and an advanced thermal management system(ATMS)is designed for it.The relationship and functions of the integrated database,the intelligent thermal control system and the efficient liquid cooling system in the ATMS are elaborated upon.For the complex thermal field regulation system and extreme space thermal environment,a modular simulation and thermal field planning method are proposed,and the feasibility of the planning algorithm is verified by numerical simulation.A solar array liquid cooling system is developed,and the system simulation results indicate that the temperatures of the solar arrays meet the requirements as the spacecraft flies by perihelion and aphelion.The advanced thermal management study supports the development of the SCOPE program and provides a reference for the thermal management in other deep-space exploration programs.
基金supported by Natural Science Foundation of Beijing Municipality(L212013)National Key Research and Development Program of China(No.2022YFA1206104)+2 种基金AI+Health Collaborative Innovation Cultivation Project(Z211100003521002)National Natural Science Foundation of China(81971718,82073786,81872809,U20A20412,81821004)Beijing Natural Science Foundation(7222020).
文摘Achieving increasingly finely targeted drug delivery to organs,tissues,cells,and even to intracellular biomacromolecules is one of the core goals of nanomedicines.As the delivery destination is refined to cellular and subcellular targets,it is essential to explore the delivery of nanomedicines at the molecular level.However,due to the lack of technical methods,the molecular mechanism of the intracellular delivery of nanomedicines remains unclear to date.Here,we develop an enzyme-induced proximity labeling technology in nanoparticles(nano-EPL)for the real-time monitoring of proteins that interact with intracellular nanomedicines.Poly(lactic-co-glycolic acid)nanoparticles coupled with horseradish peroxidase(HRP)were fabricated as a model(HRP(+)-PNPs)to evaluate the molecular mechanism of nano delivery in macrophages.By adding the labeling probe biotin-phenol and the catalytic substrate H_(2)O_(2)at different time points in cellular delivery,nano-EPL technology was validated for the real-time in situ labeling of proteins interacting with nanoparticles.Nano-EPL achieves the dynamic molecular profiling of 740 proteins to map the intracellular delivery of HRP(+)-PNPs in macrophages over time.Based on dynamic clustering analysis of these proteins,we further discovered that different organelles,including endosomes,lysosomes,the endoplasmic reticulum,and the Golgi apparatus,are involved in delivery with distinct participation timelines.More importantly,the engagement of these organelles differentially affects the drug delivery efficiency,reflecting the spatial–temporal heterogeneity of nano delivery in cells.In summary,these findings highlight a significant methodological advance toward understanding the molecular mechanisms involved in the intracellular delivery of nanomedicines.
基金The work is supported by the National Key Research and Development Program of China(Grant No.2022YFA1204104)the National Natural Science Foundation of China(Grant No.61888102)the Chinese Academy of Sciences(Grant Nos.ZDBS-SSW-WHC001 and XDB33030100).
文摘Two-dimensional(2D)magnet/superconductor heterostructures can promote the design of artificial materials for exploring 2D physics and device applications by exotic proximity effects.However,plagued by the low Curie temperature and instability in air,it is hard to realize practical applications for the reported layered magnetic materials at present.In this paper,we developed a space-confined chemical vapor deposition method to synthesize ultrathin air-stable ε-Fe_(2)O_(3) nanosheets with Curie temperature above 350 K.The ε-Fe_(2)O_(3)/NbSe_(2) heterojunction was constructed to study the magnetic proximity effect on the superconductivity of the NbSe_(2) multilayer.The electrical transport results show that the subtle proximity effect can modulate the interfacial spin–orbit interaction while undegrading the superconducting critical parameters.Our work paves the way to construct 2D heterojunctions with ultrathin nonlayered materials and layered van der Waals(vdW)materials for exploring new physical phenomena.
基金supported by National Natural Science Foundation of China(Nos.22108200,21938008 and 22121004)Natural Science Foundation of Zhejiang Province(LQ22B060013)the Haihe Laboratory of Sustainable Chemical Transformations for financial support。
文摘The interaction between a promoter and an active metal crucially impacts catalytic performance.Nowadays,the influence of promoter contents and species has been intensively considered.In this study,we investigate the effect of the iron(Fe)-zinc(Zn)proximity of Fe-Zn bimetallic catalysts on CO_(2)hydrogenation performance.To eliminate the size effect,Fe_(2)O_(3)and ZnO nanoparticles with uniform size are first prepared by the thermal decomposition method.By changing the loading sequence or mixing method,a series of Fe-Zn bimetallic catalysts with different Fe-Zn distances are obtained.Combined with a series of characterization techniques and catalytic performances,Fe-Zn bimetallic proximity for compositions of Fe species is discussed.Furthermore,we observe that a smaller Fe-Zn distance inhibits the reduction and carburization of the Fe species and facilitates the oxidation of carbides.Appropriate proximity of Fe and Zn(i.e.,Fe_1Zn_(1)-imp and Fe_(1)Zn_(1)-mix samples)results in a suitable ratio of the Fe_5C_(2)and Fe_(3)O_(4)phases,simultaneously promoting the reverse water-gas shift and Fischer-Tropsch synthesis reactions.This study provides insight into the proximity effect of bimetallic catalysts on CO_(2)hydrogenation performance.
文摘The study of the neuron has always been a fundamental aspect when it came to studying mental illnesses such as autism and depression. The protein protocadherin-9 (PCDH9) is an important transmembrane protein in the development of the neuron synapse. Hence, research on its protein interactome is key to understanding its functionality and specific properties. A newly discovered biotin ligase, TurboID, is a proximity labeler that is designed to be able to label and observe transmembrane proteins, something that previous methods struggled with. The TurboID method is verified in HEK293T cells and primary cultured mouse cortical neurons. Results have proven the validity of the TurboID method in observing PCDH9-interacting proteins.
基金supported by the National Natural Science Foundation of China(Grant No.61973037)and(Grant No.61871414)Postdoctoral Fundation of China(Grant No.2022M720419)。
文摘The interrupted-sampling repeater jamming(ISRJ)can cause false targets to the radio-frequency proximity sensors(RFPSs),resulting in a serious decline in the target detection capability of the RFPS.This article proposes a recognition method for RFPSs to identify the false targets caused by ISRJ.The proposed method is realized by assigning a unique identity(ID)to each RFPS,and each ID is a periodically and chaotically encrypted in every pulse period.The processing technique of the received signal is divided into ranging and ID decryption.In the ranging part,a high-resolution range profile(HRRP)can be obtained by performing pulse compression with the binary chaotic sequences.To suppress the noise,the singular value decomposition(SVD)is applied in the preprocessing.Regarding ID decryption,targets and ISRJ can be recognized through the encryption and decryption processes,which are controlled by random keys.An adaptability analysis conducted in terms of the peak-to-side lobe ratio(PSLR)and bit error rate(BER)indicates that the proposed method performs well within a 70-k Hz Doppler shift.A simulation and experimental results show that the proposed method achieves extremely stable target and ISRJ recognition accuracies at different signal-to-noise ratios(SNRs)and jamming-to-signal ratios(JSRs).
文摘A new method for determining proximity parameters α,β ,and η in electron beam lithography is introduced on the assumption that the point exposure spread function is composed of two Gaussians.A single line is used as test pattern to determine proximity effect parameters and the normalization approach is adopted in experimental data transaction in order to eliminate the need of measuring exposure clearing dose of the resist.Furthermore,the parameters acquired by this method are successfully used for proximity effect correction in electron beam lithography on the same experimental conditions.
文摘Considering the efficiency and veracity of rules based optical proximity correction (OPC),the importance of rules in rules based OPC is pointed out.And how to select,to construct and to apply more concise and practical rules base is disscussed.Based on those ideas,four primary rules are suggested.Some data resulted in rules base are shown in table.The patterns on wafer are clearly improved by applying these rules to correct mask.OPCL,the automatic construction of the rules base is an important part of the whole rules based OPC system.
文摘We present a detailed routing algorithm considering the optical proximity effect. The light intensity is calculated beforehand and stored in look-up tables. These costs are used as a constraint to guide the sequential routing. The routing algorithm is based on constructed force directed Steiner tree routing to enhance routing efficien- cy. Experimental results on industrial benchmark circuits show that the presented routing algorithm can obtain much improvement considering optical effects short runtime.
文摘In order to analyze the electrostatic field concerned with electrostatic proximity fuze problem using the available finite analysis software package, the technology to model the problem with a scale reduction object and boundary was presented. The boundary is determined by the maximum distance the sensor can detect. The object model is obtained by multiplying the terms in Poisson's equation with a scale reduction factor and the real value can be reconstructed with the same reverse process after software calculation. Using the finite element analysis program, the simulation value is close to the theoretical value with a little error. The boundary determination and scale reduction method is suitable to modeling the irregular electrostatic field around air targets, such as airplane, missile and so on, which is based on commonly used personal computer (PC). The technology reduces the calculation and storage cost greatly.
基金the National Natural Science Foundation of China(No.20704042)the Shanghai Pujiang Talent Plan(No.07PJ14095)+1 种基金the CAS Knowledge Innovation Programthe Committee of Science and Technology of Shanghai(Nos.06XD14020,07JC14058,0752nm016)~~
文摘We describe the fabrication of metal nanogaps of sub-20nm in feature size using the proximity effect in electron beam lithography （EBL）. The proximity effect is extended to develop a flexible and practical method for preparing metal （e. g. Au or Ag） nanogaps and arrays in combination with a transfer process （e. g., deposition/lift-off）. Different from the direct gap-writing process,the nanogap precursor structures （nanoconnections） were designed by GDSII software and then written by electron beam. Following a deposition and lift-off process, the metal nanogaps were obtained and the nanogap size can be lowered to -10nm by controlling the exposure dose in EBL.
基金National Natural Science Foundation of China, No.40635026 40701045 Knowledge Innovation Program of the Chinese Academy of Sciences, No.KZCX2-YW-Q 10-4
文摘Transport infrastructure plays an important role in shaping the configuration of spatial socio-economic structures and influences regional accessibility. This paper defines transport dominance from three aspects： quafity, quantity, and advantage, measured by density, proximity, and accessibility indices. County is the basic unit for analysis. The results reveal： （1） Transport dominance statistically follows a partial normal distribution. A very few counties, 1.4% of the total, have extremely high transport dominance which strongly supports the socio-economic development in these areas. In contrast, one eighth of all counties have poor transport dominance which impedes local socio-economic development to some extent. The remaining areas, about 70% of the counties, have median transport dominance. （2） Transport dominance is spatially unevenly distributed, with values decreasing gradually from the coastal area to the inland area. Areas in the first-highest level of transport dominance are mainly concentrated in the Yangtze River Delta, the Greater Beijing area, and the Pearl River Delta. Areas in the second-highest level are focused in Chengdu, Chongqing, and Wuhan metropolitan areas. Provincial capitals and a few other counties belong to the third-highest level.
文摘The rails of electromagnetic railgun can be ablated by the temperature rise due to current concentration.The current distributions on the rails and armature are not only affected by the skin effect,but also influenced by the proximity effect which is rarely mentioned.This paper illustrated the difference between skin effect and proximity effect,and the influencing factors of proximity effect were investigated.Results show that the current is concentrated on the surface around rails due to the skin effect,and the proximity effect exacerbates the current density on the inner surfaces of rails.Decrease in distance from rails enhances the proximity effect,but has nothing to do with the skin effect,which also augments the rail resistance,resulting in temperature rise.It can explain the reason why the ablation is often detected in the small caliber railgun.Research results in this paper can provide support for design and optimization of electromagnetic railgun.
基金supported by the National Natural Science Foundation of China (Grant Nos. 41871288, 41930102 and 41602182)the Fundamental Research Funds for the Central Universities (Grant No. 2018CSLZ002)
文摘Topographic feature points and lines are the framework of topography,and their spatial distance relationship is an breakthrough in the study of topographical geometry,internal structure and development level.Proximity distance(PD)is an indicator to describe the distance between the gully source point(GSP)and the watershed boundary.In the upstream catchment area,PDs can be expressed by the streamline proximity distance(SPD),as well as by the horizontal proximity distance(HPD)and the vertical proximity distance(VPD)in the horizontal and vertical dimensions,respectively.The series of indicators(e.g.,SPD,HPD and VPD)are important for quantifying the geomorphological development process of a loess basin because of the headward erosion of loess gullies.In this study,the digital elevation model data with 5 m resolution and a digital topographic analysis method are used for the statistical analyses of the SPD,VPD and HPD in 50 sample areas of 6 geomorphic types in the Loess Plateau of northern Shaanxi.The spatial characteristics and the influencing factors are also analysed.Results show that:1)Central tendencies for the HPDs and the VPDs for the whole study area and the six typical loess landforms are evident.2)Spatial patterns of the HPDs and the VPDs exhibit evident trends and zonal distributions over the whole study area.3)The HPDs have a strong positive correlation with gully density(GD)and hypsometric integral.The VPDs also correlates with GD to an extent.Vegetation cover,mean annual precipitation and loess thickness have stronger effects on the VPD than on the HPD.
文摘The formation maintenance of multiple unmanned aerial vehicles(UAVs)based on proximity behavior is explored in this study.Individual decision-making is conducted according to the expected UAV formation structure and the position,velocity,and attitude information of other UAVs in the azimuth area.This resolves problems wherein nodes are necessarily strongly connected and communication is strictly consistent under the traditional distributed formation control method.An adaptive distributed formation flight strategy is established for multiple UAVs by exploiting proximity behavior observations,which remedies the poor flexibility in distributed formation.This technique ensures consistent position and attitude among UAVs.In the proposed method,the azimuth area relative to the UAV itself is established to capture the state information of proximal UAVs.The dependency degree factor is introduced to state update equation based on proximity behavior.Finally,the formation position,speed,and attitude errors are used to form an adaptive dynamic adjustment strategy.Simulations are conducted to demonstrate the effectiveness and robustness of the theoretical results,thus validating the effectiveness of the proposed method.
基金Project supported by the National Natural Science Foundation of China(Grant No.U1732104)China Postdoctoral Science Foundation(Grant No.2017M611443)Shanghai STCSM2019-11-20 Grant,China(Grant No.19142202700)。
文摘High resolution Fresnel zone plates for nanoscale three-dimensional imaging of materials by both soft and hard x-rays are increasingly needed by the broad applications in nanoscience and nanotechnology.When the outmost zone-width is shrinking down to 50 nm or even below,patterning the zone plates with high aspect ratio by electron beam lithography still remains a challenge because of the proximity effect.The uneven charge distribution in the exposed resist is still frequently observed even after standard proximity effect correction(PEC),because of the large variety in the line width.This work develops a new strategy,nicknamed as local proximity effect correction(LPEC),efficiently modifying the deposited energy over the whole zone plate on the top of proximity effect correction.By this way,50 nm zone plates with the aspect ratio from 4:1 up to 15:1 and the duty cycle close to 0.5 have been fabricated.Their imaging capability in soft(1.3 keV)and hard(9 keV)x-ray,respectively,has been demonstrated in Shanghai Synchrotron Radiation Facility(SSRF)with the resolution of 50 nm.The local proximity effect correction developed in this work should also be generally significant for the generation of zone plates with high resolutions beyond 50 nm.
