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Effects of Bias Voltage on the Structure and Mechanical Properties of Thick CrN Coatings Deposited by Mid-Frequency Magnetron Sputtering 被引量:6
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作者 容双全 何俊 +3 位作者 王红军 田灿鑫 郭立平 付德君 《Plasma Science and Technology》 SCIE EI CAS CSCD 2009年第1期38-41,共4页
Thick CrN coatings were deposited on Si (111) substrates by electron source assisted mid-frequency magnetron sputtering working at 40 kHz. The deposition rate, structure, and microhardness of the coatings were stron... Thick CrN coatings were deposited on Si (111) substrates by electron source assisted mid-frequency magnetron sputtering working at 40 kHz. The deposition rate, structure, and microhardness of the coatings were strongly influenced by the negative bias voltage (Vb). The deposition rate reached 8.96 μm/h at a Vb of -150 V. X-ray diffraction measurement revealed strong CrN (200) orientation for films prepared at low bias voltages. At a high bias voltage of Vb less than -25 V both CrN (200) and (111) were observed. Large and homogeneous grains were observed by both atomic force microscopy and scanning electron microscopy in samples prepared under optimal conditions. The samples exhibited a fibrous microstructure for a low bias voltage and a columnar structure for VD less than -150 V. 展开更多
关键词 CRN middle-frequency magnetron sputtering bias voltage
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Establishing an Initial Electron Beam Model with Monte Carlo Simulation for a Single 6 MV X-ray Medical Linac Based on Particle Dynamics Characteristics
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作者 ZHAO Hong-bin KONG Xiao-xiao +2 位作者 LI Quan-feng LIN Xiao-qi BAO Shang-lian 《Chinese Journal of Biomedical Engineering(English Edition)》 2009年第2期47-54,66,共9页
Objective:In this study,we try to establish an initial electron beam model by combining Monte Carlo simulation method with particle dynamic calculation(TRSV)for the single 6 MV X-ray accelerating waveguide of BJ-6 med... Objective:In this study,we try to establish an initial electron beam model by combining Monte Carlo simulation method with particle dynamic calculation(TRSV)for the single 6 MV X-ray accelerating waveguide of BJ-6 medical linac.Methods and Materials:1.We adapted the treatment head configuration of BJ-6 medical linac made by Beijing Medical Equipment Institute(BMEI)as the radiation system for this study.2.Use particle dynamics calculation code called TRSV to drive out the initial electron beam parameters of the energy spectrum,the spatial intensity distribution,and the beam incidence angle.3.Analyze the 6 MV X-ray beam characteristics of PDDc,OARc in a water phantom by using Monte Carlo simulation(BEAMnrc,DOSXYZnrc)for a preset of the initial electron beam parameters which have been determined by TRSV,do the comparisons of the measured results of PDDm,OARm in a real water phantom,and then use the deviations of calculated and measured results to slightly modify the initial electron beam model back and forth until the deviations meet the error less than 2%.Results:The deviations between the Monte Carlo simulation results of percentage depth doses at PDDc and off-axis ratios OARc and the measured results of PDDm and OARm in a water phantom were within 2%.Conclusion:When doing the Monte Carlo simulation to determine the parameters of an initial electron beam for a particular medical linac like BJ-6,modifying some parameters based on the particle dynamics calculation code would give some more reasonable and more acceptable results. 展开更多
关键词 initial electron beam model particle dynamic calculation Monte Carlosimulation medical linear accelerator
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