Microscopic vision has been widely applied in precision assembly.To achieve sufficiently high resolution in measurements for precision assembly when the sizes of the parts involved exceed the field of view of the visi...Microscopic vision has been widely applied in precision assembly.To achieve sufficiently high resolution in measurements for precision assembly when the sizes of the parts involved exceed the field of view of the vision system,an image mosaic technique must be used.In this paper,a method for constructing an image mosaic with non-overlapping areas with enhanced efficiency is proposed.First,an image mosaic model for the part is created using a geometric model of the measurement system installed on a X-Y-Z precision stages with high repeatability,and a path for image acquisition is established.Second,images are captured along the same path for a specified calibration plate,and an entire image is formed based on the given model.The measurement results obtained from the specified calibration plate are utilized to identify mosaic errors and apply compensation for the part requiring measurement.Experimental results show that the maximum error is less than 4μm for a camera with pixel equivalent 2.46μm,thereby demonstrating the accuracy of the proposed method.This image mosaic technique with non-overlapping regions can simplify image acquisition and reduce the workload involved in constructing an image mosaic.展开更多
Underwater target motion estimation is a challenge for ocean military and scientific research.In this work,we propose a method based on the combination of polarization imaging and optical flow for turbid underwater ta...Underwater target motion estimation is a challenge for ocean military and scientific research.In this work,we propose a method based on the combination of polarization imaging and optical flow for turbid underwater target detection.Polarization imaging can reduce the influence of backscattered light and obtain high-quality images underwater.The optical flow shows the motion and structural information of the target.We use polarized optical flow to obtain the optical flow field and estimate the target motion.The experimental results of different targets under varying water turbidity levels illustrate that our method is realizable and robust.The precision is verified by comparing the results with the precise displacement data and calculating two error measures.The proposed method based on polarized optical flow can obtain accurate displacement information and a good recognition effect.Moving target segmentation based on the Otsu method further proves the superiority of the polarized optical flow under turbid water.This study is valuable for target detection and motion estimation in scattering environments.展开更多
Mechanical properties of structural materials are particularly important for design, performance realization and reliability analysis of microelectromechanical systems （MEMS）. Furthermore, accurate database of mecha...Mechanical properties of structural materials are particularly important for design, performance realization and reliability analysis of microelectromechanical systems （MEMS）. Furthermore, accurate database of mechanical properties at the micro scale can provide indispensable reference for establishing MEMS standard. Electroplated nickel film is one of the most favored structural materials used in MEMS, thus its mechanical properties has been studied for many years. However, the measured values show large scatter in Yotmg＇s modulus of nickel film. Young＇s modulus and yield stress of electroplated nickel film are measured by using a micro-tensile testing instrument. The tensile load applied on the specimen is measured by a load cell with accuracy 0.25 mN directly, without additional friction. Through measuring the axial stiffness coefficient of the tensile instnunent in situ, the tensile strain of the specimen is obtained by using two-serial spring model. The electroplated nickel films were fabricated from sulfarnate baths, and the gauge section is 500μm long and 10μm wide nominally, and thickness range between 25 μm and 50μm. The obtained Young＇s modulus from tensile testing is 83＋6 GPa for nickel specimens electroplated at current density of 20 mA/cm2 and it increases to 124＋5 GPa as current density is decreased to 10 mA/cm2. The phenomena are interpreted in terms of porosity of microstructure. The higher current density produced rnicrostucture with low density and high volume fraction of pores, and the microstructure of high porosity corresponds to a lower modulus. The measured values of Young＇s modulus are consistent with those of calculated from the exponential empirical formula between Young＇s modulus and porosity. The micro-tensile testing instrument can also be used for mechanical measurement of other MEMS films.展开更多
The CO2-induced capillary blocking in anode flow field is one of the key adverse factors to reduce the performance of a micro-direct methanol fuel cell(l DMFC). In order to solve this problem, new polycarbonate(PC) fl...The CO2-induced capillary blocking in anode flow field is one of the key adverse factors to reduce the performance of a micro-direct methanol fuel cell(l DMFC). In order to solve this problem, new polycarbonate(PC) flow field plates with nested arrangement of hydrophilic fuel channels and superhydrophobic gas channels were designed,fabricated, and tested in this work. The gas channels were treated with solvent-induced crystallization using acetone solution. The superhydrophobicity with 160° water contact angle and 2° tilting angle was obtained on the PC substrates. A dummy cell using hydrogen peroxide decomposition reaction and a test loop were separately set up to evaluate the flow fields' performance. It was found that a 37 % pressure drop decrease can be obtained in the new serpentine flow field compared with that of the conventional one. The benefit of the new flow field to remove gas bubbles was also confirmed by an in situ visualization study on the dummy cell. Results show that the auxiliary superhydrophobic gas channels can speed up the discharge of the gas bubbles from the flow field, which will in turn improve the l DMFC performance.展开更多
Fabrication of microchannels on polymethylmethacrylate （PMMA） substrates using novel microfabrication methods is demonstrated. The image of microchannels is transferred from a silicon master possessing the inverse i...Fabrication of microchannels on polymethylmethacrylate （PMMA） substrates using novel microfabrication methods is demonstrated. The image of microchannels is transferred from a silicon master possessing the inverse image of the microchannel to a PMMA plate by using hot embossing methods. The silicon master is electrostatically bonded to a Pyrex 7740 glass wafer, which improves the device yield from about 20 devices to hundreds of devices per master. Effects of embossing temperature, pressure and time on the accuracy of replication are systematically studied using the orthogonal factorial design. According to the suggested experimental model, the time for the whole embossing procedure is shorten from about 20 min to 6 min, and the accuracy of replication is 99.3%. The reproducibility of the hot embossing method is evaluated using 10 channels on different microfluidic devices, with variations of 1.4 % in depth and 1.8% in width.展开更多
In order to use micro ultrasonic bonding technique to package polymer microfluidic chips, an auxiliary microstructure named micro energy director is designed and fabricated. The hot embossing process for PMMA （ polym...In order to use micro ultrasonic bonding technique to package polymer microfluidic chips, an auxiliary microstructure named micro energy director is designed and fabricated. The hot embossing process for PMMA （ polymethyl methacrylate） substrates with both concave micro channel and convex micro energy director for ultrasonic bonding is studied. The embossing processes with different embossing temperatures are simulated using Finite Element Method （FEM）. The optimized parameters are： the embossing temperature of 135 ℃ , holding time of 200 s, and the embossing pressure of 1.65 MPa. The experimental results show that the replication error between experiments and simulations is less than 2% and the replication accuracy of the microstrueture is more than 96%. The study offers a method for quick optimizing parameters for hot embossing both concave and convex microstructures.展开更多
Aiming at the requirement of autonomous navigation capability of the underwater unmanned vehicle(UUV),a novel bionic method for underwater navigation based on polarization pattern within Snell’s window is proposed.In...Aiming at the requirement of autonomous navigation capability of the underwater unmanned vehicle(UUV),a novel bionic method for underwater navigation based on polarization pattern within Snell’s window is proposed.Inspired by creatures,polarization navigation is a satellite-free navigation scheme and has great potential to be used in the water.However,because of the complex underwater environment,whether UUV polarization navigation can be realized is doubtful.To illustrate the feasibility of underwater polarization navigation,we firstly establish the model of under-water polarization patterns to prove the stability and predictability of the underwater polarization pattern within Snell’s window.Then,we carry out static and dynamic experiments of underwater heading determination based on developed polarization information detection equipment.Finally,we obtain underwater polarization patterns and conduct the tracking experiment at different water depths.The experimental results of the underwater polarization patterns are consistent with the simulation,which proves the correctness of the proposed model.At the water depth of 5 m,the average angle and position error of the tracking experiment are 14.3508°and 4.0812 m,respectively.It is illustrated that underwater polarization navigation is realizable and the precision can meet the real-time navigation requirements of UUV.This study promotes the improvement of underwater navigation ability and the development of marine equipment.展开更多
Use of metallic Li anode raises serious concerns on the safety and operational performance of Li-S batteries due to uncontrolled hazard of Li dendrite formation, which is difficultly eliminated as long as the metallic...Use of metallic Li anode raises serious concerns on the safety and operational performance of Li-S batteries due to uncontrolled hazard of Li dendrite formation, which is difficultly eliminated as long as the metallic Li exists in the cells. Pairing lithium sulfide (Li2S) cathode with currently available metallic Lifree high-capacity anodes offers an alternative solution to this challenge. However, the performance of Li2S cathode is primarily restricted by high activation barrier upon initial charge, low active mass utilization and sluggish redox kinetics. Herein, a MXene-induced multifunctional collaborative interface is proposed to afford superb activity towards redox solid-liquid/liquid-liquid phase transformation, strong chemisorption, high conductivity and fast ionic/charge transport in high Li2S loading cathode. Applying collaborative interface effectively reduces initial voltage barrier of Li2S activation and regulates the kinetic behavior of redox polysulfide conversion. Therefore, stable operation of additive-free Li2S cathode with high areal capacities at high Li2S loading up to 9 mg cm^-2 can be achieved with less sacrifice of high capacity and rate capability in Li-S batteries. Rechargeable metallic Li-free batteries are successfully constructed by pairing this high-performance Li2S cathode with high-capacity metal oxide anodes, which delivers superior energy density to current Li-ion batteries.展开更多
As an important tool for marine exploration, the autonomous underwater vehicle(AUV) must home in and dock at a docking station(DS) to be recharged, repaired, or to exchange information at set intervals. However, the c...As an important tool for marine exploration, the autonomous underwater vehicle(AUV) must home in and dock at a docking station(DS) to be recharged, repaired, or to exchange information at set intervals. However, the complex and hostile underwater environment makes this process challenging. This study proposes a real-time method based on polarized optical guidance for determining the position and attitude of the AUV relative to its DS. Four polarized artificial underwater landmarks are positioned at the DS, which are recognized by the AUV vision system. Compared with light intensity, the polarization of a light beam is known to be better maintained at greater propagation distances, especially in underwater environments. The proposed method, which is inspired by the ability of marine animals to communicate, calculates the pose parameters in less than 10 ms without any other navigational information. The simulation results reveal that the angle errors are small and the position errors are no more than 0.116 m within 100 m in the coastal ocean. The results of underwater experiments further demonstrate the feasibility of the proposed method, which extends the operating distance of the AUV beyond what is currently possible while maintaining the precision of traditional optical guidance.展开更多
The manufacturing accuracy of ultra-precision master gears signifies the technological capability of the ultra-precision gear.Currently,there is little report about the manufacturing technologies of ultra-precision ma...The manufacturing accuracy of ultra-precision master gears signifies the technological capability of the ultra-precision gear.Currently,there is little report about the manufacturing technologies of ultra-precision master gears at home and aboard.In order to meet the requirement of grinding ultra precision master gear,the gear grinder with flat-faced wheel Y7125 is chosen as the object machine tool and the geometric model of its precision generating part,the involute cam,is established.According to the structure of the involute cam,the effective working section and its adjustable range of the cam are determined,and the mathematical expressions of the effects of comprehensive eccentricity of the involute cam on gear profile deviations are derived.According to the primary harmonic trends of the deviation curve,it is shown that gear profile form and slope deviations in different work generating sections of the involute cam are different which the latter changes with the cam eccentricity obviously.Then,the issues of extreme values and methods of error compensation are studied and the conclusion that large adjustable range is benefit to search the optimal involute-cam section which is responding to the minimum gear profile deviations is obtained.A group of examples are calculated by choosing master gears with d=120 mm and m=2-6 mm and an involute cam with base diameter djcam =117 mm.And it is found that the maximum gear profile deviation counts for no more than 5% of the cam eccentricity after error compensation.A gear-grinding experiment on the master gear with m=2 mm is conducted by choosing different sections of the involute cam and the differences of gear profile deviations then the existence of the cam eccentricity are verified.The research discloses the rule of gear profile deviations caused by the comprehensive eccentricity of the involute cam and provides the theoretical guidance and the processing methods for grinding profile of the ultra precision master gear.展开更多
Electrohydrodynamicjet （E-Jet） is an approach to the fabrication of micro/nano-structures by the use of electrical forces. In this process, the liquid is subjected to electrical and mechanical forces to form a liqui...Electrohydrodynamicjet （E-Jet） is an approach to the fabrication of micro/nano-structures by the use of electrical forces. In this process, the liquid is subjected to electrical and mechanical forces to form a liquid jet, which is further disintegrated into droplets. The major advantage of the E-Jet technique is that the sizes of the jet formed can be at the nanoscale far smaller than the nozzle size, which can realize high printing resolution with less risk of nozzle blockage. The E-Jet technique, which mainly includes E-Jet deposition and E-Jet printing, has a wide range of applications in the fabrication ofmicro/nano-structures for micro/nano-electromechanical system devices. This tech- nique is also considered a micro/nano-fabrication method with a great potential for commercial use. This study mainly reviews the E-Jet deposition/printing fundamentals, fabrication process, and applications.展开更多
The volume expansion of SU-8 resist brings serious dimensional errors to electroformed structures.Two approaches have been proposed to reduce resist distortions during electroforming:electroforming at room temperature...The volume expansion of SU-8 resist brings serious dimensional errors to electroformed structures.Two approaches have been proposed to reduce resist distortions during electroforming:electroforming at room temperature and adding auxiliary features for mask patterns.However,the former method induces higher internal stresses in the electroformed metal layers.And the latter method makes it difficult to predict the expansion behaviors of the resists.In the paper,the thermal expansion of the SU-8 mould is calculated by ANSYS firstly,and the lower thermal expansion value indicates that hygroscopic swelling plays a leading role in SU-8 mould distortions.An original technique is presented to reduce SU-8 hygroscopic swelling by ultrasonic treatment.The dimensional errors of the electroformed structure fabricated on the ultrasonic treatment mould are 50% lower than the one without ultrasonic treatment.Simulation of hygroscopic swelling is conducted by finite element analysis,and the results indicate that the hygroscopic strain ε of SU-8 after electroforming is declined from 6.8% to 3.1% because of ultrasonic.The measurements show that ultrasonic treatment increased the water contact angle of cured SU-8 from 70.8?to 74.9?.Based on these results,the mechanism of ultrasonic effect on hygroscopic swelling is proposed from the view of ultrasonic vibration decreasing the number of hydroxyl groups in SU-8.The research presents a novel method to improve the precisions of electroformed structures.It has no influence on the internal stresses of final structures and does not increase the complexities of mask layouts.展开更多
A new kind of region pair grey difference classifier was proposed. The regions in pairs associated to form a feature were not necessarily directly-connected, but were selected dedicatedly to the grey transition betwee...A new kind of region pair grey difference classifier was proposed. The regions in pairs associated to form a feature were not necessarily directly-connected, but were selected dedicatedly to the grey transition between regions coinciding with the face pattern structure. Fifteen brighter and darker region pairs were chosen to form the region pair grey difference features with high discriminant capabilities. Instead of using both false acceptance rate and false rejection rate, the mutual information was used as a unified metric for evaluating the classifying performance. The parameters of specified positions, areas and grey difference bias for each single region pair feature were selected by an optimization processing aiming at maximizing the mutual information between the region pair feature and classifying distribution, respectively. An additional region-based feature depicting the correlation between global region grey intensity patterns was also proposed. Compared with the result of Viola-like approach using over 2 000 features, the proposed approach can achieve similar error rates with only 16 features and 1/6 implementation time on controlled illumination images.展开更多
On the basis of the Li-site vacancy model, the non-stoichiometric defects in LN crystals, i.e., anti-site defects NbLi and corresponding lithium vacancy defects VLi, were investigated by the bond valence model. Accord...On the basis of the Li-site vacancy model, the non-stoichiometric defects in LN crystals, i.e., anti-site defects NbLi and corresponding lithium vacancy defects VLi, were investigated by the bond valence model. According to the valence sum rule, 4 VLi sites must emerge in the nearest lattices of NbLi, and thus form a neutral cluster with the center, NbLi(VLi)4Nb5O15. The bond graph of the defect cluster was given, which reveals the ideal chemical bonding characteristics of defect clusters. Combining the possible configuration of defect clusters and the ideal bond lengths in the bond graph, the size of defect clusters in the LN crystallographic frame is estimated as 0.9～1.2 nm in diameter.展开更多
On the basis of the bond valence model, the preferential occupancy of various dopant such as Mn2+, Eu3+, Er3+, Nd3+, Lu3+, Yb3+, In3+, Cr3+, Fe3+ and Ti4+ in the ideal stoichiometric lithium niobate (SLN) crystallogra...On the basis of the bond valence model, the preferential occupancy of various dopant such as Mn2+, Eu3+, Er3+, Nd3+, Lu3+, Yb3+, In3+, Cr3+, Fe3+ and Ti4+ in the ideal stoichiometric lithium niobate (SLN) crystallographic frame was investigated in a viewpoint of chemical bonds. Theoretical analysis indicates that the dopant occupancy is significantly influenced by the anti-site Nb4+Li. Our work also shows that Mg-like ions (Mg2+, Zn2+, In3+, Sc3+) have a repulsive effect on Nb4+Li ions. When removing Nb4+Li ion by codoping Mg-like ions, the dopant occupancy in the LN crystallographic frame is determined by the natural characteristics of dopant, which is consistent well with the result in the ideal SLN crystals.展开更多
Sb-doped ZnO thin films are deposited on c-plane sapphire substrates by pulsed laser deposition. Hall results indicate that the conductivity of the Sb-doped ZnO thin films is strongly dependent on the substrate temper...Sb-doped ZnO thin films are deposited on c-plane sapphire substrates by pulsed laser deposition. Hall results indicate that the conductivity of the Sb-doped ZnO thin films is strongly dependent on the substrate temperature. The sample deposited at the temperature of 550°C exhibits p-type conductivity. It gives a resistivity of 15.25Ω＆#12539;cm, with a Hall mobility of 1.79cm2V-1s-1 and a carrier concentration of 2.290×1017cm-3 at room temperature. The x-ray diffraction indicates that the Sb-doped ZnO thin films deposited in the range of 450-650°C are high c-axis oriented. Low-temperature photoluminescence spectra indicate that the sample deposited at 550°C shows the strong acceptor-bound exciton （A0X） emission.展开更多
Three-dimensional（3-D） free-form shape measurement,a challenging task pursued by computer vision,is mainly characterized with single view acquisition and multiple view registration.Most of the conventional scanning ...Three-dimensional（3-D） free-form shape measurement,a challenging task pursued by computer vision,is mainly characterized with single view acquisition and multiple view registration.Most of the conventional scanning systems are less flexibility and difficult to realize engineering applications for employing sequential registration tactic.To develop portable scanning system and engineering registration method overcoming problems of error accumulation and propagation is the research direction.In this paper,one 3-D free-form shape measuring system using unconstrained range sensor is designed.A quasi-active stereo binocular visual sensor embedded within a scanning mechanism is used as the range sensor.Error compensation is performed by residual amendment according to camera calibration lattice.Artificial control points are designed and adhered on object and one camera is introduced to shot these control points from different positions and orientations.Then ray bundle adjustment（BA） method is used to calculate the space coordinates of all the control points,so as to set up a global control net work.Registration can be completed by mapping at least 3 control points observed by range sensor in single view acquisition into the global control network.In this system,no calibration for laser plane is required and the motion of range sensor is completely free.The overlapping of neighboring region is unessential for registration.Therefore,the working range of the system can be easily extended.The measuring precision mainly depends on the quality of global control network.The sequential distances of coding control points are observed by electronic theodolites and then compared with those obtained according to BA result.Experimental results show that relative distance error of control points is no more than 0.2%.The proposed measuring system is portable,provides good capacity for global error control,and contributes to the engineering application of 3-D free-form shape measurement.展开更多
Ag-doped ZnO (ZnO:Ag) films are prepared on c-plane sapphire substrates by pulsed laser deposition at different substrate temperatures.The effect of substrate temperature on the ZnO:Ag film is studied in detail by EDX...Ag-doped ZnO (ZnO:Ag) films are prepared on c-plane sapphire substrates by pulsed laser deposition at different substrate temperatures.The effect of substrate temperature on the ZnO:Ag film is studied in detail by EDX,XRD and Raman spectroscopy.The results reveal that raising the substrate temperature is beneficial for incorporating Ag into ZnO:Ag films in the range of our experimental temperatures and a number of Ag atoms incorporation into ZnO:Ag films may cause the (002) peak positions of the XRD spectra shift to a lower angle direction,but hardly affect the c-axis orientation of the films.The (002) peak shift ought to be due to the increase of lattice constant in the c-axis direction caused by the partial substitution of Zn^(2+) ions by Ag^(+) ions.In addition,a local vibrational mode (LVM) at 492cm^(-1) induced by doping Ag occurred in the Raman spectra of ali the ZnO:Ag films and its peak position hardly shifted with increasing substrate temperature.It means that the LVM can act as an indication of Ag incorporation into ZnO:Ag film.展开更多
This paper studies the flow characteristics in micro/nano-channels subjected to an applied electric field. The nano-channel flow was observed by means of the fluorescence Calcein. A Fluorescence Concentration Gradient...This paper studies the flow characteristics in micro/nano-channels subjected to an applied electric field. The nano-channel flow was observed by means of the fluorescence Calcein. A Fluorescence Concentration Gradient Interface （FCGI） was observed across the nano-channel array. The front of the FCGI was shown to have an analogous parabolic shape. The propagation of this interface reflects indirectly the induced pressure at the micro/nano-channel junction, where the enrichment-depletion processes are known to take place. This induced pressure was predicted by numerical simulations, and this paper gives the first experimental evidence.展开更多
In order to describe the characteristics of piezoelectric bimorph, properties of lead zirconate titanate （LZT） film are studied by X-ray diffraction （XRD） and scanning eletron microscope （SEM）. The ratio of PbTi...In order to describe the characteristics of piezoelectric bimorph, properties of lead zirconate titanate （LZT） film are studied by X-ray diffraction （XRD） and scanning eletron microscope （SEM）. The ratio of PbTiOJPbZrO3 in LZT is 53/47, which is around morphotropic phase boundary （MPB）. LZT film is composed of cubic particles with the average size of 5 ~ma. Density of thin film is figured out through the datum measured in experiments. The displacement model used to analyze the driving ability of bimorph is set up, and the effect of elastic intermediate layer is taken into account. Piezoelectric coefficient of LZT film is worked out by using the displacement model. Experiments of driving ability show that deformation of bimorph free end does not increase with times of crystal growth processes and the maximum deformation is obtained after two times crystal growth processes. Finally, the ferroelectric property of the bimorph is investigated and coercive voltage of the bimorph is obtained.展开更多
基金supported by the Liaoning Revitalization Talents Program(Grant No.XLYC2002020)the Major Project of Basic Scientific Research of Chinese Ministry(Grant No.JCYK2016205A003).
文摘Microscopic vision has been widely applied in precision assembly.To achieve sufficiently high resolution in measurements for precision assembly when the sizes of the parts involved exceed the field of view of the vision system,an image mosaic technique must be used.In this paper,a method for constructing an image mosaic with non-overlapping areas with enhanced efficiency is proposed.First,an image mosaic model for the part is created using a geometric model of the measurement system installed on a X-Y-Z precision stages with high repeatability,and a path for image acquisition is established.Second,images are captured along the same path for a specified calibration plate,and an entire image is formed based on the given model.The measurement results obtained from the specified calibration plate are utilized to identify mosaic errors and apply compensation for the part requiring measurement.Experimental results show that the maximum error is less than 4μm for a camera with pixel equivalent 2.46μm,thereby demonstrating the accuracy of the proposed method.This image mosaic technique with non-overlapping regions can simplify image acquisition and reduce the workload involved in constructing an image mosaic.
基金supported by the National Natural Science Foundation of China (No.52394252)the Postdoctoral Fellowship Program of CPSF (No.GZC20232497)+2 种基金the Key Research and Development Program of Shandong Province,China (No.2021ZLGX04)the Shandong Postdoctoral Science Foundation (No.SDBX2023012)the Qingdao Postdoctoral Program Grant (No.QDBSH20230202009)。
文摘Underwater target motion estimation is a challenge for ocean military and scientific research.In this work,we propose a method based on the combination of polarization imaging and optical flow for turbid underwater target detection.Polarization imaging can reduce the influence of backscattered light and obtain high-quality images underwater.The optical flow shows the motion and structural information of the target.We use polarized optical flow to obtain the optical flow field and estimate the target motion.The experimental results of different targets under varying water turbidity levels illustrate that our method is realizable and robust.The precision is verified by comparing the results with the precise displacement data and calculating two error measures.The proposed method based on polarized optical flow can obtain accurate displacement information and a good recognition effect.Moving target segmentation based on the Otsu method further proves the superiority of the polarized optical flow under turbid water.This study is valuable for target detection and motion estimation in scattering environments.
基金supported by National Natural Science Foundation of China (Grant No. 50535030)National Basic Research Program of China (973 Program, Grant No. 2006CB300407)
文摘Mechanical properties of structural materials are particularly important for design, performance realization and reliability analysis of microelectromechanical systems （MEMS）. Furthermore, accurate database of mechanical properties at the micro scale can provide indispensable reference for establishing MEMS standard. Electroplated nickel film is one of the most favored structural materials used in MEMS, thus its mechanical properties has been studied for many years. However, the measured values show large scatter in Yotmg＇s modulus of nickel film. Young＇s modulus and yield stress of electroplated nickel film are measured by using a micro-tensile testing instrument. The tensile load applied on the specimen is measured by a load cell with accuracy 0.25 mN directly, without additional friction. Through measuring the axial stiffness coefficient of the tensile instnunent in situ, the tensile strain of the specimen is obtained by using two-serial spring model. The electroplated nickel films were fabricated from sulfarnate baths, and the gauge section is 500μm long and 10μm wide nominally, and thickness range between 25 μm and 50μm. The obtained Young＇s modulus from tensile testing is 83＋6 GPa for nickel specimens electroplated at current density of 20 mA/cm2 and it increases to 124＋5 GPa as current density is decreased to 10 mA/cm2. The phenomena are interpreted in terms of porosity of microstructure. The higher current density produced rnicrostucture with low density and high volume fraction of pores, and the microstructure of high porosity corresponds to a lower modulus. The measured values of Young＇s modulus are consistent with those of calculated from the exponential empirical formula between Young＇s modulus and porosity. The micro-tensile testing instrument can also be used for mechanical measurement of other MEMS films.
基金financially supported by the National Natural Science Foundation of China (Nos. 51275076, 51475081)
文摘The CO2-induced capillary blocking in anode flow field is one of the key adverse factors to reduce the performance of a micro-direct methanol fuel cell(l DMFC). In order to solve this problem, new polycarbonate(PC) flow field plates with nested arrangement of hydrophilic fuel channels and superhydrophobic gas channels were designed,fabricated, and tested in this work. The gas channels were treated with solvent-induced crystallization using acetone solution. The superhydrophobicity with 160° water contact angle and 2° tilting angle was obtained on the PC substrates. A dummy cell using hydrogen peroxide decomposition reaction and a test loop were separately set up to evaluate the flow fields' performance. It was found that a 37 % pressure drop decrease can be obtained in the new serpentine flow field compared with that of the conventional one. The benefit of the new flow field to remove gas bubbles was also confirmed by an in situ visualization study on the dummy cell. Results show that the auxiliary superhydrophobic gas channels can speed up the discharge of the gas bubbles from the flow field, which will in turn improve the l DMFC performance.
基金This project is supported by National Natural Science Foundation of China (No.50135040)National Hi-tech Research and Development Program of China(863 Program, No.2002AA404460).
文摘Fabrication of microchannels on polymethylmethacrylate （PMMA） substrates using novel microfabrication methods is demonstrated. The image of microchannels is transferred from a silicon master possessing the inverse image of the microchannel to a PMMA plate by using hot embossing methods. The silicon master is electrostatically bonded to a Pyrex 7740 glass wafer, which improves the device yield from about 20 devices to hundreds of devices per master. Effects of embossing temperature, pressure and time on the accuracy of replication are systematically studied using the orthogonal factorial design. According to the suggested experimental model, the time for the whole embossing procedure is shorten from about 20 min to 6 min, and the accuracy of replication is 99.3%. The reproducibility of the hot embossing method is evaluated using 10 channels on different microfluidic devices, with variations of 1.4 % in depth and 1.8% in width.
基金Sponsored by the National Natural Science Foundation of China(Grant No.50975037)the State Key Development Program for Basic Research of China(Grant No.2011CB013105).
文摘In order to use micro ultrasonic bonding technique to package polymer microfluidic chips, an auxiliary microstructure named micro energy director is designed and fabricated. The hot embossing process for PMMA （ polymethyl methacrylate） substrates with both concave micro channel and convex micro energy director for ultrasonic bonding is studied. The embossing processes with different embossing temperatures are simulated using Finite Element Method （FEM）. The optimized parameters are： the embossing temperature of 135 ℃ , holding time of 200 s, and the embossing pressure of 1.65 MPa. The experimental results show that the replication error between experiments and simulations is less than 2% and the replication accuracy of the microstrueture is more than 96%. The study offers a method for quick optimizing parameters for hot embossing both concave and convex microstructures.
基金supported by the National Natural Science Foundation of China(Grant No.52175265).
文摘Aiming at the requirement of autonomous navigation capability of the underwater unmanned vehicle(UUV),a novel bionic method for underwater navigation based on polarization pattern within Snell’s window is proposed.Inspired by creatures,polarization navigation is a satellite-free navigation scheme and has great potential to be used in the water.However,because of the complex underwater environment,whether UUV polarization navigation can be realized is doubtful.To illustrate the feasibility of underwater polarization navigation,we firstly establish the model of under-water polarization patterns to prove the stability and predictability of the underwater polarization pattern within Snell’s window.Then,we carry out static and dynamic experiments of underwater heading determination based on developed polarization information detection equipment.Finally,we obtain underwater polarization patterns and conduct the tracking experiment at different water depths.The experimental results of the underwater polarization patterns are consistent with the simulation,which proves the correctness of the proposed model.At the water depth of 5 m,the average angle and position error of the tracking experiment are 14.3508°and 4.0812 m,respectively.It is illustrated that underwater polarization navigation is realizable and the precision can meet the real-time navigation requirements of UUV.This study promotes the improvement of underwater navigation ability and the development of marine equipment.
基金supported by the National Natural Science Foundation of China (NSFC, No. 51522203, 51772040)Fok Ying Tung Education Foundation (No. 151047)+2 种基金the Recruitment Program of Global Youth ExpertsXinghai Scholarship of Dalian University of Technologythe Fundamental Research Funds for the Central Universities (No. DUT18LAB19)
文摘Use of metallic Li anode raises serious concerns on the safety and operational performance of Li-S batteries due to uncontrolled hazard of Li dendrite formation, which is difficultly eliminated as long as the metallic Li exists in the cells. Pairing lithium sulfide (Li2S) cathode with currently available metallic Lifree high-capacity anodes offers an alternative solution to this challenge. However, the performance of Li2S cathode is primarily restricted by high activation barrier upon initial charge, low active mass utilization and sluggish redox kinetics. Herein, a MXene-induced multifunctional collaborative interface is proposed to afford superb activity towards redox solid-liquid/liquid-liquid phase transformation, strong chemisorption, high conductivity and fast ionic/charge transport in high Li2S loading cathode. Applying collaborative interface effectively reduces initial voltage barrier of Li2S activation and regulates the kinetic behavior of redox polysulfide conversion. Therefore, stable operation of additive-free Li2S cathode with high areal capacities at high Li2S loading up to 9 mg cm^-2 can be achieved with less sacrifice of high capacity and rate capability in Li-S batteries. Rechargeable metallic Li-free batteries are successfully constructed by pairing this high-performance Li2S cathode with high-capacity metal oxide anodes, which delivers superior energy density to current Li-ion batteries.
基金supported by the National Natural Science Foundation of China (NSFC)(Nos. 51675076,51505062)the Science Fund for Creative Research Groups of NSFC (No. 51621064)the Pre-Research Foundation of China (No. 61405180102)。
文摘As an important tool for marine exploration, the autonomous underwater vehicle(AUV) must home in and dock at a docking station(DS) to be recharged, repaired, or to exchange information at set intervals. However, the complex and hostile underwater environment makes this process challenging. This study proposes a real-time method based on polarized optical guidance for determining the position and attitude of the AUV relative to its DS. Four polarized artificial underwater landmarks are positioned at the DS, which are recognized by the AUV vision system. Compared with light intensity, the polarization of a light beam is known to be better maintained at greater propagation distances, especially in underwater environments. The proposed method, which is inspired by the ability of marine animals to communicate, calculates the pose parameters in less than 10 ms without any other navigational information. The simulation results reveal that the angle errors are small and the position errors are no more than 0.116 m within 100 m in the coastal ocean. The results of underwater experiments further demonstrate the feasibility of the proposed method, which extends the operating distance of the AUV beyond what is currently possible while maintaining the precision of traditional optical guidance.
基金supported by National Hi-tech Research and Development Program of China (863 Program,Grant No.2008AA042506)
文摘The manufacturing accuracy of ultra-precision master gears signifies the technological capability of the ultra-precision gear.Currently,there is little report about the manufacturing technologies of ultra-precision master gears at home and aboard.In order to meet the requirement of grinding ultra precision master gear,the gear grinder with flat-faced wheel Y7125 is chosen as the object machine tool and the geometric model of its precision generating part,the involute cam,is established.According to the structure of the involute cam,the effective working section and its adjustable range of the cam are determined,and the mathematical expressions of the effects of comprehensive eccentricity of the involute cam on gear profile deviations are derived.According to the primary harmonic trends of the deviation curve,it is shown that gear profile form and slope deviations in different work generating sections of the involute cam are different which the latter changes with the cam eccentricity obviously.Then,the issues of extreme values and methods of error compensation are studied and the conclusion that large adjustable range is benefit to search the optimal involute-cam section which is responding to the minimum gear profile deviations is obtained.A group of examples are calculated by choosing master gears with d=120 mm and m=2-6 mm and an involute cam with base diameter djcam =117 mm.And it is found that the maximum gear profile deviation counts for no more than 5% of the cam eccentricity after error compensation.A gear-grinding experiment on the master gear with m=2 mm is conducted by choosing different sections of the involute cam and the differences of gear profile deviations then the existence of the cam eccentricity are verified.The research discloses the rule of gear profile deviations caused by the comprehensive eccentricity of the involute cam and provides the theoretical guidance and the processing methods for grinding profile of the ultra precision master gear.
文摘Electrohydrodynamicjet （E-Jet） is an approach to the fabrication of micro/nano-structures by the use of electrical forces. In this process, the liquid is subjected to electrical and mechanical forces to form a liquid jet, which is further disintegrated into droplets. The major advantage of the E-Jet technique is that the sizes of the jet formed can be at the nanoscale far smaller than the nozzle size, which can realize high printing resolution with less risk of nozzle blockage. The E-Jet technique, which mainly includes E-Jet deposition and E-Jet printing, has a wide range of applications in the fabrication ofmicro/nano-structures for micro/nano-electromechanical system devices. This tech- nique is also considered a micro/nano-fabrication method with a great potential for commercial use. This study mainly reviews the E-Jet deposition/printing fundamentals, fabrication process, and applications.
基金supported by the National Natural Science Foundation of China (No:50675025 and 51075057)
文摘The volume expansion of SU-8 resist brings serious dimensional errors to electroformed structures.Two approaches have been proposed to reduce resist distortions during electroforming:electroforming at room temperature and adding auxiliary features for mask patterns.However,the former method induces higher internal stresses in the electroformed metal layers.And the latter method makes it difficult to predict the expansion behaviors of the resists.In the paper,the thermal expansion of the SU-8 mould is calculated by ANSYS firstly,and the lower thermal expansion value indicates that hygroscopic swelling plays a leading role in SU-8 mould distortions.An original technique is presented to reduce SU-8 hygroscopic swelling by ultrasonic treatment.The dimensional errors of the electroformed structure fabricated on the ultrasonic treatment mould are 50% lower than the one without ultrasonic treatment.Simulation of hygroscopic swelling is conducted by finite element analysis,and the results indicate that the hygroscopic strain ε of SU-8 after electroforming is declined from 6.8% to 3.1% because of ultrasonic.The measurements show that ultrasonic treatment increased the water contact angle of cured SU-8 from 70.8?to 74.9?.Based on these results,the mechanism of ultrasonic effect on hygroscopic swelling is proposed from the view of ultrasonic vibration decreasing the number of hydroxyl groups in SU-8.The research presents a novel method to improve the precisions of electroformed structures.It has no influence on the internal stresses of final structures and does not increase the complexities of mask layouts.
基金Supported by the Joint Research Funds of Dalian University of Technology and Shenyang Automation Institute,Chinese Academy of Sciences
文摘A new kind of region pair grey difference classifier was proposed. The regions in pairs associated to form a feature were not necessarily directly-connected, but were selected dedicatedly to the grey transition between regions coinciding with the face pattern structure. Fifteen brighter and darker region pairs were chosen to form the region pair grey difference features with high discriminant capabilities. Instead of using both false acceptance rate and false rejection rate, the mutual information was used as a unified metric for evaluating the classifying performance. The parameters of specified positions, areas and grey difference bias for each single region pair feature were selected by an optimization processing aiming at maximizing the mutual information between the region pair feature and classifying distribution, respectively. An additional region-based feature depicting the correlation between global region grey intensity patterns was also proposed. Compared with the result of Viola-like approach using over 2 000 features, the proposed approach can achieve similar error rates with only 16 features and 1/6 implementation time on controlled illumination images.
基金Project supported by the National Natural Science Foundation of China (20471012), Foundation for the Author of National Excellent Doctoral Dissertation of China (200322), the Research Fund for the Doctoral Program of Higher Education (20040141004) and the Scientific Research Foundation for the Returned Overseas Chinese Scholars, State Education Ministry
文摘On the basis of the Li-site vacancy model, the non-stoichiometric defects in LN crystals, i.e., anti-site defects NbLi and corresponding lithium vacancy defects VLi, were investigated by the bond valence model. According to the valence sum rule, 4 VLi sites must emerge in the nearest lattices of NbLi, and thus form a neutral cluster with the center, NbLi(VLi)4Nb5O15. The bond graph of the defect cluster was given, which reveals the ideal chemical bonding characteristics of defect clusters. Combining the possible configuration of defect clusters and the ideal bond lengths in the bond graph, the size of defect clusters in the LN crystallographic frame is estimated as 0.9～1.2 nm in diameter.
基金Project supported by the National Natural Science Foundation of China (20471012), Foundation for the Author of National Excellent Doctoral Dissertation of China (200322), the Research Fund for the Doctoral Program of Higher Education (20040141004) and the Scientific Research Foundation for the Returned Overseas Chinese Scholars, State Education Ministry
文摘On the basis of the bond valence model, the preferential occupancy of various dopant such as Mn2+, Eu3+, Er3+, Nd3+, Lu3+, Yb3+, In3+, Cr3+, Fe3+ and Ti4+ in the ideal stoichiometric lithium niobate (SLN) crystallographic frame was investigated in a viewpoint of chemical bonds. Theoretical analysis indicates that the dopant occupancy is significantly influenced by the anti-site Nb4+Li. Our work also shows that Mg-like ions (Mg2+, Zn2+, In3+, Sc3+) have a repulsive effect on Nb4+Li ions. When removing Nb4+Li ion by codoping Mg-like ions, the dopant occupancy in the LN crystallographic frame is determined by the natural characteristics of dopant, which is consistent well with the result in the ideal SLN crystals.
基金Supported by the National Natural Science Foundation of China under Grant No 50532080, Key Laboratory Projects of the Education Department of Liaoning Province under Grant No 20060131 and Specialized Research Fund for the Doctoral Program of Higher Education under Grant No 20070141038.
文摘Sb-doped ZnO thin films are deposited on c-plane sapphire substrates by pulsed laser deposition. Hall results indicate that the conductivity of the Sb-doped ZnO thin films is strongly dependent on the substrate temperature. The sample deposited at the temperature of 550°C exhibits p-type conductivity. It gives a resistivity of 15.25Ω＆#12539;cm, with a Hall mobility of 1.79cm2V-1s-1 and a carrier concentration of 2.290×1017cm-3 at room temperature. The x-ray diffraction indicates that the Sb-doped ZnO thin films deposited in the range of 450-650°C are high c-axis oriented. Low-temperature photoluminescence spectra indicate that the sample deposited at 550°C shows the strong acceptor-bound exciton （A0X） emission.
基金supported by Fujian Provincial Natural Science Foundation for the Youth of China (Grant No. 2009J05136)Key Program of National Natural Science Foundation of China (Grant No.50735003)
文摘Three-dimensional（3-D） free-form shape measurement,a challenging task pursued by computer vision,is mainly characterized with single view acquisition and multiple view registration.Most of the conventional scanning systems are less flexibility and difficult to realize engineering applications for employing sequential registration tactic.To develop portable scanning system and engineering registration method overcoming problems of error accumulation and propagation is the research direction.In this paper,one 3-D free-form shape measuring system using unconstrained range sensor is designed.A quasi-active stereo binocular visual sensor embedded within a scanning mechanism is used as the range sensor.Error compensation is performed by residual amendment according to camera calibration lattice.Artificial control points are designed and adhered on object and one camera is introduced to shot these control points from different positions and orientations.Then ray bundle adjustment（BA） method is used to calculate the space coordinates of all the control points,so as to set up a global control net work.Registration can be completed by mapping at least 3 control points observed by range sensor in single view acquisition into the global control network.In this system,no calibration for laser plane is required and the motion of range sensor is completely free.The overlapping of neighboring region is unessential for registration.Therefore,the working range of the system can be easily extended.The measuring precision mainly depends on the quality of global control network.The sequential distances of coding control points are observed by electronic theodolites and then compared with those obtained according to BA result.Experimental results show that relative distance error of control points is no more than 0.2%.The proposed measuring system is portable,provides good capacity for global error control,and contributes to the engineering application of 3-D free-form shape measurement.
基金Supported by the National Natural Science Foundation of China under Grant Nos 60777009,50532080,and 10804014the Key Laboratory Projects of the Education Department of Liaoning Province(No 20060131)the Doctoral Project of the Ministry of Education of China under Grant Nos 20070141038 and 20070141017.
文摘Ag-doped ZnO (ZnO:Ag) films are prepared on c-plane sapphire substrates by pulsed laser deposition at different substrate temperatures.The effect of substrate temperature on the ZnO:Ag film is studied in detail by EDX,XRD and Raman spectroscopy.The results reveal that raising the substrate temperature is beneficial for incorporating Ag into ZnO:Ag films in the range of our experimental temperatures and a number of Ag atoms incorporation into ZnO:Ag films may cause the (002) peak positions of the XRD spectra shift to a lower angle direction,but hardly affect the c-axis orientation of the films.The (002) peak shift ought to be due to the increase of lattice constant in the c-axis direction caused by the partial substitution of Zn^(2+) ions by Ag^(+) ions.In addition,a local vibrational mode (LVM) at 492cm^(-1) induced by doping Ag occurred in the Raman spectra of ali the ZnO:Ag films and its peak position hardly shifted with increasing substrate temperature.It means that the LVM can act as an indication of Ag incorporation into ZnO:Ag film.
基金supported by the Chinese Academy of Sciences Research and Development Program of China(Grant No.KJCX2-YW-H18)the National Natural Science Foundation of China(Grant No.10872203)the National Key Basic Research Development Program of China(973Program,Grant No2007CB714501)
文摘This paper studies the flow characteristics in micro/nano-channels subjected to an applied electric field. The nano-channel flow was observed by means of the fluorescence Calcein. A Fluorescence Concentration Gradient Interface （FCGI） was observed across the nano-channel array. The front of the FCGI was shown to have an analogous parabolic shape. The propagation of this interface reflects indirectly the induced pressure at the micro/nano-channel junction, where the enrichment-depletion processes are known to take place. This induced pressure was predicted by numerical simulations, and this paper gives the first experimental evidence.
基金This project is supported by National Natural Science Foundation of China (No.50675025)Scientific Research Foundation of Ministry of Education,Dalian City for the Returned Overseas Chinese ScholarsDoctoral Startup Fund of Liaoning Province of China (No.20051080).
文摘In order to describe the characteristics of piezoelectric bimorph, properties of lead zirconate titanate （LZT） film are studied by X-ray diffraction （XRD） and scanning eletron microscope （SEM）. The ratio of PbTiOJPbZrO3 in LZT is 53/47, which is around morphotropic phase boundary （MPB）. LZT film is composed of cubic particles with the average size of 5 ~ma. Density of thin film is figured out through the datum measured in experiments. The displacement model used to analyze the driving ability of bimorph is set up, and the effect of elastic intermediate layer is taken into account. Piezoelectric coefficient of LZT film is worked out by using the displacement model. Experiments of driving ability show that deformation of bimorph free end does not increase with times of crystal growth processes and the maximum deformation is obtained after two times crystal growth processes. Finally, the ferroelectric property of the bimorph is investigated and coercive voltage of the bimorph is obtained.
