TiO2-like polymer films were synthesized by inductively coupled plasma in pulsed radio-frequency (RF) modes. The plasma chemistry, studied by optical emission spectroscopy, showed that the ra- dicals and fragments for...TiO2-like polymer films were synthesized by inductively coupled plasma in pulsed radio-frequency (RF) modes. The plasma chemistry, studied by optical emission spectroscopy, showed that the ra- dicals and fragments formed in the discharge were dependent on the precursor, and that the species density in the plasma gas is as a function of flux de gas that is used to carry the monomer into the plasma reactors.展开更多
文摘TiO2-like polymer films were synthesized by inductively coupled plasma in pulsed radio-frequency (RF) modes. The plasma chemistry, studied by optical emission spectroscopy, showed that the ra- dicals and fragments formed in the discharge were dependent on the precursor, and that the species density in the plasma gas is as a function of flux de gas that is used to carry the monomer into the plasma reactors.
