Residual stresses and deformation of static bonding multi-layer Pyrex7740 glass and aluminum have important effects on performances of bonding parts. The stress and strain finite element analysis of anodic bonding can...Residual stresses and deformation of static bonding multi-layer Pyrex7740 glass and aluminum have important effects on performances of bonding parts. The stress and strain finite element analysis of anodic bonding can optimize the structure and process design, reduce the workload of the experiments, shorten the production cycle, improve the bonding quality, and reduce the process costs. In this paper, residual stresses and deformation in the static bonding two-layer （glass/aluminum）, three-layer （glass/aluminum/ glass）,five-layer（glass/aluminum/glass/aluminum/glass）and seven-layer （glass/aluminum/glass/aluminum/glass/ aluminum/glass） samples have been analyzed using nonlinear finite element simulation software MARC. The simulation results show that the shear stress distribution and deformation distribution in different multi-layer glass and aluminum samples are similar. The stress distribution along thickness at different typical positions in all multi-layer samples has characteristics of pulse pattern, which has pulse peak at the position of transition layers and then decreases abruptly to the minimum value at the positions of glass and aluminum. The maximum shear stress is located in the outside surface area in the transition layer between the top unconstrained glass layer and aluminum layer. The displacement distribution along thickness in all multi-layer samples increases gradually fi＇om the constrained bottom glass layer to the top unconstrained glass layer with abrupt step increase in the aluminum layers, The maximum deformations occur in aluminum layers. It is found that the minimum deformation distortion and the minimum shear stress occur in the three-layer static bonding sample.展开更多
In this study,powders of polyethylene oxide（PEO） and lithium perchlorate（Li Cl O4） were used as the raw materials for producing the ionic conduction polymer PEO–Li Cl O4 with different complex-ratios and used for...In this study,powders of polyethylene oxide（PEO） and lithium perchlorate（Li Cl O4） were used as the raw materials for producing the ionic conduction polymer PEO–Li Cl O4 with different complex-ratios and used for anodic bonding through high energy ball milling method,and meanwhile,X-ray diffraction,differential scanning calorimetry（DSC）,ultraviolet absorption spectrum test analysis,and other relevant methods were adopted to research the complexation mechanism of PEO and Li Cl O4 and the impact of the ionic conduction polymer with different complex-ratios on the anodic bonding process under the action of the strong static electric field.The research results showed that the crystallization of PEO could be effectively obstructed with increased addition of Li Cl O4,thus increasing the content of PEO–Li Cl O4 in amorphous area and continuously improving the complexation degree and the room-temperature conductivity thereof,and that the higher room-temperature conductivity enabled PEO–Li Cl O4 to better bond with metallic aluminum and have better bonding quality.As the new encapsulating material,such research results will promote the application of new polymer functional materials in micro-electromechanical system（MEMS） components.展开更多
基金Supported by the National Natural Science Foundation of China(No.51275332)Shanxi Graduate Outstanding Innovative Projects(No.20123104)
文摘Residual stresses and deformation of static bonding multi-layer Pyrex7740 glass and aluminum have important effects on performances of bonding parts. The stress and strain finite element analysis of anodic bonding can optimize the structure and process design, reduce the workload of the experiments, shorten the production cycle, improve the bonding quality, and reduce the process costs. In this paper, residual stresses and deformation in the static bonding two-layer （glass/aluminum）, three-layer （glass/aluminum/ glass）,five-layer（glass/aluminum/glass/aluminum/glass）and seven-layer （glass/aluminum/glass/aluminum/glass/ aluminum/glass） samples have been analyzed using nonlinear finite element simulation software MARC. The simulation results show that the shear stress distribution and deformation distribution in different multi-layer glass and aluminum samples are similar. The stress distribution along thickness at different typical positions in all multi-layer samples has characteristics of pulse pattern, which has pulse peak at the position of transition layers and then decreases abruptly to the minimum value at the positions of glass and aluminum. The maximum shear stress is located in the outside surface area in the transition layer between the top unconstrained glass layer and aluminum layer. The displacement distribution along thickness in all multi-layer samples increases gradually fi＇om the constrained bottom glass layer to the top unconstrained glass layer with abrupt step increase in the aluminum layers, The maximum deformations occur in aluminum layers. It is found that the minimum deformation distortion and the minimum shear stress occur in the three-layer static bonding sample.
基金supported by the National Natural Science Foundation of China (No.51275332)the Natural Science Foundation for Young Scientists of Shanxi Province,China (No.2014021025-2)
文摘In this study,powders of polyethylene oxide（PEO） and lithium perchlorate（Li Cl O4） were used as the raw materials for producing the ionic conduction polymer PEO–Li Cl O4 with different complex-ratios and used for anodic bonding through high energy ball milling method,and meanwhile,X-ray diffraction,differential scanning calorimetry（DSC）,ultraviolet absorption spectrum test analysis,and other relevant methods were adopted to research the complexation mechanism of PEO and Li Cl O4 and the impact of the ionic conduction polymer with different complex-ratios on the anodic bonding process under the action of the strong static electric field.The research results showed that the crystallization of PEO could be effectively obstructed with increased addition of Li Cl O4,thus increasing the content of PEO–Li Cl O4 in amorphous area and continuously improving the complexation degree and the room-temperature conductivity thereof,and that the higher room-temperature conductivity enabled PEO–Li Cl O4 to better bond with metallic aluminum and have better bonding quality.As the new encapsulating material,such research results will promote the application of new polymer functional materials in micro-electromechanical system（MEMS） components.
