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Experimental Studies of Low-Pressure Plasma Jet by Means of Langmuir Probes and Emission Spectra
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作者 刘磊 曹金祥 +7 位作者 牛田野 王亮 孟刚 刘鑫 袁雷 邬润辉 张生俊 任爱民 《Plasma Science and Technology》 SCIE EI CAS CSCD 2009年第3期307-313,共7页
An investigation was made into the argon plasma jet that expanded in a low-pressure vacuum chamber. The spatial distributions of the parameters of the plasma jet with different supplied powers were measured using a te... An investigation was made into the argon plasma jet that expanded in a low-pressure vacuum chamber. The spatial distributions of the parameters of the plasma jet with different supplied powers were measured using a ten-channel Langmuir probe array. The chemical species in the plasma jet were identified by emission spectroscopy. The electron excitation temperatures at two positions, 10 cm and 50 cm downstream from the nozzle exit were calculated, respectively, by the Boltzmann plot method. 展开更多
关键词 plasma jet spatial distribution probe array emission spectrum
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